公开(公告)号：US4816885A

公开(公告)日：1989-03-28

申请号：US47130

申请日：1987-05-08

申请人： Mamoru Yoshida ,  Tsutomu Nomoto ,  Tomoo Araki ,  Tsukasa Watanabe

发明人： Mamoru Yoshida ,  Tsutomu Nomoto ,  Tomoo Araki ,  Tsukasa Watanabe

IPC分类号： G02F1/136 ,  G02F1/1368 ,  H01L27/12 ,  H01L29/78 ,  H01L29/786

CPC分类号： G02F1/1368 ,  H01L27/12 ,  H01L29/78669

摘要： A thin-film transistor matrix comprises thin-film transistors formed on a dielectric substrate and arranged in rows and columns. Each of the transistors comprises a control electrode, an insulation film formed on the control electrode, a semiconductor film formed on the insulation film, a first main electrode formed on the semiconductor film, and a second main electrode formed on the semiconductor film. Row interconnection layers are provided for the respective rows to interconnect the control electrodes of the transistors of the respective rows. Column interconnection layers are provided for the respective columns to interconnect the first main electrodes in the respective columns. The insulation film and the semiconductor film are formed in the regions where the transistor is formed and in the regions where the column interconnection layer is formed.

摘要翻译： 薄膜晶体管矩阵包括形成在电介质基板上并以行和列布置的薄膜晶体管。 每个晶体管包括控制电极，形成在控制电极上的绝缘膜，形成在绝缘膜上的半导体膜，形成在半导体膜上的第一主电极和形成在半导体膜上的第二主电极。 针对相应的行设置行互连层以互连各行的晶体管的控制电极。 为相应的列提供列互连层以互连各个列中的第一主电极。 绝缘膜和半导体膜形成在形成晶体管的区域和形成列互连层的区域中。

公开(公告)号：US4547067A

公开(公告)日：1985-10-15

申请号：US560966

申请日：1983-12-13

申请人： Tsukasa Watanabe

发明人： Tsukasa Watanabe

IPC分类号： G01N21/21 ,  G01N21/89 ,  G01N21/896 ,  G01N21/90 ,  G01B11/18

CPC分类号： G01N21/90 ,  G01N21/9018

摘要： In a detecting system adapted to detect foreign matters as faults of a glass bottle, between a projection path of a diffused light towards the object to be inspected and said object, a plane polarizing plate of a circular polarizer which includes the plane polarizing plate combined with a 1/4 wave plate is disposed at the side of a diffused light side, while, in a light path which causes light transmitted through the object to form an image on the photoelectric detector 6 through the lens, a detecting side circular polarizer which includes a 1/4 wave plate and a plane polarizing plate is placed. An output electric signal of the photoelectric detector is subjected to analog operation processing.

摘要翻译： 在适于检测异物作为玻璃瓶的故障的检测系统中，在扩散光的投射路径朝向被检查物体和所述物体之间，包括平面偏振板的平面偏振片与 在散射光侧的一侧设置有1/4波片，在使透过物体的光通过透镜在光电检测器6上形成图像的光路中，检测侧圆偏振器包括 放置1/4波片和平面偏振片。 对光电检测器的输出电信号进行模拟运算处理。

公开(公告)号：US09354085B2

公开(公告)日：2016-05-31

申请号：US13508701

申请日：2010-10-27

申请人： Tsukasa Watanabe

发明人： Tsukasa Watanabe

IPC分类号： G01C17/38 ,  G01D5/244

CPC分类号： G01D5/24452

摘要： An angle detecting device with a self-calibration function has sensor heads for reading a scale of a scale disc fixed to a rotating shaft, has first sensor heads and a second sensor head at a position of one of the first sensor heads, in which the first and second sensor heads are calibrated with a first group including L sensor heads and a second group including M sensor heads, respectively arranged with a different equiangular interval, and in which phases of the calibration values obtained from the second group, are shifted by j*P/L(j=1 to L−1), where P is the total number of scale marks, and average values of the calibration values from the second group and the shifted calibration values are obtained, the average values are added to the calibration values from the first group, and the added values are output as calibration values.

