摘要:
A method for using a film formation apparatus for a semiconductor process to form a thin film on a target substrate while supplying a film formation reactive gas from a first nozzle inside a reaction chamber includes performing a cleaning process to remove a by-product film deposited inside the reaction chamber and the first nozzle, in a state where the reaction chamber does not accommodate the target substrate. The cleaning process includes, in order, an etching step of supplying a cleaning reactive gas for etching the by-product film into the reaction chamber, and activating the cleaning reactive gas, thereby etching the by-product film, and an exhaust step of stopping supply of the cleaning reactive gas and exhausting gas from inside the reaction chamber. The etching step is arranged to use conditions that cause the cleaning reactive gas supplied in the reaction chamber to flow into the first nozzle.
摘要:
A method for using a film formation apparatus for a semiconductor process to form a thin film on a target substrate inside a reaction chamber includes performing a cleaning process to remove a by-product film deposited on a predetermined region in a gas route from a film formation gas supply system, which supplies a film formation gas contributory to film formation, through the reaction chamber to an exhaust system, by alternately repeating an etching step and an exhaust step a plurality of times in a state where the reaction chamber does not accommodate the target substrate. The etching step includes supplying a cleaning gas in an activated state for etching the by-product film onto the predetermined region, thereby etching the by-product film. The exhaust step includes stopping supply of the cleaning gas and exhausting gas by the exhaust system from a space in which the predetermined region is present.
摘要:
Regarding predetermined positioning criteria (M1, M2), ((G1, G2), (N1, or N2), (K1, K2)), there is provided image processing means (40B) for obtaining by image processing, measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) and reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)), and for moving a work (W) in a manner that the measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) and the reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)) coincide with each other, thereby positioning the work (W) at a predetermined position.
摘要:
An object recognition apparatus that processes images, as acquired by an imaging means (10) mounted on a moving object, in a first image plane and a second image plane of different points of view, and recognizes an object in the vicinity of the moving object. The object recognition apparatus comprises: a feature point detection means (42) that detects feature points in first and second image planes of an object image; a fundamental matrix determination means (43a) that determines, based on calculation of an epipole through the auto-epipolar property, a fundamental matrix that expresses a geometrically corresponding relationship based on translational camera movement, with not less than two pairs of feature points corresponding between the first and second image planes; and a three-dimensional position calculation means (43b) that calculates a three-dimensional position of an object based on the coordinates of the object in the first and second image planes and the determined fundamental matrix.
摘要:
The invention discloses isoxazole derivatives represented by a formula, in which R1 stands for hydrogen, lower alkyl, amino, halogen, lower alkoxy and the like, R2 stands for substituted or unsubstituted aryl and the like, R3 stands for hydrogen or lower alkyl, R4 stands for substituted or unsubstituted phenyl and the like, and Y stands for —CH2—, —CO—, —CH(CH3)—, —O—, —NH— and the like, or pharmaceutically acceptable salts thereof, which have excellent p38MAPkinase inhibitory action.
摘要:
According to an aspect of the invention, there is provided a content sharing system including: a first device configured to acquire a right object; a second device configured to acquire a content of the right object from the first device; a session key generation unit provided in the first device and the second device and configured to generate a session key based on mutual authentication; a temporary right object generation unit provided in the first device and configured to generate a temporary right object from the right object by using the session key to supply the generated temporary right to the second device; and a content play unit provided in the second device and configured to receive the temporary right object to play the content of the right object acquired from the first device by using the temporary right object.
摘要:
An information terminal disclosed herein includes a data storage in which data is stored; an internal controller which accesses the data storage by a request from inside the information terminal; and an external controller which accesses the data storage by a request from outside the information terminal. If a request that the internal controller access the data storage is generated while the external controller is accessing the data storage, then the external controller repeatedly transmits a negative reply that data has not been properly received in response to access from the outside and the internal controller accesses the data storage while the external controller repeatedly transmits the negative reply.
摘要:
The case disclosed has a raised portion stepped upward convexly and a rib molded inside of the raised portions integrally. The case is disposed at a rear surface of a display unit of a portable information equipment.
摘要:
A range of operable angle is divided into four large sections. A plurality of signal contact shoes come into contact with signal conductive portions in different combinations at individual positions within each of the large sections, and these states of contacting combinations repeat in each of the large sections. A plurality of common contact shoes correspond individually to four large sections, and each remains in contact with a common conductive portion continuously in the corresponding large section.
摘要:
A portable terminal having a display unit and a slot on which an external memory is mounted detachably, includes an internal memory configured to store contents, a play list including information indicating the contents and information indicating contents stored in the external memory, and location information indicating whether or not the contents are contents stored in the external memory, and a controller which confirms whether or not the contents corresponding to information indicating the contents registered together with the location information exist in the external memory mounted on the slot, when representing the play list on the display unit, in the case where the location information stored in the internal memory indicates the external memory, and when no existence is detected, displaying information indicating the contents in a mode of indicating that the contents cannot be used.