Charged particle beam exposure method and charged particle beam exposure
apparatus
    31.
    发明授权
    Charged particle beam exposure method and charged particle beam exposure apparatus 失效
    带电粒子束曝光方法和带电粒子束曝光装置

    公开(公告)号:US5808313A

    公开(公告)日:1998-09-15

    申请号:US892976

    申请日:1997-07-15

    摘要: The object of the present invention is to ensure a correct exposure even when a single exposure apparatus is used to expose a predetermined pattern, and an exposure apparatus therefor. According to the present invention, a charged particle beam exposure method, wherein a charged particle beam having a predetermined shape is irradiated to a sample to have the surface of the sample be exposed, comprises the steps of: storing a record of a first quantity of reflected electrons or a first sample current, which is detected in accordance with the charged particle beam irradiatd to the sample when a first exposure pattern is formed in a first area of the sample; and comparing a second quantity of reflected electrons or a second sample current, which is detected in accordance with the charged particle beam irradiated to the sample when the first exposure pattern is formed in a second area of the sample, with the first quantity of the reflected electrons or the first sample current which is stored when the first area is exposed, and generating a matched or unmatched signal therefor.

    摘要翻译: 本发明的目的在于即使使用单一的曝光装置来曝光预定图案也能确保正确的曝光及其曝光装置。 根据本发明,一种带电粒子束曝光方法,其中对样品照射具有预定形状的带电粒子束以暴露样品的表面,包括以下步骤:将第一量的 反射电子或第一样品电流,当在样品的第一区域中形成第一曝光图案时,其根据被照射到样品的带电粒子束来检测; 并且比较第二量的反射电子或第二样品电流,其在样品的第二区域中形成第一曝光图案时根据照射到样品的带电粒子束检测到的第一数量的反射电子或第二样品电流, 电子或第一采样电流,其在第一区域被暴露时存储,并且产生匹配或不匹配的信号。

    Method and apparatus for optically measuring specimen
    32.
    发明授权
    Method and apparatus for optically measuring specimen 失效
    用于光学测量样品的方法和设备

    公开(公告)号:US5760900A

    公开(公告)日:1998-06-02

    申请号:US8993

    申请日:1993-01-26

    IPC分类号: G01N15/14 G01N21/64

    摘要: A specimen measurement apparatus and method includes sequentially moving individual specimens, radiating first and second radiation beams on first and second positions spaced apart from each other in a moving direction of the specimens, time-serially detecting light components emerging from specimens passing the first and second positions using the same light detector, and an optical selector, arranged in an optical path between the radiation positions and a light detector, for, when a specimen passes the first position, selectively guiding a light component having a first optical characteristic emerging from the specimen to the light detector, and for, when the specimen passes the second position, selectively guiding a light component having a second optical characteristic emerging from the specimen to the light detector.

    摘要翻译: 样本测量装置和方法包括:顺序地移动单个样本,沿着在样本的移动方向上彼此间隔开的第一和第二位置辐射第一和第二辐射束,时间序列地检测通过第一和第二 使用相同的光检测器的位置和布置在辐射位置和光检测器之间的光路中的光学选择器,当样本通过第一位置时,选择性地引导具有从样本出现的第一光学特性的光分量 并且当样本通过第二位置时,选择性地将具有从样本出现的第二光学特性的光分量引导到光检测器。

    Recording apparatus
    33.
    发明授权
    Recording apparatus 失效
    记录装置

    公开(公告)号:US5721581A

    公开(公告)日:1998-02-24

    申请号:US346295

    申请日:1994-11-23

    CPC分类号: B41J2/17566 B41J29/393

    摘要: A facsimile apparatus comprises a facsimile unit for sending data corresponding to image data that has been received, and a printer unit for performing image recording by discharging ink droplets in accordance with data sent from the facsimile unit. A first CPU for the control of the facsimile unit sends, after one page of image data, data in a predetermined pattern and further a paper exhausting command to the printer. A second CPU of the printer unit performs a paper exhausting operation upon receiving the paper exhausting command, after recording of the predetermined pattern, and upon conveying the recording paper up to a predetermined position, sends a signal for starting detection of the predetermined pattern to the first CPU. The first CPU thereby receives a detection signal from a photo sensor. The second CPU further conveys the recording paper, and at a timing of exhausting out of the apparatus, sends a signal for the detection end of the predetermined pattern to the first CPU. Thereby, it is possible to detect correctly the pattern for detection of the emptiness of ink and the recording paper jam which is recorded at the trailing portion of the recording paper.