摘要翻译： 具有自校正功能的角度检测装置具有用于读取固定到旋转轴的刻度盘的刻度的传感器头，在第一传感器头之一的位置具有第一传感器头和第二传感器头，其中 第一和第二传感器头用包括L个传感器头的第一组和包括分别以不同的等角度间隔布置的M个传感器头的第二组进行校准，并且从第二组获得的校准值的相位偏移j * P / L（j = 1〜L-1），其中P是刻度标记的总数，并且获得来自第二组的校正值和偏移的校准值的平均值，将平均值加到 来自第一组的校准值，并且添加的值作为校准值输出。

公开(公告)号：US09146136B2

公开(公告)日：2015-09-29

申请号：US13508686

申请日：2010-10-27

申请人： Tsukasa Watanabe

发明人： Tsukasa Watanabe

IPC分类号： G01R33/10 ,  G01D5/244 ,  G01D5/347

CPC分类号： G01D5/24476 ,  G01D5/24452 ,  G01D5/2448 ,  G01D5/2449 ,  G01D5/3473

摘要： An angle detecting device with self-calibration function, in which sensor heads are provided with an equiangular interval on a scale disc fixed to a rotating shaft, one sensor head is selected as reference, a sum of measurement differences between the reference and another sensor head is divided by the number of sensor heads, to determine an average, whereby a self-calibration value is obtained, in which a sensor head of the reference is changed to another in order, and the respective self-calibration value is obtained, which value is deviated by an angle of arrangement with respect to a particular sensor head, and a phase is aligned to a self-calibration value of the particular one as the reference, to determine an average for calculations of this phase conversion, which average is subtracted from the respective calculation subjected to the phase conversion, to obtain only asynchronous angular errors.

摘要翻译： 一种具有自校准功能的角度检测装置，其中传感器头在固定在旋转轴上的刻度盘上设置有等角度间隔，选择一个传感器头作为参考，参考和另一个传感器头之间的测量差之和 被传感器头的数量除以确定平均值，从而获得其中参考的传感器头按顺序改变为另一个的自校准值，并且获得相应的自校准值，该值 偏离相对于特定传感器头的布置角度，并且将相位与特定一个的自校准值对准作为参考，以确定该相位转换的计算的平均值，该平均值从 进行相位转换的相应计算，仅获得异步角度误差。

公开(公告)号：US09084352B2

公开(公告)日：2015-07-14

申请号：US14362829

申请日：2012-06-19

申请人： Naoya Shinmura ,  Tsukasa Watanabe ,  Hiroki Matsumoto

发明人： Naoya Shinmura ,  Tsukasa Watanabe ,  Hiroki Matsumoto

IPC分类号： G06F1/16 ,  H05K5/02 ,  H01R13/52 ,  H04M1/18 ,  H05K5/03 ,  H05K5/06 ,  H04M1/02

CPC分类号： H05K5/0239 ,  H01R13/5202 ,  H01R13/5213 ,  H01R2201/16 ,  H04M1/0249 ,  H04M1/18 ,  H05K5/03 ,  H05K5/061

摘要： In a lid member with a waterproofing function, the lid member including a projection portion integrally formed in one surface of a resin main body of the lid member opening and closing an opening portion formed in a housing, and accommodated in the opening portion, and a seal portion integrally formed in an outer peripheral surface of the projection portion, provided with an annular projection coming into close contact with a peripheral surface of the opening portion, and made of a rubber-like elastic material, the annular projection is formed as a shape which is expanded toward an inner portion side of the opening portion, forms in its outer peripheral surface a taper surface which converges toward the inner portion side, and is provided with a seal surface having a circular arc shaped cross section so as to be connected to a maximum diameter portion of the taper surface.

