公开(公告)号：US08368988B2

公开(公告)日：2013-02-05

申请号：US12539255

申请日：2009-08-11

Applicant: Che-heung Kim

Inventor： Che-heung Kim

IPC: G02B26/02 ,  G03B9/34

CPC classification number: G02B26/02 ,  G02B6/353

Abstract: A micro shutter device and a method of manufacturing the micro shutter device are provided. A transparent substrate is provided. A barrier is formed on the substrate to partition a unit pixel. A pattern layer is formed with a transparent material to have a transparent first pattern portion on the substrate in the unit pixel. A movable plate is arranged to face the pattern layer, has an opaque second pattern layer corresponding to a shape of the first pattern portion, and is configured to transmit light therethrough except the second pattern portion. An actuator is for moving the movable plate. Therefore, light leakage due to diffraction can be prevented, resulting in increasing contrast ratio and improving light efficiency.

Abstract translation: 提供微型快门装置和制造微型快门装置的方法。 提供透明基板。 在基板上形成屏障以分隔单位像素。 图案层由透明材料形成，以在单位像素中的基板上具有透明的第一图案部分。 可移动板被布置为面对图案层，具有对应于第一图案部分的形状的不透明的第二图案层，并且被配置为透射除了第二图案部分之外的光。 致动器用于移动可动板。 因此，可以防止由于衍射引起的漏光，从而增加对比度并提高光效。

公开(公告)号：US08198785B2

公开(公告)日：2012-06-12

申请号：US13007017

申请日：2011-01-14

Applicant: Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

Inventor： Young-tack Hong ,  Dong-kyun Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Jong-seok Kim ,  Che-heung Kim

IPC: H01L41/00

CPC classification number: B41J2/04581 ,  B41J2/04541

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract translation: 微机电系统（MEMS）开关包括基板，形成在基板上的固定信号线，与固定信号线的上表面和下表面之一间隔开的可移动信号线，以及至少一个压电致动器 连接到可移动信号线的第一端，以使可移动信号线与固定信号线接触或分离。 压电致动器包括第一电极，形成在第一电极上的压电层，形成在压电层上的第二电极，以及形成在第二电极上并与可移动信号线连接的连接层。

公开(公告)号：US20100225991A1

公开(公告)日：2010-09-09

申请号：US12782418

申请日：2010-05-18

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC: G02B26/00

CPC classification number: H01H59/0009 ,  H01H1/0036

Abstract: A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

公开(公告)号：US20090097140A1

公开(公告)日：2009-04-16

申请号：US12036316

申请日：2008-02-25

Applicant: Seung-tae Choi ,  Tae-sang Park ,  Jeong-yub Lee ,  Jong-oh Kwon ,  Che-heung Kim ,  Seung-wan Lee ,  Woon-bae Kim

Inventor： Seung-tae Choi ,  Tae-sang Park ,  Jeong-yub Lee ,  Jong-oh Kwon ,  Che-heung Kim ,  Seung-wan Lee ,  Woon-bae Kim

IPC: G02B7/02

CPC classification number: G02B7/08

Abstract: A varifocal optical device is provided. The varifocal optical device includes an optical lens, an actuator unit connected with the optical lens and having two areas that are bending-deformed in opposite directions to each other when a voltage is applied thereto, and a supporting unit to support the actuator unit, so that a focus of the optical lens is varied by the bending deformation when the voltage is applied to the actuator unit. Thereby, a driving displacement of the varifocal optical lens can be maximized.

Abstract translation: 提供变焦光学装置。 变焦光学装置包括光学透镜，与光学透镜连接的致动器单元，并且当施加电压时具有彼此相反方向弯曲变形的两个区域，以及支撑单元以支撑致动器单元，因此 当将电压施加到致动器单元时，光学透镜的焦点因弯曲变形而变化。 从而可以使变焦光学透镜的驱动位移最大化。

公开(公告)号：US07501911B2

公开(公告)日：2009-03-10

申请号：US11417242

申请日：2006-05-04

Applicant: Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

Inventor： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

IPC: H01P1/15

CPC classification number: H01H59/0009

Abstract: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

Abstract translation: 立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，致动器定位在所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。 因此，可以防止致动器粘附到基板。 此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

公开(公告)号：US07420135B2

公开(公告)日：2008-09-02

申请号：US11322267

申请日：2006-01-03

Applicant: Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

Inventor： Sang-hun Lee ,  Soon-cheol Kweon ,  Che-heung Kim ,  Hyung-jae Shin

IPC: H01H57/00 ,  H01H21/22 ,  H01P1/10 ,  G02B26/08 ,  G02B26/00

CPC classification number: H01H59/0009

Abstract: A micro electro-mechanical system (MEMS) switch and a method for manufacturing the same are provided. The MEMS switch includes a substrate; signal lines formed on the substrate; main electrodes spaced apart by a distance and formed over the substrate; an actuating beam installed above the main electrodes at a certain height; a support unit to support the actuating beam; and sub-electrodes formed above the actuating beam at a distance from the actuating beam and facing the corresponding main electrodes. The method includes depositing and patterning a metal layer on a substrate; depositing and patterning a sacrificial layer to form actuator beam support holes and first sub-electrode contact holes; depositing and patterning an actuating beam layer on the sacrificial layer, thereby forming spacers; depositing and patterning second sub-electrode contact holes from another sacrificial layer; depositing and patterning a sub-electrode layer on the sacrificial layer; and removing the two sacrificial layers.

