公开(公告)号：US20090315095A1

公开(公告)日：2009-12-24

申请号：US12456391

申请日：2009-06-16

申请人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

发明人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

IPC分类号： H01L29/788 ,  H01L21/336

CPC分类号： H01L21/82385 ,  H01L21/8221 ,  H01L21/823425 ,  H01L21/823456 ,  H01L21/823468 ,  H01L23/481 ,  H01L23/485 ,  H01L27/0688 ,  H01L27/11526 ,  H01L27/11551 ,  H01L2224/9202 ,  H01L21/76898

摘要： In multiple-layered memory devices, memory systems employing the same, and methods of forming such devices, a second memory device layer on a first memory device layer comprises a second substrate including a second memory cell region. The second substrate includes only a single well in the second memory cell region, the single well of the second memory cell region comprising a semiconducting material doped with impurity of one of a first type and second type. The single well defines an active region in the second memory cell region of the second substrate. Multiple second cell strings are arranged on the second substrate in the second active region. Although the second memory cell region includes only a single well, during a programming or erase operation of the memory cells of the second layer, requiring a high voltage to be applied to the single well in the substrate of the second layer, the high voltage will not interfere with the operation of the peripheral transistors of the first layer, second layer, or other layers, since they are isolated from each other. As a result, the substrate of the second layer can be prepared to have a thinner profile, and with fewer processing steps, resulting in devices with higher-density, greater reliability, and reduced fabrication costs.

摘要翻译： 在多层存储器件中，采用该器件的存储器系统和形成这种器件的方法在第一存储器件层上的第二存储器件层包括包括第二存储单元区域的第二衬底。 第二衬底仅包括第二存储单元区域中的单个阱，第二存储单元区域的单阱包括掺杂有第一类型和第二类型之一杂质的半导体材料。 单阱限定了第二衬底的第二存储单元区域中的有源区。 多个第二电池串被布置在第二有源区域中的第二衬底上。 虽然第二存储单元区域仅包括单个阱，但是在第二层的存储单元的编程或擦除操作期间，需要向第二层的衬底中的单个阱施加高电压，高电压将 不妨碍第一层，第二层或其它层的外围晶体管的操作，因为它们彼此隔离。 结果，第二层的基底可以被制备成具有更薄的轮廓，并且具有更少的加工步骤，导致具有更高密度，更高可靠性和降低制造成本的装置。

公开(公告)号：US20140014889A1

公开(公告)日：2014-01-16

申请号：US13938833

申请日：2013-07-10

申请人： Sunil Shim ,  Wonseok Cho ,  Woonkyung Lee

发明人： Sunil Shim ,  Wonseok Cho ,  Woonkyung Lee

IPC分类号： H01L29/78 ,  H01L45/00 ,  H01L23/538

CPC分类号： H01L27/11582 ,  H01L23/5384 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/2409 ,  H01L27/2481 ,  H01L27/249 ,  H01L29/7827 ,  H01L45/04 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L2924/0002 ,  H01L2924/00

摘要： A semiconductor device includes a plurality of first insulating layers and a plurality of second layers alternately and vertically stacked on a substrate. Each of the plurality of second layers includes a horizontal electrode horizontally separated by a second insulating layer. A contact plug penetrates the plurality of first insulating layers and the second insulating layer of the plurality of second layers.

摘要翻译： 半导体器件包括多个第一绝缘层和多个第二层，其交替地和垂直地堆叠在基板上。 多个第二层中的每一个包括由第二绝缘层水平隔开的水平电极。 接触插塞穿透多个第二绝缘层和多个第二层中的第二绝缘层。

公开(公告)号：US07936002B2

公开(公告)日：2011-05-03

申请号：US12456391

申请日：2009-06-16

申请人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

发明人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

IPC分类号： H01L29/76 ,  H01L31/036 ,  H01L31/112 ,  H01L29/94 ,  H01L31/062

CPC分类号： H01L21/82385 ,  H01L21/8221 ,  H01L21/823425 ,  H01L21/823456 ,  H01L21/823468 ,  H01L23/481 ,  H01L23/485 ,  H01L27/0688 ,  H01L27/11526 ,  H01L27/11551 ,  H01L2224/9202 ,  H01L21/76898