摘要翻译： 在具有防水功能的盖构件中，所述盖构件包括突出部，所述突出部一体地形成在所述盖构件的树脂主体的一个表面中，所述盖构件的开闭部分形成在壳体中并容纳在所述开口部中， 所述密封部一体地形成在所述突起部的外周面上，设置有与所述开口部的周面紧密接触的环状突起，并且由橡胶状弹性材料形成，所述环状突起形成为 其朝向开口部的内侧侧扩展，在其外周面形成有朝向内侧侧会聚的锥面，并且设置有具有圆弧状截面的密封面，以与 锥形表面的最大直径部分。

公开(公告)号：US08969218B2

公开(公告)日：2015-03-03

申请号：US13443156

申请日：2012-04-10

申请人： Tsukasa Watanabe ,  Keisuke Egashira ,  Miyako Kaneko ,  Takehiko Orii

发明人： Tsukasa Watanabe ,  Keisuke Egashira ,  Miyako Kaneko ,  Takehiko Orii

IPC分类号： H01L21/302 ,  H01L21/3105 ,  H01L21/311 ,  H01L21/67 ,  H01L21/02

CPC分类号： H01L21/3105 ,  H01L21/02164 ,  H01L21/02359 ,  H01L21/31111 ,  H01L21/6708

摘要： Disclosed is a technique for attaining high etching selectivity of a silicon nitride film to a silicon oxide film. The etching method includes a step of supplying a silylating agent to a substrate having a silicon nitride film and a silicon oxide film exposed on the surface thereof to thereby form a silylated film as a protective film over the surface of the silicon oxide film. After this step, an etching solution is supplied to the substrate. It is thus possible to selectively etch only the silicon nitride film.

摘要翻译： 公开了一种获得氮化硅膜对氧化硅膜的高蚀刻选择性的技术。 蚀刻方法包括向在其表面上暴露的氮化硅膜和氧化硅膜的基板供给甲硅烷化剂的步骤，从而在氧化硅膜的表面上形成作为保护膜的甲硅烷基化膜。 在该步骤之后，向衬底提供蚀刻溶液。 因此，可以仅选择性地仅蚀刻氮化硅膜。

公开(公告)号：US08449684B2

公开(公告)日：2013-05-28

申请号：US11783748

申请日：2007-04-11

申请人： Tsukasa Watanabe ,  Naoki Shindo

发明人： Tsukasa Watanabe ,  Naoki Shindo

IPC分类号： B08B7/00 ,  B08B7/04 ,  B08B3/00

CPC分类号： H01L21/67057 ,  B08B3/048 ,  B08B3/12

摘要： The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate W is subjected to an ultrasonic cleaning process. The step of generating ultrasonic waves includes a step of generating ultrasonic waves in the cleaning tank while the cleaning liquid is being supplied into the cleaning tank. A supply rate at which the cleaning liquid is supplied into the cleaning tank at a certain timing in the step of generating ultrasonic waves differs from a supply rate at which the cleaning liquid is supplied into the cleaning tank at another timing in the step of generating ultrasonic waves.

摘要翻译： 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中，将待处理基板W浸入清洗槽12内的清洗液中。然后，在包含在清洗槽12内的清洗液中产生超声波，使基板 W进行超声波清洗处理。 产生超声波的步骤包括在将清洁液供给到清洗槽中时在清洗槽中产生超声波的步骤。 在产生超声波的步骤中的某个时刻将清洗液供给到清洗槽中的供给速度与在生成超声波的步骤中的另一定时将清洗液供给到清洗槽中的供给速度不同 波浪。

公开(公告)号：US20070240736A1

公开(公告)日：2007-10-18

申请号：US11783748

申请日：2007-04-11

申请人： Tsukasa Watanabe ,  Naoki Shindo

发明人： Tsukasa Watanabe ,  Naoki Shindo

IPC分类号： B08B7/04 ,  B08B3/00 ,  B08B3/12

CPC分类号： H01L21/67057 ,  B08B3/048 ,  B08B3/12

摘要： The present invention provides a substrate cleaning method capable of removing particles from the entire surface of a substrate to be processed at a high removing efficiency. In the substrate cleaning method according to the present invention, a substrate to be processed W is immersed in a cleaning liquid in a cleaning tank 12. Then, ultrasonic waves are generated in the cleaning liquid contained in the cleaning tank 12, so that the substrate W is subjected to an ultrasonic cleaning process. The step of generating ultrasonic waves includes a step of generating ultrasonic waves in the cleaning tank while the cleaning liquid is being supplied into the cleaning tank. A supply rate at which the cleaning liquid is supplied into the cleaning tank at a certain timing in the step of generating ultrasonic waves differs from a supply rate at which the cleaning liquid is supplied into the cleaning tank at another timing in the step of generating ultrasonic waves.