    摘要翻译: 传真装置包括:传真单元,用于发送对应于已经接收的图像数据的数据;以及打印机单元,用于根据从传真单元发送的数据排出墨滴来执行图像记录。 用于控制传真单元的第一CPU在一页图像数据之后以预定图案发送数据,并且进一步向打印机输送排纸命令。 打印机单元的第二CPU在接收到排纸命令之后,在记录了预定图案之后执行排纸操作,并且在将记录纸传送到预定位置时,将用于开始检测预定图案的信号发送到 第一个CPU。 因此,第一CPU从光传感器接收检测信号。 第二CPU进一步传送记录纸,并且在排出装置的定时,向第一CPU发送用于预定图案的检测结束的信号。 因此,可以正确地检测记录在记录纸的尾部的墨的空白和记录纸卡纸的检测图案。

    Recovery device having a protruding portion providing reduced pressure
for improved recovery and method using same
    35.
    发明授权
    Recovery device having a protruding portion providing reduced pressure for improved recovery and method using same 失效
    具有突出部分的恢复装置提供减小的压力以改善回收率和使用它的方法

    公开(公告)号:US5559536A

    公开(公告)日:1996-09-24

    申请号:US227094

    申请日:1994-04-13

    IPC分类号: B41J2/165 B41J2/17

    摘要: A cleaning device for an ink jet recording head, having at least one discharge port for ejecting recording liquid, includes a cap member for facing a region of the recording head having the discharge port therein, a supply path for supplying a fluid medium to the cap member for flow along the discharge port region and a discharge path for discharging the medium from the cap member. The flow of the medium inside the cap member from the supply path to said discharge path is constricted by a protruding portion in the cap member, which protruding portion is disposed in the cap member such that the discharge port is spaced opposite the protruding portion when the discharge port region faces the cap member, and the medium flows along the discharge port region such that a negative pressure is generated for drawing recording liquid from the discharge port into the flow of the medium.

    摘要翻译: 一种用于喷墨记录头的清洁装置,具有用于喷射记录液体的至少一个排出口,包括用于与其中具有排出口的记录头区域相对的盖构件,用于将流体介质供应到盖的供应路径 沿着排出口区域流动的构件和用于从盖构件排出介质的排出路径。 盖构件内的从供给路径到排出路径的介质的流动被盖构件中的突出部收缩,该突出部设置在盖构件中,使得排出口与突出部相对地间隔开 排出口区域面向盖构件,并且介质沿着排出口区域流动,从而产生用于将记录液体从排出口拉到介质流中的负压。

    Apparatus and method for wiping an ink jet recording head with control
of relative speed between wiper and head
    36.
    发明授权
    Apparatus and method for wiping an ink jet recording head with control of relative speed between wiper and head 失效
    用于通过控制擦拭器和头部之间的相对速度来擦拭喷墨记录头的装置和方法

    公开(公告)号:US5548309A

    公开(公告)日:1996-08-20

    申请号:US737657

    申请日:1991-07-30

    IPC分类号: B41J2/165

    CPC分类号: B41J2/16508 B41J2/16588

    摘要: A wiping apparatus for a recording head of an ink jet recording apparatus, which has a recording head including an ink ejection portion, includes a wiping member, and a rotation device for rotating the recording head and/or the wiping member so that the wiping member slides on the ink ejection portion. The apparatus prevents the splash of ink caused when the wiping member leaves the ink ejection portion by using one of the following techniques: First, a wiping speed is decreased at the end of wiping; second, an angle between the wiping member and the ink ejection portion is declined as the wiping proceeds; third, the first and second techniques are combined; and fourth, an approach amount of the wiping member to the ink ejection portion is reduced at least just before the wiping member leaves the ink ejection portion. Using one of these technique enables the wiping member to leave softly the ink ejection portion by weakening the restoring force of the wiping member, thereby preventing ink from splashing into the surroundings during the wiping operation.

    摘要翻译: 一种用于喷墨记录装置的记录头的擦拭装置,具有包括喷墨部分的记录头,包括擦拭部件和用于使记录头和/或擦拭部件旋转的旋转装置,使得擦拭部件 在喷墨部分上滑动。 该装置通过使用以下技术之一防止擦拭构件离开墨水喷射部时引起的墨水飞溅:首先,在擦拭结束时擦拭速度降低; 第二,随着擦拭的进行,擦拭部件和喷墨部分之间的角度下降; 第三,第一和第二技术相结合; 第四,至少恰好在擦拭构件离开墨水喷射部分之前,将擦拭构件到墨水喷射部分的接近量减少。 使用这些技术之一,通过削弱擦拭构件的恢复力,擦拭构件能够轻轻地离开墨水喷射部分,从而防止在擦拭操作期间墨水溅入周围环境。

    Recovery system and ink jet recording apparatus provided with said
recovery system
    38.
    发明授权
    Recovery system and ink jet recording apparatus provided with said recovery system 失效
    具有所述回收系统的回收系统和喷墨记录装置

