利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

47 条记录 (耗时 0.022 秒)

    ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME
    5.
    发明申请
    ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME 审中-公开
    机电传感器及其制造方法

    公开(公告)号：US20120256518A1

    公开(公告)日：2012-10-11

    申请号：US13434405

    申请日：2012-03-29

    申请人： Kazutoshi Torashima ,  Takahiro Akiyama ,  Toshio Tomiyoshi

    发明人： Kazutoshi Torashima ,  Takahiro Akiyama ,  Toshio Tomiyoshi

    IPC分类号： H02N1/00 ,  B05D5/12

    CPC分类号： B06B1/0292

    摘要： A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation.

    摘要翻译： 制造机电换能器的方法包括在第一电极上形成绝缘膜，在绝缘膜上形成牺牲层，在牺牲层上形成第一膜，在第一膜上形成第二电极，在第一膜上形成蚀刻孔 第一膜并通过蚀刻孔除去牺牲层，并在第二电极上形成第二膜，并密封蚀刻孔。 在一个操作中进行形成第二膜并密封蚀刻孔。

    Method of manufacturing oscillator device, and optical deflector and optical instrument having oscillator device
    7.
    发明授权
    Method of manufacturing oscillator device, and optical deflector and optical instrument having oscillator device 失效
    制造振荡器装置的方法，以及具有振荡器装置的光偏转器和光学仪器

    公开(公告)号：US07643197B2

    公开(公告)日：2010-01-05

    申请号：US12267803

    申请日：2008-11-10

    申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

    发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

    IPC分类号： G02B26/08

    CPC分类号： G02B26/105 ,  Y10S359/90

    摘要： A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.

    摘要翻译： 一种制造基于蚀刻单晶硅衬底的振荡器的方法，所述方法包括掩模形成步骤，用于在单晶硅衬底上形成具有由多个相互耦合的振荡器组成的重复形状的图案的蚀刻掩模，每个包括 在支撑基板和可动部件之间的扭转弹簧，在使用蚀刻掩模作为掩模的同时蚀刻单晶硅基板的蚀刻步骤，在单晶硅基板上形成由多个对应的相互耦合的振荡器 以及切割步骤，用于确定每个振荡器的可移动部件和支撑基板的重复形状的宽度，该宽度有效地确定当这些振荡器用作振荡器时所需的各个振荡器的谐振频率，以及 用于通过在相邻振荡之间切割可移动部件和支撑基板进行切割 ator，以确定的宽度。

    Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
    9.
    发明授权
    Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it 有权
    制造振荡器装置的方法，以及基于此的振荡器装置的光偏转器和光学仪器

    公开(公告)号：US08305674B2

    公开(公告)日：2012-11-06

    申请号：US12673694

    申请日：2008-10-28

    申请人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

    发明人： Suguru Miyagawa ,  Takahiro Akiyama ,  Kazutoshi Torashima ,  Takahisa Kato ,  Kazunari Fujii

    IPC分类号： G02B26/10

    CPC分类号： G02B26/105 ,  G02B26/085 ,  H04N1/1135 ,  Y10T29/49774

    摘要： A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.

    摘要翻译： 一种制造振荡器装置的方法，该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法，该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩，用于测量共振频率的第二步骤，用于计算扭簧的弹簧常数的第三步骤，根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率， 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率，计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ，以便将谐振频率调节到目标谐振频率，以及用于调整res的第五步骤 基于计算出的调整量，振荡器的频率与目标谐振频率成正比。

    METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT HAVING OSCILLATOR DEVICE
    10.
    发明申请
    METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT HAVING OSCILLATOR DEVICE 失效
    振荡器装置的制造方法以及具有振荡器装置的光学偏转器和光学仪器

    公开(公告)号：US20090135472A1

    公开(公告)日：2009-05-28

    申请号：US12267803

    申请日：2008-11-10

    申请人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

    发明人： Takahisa Kato ,  Kazutoshi Torashima ,  Takahiro Akiyama

    IPC分类号： G02F1/29 ,  H01L21/302

    CPC分类号： G02B26/105 ,  Y10S359/90

    摘要： A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.

    摘要翻译： 一种制造基于蚀刻单晶硅衬底的振荡器的方法，所述方法包括掩模形成步骤，用于在单晶硅衬底上形成具有由多个相互耦合的振荡器组成的重复形状的图案的蚀刻掩模，每个包括 在支撑基板和可动部件之间的扭转弹簧，在使用蚀刻掩模作为掩模的同时蚀刻单晶硅基板的蚀刻步骤，在单晶硅基板上形成由多个对应的相互耦合的振荡器 以及切割步骤，用于确定每个振荡器的可移动部件和支撑基板的重复形状的宽度，该宽度有效地确定当这些振荡器用作振荡器时所需的各个振荡器的谐振频率，以及 用于通过在相邻振荡之间切割可移动部件和支撑基板进行切割 ator，以确定的宽度。