System and method for detecting substrate and manufacturing device

    公开(公告)号:US10467591B2

    公开(公告)日:2019-11-05

    申请号:US15521976

    申请日:2016-10-21

    Abstract: A system and a method for detecting a substrate and a manufacturing device are disclosed. The detection system includes: an emitting unit and a control unit; wherein the emitting unit provides a first reference light and a second reference light, the first reference light propagates to the control unit, the second reference light is modulated by the substrate to generate a test light, the test light propagates to the control unit; the control unit obtains and compares a power of the first reference light and a power of the test light so as to determine whether a foreign matter is present on a surface of the substrate. The detection system can prevent foreign matters such as photoresist from influencing other manufacturing devices such as cleaning and deposition devices, which is beneficial to the maintenance and service of the manufacturing devices.

    ARRAY SUBSTRATE AND PREPARATION METHOD THEREFOR, AND DISPLAY DEVICE

    公开(公告)号:US20190181161A1

    公开(公告)日:2019-06-13

    申请号:US16322420

    申请日:2018-05-15

    Inventor: Wusheng Li

    Abstract: Arrangements of the present disclosure provide a manufacturing method. The manufacturing method includes forming a first conductive pattern comprising a first signal line on a base substrate. The manufacturing method includes forming a second conductive pattern comprising a second conductive line on a side of the first conductive pattern away from the base substrate. The first signal line and the second signal line intersect with each other and are insulated from each other. An overlapping region is formed by orthogonal projections of the second signal line and the first signal line on the base substrate. A length of an edge of the overlapping region extending in a direction along with the second signal line is greater than a linear distance between two vertices of the edge.

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