    公开(公告)号:US5481283A

    公开(公告)日:1996-01-02

    申请号:US409963

    申请日:1995-03-24

    IPC分类号: B41J2/165

    摘要: A recovery system comprises a cap means for covering the discharging ports of a recording head to perform recording by discharging ink, and a wiper assembly for wiping the discharging port face of the recording head, the wiper assembly being a large-sized wiping member and a small-sized wiping member, wherein the small-sized wiping member is first in contact with the discharging port face of the recording head. A guide member guides the recording head and the cap at the time of mating and a holder holds the recording head and cap, which holder holds the recording head and said cap in such a manner that they can relatively be displaced in the direction crossing the contacting direction thereof. A cap unit with the cap and wiper assembly can be rotated within a rotational area of the recording head. Wiping by the wiper assembly is performed in such a manner that following the rotation of the recording head, the small-sized wiping member is first in contact therewith and subsequently, the large-sized wiping member is in contact therewith.

    摘要翻译: 回收系统包括用于覆盖记录头的排出口以通过排出墨水进行记录的盖装置和用于擦拭记录头的排出口面的擦拭器组件,刮水器组件是大尺寸的擦拭构件和 小型擦拭构件,其中小尺寸擦拭构件首先与记录头的排出口面接触。 引导构件在配合时引导记录头和盖,并且保持器保持记录头和盖,该保持器以这样的方式保持记录头和盖,使得它们可以在与接触的方向相对移位 方向。 具有盖和刮水器组件的盖单元可以在记录头的旋转区域内旋转。 通过擦拭器组件的擦拭以这样一种方式进行:在记录头的旋转之后,小尺寸的擦拭部件首先与其接触,随后大尺寸的擦拭部件与其接触。

    Nonradiative dielectric waveguide and manufacturing method thereof
    39.
    发明授权
    Nonradiative dielectric waveguide and manufacturing method thereof 失效
    非辐射介质波导及其制造方法

    公开(公告)号:US5473296A

    公开(公告)日:1995-12-05

    申请号:US205905

    申请日:1994-03-03

    IPC分类号: H01P3/16 H01P11/00

    CPC分类号: H01P3/165

    摘要: A nonradiative dielectric waveguide which includes a first housing and a second housing. The first housing and the second housing respectively include first and second dielectric units and conductor electrodes. The first and second dielectric units are respectively integrally formed with first and second planar portions, and first and second dielectric strip line portions extending outwardly from said first and second planar portions and by a predetermined height, with abutting faces generally parallel with the conductor electrodes and being provided at top portions of said dielectric strip line portions. The conductor electrodes are respectively formed in close contact with faces of the first and second dielectric units remote from the abutting faces. The first and second housings are overlapped so as to make the abutting faces confront each other. The first and second dielectric strip lines portions cooperate to propagate electromagnetic waves. The disclosure is also directed to a manufacturing method of the above nonradiative dielectric waveguide.

    摘要翻译: 一种非辐射介质波导,包括第一壳体和第二壳体。 第一壳体和第二壳体分别包括第一和第二电介质单元和导体电极。 第一和第二电介质单元分别与第一和第二平面部分一体地形成,并且第一和第二介质条线部分从所述第一和第二平面部分向外延伸并且具有预定高度,其中接触面大致平行于导体电极, 设置在所述介质带状线部分的顶部。 导体电极分别形成为紧密接触第一和第二介质单元的远离邻接表面的表面。 第一和第二壳体重叠,以使邻接面彼此面对。 第一和第二介质条线部分协作以传播电磁波。 本发明还涉及上述非辐射电介质波导的制造方法。

    Capping means and ink jet recording apparatus using the same
    40.
    发明授权
    Capping means and ink jet recording apparatus using the same 失效
    封盖装置和使用其的喷墨记录装置

    公开(公告)号:US5471230A

    公开(公告)日:1995-11-28

    申请号:US655153

    申请日:1991-02-13

    IPC分类号: B41J2/165

    摘要: A capping device to be used with an ink jet recording apparatus for recording on a recording medium by discharging ink onto the recording medium comprises a capping member for covering a discharge port of an ink jet recording head for discharging ink to effect the recording on the recording medium and a pushing member provided on the capping member at an inner side thereof for pushing with pressure against the discharge port of the ink jet recording head. An ink jet recording apparatus is disclosed using the capping device.

    摘要翻译: 与喷墨记录装置一起使用的用于在记录介质上通过将油墨喷射到记录介质上而进行记录的封盖装置包括用于覆盖用于排出墨水的喷墨记录头的排出口的封盖构件,以在记录上进行记录 介质和推动构件,其设置在封盖构件的内侧,用于将压力压靠在喷墨记录头的排出口。 公开了使用封盖装置的喷墨记录装置。