Polishing slurry and method of reclaiming wafers
    32.
    发明申请
    Polishing slurry and method of reclaiming wafers 失效
    抛光浆料和回收晶圆的方法

    公开(公告)号:US20060255314A1

    公开(公告)日:2006-11-16

    申请号:US11129444

    申请日:2005-05-16

    摘要: The polishing slurry contains monoclinic zirconium oxide particles having a crystallite size of 10 to 1,000 nm and an average particle diameter of 30 to 2,000 nm in an amount of 1 to 20 weight %, a carboxylic acid having three or more carboxyl groups in the molecule, and a quaternary alkylammonium hydroxide, and has a pH of 9 to 12. The method of reclaiming wafers comprises a step of polishing used test wafers by using the polishing slurry above and removing the films formed on the wafers and the degenerated layers formed on the wafer surfaces, a step of mirror-polishing at least one side of the wafers, and a step of cleaning the wafers.

    摘要翻译: 研磨浆料含有微晶尺寸为10〜1000nm,平均粒径为30〜2000nm,分子量为1〜20重量%的羧酸的单斜晶氧化锆粒子, 和季铵烷基氢氧化铵,并且具有9至12的pH值。回收晶片的方法包括通过使用上述抛光浆料抛光所用测试晶片并除去形成在晶片上的膜和形成在晶片上的退化层的步骤 表面,对晶片的至少一侧进行镜面抛光的步骤,以及清洁晶片的步骤。

    Method of blanking an element for belt for continuously variable transmission
    33.
    发明授权
    Method of blanking an element for belt for continuously variable transmission 失效
    用于无级变速器的皮带元件的冲裁方法

    公开(公告)号:US06904782B2

    公开(公告)日:2005-06-14

    申请号:US10658760

    申请日:2003-09-10

    申请人: Tetsuo Suzuki

    发明人: Tetsuo Suzuki

    IPC分类号: B21D53/14 F16G5/16 B21D28/00

    CPC分类号: B21D53/14 F16G5/16

    摘要: A body having a thin region in substantially a half lower portion and a head joined to the body by a neck. When the element is blanked out of a metal sheet, an excess amount of metal produced by pressing the substantially half lower portion of the body flows from the body into the metal sheet positioned on an opposite side of the neck and a metal flow is produced into laterally spaced ends of the neck. The head has relatively thick laterally spaced ends and the head neck and the body have respective thicknesses equal to or smaller than the thickness of the head. The laterally spaced side end regions of the body have a thickness smaller than a thickness of the lower region of the neck in the substantially half upper portion of the body.

    摘要翻译: 具有基本上半部分的薄区域的主体和通过颈部连接到身体的头部。 当元件从金属片冲裁出来时,通过按压主体的大致半部分而产生的过量的金属从身体流入位于颈部相对侧的金属片,并且金属流被产生成 颈部的横向间隔的端部。 头部具有相对较厚的侧向间隔开的端部,并且头颈部和主体具有等于或小于头部厚度的各自的厚度。 主体的横向间隔开的侧端区域的厚度小于颈部在身体的大致上半部分中的下部区域的厚度。

    Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers
    34.
    发明授权
    Specifying method for Cu contamination processes and detecting method for Cu contamination during reclamation of silicon wafers, and reclamation method of silicon wafers 失效
    硅晶片回填中Cu污染过程的指定方法和Cu污染的检测方法以及硅晶片的回收方法

    公开(公告)号:US06884634B2

    公开(公告)日:2005-04-26

    申请号:US10255668

    申请日:2002-09-27

    CPC分类号: H01L22/34

    摘要: A method of specifying a Cu-contamination-causative step or steps in a Si wafer reclamation process including plural steps in combination, comprising: using p-type Si wafers, or p-type Si wafers and n-type Si wafers as monitor wafers, and performing a measuring operation for measuring the electrical resistance of the monitor wafers at least once before and after a single step or a series of successive steps during the Si wafer reclamation process. The present invention is capable of nondestructively, simply, and accurately detecting Cu that can contaminate Si wafers during a Si wafer reclamation process and is capable of specifying a Cu-contamination-causative process.

    摘要翻译: 一种在包括多个步骤的Si晶片回收处理中指定Cu-污染致动步骤或步骤的方法,包括:使用p型Si晶片或p型Si晶片和n型Si晶片作为监测晶片, 并且在Si晶片回收处理期间,在单个步骤或一系列连续步骤之前和之后,至少进行一次测量监视晶片的电阻的测量操作。 本发明能够非破坏性,简单地且精确地检测在Si晶片回收过程中可能污染Si晶片的Cu,并且能够指定Cu-污染致病过程。

    Recycle of grinding sludge
    35.
    发明授权
    Recycle of grinding sludge 有权
    回收研磨泥浆

    公开(公告)号:US06874411B2

    公开(公告)日:2005-04-05

    申请号:US09838340

    申请日:2001-04-20

    摘要: A method of and an apparatus for compressing the grinding sludge, which is effective to compress the grinding sludge to provide an intended rigid briquette even though the grinding sludge contains ground chips of hardened iron and/or steel materials and an oil-based coolant and also to facilitate reuse of the briquette (B1) as material for production of steel. The grinding sludge containing the oil-based coolant and hardened component parts such as steel component parts that are used in bearings is compressed. To this end, the grinding sludge produced from a grinding line (1) is filtered by a filtering unit (4) to provide a concentrated sludge which is subsequently compressed by squeezing by a briquetting machine (5) to provide the briquette (B1). The briquette B1 so obtained can be reused as steel material. The coolant separated from the grinding sludge during filtering and squeezing is returned to the grinding line (1) through recovery passages (7, 8).

