-
公开(公告)号：US20120025851A1
公开(公告)日：2012-02-02
申请号：US12847734
申请日：2010-07-30
申请人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
发明人： Brian D. Homeijer , Robert G. Walmsley , Rodney L. Alley , Dennis M. Lazaroff , Sara J. Homeijer
CPC分类号： G01D5/2415 , G01D5/2412 , H01G5/16 , H01L28/40
摘要： The present disclosure includes capacitive sensors and methods of forming capacitive sensors. One capacitive sensor includes a first substrate structure having a first dielectric material formed thereon and electrodes of a first electrode array formed on the first dielectric material. The sensor includes a second substrate structure facing the first substrate structure and having a second dielectric material formed thereon and electrodes of a second electrode array formed on the second dielectric material. The sensor includes a removed portion of the first dielectric material forming a recess between adjacent electrodes of the first electrode array, and the first substrate structure is moveable with respect to the second substrate structure.
摘要翻译： 本公开包括电容传感器和形成电容式传感器的方法。 一个电容传感器包括其上形成有第一电介质材料的第一衬底结构和形成在第一电介质材料上的第一电极阵列的电极。 该传感器包括面向第一衬底结构并具有形成在其上的第二电介质材料和形成在第二电介质材料上的第二电极阵列的电极的第二衬底结构。 传感器包括第一介电材料的去除部分，在第一电极阵列的相邻电极之间形成凹槽，并且第一衬底结构可相对于第二衬底结构移动。
-
公开(公告)号：US20110179866A1
公开(公告)日：2011-07-28
申请号：US13119928
申请日：2008-10-31
申请人： Wenhua Zhang , Robert G. Walmsley
发明人： Wenhua Zhang , Robert G. Walmsley
CPC分类号： G01C19/5755 , G01C19/574
摘要： Gyroscopes that can compensate frequency mismatch are provided. In this regard, a representative gyroscope, among others, includes a top substrate including an outermost structure, a first driving structure and a first sensing structure. The first driving structure and the first sensing structure are disposed within the outermost structure. The first driving structure and the first sensing structure include a first driving electrode and a first sensing electrode that are disposed on a bottom surface of the first driving structure and first sensing structure, respectively. A portion of the mass on the top surface of the first sensing structure is removed. The gyroscope further includes a bottom substrate that is disposed below the top substrate. The bottom substrate includes a second driving electrode and a second sensing electrode that are disposed on a top surface of the bottom substrate and below the first driving electrode and the first sensing electrode.
摘要翻译： 提供可以补偿频率不匹配的陀螺仪。 在这方面，代表性的陀螺仪其中包括包括最外面结构的顶部基底，第一驱动结构和第一感测结构。 第一驱动结构和第一感测结构设置在最外面的结构内。 第一驱动结构和第一感测结构包括分别设置在第一驱动结构和第一感测结构的底表面上的第一驱动电极和第一感测电极。 去除第一感测结构的顶表面上的质量的一部分。 陀螺仪还包括设置在顶部基板下方的底部基板。 底部基板包括设置在底部基板的顶表面上并且在第一驱动电极和第一感测电极下方的第二驱动电极和第二感测电极。
-
公开(公告)号：US07966880B2
公开(公告)日：2011-06-28
申请号：US12250089
申请日：2008-10-13
IPC分类号： G01P1/02
CPC分类号： G01D11/245 , G01D11/10
摘要： Encapsulated devices that can adjust the damping level within are provided. In this regard, a representative encapsulated device, among others, comprises a bottom substrate, a middle substrate that is disposed above the bottom substrate, and a top substrate that is disposed above the middle substrate. The middle substrate comprises an outermost structure and at least one damping device. The at least one damping device is supported to the outermost structure. At least one top gap and a bottom gap are formed between the at least one damping device and the top and bottom substrates, respectively. The at least one top gap has at least one cavity depth that is adapted to adjust the damping level of the encapsulated device.
摘要翻译： 提供可以调节阻尼水平的封装器件。 在这方面，代表性的封装装置尤其包括底部基板，设置在底部基板上方的中间基板和设置在中间基板上方的顶部基板。 中间基板包括最外面的结构和至少一个阻尼装置。 至少一个阻尼装置被支撑到最外面的结构。 在至少一个阻尼装置和顶部和底部基板之间分别形成至少一个顶部间隙和底部间隙。 所述至少一个顶部间隙具有适于调节所述封装装置的阻尼水平的至少一个腔体深度。
-
公开(公告)号：US20100257934A1
公开(公告)日：2010-10-14
申请号：US12421016
申请日：2009-04-09
IPC分类号： G01C19/56
CPC分类号： G01C19/5719
摘要： Gyroscopes using surface electrodes are provided. In this regard, a representative microelectromechanical systems (MEMS) gyroscope, among others, includes a top substrate and a bottom substrate. The top substrate includes an outermost structure that is open and enclosed and a first driving structure that is disposed within the outermost structure and includes first driving electrodes disposed on a bottom surface. The bottom substrate is disposed below the top substrate and includes second driving electrodes disposed on a top surface of the bottom substrate. The second driving electrodes are substantially aligned below the first driving electrodes such that a force can be applied to the first driving structure by an electrostatic force generated between the first and second driving electrodes. The first and second driving electrodes are also configured to provide a capacitance signal based on the movement of the first driving structure.
