公开(公告)号：US20120256519A1

公开(公告)日：2012-10-11

申请号：US13436336

申请日：2012-03-30

申请人： Toshio Tomiyoshi ,  Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Toshio Tomiyoshi ,  Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： H02N11/00 ,  B05D5/12

CPC分类号： H04R1/00 ,  B06B1/0292 ,  B81B2201/0271 ,  B81B2203/04 ,  B81C1/00626 ,  H04R2201/003

摘要： An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.

摘要翻译： 机电换能器包括基板，设置在基板上的第一电极以及设置在第一电极上的具有间隔的膜的振动膜和设置在膜上以与第一电极相对的第二电极。 第一电极的表面粗糙度值为6nm RMS以下。

公开(公告)号：US20120256518A1

公开(公告)日：2012-10-11

申请号：US13434405

申请日：2012-03-29

申请人： Kazutoshi Torashima ,  Takahiro Akiyama ,  Toshio Tomiyoshi

发明人： Kazutoshi Torashima ,  Takahiro Akiyama ,  Toshio Tomiyoshi

IPC分类号： H02N1/00 ,  B05D5/12

CPC分类号： B06B1/0292

摘要： A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

摘要翻译： 制造机电换能器的方法包括在第一电极上形成绝缘膜，在绝缘膜上形成牺牲层，在牺牲层上形成第一膜，在第一膜上形成第二电极，在第一膜上形成蚀刻孔 第一膜并通过蚀刻孔除去牺牲层，并在第二电极上形成第二膜，并密封蚀刻孔。 在一个操作中进行形成第二膜并密封蚀刻孔。

公开(公告)号：US20120091543A1

公开(公告)日：2012-04-19

申请号：US13248440

申请日：2011-09-29

申请人： Kazutoshi Torashima ,  Takahiro Akiyama

发明人： Kazutoshi Torashima ,  Takahiro Akiyama

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： B81C1/00158 ,  B06B1/0292

摘要： An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate.

摘要翻译： 机电换能器包括多个元件，每个元件包括至少一个蜂窝结构，所述蜂窝结构包括：半导体衬底，半导体膜片和用于支撑隔膜的支撑部分，使得在衬底的一个表面和膜片之间形成间隙 。 元件在包括隔膜的半导体膜的分离位置彼此分离。 每个元件包括穿过包括支撑部分和半导体衬底的第一绝缘层的通孔中：连接到包括隔膜的半导体膜的导体; 以及用于使导体与半导体衬底绝缘的第二绝缘层。

公开(公告)号：US20120262770A1

公开(公告)日：2012-10-18

申请号：US13421791

申请日：2012-03-15

申请人： Kazutoshi Torashima ,  Yuji Kasanuki

发明人： Kazutoshi Torashima ,  Yuji Kasanuki

IPC分类号： G02B26/08

CPC分类号： G01N29/2418 ,  B06B1/0292 ,  G01H9/00

摘要： The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell 2 in which the vibration film 7 containing one electrode 8 out of two electrodes 3 and 8 that are provided so as to interpose a space 5 therebetween is vibratably supported. The electromechanical transducer has a stress relaxation layer formed on the vibration film 7, which has an acoustic impedance matching that of the vibration film 7, and has a light reflection layer 6 formed on the stress relaxation layer 9.

摘要翻译： 本发明提供一种机电换能器，其能够防止光入射到接收面上，而不会降低振动膜的机械特性。 机电换能器具有至少一个电池2，其中包含设置成在其间插入空间5的两个电极3和8中的一个电极8的振动膜7被振动地支撑。 机电换能器具有形成在振动膜7上的应力松弛层，其具有与振动膜7的声阻抗匹配的声阻抗，并且具有形成在应力缓和层9上的光反射层6。

公开(公告)号：US20050129353A1

公开(公告)日：2005-06-16

申请号：US11000064

申请日：2004-12-01

申请人： Kazutoshi Torashima ,  Yasushi Mizoguchi ,  Yasuhiro Shimada

发明人： Kazutoshi Torashima ,  Yasushi Mizoguchi ,  Yasuhiro Shimada

IPC分类号： B41J2/44 ,  B81B3/00 ,  G02B1/11 ,  G02B26/08 ,  G02B26/10 ,  G02B6/26

CPC分类号： G02B1/11 ,  G02B26/0841

摘要： An optical deflector is fixed in a box-shaped member and the box-shaped member has a through-hole and a light-transmissive portion for cutting off air inflow formed on a light reflection side of the optical deflector, whereby dust is prevented from attaching to a reflecting surface.