摘要翻译： 本发明提供一种能够以高去除效率从待处理基板的整个表面去除颗粒的基板清洗方法。 在本发明的基板清洗方法中，将被处理基板W浸渍在清洗槽12内的清洗液中。 然后，在包含在清洗槽12中的清洗液中产生超声波，从而对基板W进行超声波清洗处理。 产生超声波的步骤包括在将清洁液供给到清洗槽中时在清洗槽中产生超声波的步骤。 在产生超声波的步骤中的某个时刻将清洗液供给到清洗槽中的供给速度与在生成超声波的步骤中的另一定时将清洗液供给到清洗槽中的供给速度不同 波浪。

公开(公告)号：US07238930B2

公开(公告)日：2007-07-03

申请号：US10542098

申请日：2004-01-21

申请人： Tsukasa Watanabe

发明人： Tsukasa Watanabe

IPC分类号： B07C5/12 ,  B07C5/34 ,  G01N21/90 ,  G01N9/04 ,  G01N7/00 ,  G01N40/14

CPC分类号： G01B11/24 ,  G01B11/12

摘要： A container mouth inspection device which can produce an ideal optical image that reliably provides information on the inner contour of the container mouth, and which enables accurate and speedy measurement of the inside diameter or the like of the container mouth. The container mouth inspection device includes a light source (2) for emitting diffused light to the bottom (99b) of the container (99) having a mouth (99a), and an optical system (1) in which a lens (10) and a diaphragm (11) are arranged along an optical axis (5) extending through the center of the mouth (99a) of the container (99) such that the diaphragm (11) is positioned behind the lens (10). The diaphragm (11) is offset backward from a back focus of the lens (10) along the optical axis (5) by a predetermined distance d so as to form an optical image of the mouth (99a) in a position behind the diaphragm (11).

摘要翻译： 一种容器口检查装置，其可以产生可靠地提供关于容器口的内轮廓的信息的理想光学图像，并且能够准确且快速地测量容器口的内径等。 容器口检查装置包括用于向具有口部（99a）的容器（99）的底部（99b）发射漫射光的光源（2），以及光学系统（1），其中透镜 ）和沿着延伸穿过容器（99）的口（99a）的中心的光轴（5））布置的隔膜（11），使得隔膜（11）位于透镜（10）后面。 光阑（11）从透镜（10）的后焦点向后偏离预定距离d，以在光阑后面形成口（99a）的光学图像 （11）。

公开(公告)号：US20060140470A1

公开(公告)日：2006-06-29

申请号：US10542098

申请日：2004-01-21

申请人： Tsukasa Watanabe

发明人： Tsukasa Watanabe

IPC分类号： G06K9/00

CPC分类号： G01B11/24 ,  G01B11/12

摘要： A container mouth inspection device which can produce an ideal optical image that reliably provides information on the inner contour of the container mouth, and which enables accurate and speedy measurement of the inside diameter or the like of the container mouth. The container mouth inspection device includes a light source (2) for emitting diffused light to the bottom (99b) of the container (99) having a mouth (99a), and an optical system (1) in which a lens (10) and a diaphragm (11) are arranged along an optical axis (5) extending through the center of the mouth (99a) of the container (99) such that the diaphragm (11) is positioned behind the lens (10). The diaphragm (11) is offset backward from a back focus of the lens (10) along the optical axis (5) by a predetermined distance d so as to form an optical image of the mouth (99a) in a position behind the diaphragm (11).

摘要翻译： 一种容器口检查装置，其可以产生可靠地提供关于容器口的内轮廓的信息的理想光学图像，并且能够准确且快速地测量容器口的内径等。 容器口检查装置包括用于向具有口部（99a）的容器（99）的底部（99b）发射漫射光的光源（2），以及光学系统（1），其中透镜 ）和沿着延伸穿过容器（99）的口（99a）的中心的光轴（5））布置的隔膜（11），使得隔膜（11）位于透镜（10）后面。 光阑（11）从透镜（10）的后焦点向后偏离预定距离d，以在光阑后面形成口（99a）的光学图像 （11）。