摘要翻译： 提供使用表面电极的陀螺仪。 在这方面，代表性的微机电系统（MEMS）陀螺仪等包括顶部基底和底部基底。 顶部基板包括开放和封闭的最外面的结构，以及设置在最外面结构内并包括设置在底面上的第一驱动电极的第一驱动结构。 底部基板设置在顶部基板的下方，并且包括设置在底部基板的顶表面上的第二驱动电极。 第二驱动电极基本上对准第一驱动电极下方，使得能够通过在第一和第二驱动电极之间产生的静电力将力施加到第一驱动结构。 第一和第二驱动电极还被配置为基于第一驱动结构的移动来提供电容信号。
-
公开(公告)号：US20100109579A1
公开(公告)日：2010-05-06
申请号：US12261647
申请日：2008-10-30
IPC分类号： H02N11/00
摘要： A resonator includes a translator, a stator, and a control circuit. The control circuit is configured to provide first and second translator voltages and first through third stator voltages, wherein the translator is configured to move with respect to the stator at a resonant frequency of the resonator in response to the control circuit.
摘要翻译： 谐振器包括转换器，定子和控制电路。 控制电路被配置为提供第一和第二转换器电压和第一至第三定子电压，其中转换器被配置为响应于控制电路在谐振器的谐振频率处相对于定子移动。
-
公开(公告)号：US20090238515A1
公开(公告)日：2009-09-24
申请号：US12262419
申请日：2008-10-31
IPC分类号： G02B6/26
CPC分类号： G02B6/12007
摘要： A ring resonator has a first optical waveguide arranged in a loop, a second optical waveguide tangentially optically coupled to the first optical waveguide, and a translatable body configured to selectively move into an evanescent field region of said first optical waveguide.
摘要翻译： 环形谐振器具有以环路布置的第一光波导，与第一光波导切向光耦合的第二光波导，以及被配置为选择性地移动到所述第一光波导的消逝场区的可平移主体。
-
公开(公告)号：US07397098B2
公开(公告)日：2008-07-08
申请号：US10733089
申请日：2003-12-11
IPC分类号： G11C11/14
CPC分类号： G11C11/1675 , G11C11/161
摘要： An aspect of the present invention is an MRAM device. The MRAM device includes a plurality of magnetic memory elements, a sense line coupled to the plurality of magnetic memory elements for sensing a magnetic orientation of each of the plurality of magnetic memory elements wherein the sense line includes a first via and a second via and wherein the sense line is utilized to thermally assist in switching a magnetic orientation of at least one of the plurality of magnetic memory elements.
摘要翻译： 本发明的一个方面是MRAM装置。 MRAM装置包括多个磁存储器元件，感测线耦合到多个磁存储元件，用于感测多个磁存储元件中的每一个的磁取向，其中感测线包括第一通孔和第二通孔，并且其中 感测线被用于热辅助切换多个磁存储元件中的至少一个的磁取向。
-
公开(公告)号：US20080089470A1
公开(公告)日：2008-04-17
申请号：US11580676
申请日：2006-10-13
申请人： Robert G. Walmsley , Inkyu Park
发明人： Robert G. Walmsley , Inkyu Park
IPC分类号： G21K5/00
CPC分类号： G03F7/7035 , G03F9/7038 , G03F9/7053 , G03F9/7088
摘要： A contact lithography system includes a patterning tool for transferring a pattern to a substrate; and a capacitive alignment system disposed on the patterning tool for cooperating with a corresponding alignment system disposed on the substrate for determining relative alignment of the patterning tool and substrate. A method of aligning a patterning tool and a substrate in a contact lithography system includes determining, based on a signal transferred through capacitors formed by opposing conductive elements disposed respectively on the patterning tool and substrate, alignment of the patterning tool and substrate.
摘要翻译： 接触光刻系统包括用于将图案转印到基板的图案形成工具; 以及电容对准系统，其布置在所述图案形成工具上，用于与设置在所述衬底上的对应对准系统配合，以确定所述图案形成工具和衬底的相对对准。 在接触光刻系统中对准图案形成工具和衬底的方法包括基于通过分别设置在图案形成工具和衬底上的相对导电元件形成的电容器传送的信号来确定图案形成工具和衬底的对准。
-
-
-
-
-
-
-
搜索结果
38 条记录 (耗时 0.027 秒)