Abstract translation: 提供微机电系统（MEMS）开关及其制造方法。 MEMS开关包括基板; 形成在基板上的信号线; 主电极隔开一段距离并形成在衬底上; 在一定高度安装在主电极之上的致动梁; 用于支撑致动梁的支撑单元; 以及形成在致动梁上方一定距离致动梁并面对相应主电极的子电极。 该方法包括在衬底上沉积和图案化金属层; 沉积和图案化牺牲层以形成致动器梁支撑孔和第一子电极接触孔; 沉积和图案化牺牲层上的致动束层，从而形成间隔物; 从另一牺牲层沉积和构图第二子电极接触孔; 在牺牲层上沉积和构图子电极层; 并去除两个牺牲层。

公开(公告)号：US20080001691A1

公开(公告)日：2008-01-03

申请号：US11585235

申请日：2006-10-24

Applicant: Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

Inventor： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

IPC: H01F7/08

CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

Abstract: A MEMS switch includes a substrate, at least one signal line and at least one electrode formed on the substrate, and a moving beam disposed in a spaced-apart relation with respect to the substrate above the substrate so as to be connected with or disconnected from the signal line according to an operation of the electrode. The moving beam includes at least one body, and at least one support to support the body. The body has a modulus of elasticity larger than that of the support. The MEMS switch prevents the moving beam from being stuck and increases a contact force generating between the moving beam and the signal line, thereby enabling a signal to be stably transmitted.

Abstract translation: MEMS开关包括衬底，至少一个信号线和形成在衬底上的至少一个电极以及相对于衬底在衬底上间隔开的关系设置的移动束，以便与衬底连接或断开 根据电极的操作的信号线。 移动梁包括至少一个主体和至少一个支撑体以支撑身体。 身体的弹性模量大于支撑体的弹性模量。 MEMS开关防止移动光束被卡住，并增加在移动光束和信号线之间产生的接触力，从而使信号能够稳定地传输。

公开(公告)号：US20070231065A1

公开(公告)日：2007-10-04

申请号：US11515717

申请日：2006-09-06

Applicant: Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

Inventor： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Hong ,  Che-heung Kim

IPC: B25G3/28

CPC classification number: H01H57/00 ,  H01H2057/006 ,  Y10T403/7026

Abstract: A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

Abstract translation: 一种压电微电子机械系统（MEMS）开关包括基板，第一和第二固定信号线，其在基板上以彼此间隔开的关系对称地形成，以在其间具有预定的间隙;压电致动器，其布置成与第一 并且所述第二固定信号线处于所述预定间隙中，并且具有支撑在所述基板上的第一端，以允许所述压电致动器能够上下移动;以及可移动信号线，其具有连接到所述第一和第二 固定信号线，以及构造成与第一和第二固定信号线中的另一个接触或分离的第二端，可移动信号线的至少一侧连接到压电致动器的上表面。

公开(公告)号：US07257307B2

公开(公告)日：2007-08-14

申请号：US11471511

申请日：2006-06-21

Applicant: Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon

Inventor： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon

IPC: G02B6/00

CPC classification number: H01H59/0009 ,  H01H1/20

Abstract: A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.

Abstract translation: MEMS（微机电系统）开关，其包括基板; 固定电极，形成在所述基板的上侧; 形成在固定电极两侧的信号线; 接触构件，形成在距离所述固定电极一定距离的信号线的上侧，并与信号线的边缘部分接触; 支撑构件，其支撑所述接触构件以可移动; 以及设置在所述支撑构件的上侧的移动电极。

公开(公告)号：US20070120445A1

公开(公告)日：2007-05-31

申请号：US11594813

申请日：2006-11-09

Applicant: Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

Inventor： Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Chang-seung Lee ,  Young-tack Houng ,  Che-heung Kim

IPC: H01L41/053

CPC classification number: H01H57/00 ,  H01L41/094 ,  H01L41/314 ,  H01L41/33

Abstract: A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward. A method of fabricating a piezoelectric RF MEMS device includes providing an upper substrate including an RF output signal line, providing a lower substrate including a piezoelectric actuator having an RF input signal line corresponding to the RF output signal line, and assembling the upper substrate and the lower substrate.

Abstract translation: 提供了一种压电RF微机电系统（MEMS）器件及其制造方法，其中基于压电效应，RF MEMS器件以低电压向上驱动。 压电RF MEMS器件包括：设置有RF输出信号线的上基板，位于RF输出信号线下方的压电致动器;以及设置有空腔的下基板，使得压电致动器的一端固定到下基板 并且其另一端与上基板和下基板可移动地间隔开，其中压电致动器在其上设置有RF输入信号线，并且提供接触焊盘以将RF输出信号线与RF输入信号线连接， 压电致动器被向上驱动。 制造压电RF MEMS器件的方法包括提供包括RF输出信号线的上基板，提供包括具有对应于RF输出信号线的RF输入信号线的压电致动器的下基板，以及组装上基板和 下基板。