公开(公告)号：US09118994B2

公开(公告)日：2015-08-25

申请号：US14402163

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R25/00 ,  H04R1/08 ,  H04R19/04 ,  H04R19/00

CPC classification number: H04R1/08 ,  H04R1/005 ,  H04R1/04 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed on each of the divided regions. An isolation portion that suppresses vibration from being propagated is formed on the back plate to partition the sensing units from each other.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域上形成由振动电极板和固定电极板构成的感测单元。 在背板上形成抑制振动传播的隔离部分，以将传感单元彼此隔开。

公开(公告)号：US11994481B2

公开(公告)日：2024-05-28

申请号：US17434963

申请日：2020-03-17

Applicant: OMRON Corporation

Inventor： Susumu Kamiyama ,  Hajime Kano ,  Shinya Nakagawa ,  Hideyuki Nakao ,  Kenichi Handa ,  Takashi Kasai

IPC: G01N25/18 ,  G01N27/18

CPC classification number: G01N25/18 ,  G01N27/18

Abstract: It is possible to reduce a decrease in accuracy of measuring the concentration of a measurement target gas even in a case where, in a mixture of gases, there is a gas greatly different from another gas in a rate of change in thermal conductivity with respect to temperature. The concentration measurement device includes a sensor configured to measure the concentration of a measurement target gas in a mixture of gases on the basis of thermal conductivity of the measurement target gas, the mixture of gases including two or more components, and a heating unit configured to heat the mixture of gases so that the concentration of the measurement target gas can be uniquely determined with respect to the thermal conductivity.

公开(公告)号：US20180249257A1

公开(公告)日：2018-08-30

申请号：US15753521

申请日：2017-01-31

Applicant: OMRON Corporation

Inventor： Takashi Kasai ,  Koji Momotani ,  Mariko Terasaka

IPC: H04R19/04

Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being deformable to have a deformation converted into a change in capacitance between the vibration electrode film and the back plate, the vibration electrode film having a through-hole as a pressure relief hole, and a protrusion integral with and formed from the same member as the back plate, the protrusion being placeable in the pressure relief hole before the vibration electrode film deforms. The protrusion and the pressure relief hole have a gap therebetween defining an airflow channel as a pressure relief channel.

公开(公告)号：US20180184212A1

公开(公告)日：2018-06-28

申请号：US15901830

申请日：2018-02-21

Applicant: OMRON Corporation

Inventor： Takashi Kasai ,  Yuki Uchida

IPC: H04R19/04 ,  H01L29/84 ,  B81B3/00 ,  H04R1/22

CPC classification number: H04R19/04 ,  B81B3/00 ,  B81B2201/0257 ,  B81B2201/0264 ,  H01L29/84 ,  H04R1/222 ,  H04R19/005 ,  H04R2201/003

Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.

公开(公告)号：US09560454B2

公开(公告)日：2017-01-31

申请号：US14772084

申请日：2013-09-09

Applicant: OMRON Corporation

Inventor： Takashi Kasai

IPC: H04R25/00 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: H04R19/00 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R2410/07 ,  H01L2924/00014

Abstract: A silicon substrate has a chamber that penetrates vertically. A diaphragm is formed on the upper surface of the silicon substrate so as to cover the upper portion of the chamber. Also, a back plate is provided above the silicon substrate so as to cover the diaphragm, and a fixed electrode plate is provided on the lower surface of the back plate in opposition to the diaphragm. Multiple acoustic holes, which penetrate vertically and are for allowing the passage of acoustic vibration, are formed in the back plate (28) and the fixed electrode plate. Multiple through-holes that have a smaller opening area than the acoustic holes are formed in a large displacement region of the diaphragm.

Abstract translation: 硅衬底具有垂直穿透的室。 在硅衬底的上表面上形成隔膜以覆盖室的上部。 另外，在硅基板的上方设有背板以覆盖隔膜，并且在后板的下表面上设置有与隔膜相对的固定电极板。 在背板（28）和固定电极板上形成有多个垂直方向穿透且用于允许声音振动通过的声孔。 在隔膜的大位移区域中形成有具有比声孔小的开口面积的多个通孔。

公开(公告)号：US09380393B2

公开(公告)日：2016-06-28

申请号：US14402246

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R25/00 ,  H04R23/00 ,  H04R19/00 ,  H04R7/06 ,  G01H11/00 ,  G01R27/26 ,  H04R3/00 ,  H04R1/28 ,  H04R19/04

