公开(公告)号：US11018292B2

公开(公告)日：2021-05-25

申请号：US15795579

申请日：2017-10-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Kansho Yamamoto ,  Takuo Hada ,  Yoichi Mochida ,  Hideya Horiuchi

IPC: H01L41/09 ,  H01L41/107 ,  H01L41/047 ,  H01L41/04 ,  H01L41/31 ,  H01L41/083 ,  H01L41/187 ,  H01L41/314 ,  H04R17/00

Abstract: A piezoelectric device that includes a base member having an opening therein and an upper layer supported by the base member. The upper layer includes a vibration portion at a location corresponding to the opening in the base member. The vibration portion includes a lower electrode, an intermediate electrode and an upper electrode that are spaced apart from one another in a thickness direction of the piezoelectric device. The upper layer includes a first piezoelectric layer disposed so as to be at least partially sandwiched between the lower electrode and the intermediate electrode, and a second piezoelectric layer disposed so as to overlap with the first piezoelectric layer and so as to be at least partially sandwiched between the intermediate electrode and the upper electrode. The first piezoelectric layer and the second piezoelectric layer are different in relative permittivity in the thickness direction of the piezoelectric device.

公开(公告)号：US10444495B2

公开(公告)日：2019-10-15

申请号：US16008071

申请日：2018-06-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Shinsuke Ikeuchi ,  Kenji Nishiyama ,  Masanobu Nomura

IPC: G02B27/00 ,  G03B17/08 ,  G03B17/56 ,  H04N5/225 ,  G03B17/02

Abstract: A vibration device includes a cylindrical vibration body portion including a cylindrical member and a piezoelectric vibrator fixed to the cylindrical member, and a light-transparent body portion that includes an outer peripheral portion connected to an end surface of the cylindrical member and a light-transparent portion positioned in front of a lens. The light-transparent body portion vibrates in a bending mode by vibration of the cylindrical vibration body portion. The bending mode includes a first bending mode in which a center-maximum-displacement portion of the light-transparent body portion and the outer peripheral portion of the light-transparent body portion connected to the end surface are displaced in the same direction and a second bending mode in which the center-maximum-displacement portion of the light-transparent body portion and the outer peripheral portion of the light-transparent body portion are displaced in opposite directions.

公开(公告)号：US10181554B2

公开(公告)日：2019-01-15

申请号：US15235353

申请日：2016-08-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Toshimaro Yoneda ,  Yoshitaka Matsuki ,  Naoyuki Endo

IPC: H01L41/187 ,  H01L41/047 ,  H01L41/08 ,  C01G33/00 ,  C23C14/08

Abstract: A piezoelectric thin film contains potassium sodium niobate represented by general formula (K1-xNax)NbO3 and CaTiO3, wherein the lattice spacing calculated from the diffraction peak of the (001) plane in an X-ray diffraction profile of the piezoelectric thin film is 3.975 Å or less, and the ratio I101/I001 of the diffraction peak intensity I101 of the (101) plane to the diffraction peak intensity I001 of the (001) plane in the X-ray diffraction profile of the piezoelectric thin film 3 satisfies the relationship log10(I101/I001)≤−2.10.