摘要翻译： 光学偏转器固定在盒状构件中，并且盒状构件具有通孔和透光部分，用于切断形成在光学偏转器的光反射侧的空气流入，从而防止灰尘附着 到反射面。

公开(公告)号：US08767278B2

公开(公告)日：2014-07-01

申请号：US13421791

申请日：2012-03-15

申请人： Kazutoshi Torashima ,  Yuji Kasanuki

发明人： Kazutoshi Torashima ,  Yuji Kasanuki

IPC分类号： G02B26/08

CPC分类号： G01N29/2418 ,  B06B1/0292 ,  G01H9/00

摘要： The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell 2 in which the vibration film 7 containing one electrode 8 out of two electrodes 3 and 8 that are provided so as to interpose a space 5 therebetween is vibratably supported. The electromechanical transducer has a stress relaxation layer 9 formed on the vibration film 7, which has an acoustic impedance matching that of the vibration film 7, and has a light reflection layer 6 formed on the stress relaxation layer 9.

摘要翻译： 本发明提供一种机电换能器，其能够防止光入射到接收面上，而不会降低振动膜的机械特性。 机电换能器具有至少一个电池2，其中包含设置成在其间插入空间5的两个电极3和8中的一个电极8的振动膜7被振动地支撑。 机电换能器具有形成在振动膜7上的应力松弛层9，其具有与振动膜7的声阻抗匹配的声阻抗，并且具有形成在应力松弛层9上的光反射层6。

公开(公告)号：US07817318B2

公开(公告)日：2010-10-19

申请号：US11608343

申请日：2006-12-08

申请人： Kazutoshi Torashima ,  Yasuhiro Shimada

发明人： Kazutoshi Torashima ,  Yasuhiro Shimada

IPC分类号： G02B26/08

CPC分类号： G03G15/04 ,  B81B3/0078 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0118 ,  G02B26/085 ,  G03G15/0435

摘要： Disclosed is an oscillating system arranged so that a gravity center of a movable member and a torsional axis of a resilient support are easily registered with each other to prevent deformation of the movable member due to its dead weight or deviation of deformation from symmetrical deformation, wherein the oscillating system includes a substrate 301, a movable member 302 with hard magnetic members 310 and 311, resilient supports 304 and 305 for supporting the movable member for torsional vibration about a torsional axis 312 with respect to the substrate, and a magnetic field producing device for driving the movable member relative to the substrate, wherein the movable member 302 has recesses 306 and 307, and wherein the hard magnetic members are fixed while their end portions are aligned with end faces 308 and 309 corresponding to the recesses.

摘要翻译： 公开了一种摆动系统，其布置成使得活动构件的重心和弹性支撑件的扭转轴彼此容易地对准，以防止可变构件由于其自重或对称变形的偏差而变形，其中 振荡系统包括基板301，具有硬磁性构件310和311的可移动构件302，用于支撑可动构件以相对于基板绕扭转轴312扭转振动的弹性支撑件304和305以及磁场产生装置 用于相对于基板驱动可移动部件，其中可移动部件302具有凹部306和307，并且其中硬磁部件的端部与对应于凹部的端面308和309对准而固定。

