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35 条记录 (耗时 0.02 秒)

    Integrated continuous spectrum spatial light modulator
    34.
    发明申请
    Integrated continuous spectrum spatial light modulator 有权
    集成连续光谱空间光调制器

    公开(公告)号：US20050024707A1

    公开(公告)日：2005-02-03

    申请号：US10631087

    申请日：2003-07-31

    申请人： Jonathan Bernstein ,  Mehmet Dokmeci

    发明人： Jonathan Bernstein ,  Mehmet Dokmeci

    IPC分类号： G02B6/26 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  G02F1/23

    CPC分类号： G02B6/357 ,  G02B6/266 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/3584 ,  G02B6/3594 ,  G02B26/0841 ,  Y10S359/904

    摘要： A novel spatial light modulator system has a high fill factor MEMS array of tilting mirrors used to attenuate wavelength channels in an optical network and an interface control circuit controlling the tilting mirror array via received control signals. The control signals include definitions of the wavelength channels and desired attenuation. This control circuit may or may not be on the same chip as the mirror array. Each mirror is supported by one or more flexures, located symmetrically or asymmetrically with respect to the mirror's center of gravity, providing single-axis or two-axis rotation. Stiffener ribs at mirror edges provide a flatter mirror. Landing electrodes held at the same potential as the mirror prevent stiction, while strain relief slots relieve stress on the mirror or flexures. Mirrors fabricated from polysilicon or metal are polished flat using a CMP technique. This SLM design is non-interferometric, therefore increased angular tilt provides increased attenuation.

    摘要翻译： 一种新颖的空间光调制器系统具有用于衰减光网络中的波长信道的倾斜镜的高填充因子MEMS阵列和经由接收的控制信号控制倾斜镜阵列的接口控制电路。 控制信号包括波长信道的定义和期望的衰减。 该控制电路可以或可以不在与镜阵列相同的芯片上。 每个镜子由相对于镜子的重心对称或不对称的一个或多个弯曲部支撑，提供单轴或双轴旋转。 镜面边缘的加强筋提供更平坦的镜子。 保持在与镜子相同电位的着陆电极防止静电，而应力消除槽释放反射镜上的应力或弯曲。 使用CMP技术将由多晶硅或金属制成的反射镜抛光平面。 这种SLM设计是非干涉式的，因此增加的角度倾斜提供增加的衰减。

    Multi-axis magnetically actuated device
    35.
    发明授权
    Multi-axis magnetically actuated device 有权
    多轴磁力驱动装置

    公开(公告)号：US06388789B1

    公开(公告)日：2002-05-14

    申请号：US09666018

    申请日：2000-09-19

    申请人： Jonathan Bernstein

    发明人： Jonathan Bernstein

    IPC分类号： G02B2608

    CPC分类号： G02B6/3572 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  Y10S359/90

    摘要： A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

    摘要翻译： 公开了一种多轴磁致动装置，多轴磁致动装置的阵列以及制造多轴磁致动装置的方法。 此外，公开了一种光开关，其由多轴磁致动装置的阵列和适于接收诸如光纤的光波导的端口阵列组成。 本发明的多轴磁力驱动装置能够沿两个正交方向旋转运动。 在一个实施例中，多轴磁致动装置包括两个嵌套旋转构件，嵌套在外旋转构件内的内旋转构件，其又嵌套在基构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件，外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 内部扭转弯曲限定了内部旋转轴线，而外部扭转挠曲限定了外部旋转轴线。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 散装微加工技术使得部件能够由单片硅晶片形成，并且可以产生具有光滑表面的部件。 构件的光滑表面可以用作反射器。 在一个实施例中，内旋转构件用作反射器。