公开(公告)号：US5805365A

公开(公告)日：1998-09-08

申请号：US542411

申请日：1995-10-12

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G02B17/06 ,  G03F7/20 ,  G02B5/10

CPC分类号： G03F7/70233 ,  G02B17/0657 ,  G03F7/70358

摘要： A projection lithography camera is presented with a wide ringfield optimized so as to make efficient use of extreme ultraviolet radiation from a large area radiation source (e.g., D.sub.source .apprxeq.0.5 mm). The camera comprises four aspheric mirrors optically arranged on a common axis of symmetry with an increased etendue for the camera system. The camera includes an aperture stop that is accessible through a plurality of partial aperture stops to synthesize the theoretical aperture stop. Radiation from a mask is focused to form a reduced image on a wafer, relative to the mask, by reflection from the four aspheric mirrors.

摘要翻译： 投影光刻照相机具有优化的宽环形场，以便有效地利用来自大面积辐射源（例如，Dsource APPROX 0.5mm）的极紫外辐射。 相机包括四个非球面镜，其光学地布置在共同的对称轴上，并且相机系统的电化率增加。 相机包括孔径光阑，可通过多个部分孔径光阑进行接近以合成理论孔径光阑。 通过来自四个非球面反射镜的反射，来自掩模的辐射被聚焦以相对于掩模在晶片上形成减小的图像。

公开(公告)号：US5512759A

公开(公告)日：1996-04-30

申请号：US469590

申请日：1995-06-06

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G03F7/20 ,  G21K1/06

CPC分类号： G03F7/702 ,  G03F7/70233 ,  G21K1/06

摘要： The present invention relates generally to the field of condensers for collecting light from a synchrotron radiation source and directing the light into a ringfield of a lithography camera. The present invention discloses a condenser comprising collecting, processing, and imaging optics. The collecting optics are comprised of concave and convex spherical mirrors that collect the light beams. The processing optics, which receive the light beams, are comprised of flat mirrors that converge and direct the light beams into a real entrance pupil of the camera in a symmetrical pattern. In the real entrance pupil are located flat mirrors, common to the beams emitted from the preceding mirrors, for generating substantially parallel light beams and for directing the beams toward the ringfield of a camera. Finally, the imaging optics are comprised of a spherical mirror, also common to the beams emitted from the preceding mirrors, images the real entrance pupil through the resistive mask and into the virtual entrance pupil of the camera. Thus, the condenser is comprised of a plurality of beams with four mirrors corresponding to a single beam plus two common mirrors.

摘要翻译： 本发明一般涉及用于收集来自同步加速器辐射源的光并将光引导到光刻照相机的环形场中的冷凝器领域。 本发明公开了一种包括收集，处理和成像光学元件的冷凝器。 收集光学器件由收集光束的凹凸球面镜组成。 接收光束的处理光学器件由平面镜组成，其以对称图案会聚并将光束引导到相机的真实入射光瞳。 在真正的入口处，瞳孔位于从前面的反射镜发射的光束共同的平面镜，用于产生基本上平行的光束并且用于将光束引向照相机的环形区域。 最后，成像光学器件由球面镜组成，对于从前面的反射镜发射的光束也是共同的，将真实入射光瞳图像通过电阻掩模并进入相机的虚拟入射光瞳。 因此，冷凝器由多个光束组成，其中四个反射镜对应于单光束加上两个公共反射镜。

公开(公告)号：US5361292A

公开(公告)日：1994-11-01

申请号：US060335

申请日：1993-05-11

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G02B27/64 ,  G03F7/20 ,  G21K1/06

CPC分类号： G03F7/70108 ,  G02B27/642 ,  G03F7/702 ,  G03F7/70233 ,  G21K1/06 ,  G21K2201/06

摘要： A series of segments of a parent aspheric mirror having one foci at at a si-point source of radiation and the other foci at the radius of a ring field have all but one or all of their beams translated and rotated by sets of mirrors such that all of the beams pass through the real entrance pupil of a ring field camera about one of the beams and fall onto the ring field radius as a coincident image as an arc of the ring field.