    摘要翻译: 一种用于压缩研磨污泥的方法和装置,其有效地压缩研磨泥浆以提供预期的刚性团块,即使研磨污泥含有硬化铁和/或钢材料的研磨碎片和油基冷却剂,以及 以便于将煤块(B1)作为生产钢材的再利用。 包含油基冷却剂的研磨污泥和用于轴承的钢组分部件等硬化部件被压缩。 为此,由研磨线(1)产生的研磨污泥由过滤单元(4)过滤以提供浓缩的污泥,随后通过压块机(5)的挤压压缩以提供压块(B1)。 如此获得的团块B1可以作为钢材重复使用。 在过滤和挤压期间从研磨污泥分离的冷却剂通过回收通道(7,8)返回到研磨生产线(1)。

    Element for belt for continuously variable transmission
    36.
    发明授权
    Element for belt for continuously variable transmission 有权
    用于连续变速传动的皮带元件

    公开(公告)号:US06645104B2

    公开(公告)日:2003-11-11

    申请号:US09864194

    申请日:2001-05-25

    申请人: Tetsuo Suzuki

    发明人: Tetsuo Suzuki

    IPC分类号: F16G122

    CPC分类号: B21D53/14 F16G5/16

    摘要: A body having a thin region in substantially a half lower portion and a head joined to the body by a neck. When the element is blanked out of a metal sheet, an excess amount of metal produced by pressing the substantially half lower portion of the body flows from the body into the metal sheet positioned on an opposite side of the neck and a metal flow is produced into laterally spaced ends of the neck. The head has relatively thick laterally spaced ends and the head and the body have respective thicknesses equal to or smaller than the thickness of the head. The laterally spaced side end regions of the body have a thickness smaller than a thickness of the lower region of the neck in the substantially half upper portion of the body.

    摘要翻译: 具有基本上半部分的薄区域的主体和通过颈部连接到身体的头部。 当元件从金属片冲裁出来时,通过按压主体的大致半部分而产生的过量的金属从身体流入位于颈部相对侧的金属片,并且金属流被产生成 颈部的横向间隔的端部。 头部具有相对较厚的侧向间隔开的端部,头部和主体具有等于或小于头部厚度的相应厚度。 主体的横向间隔开的侧端区域的厚度小于颈部在身体的大致上半部分中的下部区域的厚度。

    Method of blanking elements of belt for continuously variable transmission
    38.
    发明授权
    Method of blanking elements of belt for continuously variable transmission 失效
    用于无级变速器的皮带元件冲裁方法

    公开(公告)号:US06453716B2

    公开(公告)日:2002-09-24

    申请号:US09798898

    申请日:2001-03-06

    申请人: Tetsuo Suzuki

    发明人: Tetsuo Suzuki

    IPC分类号: B21D2806

    CPC分类号: F16G5/163 B21D53/14 F16G5/16

    摘要: Elements with heads confronting each other are blanked out of two opposite sides of an elongated metal sheet. The differences between thicknesses of the elements at a measurement point at or near necks of the elements and measurement points at ears of the elements are averaged, and a distance between corners of the metal sheet and a counter load of counter punches are established in order to keep the averages in an allowable range. When elements are blanked out of the metal sheet with the distance and the counter load thus established, even if the metal sheet is laterally displaced out of position, a belt assembly made up of the elements blanked out of the two opposite sides of the metal sheet and mixed at a ratio of about 1 to 1 poses no problems because variations in the thicknesses of the elements blanked out of one of the two opposite sides of the metal sheet and variations in the thicknesses of the elements blanked out of the other of the two opposite sides of the metal sheet cancel each other.

    摘要翻译: 具有彼此面对的头部的元件在细长的金属片的两个相对侧中被消隐。 在元件的颈部或颈部的测量点处的元件的厚度与元件的耳朵处的测量点之间的厚度之间的差异被平均,并且建立金属片的角部与反冲头的反荷载之间的距离,以便 将平均值保持在允许范围内。 当元件被从金属板上冲出出来的距离和相应的负载如此建立时,即使金属板横向偏移到位置之外,由金属板的两个相对侧的元件组成的带组件 并且以约1比1的比例混合没有问题,因为从金属片的两个相对侧之一中冲出的元件的厚度的变化和元件的厚度的变化在两个之外的另一个中消失 金属片的相对侧彼此抵消。