公开(公告)号：US5166884A

公开(公告)日：1992-11-24

申请号：US797714

申请日：1991-11-25

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： G03F7/20 ,  H01L21/673

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统，其包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US5097421A

公开(公告)日：1992-03-17

申请号：US54212

申请日：1987-05-18

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： B65G43/00 ,  G03F7/20 ,  G05B15/02 ,  H01L21/02 ,  H01L21/027 ,  H01L21/304 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 公开了一种系统，其安装有用于承载诸如半导体晶片的物品的可运输容器，该系统包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US4974166A

公开(公告)日：1990-11-27

申请号：US458767

申请日：1989-12-29

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： B23Q41/00 ,  B23Q41/02 ,  B65G1/137 ,  B65G49/07 ,  B65G61/00 ,  G03F7/20 ,  G05B19/418 ,  G06Q50/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67294 ,  G03F7/70525 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991 ,  G05B19/4183 ,  H01L21/67276 ,  G05B2219/31002 ,  G05B2219/31286 ,  G05B2219/31323 ,  G05B2219/31432 ,  Y02P90/08 ,  Y02P90/10 ,  Y02P90/24 ,  Y02P90/28 ,  Y02P90/285

摘要： A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.

摘要翻译： 用于存储运输和处理物品的系统包括多个可运输容器，每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置，用于接收，存储，传送和显示与 由相应的运输容器收到的物品。 多个工作站适于接收可移动容器中的一个并处理所选物品中的一个。 工作站还验证可运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元通信以接收和发送状态信息和处理信息，并且传送由提供的数据处理装置存储的信息 运输容器。 该系统还可以包括用于接收所述可移动容器的存储站，用于提供在可运输容器上提供的数据处理设备与中央处理单元之间的通信，以及用于制作由所述数据处理设备存储的信息的备份副本。

公开(公告)号：US4739882A

公开(公告)日：1988-04-26

申请号：US829447

申请日：1986-02-13

申请人： Mihir Parikh ,  Anthony C. Bonora ,  W. George Faraco ,  Barney H. Huang

发明人： Mihir Parikh ,  Anthony C. Bonora ,  W. George Faraco ,  Barney H. Huang

IPC分类号： H01L21/673 ,  H01L21/677 ,  B65D1/04

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67772 ,  Y10S414/14

摘要： The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.

摘要翻译： 本发明是用于储存物品并保持诸如半导体晶片的清洁物品的可运送的容器。 容器提供了一个盒子，它定义了用于容纳物品的内部空间。 箱子包括一个箱顶和盒底座，它支撑箱顶，并且包括用于打开和关闭容器的箱门。 箱门提供用于支撑内部空间中的物品的区域。 衬里可插入内部空间并围绕该区域。 箱门可从盒子空间伸缩。 该区域的物品可与箱门一起缩回。

公开(公告)号：US5547328A

公开(公告)日：1996-08-20

申请号：US299900

申请日：1994-09-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5370491A

公开(公告)日：1994-12-06

申请号：US948148

申请日：1992-09-21

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输容器（例如SMIF吊舱）转移到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5169272A

公开(公告)日：1992-12-08

申请号：US607898

申请日：1990-11-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door iself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门在清洁容器内的环境之前被清除。

公开(公告)号：US4724874A

公开(公告)日：1988-02-16

申请号：US840380

申请日：1986-05-01

申请人： Mihir Parikh ,  Anthony C. Bonora

发明人： Mihir Parikh ,  Anthony C. Bonora

IPC分类号： H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67393 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.

摘要翻译： 一种用于加工设备的可密封运输的容器，其具有与端口板密封地配合的端口板和端口门，所述可运输容器包括具有用于容纳物品的内部空间的箱体。 该箱包括用于在箱体外部在内部空间与环境之间进行通信的导管。 导管包括用于过滤通过导管的流体的过滤器。 该盒子包括具有密封表面的盒顶部和与盒子顶部密封地配合的盒子门。 端口板还包括密封表面并且与盒顶部密封地配合。 端口门包括一个密封表面，并且密封地配合到端口板。 箱门包括用于机械地打开和关闭盒的闩锁，并且端口门包括用于启动闩锁的装置。

公开(公告)号：US5570990A

公开(公告)日：1996-11-05

申请号：US147372

申请日：1993-11-05

申请人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

发明人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

IPC分类号： G03F7/20 ,  H01L21/677 ,  G06F15/50

CPC分类号： G03F7/70541 ,  G03F7/70741 ,  G03F7/7075 ,  H01L21/67775 ,  Y10S414/14

摘要： A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

摘要翻译： 开发了用于机械协助SMIF集装箱运动的人造导向移动式装载机储料器。 辅助包括一个手推车，一个半电动运输臂，一个处理器和通讯装置。 使用手臂将一组容器放在购物车上。 推车被推到半导体处理工具，其中臂用于将容器运送到加工工具的端口和从处理工具的端口传送。 处理器和通信设备用于库存控制，并将容器引导到处理工具的端口。

公开(公告)号：US20120321417A1

公开(公告)日：2012-12-20

申请号：US13464923

申请日：2012-05-04

申请人： Anthony C. Bonora ,  Richard Garcia

发明人： Anthony C. Bonora ,  Richard Garcia

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67265 ,  H01L21/68707

摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.

摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。