CPC classification number: H04R23/00 ,  G01H11/00 ,  G01R27/2605 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R1/28 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed in each of the divided regions. The plurality of sensing units output a plurality of signals having different sensitivities. At least some sensing units of the sensing units have vibration electrode plates having areas different from the areas of the vibration electrode plates in the other sensing units.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域中形成由振动电极板和固定电极板构成的感测单元。 多个感测单元输出具有不同灵敏度的多个信号。 感测单元的至少一些感测单元具有与其它感测单元中的振动电极板的区域不同的振动电极板。

公开(公告)号：US20150156576A1

公开(公告)日：2015-06-04

申请号：US14402163

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R1/08

CPC classification number: H04R1/08 ,  H04R1/005 ,  H04R1/04 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed on each of the divided regions. An isolation portion that suppresses vibration from being propagated is formed on the back plate to partition the sensing units from each other.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域上形成由振动电极板和固定电极板构成的传感单元。 在背板上形成抑制振动传播的隔离部分，以将传感单元彼此隔开。

公开(公告)号：US20150104048A1

公开(公告)日：2015-04-16

申请号：US14402246

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R23/00 ,  G01H11/00 ,  G01R27/26

CPC classification number: H04R23/00 ,  G01H11/00 ,  G01R27/2605 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R1/28 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed in each of the divided regions. The plurality of sensing units output a plurality of signals having different sensitivities. At least some sensing units of the sensing units have vibration electrode plates having areas different from the areas of the vibration electrode plates in the other sensing units.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域中形成由振动电极板和固定电极板构成的感测单元。 多个感测单元输出具有不同灵敏度的多个信号。 感测单元的至少一些感测单元具有与其它感测单元中的振动电极板的区域不同的振动电极板。

公开(公告)号：US20150078591A1

公开(公告)日：2015-03-19

申请号：US14481249

申请日：2014-09-09

Applicant: OMRON Corporation

Inventor： Takashi Kasai

IPC: H04R19/04

CPC classification number: H04R19/04 ,  H04R1/086 ,  H04R1/245 ,  H04R19/005 ,  H04R31/00

Abstract: An acoustic transducer has a vibrating film and a fixed film formed above an opening portion of a substrate, and at least a first sensing portion and a second sensing portion that detect sound waves using change in capacitance between a vibrating electrode provided in the vibrating film and a fixed electrode provided in the fixed film, convert the sound waves into electrical signals, and output the electrical signals. In the first sensing portion and the second sensing portion, the fixed film is used in common, and the vibrating electrode is divided into a first sensing region and a second sensing region that respectively correspond to the first sensing portion and the second sensing portion. In the first sensing portion, a protrusion portion that protrudes toward the vibrating electrode is provided on a region of the fixed film that opposes the first sensing region.

Abstract translation: 声换能器具有形成在基板的开口部分上方的振动膜和固定膜，至少第一感测部分和第二感测部分使用设置在振动膜中的振动电极之间的电容变化来检测声波， 设置在固定膜中的固定电极将声波转换成电信号，并输出电信号。 在第一感测部分和第二感测部分中，固定膜被共同使用，并且振动电极被分成分别对应于第一感测部分和第二感测部分的第一感测区域和第二感测区域。 在第一感测部分中，朝向振动电极突出的突出部分设置在与第一感测区域相对的固定膜的区域上。

公开(公告)号：US20150003638A1

公开(公告)日：2015-01-01

申请号：US14377707

申请日：2013-02-26

Applicant: OMRON Corporation

Inventor： Takashi Kasai

IPC: H04R1/08

CPC classification number: H04R1/08 ,  B81B7/0061 ,  B81B2201/0257 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16151 ,  H04R1/245 ,  H04R1/2807 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/401 ,  H04R2410/03 ,  H01L2924/00014

Abstract: A microphone has a package, a support base fixed to an inner surface of the package, and a plurality of acoustic sensors disposed on a surface of the support base. The package has a sound hole opened in a region in which the support base is disposed. The support base has penetration holes that include a plurality of openings opened in the surface of the support base and that have the sound hole and a cavity in each of the acoustic sensors in communication with each other. The openings of the penetration holes in the surface of the support base are spaced apart from each other, and are in communication with the cavity of each of the different acoustic sensors.

Abstract translation: 麦克风具有封装，固定到封装的内表面的支撑基座和设置在支撑基座的表面上的多个声学传感器。 该包装件在其中设置有支撑基座的区域中具有开口的声孔。 支撑基座具有贯穿孔，该贯通孔包括在支撑基座的表面上开口的多个开口，并且每个声学传感器中的声孔和空腔彼此连通。 支撑基座的表面中的穿孔的开口彼此间隔开，并且与每个不同声学传感器的空腔连通。