摘要翻译： 具有位于准点辐射源处的一个焦点并且在环形场半径处的另一个焦点的父非球面反射镜的一系列段具有由一组反射镜平移和旋转的所有光束中的一个或全部，使得 所有的光束通过围绕其中一个光束的环形场摄像机的真实入射光瞳，并且作为环形场的圆弧落在环形场半径上作为重合图像。

公开(公告)号：US07715098B1

公开(公告)日：2010-05-11

申请号：US12028270

申请日：2008-02-08

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G03B21/60

CPC分类号： G03B21/60

摘要： An apparatus and method for improving the contrast between incident projected light and ambient light reflected from a projection screen are described. The efficiency of the projection screen for reflection of the projected light remains high, while permitting the projection screen to be utilized in a brightly lighted room. Light power requirements from the projection system utilized may be reduced.

摘要翻译： 描述了用于改善从投影屏幕反射的入射投射光和环境光之间的对比度的装置和方法。 用于反射投影光的投影屏幕的效率保持很高，同时允许投影屏幕在明亮的房间中使用。 可以减少来自投影系统的光功率要求。

公开(公告)号：US07449699B1

公开(公告)日：2008-11-11

申请号：US11478573

申请日：2006-06-29

申请人： David P. Adams ,  Michael B. Sinclair ,  Thomas M. Mayer ,  Michael J. Vasile ,  William C. Sweatt

发明人： David P. Adams ,  Michael B. Sinclair ,  Thomas M. Mayer ,  Michael J. Vasile ,  William C. Sweatt

IPC分类号： G21K5/04

CPC分类号： H01J37/3056 ,  H01J37/228 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/30455

摘要： Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.

摘要翻译： 使用光学干涉仪来监测并提供对集成的能量粒子柱的反馈控制的方法和装置，以在样本的表面上产生包括特征的深度，形状和/或粗糙度的期望的形貌。 能量粒子柱可以将能量物质（包括离子，光子和/或中性粒子）引导到表面以产生具有约1微米的面内尺寸以及约1纳米的高度或深度的特征。 能量过程可以包括减影过程，例如溅射，消融，聚焦离子束研磨，以及加成过程，例如能量束诱导化学气相沉积。 干涉测量方法与能量物质处理的集成提供了在表面（包括平面和弯曲形状）上创建所需拓扑的能力。

公开(公告)号：US07286295B1

公开(公告)日：2007-10-23

申请号：US11290050

申请日：2005-11-30

申请人： William C. Sweatt ,  David D. Gill

发明人： William C. Sweatt ,  David D. Gill

IPC分类号： G02B27/10

CPC分类号： G02B3/0037 ,  G02B3/0056 ,  G02B3/08 ,  G02B6/4206

摘要： An apposition microoptical compound lens comprises a plurality of lenslets arrayed around a segment of a hollow, three-dimensional optical shell. The lenslets collect light from an object and focus the light rays onto the concentric, curved front surface of a coherent fiber bundle. The fiber bundle transports the light rays to a planar detector, forming a plurality of sub-images that can be reconstructed as a full image. The microoptical compound lens can have a small size (millimeters), wide field of view (up to 180°), and adequate resolution for object recognition and tracking.

摘要翻译： 平行微光复合透镜包括围绕中空的三维光学外壳的片段排列的多个小透镜。 小透镜从物体收集光并将光线聚焦到相干纤维束的同心弯曲前表面上。 纤维束将光线传输到平面检测器，形成可以重建为全图像的多个子图像。 微光复合透镜可以具有小尺寸（毫米），宽视场（高达180度），以及足够的分辨率用于物体识别和跟踪。

公开(公告)号：US06700644B2

公开(公告)日：2004-03-02

申请号：US10163791

申请日：2002-06-05

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G03B2742

CPC分类号： G03F7/70083 ,  G03F7/70091 ,  G03F7/702

摘要： A condenser for a photolithography system, in which a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, includes a source of propagating radiation, a first mirror illuminated by the radiation, a mirror array illuminated by the radiation reflected from said first mirror, and a second mirror illuminated by the radiation reflected from the array. The mirror array includes a plurality of micromirrors. Each of the micromirrors is selectively actuatable independently of each other. The first mirror and the second mirror are disposed such that the source is imaged onto a plane of the mask and the mirror array is imaged into the entrance pupil of the camera.

