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31.发明授权公开(公告)号：US07274623B2
公开(公告)日：2007-09-25
申请号：US11094874
申请日：2005-03-30
CPC分类号： B06B1/0292 , G10K9/12
摘要： A novel operation regime for capacitive micromachined ultrasonic transducers (cMUTs). The collapse-snapback operation in which the center of the membrane makes intermittent contact with the substrate. This combines two distinct states of the membrane (in-collapse and out-of-collapse) to unleash unprecedented acoustic output pressures into the medium. The collapse-snapback operation utilizes a larger range of membrane defection profiles (both collapsed and released membrane profiles) and generates higher acoustic output pressures than the conventional operation. Collapse-snapback operation meets the extreme acoustic transmit pressure demands of the ultrasonic industry.
摘要翻译： 电容式微加工超声换能器（cMUT）的新颖操作方案。 折叠回击操作，其中膜的中心与衬底间歇接触。 这结合了膜的两种截然不同的状态（塌陷和失真），以释放出前所未有的声输出压力进入介质。 塌陷 - 回弹操作利用更大范围的膜缺陷曲线（两个折叠和释放的膜轮廓），并产生比常规操作更高的声输出压力。 塌陷 - 回弹操作满足超声波行业的极端声学传输压力要求。
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32.发明授权Microfluidic channels with integrated ultrasonic transducers for temperature measurement and method 失效具有集成超声换能器的微流体通道用于温度测量和方法公开(公告)号：US06789426B2
公开(公告)日：2004-09-14
申请号：US10198290
申请日：2002-07-17
IPC分类号： G01H500
CPC分类号： G01N29/223 , G01H5/00 , G01K11/24 , G01N29/024 , G01N29/326 , G01N2291/02881
摘要： There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.
摘要翻译： 描述了一种用于测量具有间隔壁的类型的微通道中的流体的温度的方法和装置。 超声波换能器将从一个壁传输的超声波传送到相对的壁。 处理器确定来自一个壁的超声波的飞行时间，并反射到与该墙壁相对的壁。 处理器通过将墙壁之间的距离除以飞行时间将飞行时间转换为速度。 处理器将速度从流体中的速度关系转换为温度。
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33.发明授权Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling 有权具有减小的交叉耦合的电容式微机械超声换能器阵列公开(公告)号：US06262946B1
公开(公告)日：2001-07-17
申请号：US09408156
申请日：1999-09-29
IPC分类号： H04R1900
CPC分类号： B06B1/0292 , G10K11/002
摘要： There is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.
摘要翻译： 描述了一种电容微机械超声换能器阵列，其被配置为最小化在基板中行进的板波的激发和传播以及在阵列表面和浸没流体之间的界面处传播的超声波。
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公开(公告)号：US5996415A
公开(公告)日：1999-12-07
申请号：US847144
申请日：1997-04-30
申请人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
发明人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
CPC分类号： G01N29/46 , G01N29/041 , G01N29/07 , G01N29/449 , G01N2291/02854 , G01N2291/02881 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/102 , G01N2291/2698
摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.
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公开(公告)号：US5686945A
公开(公告)日：1997-11-11
申请号：US337913
申请日：1994-11-14
CPC分类号： B41J2/14008 , B41J2002/14483
摘要： Acoustically thin capping structures and acoustic droplet ejectors having fluid wells and which use such capping structures to create fluid cells. The inventive capping structures permit the accurate positioning of the free surface of a fluid, permit acoustically induced fluid droplet ejection, and prevent fluid from spilling from the fluid wells. "Acoustically thin" means that the thickness of the capping structure is small enough that the acoustic energy that is lost passing through the capping structure is less than 50% of the incident acoustic energy.
摘要翻译： 声学薄封盖结构和具有流体孔的声学液滴喷射器，并且使用这种封盖结构来产生流体池。 本发明的封盖结构允许流体的自由表面的精确定位，允许声学诱导的液滴喷射，并且防止流体从流体孔溢出。 “声学上薄”意味着封盖结构的厚度足够小，使得通过封盖结构失去的声能小于入射声能的50％。
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公开(公告)号：US5392064A
公开(公告)日：1995-02-21
申请号：US810248
申请日：1991-12-19
CPC分类号： B41J2/1631 , B41J2/14008 , B41J2/1607 , B41J2/1626 , B41J2/1632 , B41J2002/14387
摘要： A liquid level control structure is provided comprising a plate having substantially flat top and bottom surfaces and an hourglass-shaped aperture containing a marking fluid. Protruding a known amount and at a known angle from opposite sides of the aperture waist are knife-edged lips that interact with the fluid's surface tension to control the location of an unbounded surface of the fluid.