公开(公告)号：US07196830B2

公开(公告)日：2007-03-27

申请号：US11091630

申请日：2005-03-29

申请人： Kazutoshi Torashima ,  Susumu Yasuda ,  Yasuhiro Shimada

发明人： Kazutoshi Torashima ,  Susumu Yasuda ,  Yasuhiro Shimada

IPC分类号： G02B26/08 ,  G02B26/00

CPC分类号： G02B26/0833

摘要： An optical deflector including a support substrate, a movable member, a reflective face, and a mounting structure for fixing the support substrate thereto. The movable member is rotatably or swingingly supported by the support substrate through elastic support members. The reflective face is provided on the movable member and deflects light incident thereon when the movable member is swung relatively to the support substrate. In the optical deflector, neutral surfaces of bending in a direction of a normal to the reflective face in the elastic support member and the movable member are not present in the same plane, and the support substrate is fixed to the mounting structure at a face of the support substrate on a side of the neutral surface in the movable member opposite to a side of the neutral surface in the elastic support member.

摘要翻译： 一种光学偏转器，包括支撑基板，可移动部件，反射面和用于将支撑基板固定到其上的安装结构。 可动构件通过弹性支撑构件由支撑衬底可旋转地或可摆动地支撑。 当可动构件相对于支撑衬底摆动时，反射面设置在可动构件上并偏转入射到其上的光。 在光学偏转器中，在弹性支撑构件和可动构件的反射面的法线方向上弯曲的中性表面不存在于同一平面中，并且支撑基板被固定到安装结构的表面 所述支撑基板在所述可动构件的所述中性面的与所述弹性支撑构件中的所述中性面的侧面相反的一侧。

公开(公告)号：US20050225822A1

公开(公告)日：2005-10-13

申请号：US11091630

申请日：2005-03-29

申请人： Kazutoshi Torashima ,  Susumu Yasuda ,  Yasuhiro Shimada

发明人： Kazutoshi Torashima ,  Susumu Yasuda ,  Yasuhiro Shimada

IPC分类号： B41J2/44 ,  B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  H04N1/036

CPC分类号： G02B26/0833

摘要： An optical deflector including a support substrate, a movable member, a reflective face, and a mounting structure for fixing the support substrate thereto. The movable member is rotatably or swingingly supported by the support substrate through elastic support members. The reflective face is provided on the movable member and deflects light incident thereon when the movable member is swung relatively to the support substrate. In the optical deflector, neutral surfaces of bending in a direction of a normal to the reflective face in the elastic support member and the movable member are not present in the same plane, and the support substrate is fixed to the mounting structure at a face of the support substrate on a side of the neutral surface in the movable member opposite to a side of the neutral surface in the elastic support member.

摘要翻译： 一种光学偏转器，包括支撑基板，可移动部件，反射面和用于将支撑基板固定到其上的安装结构。 可动构件通过弹性支撑构件由支撑衬底可旋转地或可摆动地支撑。 当可动构件相对于支撑衬底摆动时，反射面设置在可动构件上并偏转入射到其上的光。 在光学偏转器中，在弹性支撑构件和可动构件的反射面的法线方向上弯曲的中性表面不存在于同一平面中，并且支撑基板被固定到安装结构的表面 所述支撑基板在所述可动构件的所述中性面的与所述弹性支撑构件中的所述中性面的侧面相反的一侧。

公开(公告)号：US08875583B2

公开(公告)日：2014-11-04

申请号：US13425346

申请日：2012-03-20

申请人： Kazutoshi Torashima ,  Ayako Kato

发明人： Kazutoshi Torashima ,  Ayako Kato

IPC分类号： G01L11/00 ,  G01L9/12 ,  G01R27/26 ,  H04R19/00 ,  B06B1/02

CPC分类号： B06B1/0292

摘要： Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.

摘要翻译： 公开了一种机电换能器，包括：包括基板，振动膜和振动膜的支撑部分的电池，其构造成支撑振动膜，使得在基板和振动膜之间形成间隙; 以及引线，其被放置在基板上，绝缘体插入其间并延伸到电池，其中绝缘体的厚度大于支撑部分的厚度。 机电换能器可以减小寄生电容，以防止噪声的增加，带宽的减少和灵敏度的降低。