摘要： In multiple-layered memory devices, memory systems employing the same, and methods of forming such devices, a second memory device layer on a first memory device layer comprises a second substrate including a second memory cell region. The second substrate includes only a single well in the second memory cell region, the single well of the second memory cell region comprising a semiconducting material doped with impurity of one of a first type and second type. The single well defines an active region in the second memory cell region of the second substrate. Multiple second cell strings are arranged on the second substrate in the second active region. Although the second memory cell region includes only a single well, during a programming or erase operation of the memory cells of the second layer, requiring a high voltage to be applied to the single well in the substrate of the second layer, the high voltage will not interfere with the operation of the peripheral transistors of the first layer, second layer, or other layers, since they are isolated from each other. As a result, the substrate of the second layer can be prepared to have a thinner profile, and with fewer processing steps, resulting in devices with higher-density, greater reliability, and reduced fabrication costs.

摘要翻译： 在多层存储器件中，采用该器件的存储器系统和形成这种器件的方法在第一存储器件层上的第二存储器件层包括包括第二存储单元区域的第二衬底。 第二衬底仅包括第二存储单元区域中的单个阱，第二存储单元区域的单阱包括掺杂有第一类型和第二类型之一杂质的半导体材料。 单阱限定了第二衬底的第二存储单元区域中的有源区。 多个第二电池串被布置在第二有源区域中的第二衬底上。 虽然第二存储单元区域仅包括单个阱，但是在第二层的存储单元的编程或擦除操作期间，需要向第二层的衬底中的单个阱施加高电压，高电压将 不妨碍第一层，第二层或其它层的外围晶体管的操作，因为它们彼此隔离。 结果，第二层的基底可以被制备成具有更薄的轮廓，并且具有更少的加工步骤，导致具有更高密度，更高可靠性和降低制造成本的装置。

公开(公告)号：US20110171787A1

公开(公告)日：2011-07-14

申请号：US13069869

申请日：2011-03-23

申请人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

发明人： Jonghyuk Kim ,  Han-Soo Kim ,  YoungSeop Rah ,  Min-sung Song ,  Jang Young Chul ,  Soon-Moon Jung ,  Wonseok Cho

IPC分类号： H01L21/8246

CPC分类号： H01L21/82385 ,  H01L21/8221 ,  H01L21/823425 ,  H01L21/823456 ,  H01L21/823468 ,  H01L23/481 ,  H01L23/485 ,  H01L27/0688 ,  H01L27/11526 ,  H01L27/11551 ,  H01L2224/9202 ,  H01L21/76898

摘要： In multiple-layered memory devices, memory systems employing the same, and methods of forming such devices, a second memory device layer on a first memory device layer comprises a second substrate including a second memory cell region. The second substrate includes only a single well in the second memory cell region, the single well of the second memory cell region comprising a semiconducting material doped with impurity of one of a first type and second type. The single well defines an active region in the second memory cell region of the second substrate. Multiple second cell strings are arranged on the second substrate in the second active region. Although the second memory cell region includes only a single well, during a programming or erase operation of the memory cells of the second layer, requiring a high voltage to be applied to the single well in the substrate of the second layer, the high voltage will not interfere with the operation of the peripheral transistors of the first layer, second layer, or other layers, since they are isolated from each other. As a result, the substrate of the second layer can be prepared to have a thinner profile, and with fewer processing steps, resulting in devices with higher-density, greater reliability, and reduced fabrication costs.

摘要翻译： 在多层存储器件中，采用该器件的存储器系统和形成这种器件的方法在第一存储器件层上的第二存储器件层包括包括第二存储单元区域的第二衬底。 第二衬底仅包括第二存储单元区域中的单个阱，第二存储单元区域的单阱包括掺杂有第一类型和第二类型之一杂质的半导体材料。 单阱限定了第二衬底的第二存储单元区域中的有源区。 多个第二电池串被布置在第二有源区域中的第二衬底上。 虽然第二存储单元区域仅包括单个阱，但是在第二层的存储单元的编程或擦除操作期间，需要向第二层的衬底中的单个阱施加高电压，高电压将 不妨碍第一层，第二层或其它层的外围晶体管的操作，因为它们彼此隔离。 结果，第二层的基底可以被制备成具有更薄的轮廓，并且具有更少的加工步骤，导致具有更高密度，更高可靠性和降低制造成本的装置。