摘要翻译： 提供了液面控制结构，其包括具有基本上平坦的顶部和底部表面的板和包含标记流体的沙漏形孔。 从孔径腰部的相对侧突出已知的量并以已知的角度突出的是刀刃边缘，其与流体的表面张力相互作用以控制流体的无界表面的位置。
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37.发明授权Liquid surface control with an applied pressure signal in acoustic ink printing 失效液压表面控制与应用压力信号在声学印刷中的应用
公开(公告)号：US5229793A
公开(公告)日：1993-07-20
申请号：US634248
申请日：1990-12-26
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： This invention is an acoustic ink printer. It has a pool of ink (33) with a free surface (36). Underneath the ink is a print head (10) which has droplet ejectors (14) for irradiating the free surface (36) of the pool of ink (33) with focused acoustic radiation (44). Over the free surface (36) of the pool of ink (33) is a membrane (16), with one or more apertures (20) aligned with the droplet ejectors (14), in intimate contact with the free surface (36) of the pool of ink (33). The apertures 20 are substantially larger than the waist diameter (46) of the focused acoustic radiation (44). An external pressure source (50) maintains the meniscus (48) of the pool of ink (33) substantially in the focal plane (52) of the focused acoustic radiation (44) during operation of the droplet ejectors (14). A piezoelectric crystal (24) is in intimate contact with the pool of ink (33). An electrical signal source (32) energizes the piezoelectric crystal (24) in order to apply a pressure signal (54) on demand to the pool of ink (33) during operation of the droplet ejectors (14). The different pressure signals (54) resulting from application of different electrical signals (29) to the piezoelectric crystal (24) can be utilized to eject individual droplets (38) of ink (33) from the free surface (34) of the ink (33) on demand, or to effect finer control over the free surface (34) of the ink (33) than is possible with the external pressure source (50) by itself.
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公开(公告)号：US4909082A
公开(公告)日：1990-03-20
申请号：US281941
申请日：1988-12-06
摘要： A shear acoustic transducer-lens system in which a shear polarized piezoelectric material excites shear polarized waves at one end of a buffer rod having a lens at the other end which excites longitudinal waves in a coupling medium by mode conversion at selected locations on the lens.
摘要翻译： 剪切式声学传感器透镜系统，其中剪切极化压电材料在另一端具有透镜的缓冲杆的一端处激发剪切极化波，其通过在透镜上的选定位置处的模式转换激发耦合介质中的纵波。
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公开(公告)号：US4751529A
公开(公告)日：1988-06-14
申请号：US944490
申请日：1986-12-19
CPC分类号： B41J2/14008 , B41J2002/14322
摘要： A printhead for an acoustic printer comprises one or more acoustic microlenses, each of which brings an acoustic beam to focus approximately at the free surface of a pool of ink for ejecting individual droplets of ink from the pool on demand. As used herein, an "acoustic microlens" is defined as being an acoustic lens having an aperture diameter which is less than an order of magnitude greater than the wavelength of the incident acoustic wave (i.e., the acoustic wave which illuminates the lens).
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公开(公告)号：US4749900A
公开(公告)日：1988-06-07
申请号：US931602
申请日：1986-11-17
IPC分类号： B06B1/06 , H01L41/083 , H01L41/24 , H01L41/08
CPC分类号： H01L41/083 , B06B1/0611 , H01L41/187 , H01L41/316 , Y10T29/42
摘要： The invention relates to a multi-layered piezoelectric acoustic transducer for generating layers of the same piezoelectric material are provided such tool alternate layers have different crystallographic orientations and different piezoelectric coupling coefficients. The layers may be provided so that alternate layers have crystallographic orientations which provide maximum electro-acoustic coupling and layers which provide minimum electro-acoustic coupling.
摘要翻译： 本发明涉及一种用于产生相同压电材料层的多层压电声换能器，这样的工具交替层具有不同的晶体取向和不同的压电耦合系数。 可以提供这些层，使得交替层具有提供最大电声耦合的晶体取向和提供最小电声耦合的层。
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