公开(公告)号：US10181554B2

公开(公告)日：2019-01-15

申请号：US15235353

申请日：2016-08-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Toshimaro Yoneda ,  Yoshitaka Matsuki ,  Naoyuki Endo

IPC: H01L41/187 ,  H01L41/047 ,  H01L41/08 ,  C01G33/00 ,  C23C14/08

Abstract: A piezoelectric thin film contains potassium sodium niobate represented by general formula (K1-xNax)NbO3 and CaTiO3, wherein the lattice spacing calculated from the diffraction peak of the (001) plane in an X-ray diffraction profile of the piezoelectric thin film is 3.975 Å or less, and the ratio I101/I001 of the diffraction peak intensity I101 of the (101) plane to the diffraction peak intensity I001 of the (001) plane in the X-ray diffraction profile of the piezoelectric thin film 3 satisfies the relationship log10(I101/I001)≤−2.10.

公开(公告)号：US09753056B2

公开(公告)日：2017-09-05

申请号：US14501109

申请日：2014-09-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takuo Hada ,  Katsumi Fujimoto ,  Hideya Horiuchi ,  Toshimaro Yoneda

IPC: G01P15/097 ,  G01P15/09 ,  G01P15/10 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P15/09 ,  G01P15/10 ,  G01P2015/0814

Abstract: A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of the vibrating beam.

公开(公告)号：US10312428B2

公开(公告)日：2019-06-04

申请号：US15245636

申请日：2016-08-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Toshimaro Yoneda ,  Yoshitaka Matsuki ,  Naoyuki Endo

IPC: H01L41/187 ,  C23C14/08 ,  H01L41/316 ,  H01L41/332 ,  C04B35/465 ,  C04B35/622 ,  C23C14/34 ,  C23C14/35 ,  H01J37/34 ,  H01L41/047 ,  H01L41/09 ,  C04B35/499

Abstract: A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.

公开(公告)号：US10230418B2

公开(公告)日：2019-03-12

申请号：US15963569

申请日：2018-04-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Sunao Yamazaki ,  Yuichi Takamine ,  Toshimaro Yoneda

IPC: H04B1/44 ,  H04B1/40 ,  H03F3/19 ,  H01Q1/50 ,  H03F3/24

Abstract: A multiplexer includes a common terminal, a reception terminal, and transmission terminals; a reception filter between the common terminal and the reception terminal; a transmission filter between the common terminal and the transmission terminal; a transmission filter between the common terminal and the transmission terminal; a first inductor connected in series between the common terminal and the reception filter; a second inductor connected between the transmission terminal and the transmission filter; and a third inductor connected between the transmission terminal and the transmission filter. The first inductor and the second inductor couple with each other through a magnetic field, and the first inductor and the third inductor couple with each other through a magnetic field.

公开(公告)号：US20160365503A1

公开(公告)日：2016-12-15

申请号：US15245636

申请日：2016-08-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： SHINSUKE IKEUCHI ,  Toshimaro Yoneda ,  Yoshitaka Matsuki ,  Naoyuki Endo

IPC: H01L41/187 ,  C04B35/622 ,  C23C14/34 ,  H01L41/047 ,  H01J37/34 ,  H01L41/09 ,  H01L41/316 ,  H01L41/332 ,  C04B35/465 ,  C23C14/35

CPC classification number: H01L41/1873 ,  C04B35/465 ,  C04B35/495 ,  C04B35/62222 ,  C04B2235/3201 ,  C04B2235/3208 ,  C04B2235/3236 ,  C04B2235/3255 ,  C04B2235/3262 ,  C23C14/024 ,  C23C14/088 ,  C23C14/3414 ,  C23C14/35 ,  H01J37/3426 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/096 ,  H01L41/316 ,  H01L41/332

Abstract: A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K1-xNax)mNbO3-nCaTiO3, wherein m, n, and x in the general formula are within the ranges of 0.87≦m≦0.97, 0≦n≦0.065, and 0≦x≦1.

Abstract translation: 压电薄膜不容易产生非均匀相，表现出良好的压电特性。 压电薄膜含有由通式（1-n）（K1-xNax）mNbO3-nCaTiO3表示的组成，其中通式中的m，n和x在0.87≤m≤0.97,0的范围内 ≤n≤0.065，0≤x≤1。

公开(公告)号：US09383205B2

公开(公告)日：2016-07-05

申请号：US14148964

申请日：2014-01-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Toshimaro Yoneda ,  Takuo Hada ,  Hideya Horiuchi

IPC: G01C19/56 ,  G01C19/5607 ,  G01C19/5621 ,  H01L41/09

CPC classification number: G01C19/56 ,  G01C19/5607 ,  G01C19/5621 ,  H01L41/09 ,  Y10T74/12 ,  Y10T74/18856

Abstract: A vibrator includes first and second circular or substantially circular arc-shaped beam portions, a base end-side weight portion, and a base end-side weight portion joining portion. The end portions of the first and second circular or substantially circular arc-shaped beam portions in an X-axis positive direction face each other across a distance in a Y-axis direction, and the end portions thereof in an X-axis negative direction are joined to each other. The base end-side weight portion is disposed between the first and second circular or substantially circular arc-shaped beam portions. The base end-side weight portion joining portion extends from a joining portion between the first circular or substantially circular arc-shaped beam portion and the second circular or substantially circular arc-shaped beam portion in the X-axis positive direction, and joined to the base end-side weight portion.