摘要翻译： 用于光刻系统的聚光器，其中来自掩模的掩模图像通过具有入射光瞳的照相机投射到晶片上，包括传播辐射源，由辐射照射的第一反射镜，由辐射照射的反射镜阵列 从所述第一反射镜反射，以及由阵列反射的辐射照射的第二反射镜。 反射镜阵列包括多个微镜。 每个微镜可以彼此独立地选择性地致动。 第一镜和第二镜布置成使得源被成像到掩模的平面上，并且镜阵列被成像到相机的入射光瞳中。

公开(公告)号：US06678048B1

公开(公告)日：2004-01-13

申请号：US09356809

申请日：1999-07-20

申请人： Jeffrey L. Rienstra ,  Stephen M. Gentry ,  William C. Sweatt

发明人： Jeffrey L. Rienstra ,  Stephen M. Gentry ,  William C. Sweatt

IPC分类号： G01J351

CPC分类号： G01J3/2823 ,  G01J3/2803 ,  G01J3/36 ,  G06K9/0063 ,  H04N5/332 ,  H04N5/3743

摘要： A programmable optical filter for use in multispectral and hyperspectral imaging employing variable gain time delay and integrate arrays. A telescope focuses an image of a scene onto at least one TDI array that is covered by a multispectral filter that passes separate bandwidths of light onto the rows in the TDI array. The variable gain feature of the TDI array allows individual rows of pixels to be attenuated individually. The attenuations are functions of the magnitudes of the positive and negative components of a spectral basis vector. The spectral basis vector is constructed so that its positive elements emphasize the presence of a target and its negative elements emphasize the presence of the constituents of the background of the imaged scene. This system provides for a very efficient determination of the presence of the target, as opposed to the very data intensive data manipulations that are required in conventional hyperspectral imaging systems.

摘要翻译： 一种用于多光谱和高光谱成像的可编程光学滤波器，采用可变增益时间延迟和集成阵列。 望远镜将场景的图像聚焦到由多光谱滤光片覆盖的至少一个TDI阵列，该多光谱滤光片将单独的光带宽传递到TDI阵列中的行上。 TDI阵列的可变增益特征允许各行像素单独衰减。 衰减是频谱基矢量的正分量和负分量的函数。 构建光谱基矢量，使其正元素强调目标的存在，其负元素强调成像场景的背景的成分的存在。 与传统的高光谱成像系统中所需的非常数据密集的数据操作相反，该系统提供了对靶的存在的非常有效的确定。

公开(公告)号：US06563907B1

公开(公告)日：2003-05-13

申请号：US10005600

申请日：2001-12-07

申请人： Glenn D. Kubiak ,  William C. Sweatt

发明人： Glenn D. Kubiak ,  William C. Sweatt

IPC分类号： G21G400

CPC分类号： H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70083 ,  H05H2240/00

摘要： Employing a source of radiation, such as an electric discharge source, that is equipped with a capillary region configured into some predetermined shape, such as an arc or slit, can significantly improve the amount of flux delivered to the lithographic wafers while maintaining high efficiency. The source is particularly suited for photolithography systems that employs a ringfield camera. The invention permits the condenser which delivers critical illumination to the reticle to be simplified from five or more reflective elements to a total of three or four reflective elements thereby increasing condenser efficiency. It maximizes the flux delivered and maintains a high coupling efficiency. This architecture couples EUV radiation from the discharge source into a ring field lithography camera.

摘要翻译： 使用诸如放电源的辐射源（如放电源）配置有一些预定形状的诸如电弧或狭缝的毛细管区域，可以显着提高输送到光刻晶片的磁通量，同时保持高效率。 该光源特别适用于采用环形相机的光刻系统。 本发明允许将对光罩进行临界照明的冷凝器从五个或更多个反射元件简化为总共三个或四个反射元件，从而提高冷凝器效率。 它最大限度地提高了焊剂的流动，保持了高的耦合效率。 该架构将EUV辐射从放电源耦合到环形光刻照相机中。

公开(公告)号：US06285737B1

公开(公告)日：2001-09-04

申请号：US09489163

申请日：2000-01-21

申请人： William C. Sweatt ,  Glenn D. Kubiak

发明人： William C. Sweatt ,  Glenn D. Kubiak

IPC分类号： G02B508

CPC分类号： B82Y10/00 ,  G02B17/00 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70166 ,  G03F7/702 ,  G03F7/70916 ,  G03F7/70983

摘要： Condenser system, for use with a ringfield camera in projection lithography, employs quasi grazing-incidence collector mirrors that are coated with a suitable reflective metal such as ruthenium to collect radiation from a discharge source to minimize the effect of contaminant accumulation on the collecting mirrors.

摘要翻译： 用于投影光刻中的环形相机的冷凝器系统采用准放射入射收集器反射镜，其被诸如钌的合适的反射金属涂覆以收集来自放电源的辐射，以最小化污染物积聚对收集反射镜的影响。