公开(公告)号：US08915137B2

公开(公告)日：2014-12-23

申请号：US12897367

申请日：2010-10-04

Applicant: Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Johannes Classen ,  Torsten Ohms ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01P3/44 ,  G01C19/574 ,  G01C19/5755

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A yaw rate sensor having a substrate which has a main plane of extension, and a Coriolis element is proposed. The Coriolis element is excitable to a vibration along a third direction which is perpendicular to the main plane of extension. A Coriolis deflection of the Coriolis element along a first direction which is parallel to the main plane of extension may be detected using a detection arrangement. The detection arrangement includes a Coriolis electrode which is connected to the Coriolis element, and a corresponding counterelectrode. Both the Coriolis electrode and the counterelectrode may be excited to a vibration along the third direction.

Abstract translation: 提出了具有具有主平面延伸的基板和科里奥利元件的偏航率传感器。 科里奥利元件可以沿垂直于主延伸平面的第三方向振动。 可以使用检测装置检测Coriolis元件沿着与主延伸平面平行的第一方向的科里奥利偏转。 检测装置包括连接到科里奥利元件的科里奥利电极和相应的反电极。 科里奥利电极和对电极都可以沿着第三个方向激发振动。

公开(公告)号：US08783105B2

公开(公告)日：2014-07-22

申请号：US13305292

申请日：2011-11-28

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Abstract translation: 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

公开(公告)号：US08607632B2

公开(公告)日：2013-12-17

申请号：US13057045

申请日：2009-08-03

Applicant: Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01P15/125 ,  G01P1/02 ,  G01C19/56

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235

Abstract: A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

Abstract translation: 一种微机械传感器，其具有至少一个可移动地安装的测量元件，其与至少一个固定电极相对，所述电极位于第一平面中，并且被位于第二平面中的至少一个印刷导体轨道接触。 第三平面位于第一平面和第二平面之间，第三平面包括导电材料。

公开(公告)号：US20120104978A1

公开(公告)日：2012-05-03

申请号：US13259976

申请日：2010-01-28

Applicant: Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

Inventor： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC: H02N1/00

CPC classification number: G01C19/5755

Abstract: A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

Abstract translation: 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US20110296913A1

公开(公告)日：2011-12-08

申请号：US13134024

申请日：2011-05-25

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.

Abstract translation: 横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。 联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从 科里奥利元件至少一个转子。

公开(公告)号：US20110185813A1

公开(公告)日：2011-08-04

申请号：US12987732

申请日：2011-01-10

Applicant: Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

Abstract translation: 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

公开(公告)号：US20110079080A1

公开(公告)日：2011-04-07

申请号：US12924756

申请日：2010-10-05

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.

Abstract translation: 微机械摆动速率传感器包括具有主平面延伸的基板和两个科里奥利元件。 第一科里奥利元件可以沿着平行于延伸主平面的第二方向被驱动到第一振动。 第二科里奥利元件可被驱动到与第一振动反平行的第二振动。 可以检测第一科里奥利元件的第一偏转和第二科里奥利元件的第二偏转，在每种情况下沿着平行于延伸的主平面并垂直于第二方向的第一方向。 微机械传感器还具有间接或直接耦合到第一科里奥利元件和第二科里奥利元件的摇杆元件，该摇臂元件具有基本上平行于第二方向的扭转轴。

公开(公告)号：US08875574B2

公开(公告)日：2014-11-04

申请号：US13120276

申请日：2009-08-05

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56 ,  B23P11/00

CPC classification number: G01C19/56 ,  Y10T29/49826

Abstract: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

Abstract translation: 一种用于旋转速率传感器装置的联接结构，具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架，所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件，每个角度元件具有至少一个第一分支和一个第二分支，并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置，旋转速率传感器装置，用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

公开(公告)号：US08826735B2

公开(公告)日：2014-09-09

申请号：US13259976

申请日：2010-01-28

Applicant: Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

Inventor： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

Abstract translation: 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US08453502B2

公开(公告)日：2013-06-04

申请号：US12924756

申请日：2010-10-05

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.

Abstract translation: 微机械摆动速率传感器包括具有主平面延伸的基板和两个科里奥利元件。 第一科里奥利元件可以沿着平行于延伸主平面的第二方向被驱动到第一振动。 第二科里奥利元件可被驱动到与第一振动反平行的第二振动。 可以检测第一科里奥利元件的第一偏转和第二科里奥利元件的第二偏转，在每种情况下沿着平行于延伸的主平面并垂直于第二方向的第一方向。 微机械传感器还具有间接或直接耦合到第一科里奥利元件和第二科里奥利元件的摇臂元件，该摇臂元件具有基本上平行于第二方向的扭转轴。