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    REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
    34.
    发明申请
    REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE 有权

    公开(公告)号：US20230101598A1

    公开(公告)日：2023-03-30

    申请号：US17491416

    申请日：2021-09-30

    Applicant: Texas Instruments Incorporated

    Inventor： Adam Joseph Fruehling

    IPC: B81B3/00 ,  H01H1/00 ,  H01G5/01 ,  G02B26/08

    Abstract: Described embodiments include a microelectromechanical system (MEMS) array comprising a first MEMS device that includes a first movable electrostatic plate elastically connected to a first structure, the first movable electrostatic plate having a first mass, a first fixed electrostatic plate, and a first drive circuit having a first drive output coupled to the first fixed electrostatic plate. There is a second MEMS device that includes a second movable electrostatic plate elastically connected to a second structure, the second movable electrostatic plate having a second mass that is different than the first mass, a second fixed electrostatic plate, and a second drive circuit having a second drive output coupled to the second fixed electrostatic plate.

    Background suppression for MM-wave spectroscopy
    36.
    发明授权
    Background suppression for MM-wave spectroscopy 有权

    公开(公告)号：US11204378B2

    公开(公告)日：2021-12-21

    申请号：US16730914

    申请日：2019-12-30

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Argyrios Dellis ,  Juan Herbsommer ,  Adam Joseph Fruehling

    IPC: G01R23/17 ,  G01V8/00 ,  G01N21/61

    Abstract: A system includes first and second gas cells, each comprising a respective sealed interior waveguide. The first gas cell contains a dipolar gas and the second gas cell does not contain a dipolar gas. The system includes first and second transmit antennas coupled to the first and second gas cells, respectively, to provide first and second electromagnetic waves to the interior of the first and second gas cells, respectively; first receive antenna coupled to the first gas cell to generate a first signal indicative of an amount of energy in the first electromagnetic wave after travel through the first gas cell; second receive antenna coupled to the second gas cell to generate a second signal indicative of an amount of energy in the second electromagnetic wave after travel through the second gas cell; processor configured to calculate a background-free signal based on a difference between the first and second signals.

    INTEGRATED COMPACT MMW SPECTROSCOPY CELL SYSTEM AND METHOD
    39.
    发明申请
    INTEGRATED COMPACT MMW SPECTROSCOPY CELL SYSTEM AND METHOD 审中-公开

    公开(公告)号：US20200209062A1

    公开(公告)日：2020-07-02

    申请号：US16234195

    申请日：2018-12-27

    Applicant: Texas Instruments Incorporated

    Inventor： Adam Joseph Fruehling ,  Juan Alejandro Herbsommer ,  Argyrios Dellis

    IPC: G01J3/42 ,  G01N21/3581

    Abstract: A compact mmW spectroscopy cell system for detecting volatile organic compounds (compounds) in a gas. The system includes a gas collection chamber, an input buffer cavity for receiving the gas from the gas collection chamber, pumping devices to pass the gas from the buffer cavity to an absorption cell and maintain pressure, and a transceiver connected to the cell. The transceiver interrogates the absorption cell filled with the gas by passing a high frequency electromagnetic signal and sweeping the signal to generate an absorption spectra which is compared to a spectroscopy database for detecting the compounds in the gas. The absorption cell, collection chambers, and pumping devices are fabricated with standard CMOS processing techniques at chip and wafer scale. The transceiver bonded to the absorption cell with chip scale integration.

    Hermetically sealed molecular spectroscopy cell
    40.
    发明授权
    Hermetically sealed molecular spectroscopy cell 有权

    公开(公告)号：US10549986B2

    公开(公告)日：2020-02-04

    申请号：US15697525

    申请日：2017-09-07

    Applicant: TEXAS INSTRUMENTS INCORPORATED

    Inventor： Juan Alejandro Herbsommer ,  Simon Joshua Jacobs ,  Benjamin Stassen Cook ,  Adam Joseph Fruehling

    IPC: B81C1/00 ,  H01L23/08 ,  H01L21/768

    Abstract: An illustrate method (and device) includes etching a cavity in a first substrate (e.g., a semiconductor wafer), forming a first metal layer on a first surface of the first substrate and in the cavity, and forming a second metal layer on a non-conductive structure (e.g., glass). The method also may include removing a portion of the second metal layer to form an iris to expose a portion of the non-conductive structure, forming a bond between the first metal layer and the second metal layer to thereby attach the non-conductive structure to the first substrate, sealing an interface between the non-conductive structure and the first substrate, and patterning an antenna on a surface of the non-conductive structure.

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