Abstract translation: 振动器包括第一和第二圆形或大致圆形的弧形梁部分，基端侧配重部分和基端侧配重部分接合部分。 第一和第二圆形或大致圆弧形的梁部分在X轴正方向上的端部在Y轴方向上的距离彼此相对，并且其端部在X轴负方向上是 相互加入 基端侧配重部分设置在第一和第二圆形或大致圆弧形的梁部分之间。 基端侧配重部接合部从第一圆弧状或大致圆弧状的梁部与第二圆形或大致圆弧状的梁部在X轴正方向上的接合部延伸，并与 基端侧配重部。

公开(公告)号：US20160172574A1

公开(公告)日：2016-06-16

申请号：US15053030

申请日：2016-02-25

Applicant: Murata Manufacturing Co., Ltd.

Inventor： SHINSUKE IKEUCHI ,  Kansho Yamamoto ,  Yutaka Kishimoto ,  Yoshitaka Matsuki ,  Naoyuki Endo ,  Toshimaro Yoneda ,  Yutaka Takeshima

IPC: H01L41/08 ,  H01L41/29 ,  H01L41/332

CPC classification number: H01L41/0805 ,  C01G33/006 ,  C01P2002/50 ,  C01P2002/52 ,  C01P2006/40 ,  C23C14/08 ,  H01L41/1873 ,  H01L41/29 ,  H01L41/316 ,  H01L41/332

Abstract: A piezoelectric device that includes a piezoelectric film, which is formed by a sputtering method and which has a columnar structure, and electrodes disposed in contact with the piezoelectric film. The piezoelectric film has a composition containing an element which can substitute Nb and has an oxidation number of 2 or more and less than 5 when oxidized in a proportion of 3.3 mol or less relative to 100 mol of potassium sodium niobate represented by a general formula (K1-xNax)NbO3, where 0

Abstract translation: 包括通过溅射法形成并具有柱状结构的压电膜和与压电膜接触的电极的压电器件。 压电体膜具有含有可以代替Nb的元素的组合物，相对于由通式（10）表示的铌酸钾钠100摩尔氧化比例为3.3摩尔以下，氧化数为2以上且小于5的组成 K1-xNax）NbO3，其中0

公开(公告)号：US11528008B2

公开(公告)日：2022-12-13

申请号：US15924307

申请日：2018-03-19

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsuya Daimon ,  Akira Michigami ,  Yasuharu Nakai ,  Toshimaro Yoneda

IPC: H03H9/25 ,  H03H9/02 ,  H01L41/187 ,  H03H9/145 ,  H01L41/047 ,  H03H9/64

Abstract: An elastic wave device includes a piezoelectric substrate, elastic wave resonators on or in the piezoelectric substrate, and a dielectric film disposed on the piezoelectric substrate and covering the elastic wave resonators. The elastic wave resonators includes respective IDT electrodes on the piezoelectric substrate. When a wavelength specified by an electrode finger pitch of the IDT electrode is denoted as λ, at least two of the elastic wave resonators have the different wavelengths. In two of the elastic wave resonators having different wavelengths, a film thickness of the IDT electrode in the elastic wave resonator having the longer wavelength is not greater than that of the IDT electrode in the elastic wave resonator having the shorter wavelength. Film thicknesses of the IDT electrodes in at least two of the elastic wave resonators are different from each other. The elastic wave device utilizes a Rayleigh wave.

公开(公告)号：US10141913B2

公开(公告)日：2018-11-27

申请号：US15893759

申请日：2018-02-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yuichi Takamine ,  Toshimaro Yoneda ,  Noriyoshi Ota

IPC: H03H9/64 ,  H03H7/38 ,  H03H7/46 ,  H03H9/72 ,  H04B1/40 ,  H03H9/145

Abstract: A multiplexer includes filters and a common terminal connected to an antenna element by a connection path, a first inductance element being connected between the connection path and a reference terminal. A terminal closer to the antenna element among an input terminal and an output terminal of one filter among the filters is connected to a parallel resonator and is connected to the common terminal with a second inductance element interposed therebetween. A terminal closer to the antenna element among an input terminal and an output terminal of each of other filters other than the one filter among the filters is connected to the common terminal and a series resonator.

公开(公告)号：US09851373B2

公开(公告)日：2017-12-26

申请号：US14100100

申请日：2013-12-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Katsumi Fujimoto ,  Toshimaro Yoneda ,  Takuo Hada ,  Hideya Horiuchi

IPC: G01C19/56 ,  G01C19/5684

CPC classification number: G01P9/04 ,  G01C19/5684

Abstract: A vibrator in a vibrating gyroscope includes a circular annular portion, a rectangular annular portion, and joining portions. The rectangular annular portion is disposed adjacent to an outer side of the circular annular portion. The joining portions join the circular annular portion and the rectangular annular portion. The rectangular annular portion includes linear beam portions. The joining portions join the circular annular portion and the center portions of the beam portions to each other.