公开(公告)号：US07246796B2

公开(公告)日：2007-07-24

申请号：US10466528

申请日：2002-01-18

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa

IPC分类号： B01F3/04

CPC分类号： H01L27/11502 ,  B01B1/005 ,  B01D3/346 ,  B01F3/04021 ,  B01F5/0646 ,  B01F5/0653 ,  B01F5/0656 ,  B01F5/0671 ,  B01F5/0676 ,  C23C16/40 ,  C23C16/409 ,  C23C16/4486 ,  H01L21/31691 ,  H01L27/11507 ,  H01L28/55 ,  Y10S261/65

摘要： A vaporizer which can be used for extended time without blockage, and possible to stably supply raw materials to a reaction part. A gas passage 2 is formed inside of main body of a dispersion part 1, a gas inlet opening 4 is utilized to introduce a pressurized carrier gas 3 into gas passage 2, a supply source 6 is utilized to supply raw material solution 5 to a carrier gas passing through gas passage 2. A vaporization pipe 20 is connected with a reaction part and gas outlet 7 of dispersion part 8 of the device, with a heater 21 to heat vaporization pipe 20, while a vaporization part 22 is utilized to heat and vaporize the carrier gas where a raw material solution is dispersed.

摘要翻译： 一种蒸发器，可以延长使用时间而不堵塞，并且可以稳定地将原料供应到反应部件。 在分散部1的主体内部形成有气体通路2，利用气体导入口4将加压载气3引入气体通路2，供给源6将原料溶液5供给到载体 气体通过气体通道2。 蒸发管20与装置的分散部8的反应部和气体出口7连接，加热器21加热蒸发管20，同时使用蒸发部22来加热和蒸发载气，原料 溶液分散。

公开(公告)号：US20050124176A1

公开(公告)日：2005-06-09

申请号：US10484371

申请日：2002-07-17

申请人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

发明人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

IPC分类号： H01L21/331 ,  H01L21/335 ,  H01L21/337 ,  H01L29/20 ,  H01L29/737 ,  H01L29/778 ,  H01L23/58 ,  H01L21/26 ,  H01L21/324 ,  H01L21/42 ,  H01L21/477

CPC分类号： H01L29/66924 ,  H01L29/2003 ,  H01L29/66318 ,  H01L29/66462 ,  H01L29/7371 ,  H01L29/7787

摘要： A semiconductor surface treatment and a film deposition method capable of realizing surface protection and surface inactivation using a boron nitride film is provided. A high-performance semiconductor device can be manufactured by using the same surface protection technology and surface inactivation technology. Additionally, a electronic device for a communication system or a high-performance information processing device may incorporate such a semiconductor device.

摘要翻译： 提供了能够使用氮化硼膜实现表面保护和表面失活的半导体表面处理和膜沉积方法。 可以通过使用相同的表面保护技术和表面灭活技术来制造高性能半导体器件。 此外，用于通信系统的电子设备或高性能信息处理设备可以并入这样的半导体器件。

公开(公告)号：US20050064724A1

公开(公告)日：2005-03-24

申请号：US10489126

申请日：2002-09-10

申请人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

发明人： Takashi Sugino ,  Masaki Kusuhara ,  Masaru Umeda

IPC分类号： C23C16/30 ,  C23C16/36 ,  H01L21/318 ,  H01L21/768 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/02112 ,  C23C16/30 ,  C23C16/36 ,  H01L21/02345 ,  H01L21/02348 ,  H01L21/318 ,  H01L21/76801 ,  H01L21/76828 ,  H01L21/76829 ,  H01L21/76835

摘要： A film formation method enables the creation of a low dielectric constant boron-carbon-nitrogen thin film. The film formation method includes the steps of generating plasma in a film formation chamber, reacting boron and carbon with nitrogen atoms inside the film formation chamber, forming a boron-carbon-nitrogen film on a substrate, and thereafter subjecting the formed film to light exposure (e.g., ultraviolet and/or infrared).

摘要翻译： 成膜方法能够形成低介电常数的硼 - 碳 - 氮的薄膜。 成膜方法包括以下步骤：在成膜室中产生等离子体，使硼和碳与成膜室内的氮原子反应，在基板上形成硼 - 碳 - 氮膜，然后对所形成的膜进行曝光 （例如，紫外线和/或红外线）。

公开(公告)号：US06447217B1

公开(公告)日：2002-09-10

申请号：US09720764

申请日：2001-03-26

申请人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

发明人： Masayuki Toda ,  Masaki Kusuhara ,  Masaru Umeda ,  Michio Yagai

IPC分类号： B65G5316

CPC分类号： H01L21/6835 ,  G03F7/7075 ,  H01L21/67778 ,  H01L21/67784 ,  H01L21/6838 ,  Y10S414/138

摘要： A substrate body transfer apparatus, and an operating method therefor, capable of inserting and extracting substrate body into and from a cassette using air conveyance without employing a transfer mechanism such as those in which direct contact is made with the substrate body when inserting or extracting a thin plate-shaped substrate body into or from a cassette. The substrate body transfer apparatus is employed when thin plate-shaped substrate body are extracted from or inserted into cassettes which store the substrate body. The substrate body transfer apparatus includes an air conveyance hand which is provided with a plurality of gas nozzles at the conveyance surface which opposes the rear surface of the substrate body and which has the function of conducting the flotation or grounding of the substrate body, the catching or launch of the substrate body, or the centering of the substrate body; and a cassette platform which has a unitary structure comprising a cassette platform seat on which the cassette is placed and which is provided with a mechanism for horizontally advancing and retracting the cassette with respect to the air conveyance hand, and a mechanism for raising and lowering the cassette platform seat at a predetermined pitch.

摘要翻译： 一种基板体转印装置及其操作方法，其能够使用空气输送将基板本体插入和取出，而不使用转印机构，例如当插入或提取基板主体时与基板主体直接接触 薄板状基板体进入或从盒中取出。 当薄板状基板主体从存储基板主体的盒中提取或插入到盒中时，采用基板主体传送装置。 基板主体传送装置包括：空气传送手，其在与基板主体的后表面相对的传送表面处设置有多个气体喷嘴，并具有进行基板主体的浮选或接地的功能， 或基板主体的发射，或基板主体的定心; 以及具有整体结构的盒式平台，其包括盒放置座的盒平台座，并且设置有用于使盒相对于空气传送手水平地前进和后退的机构，以及用于升高和降低 盒式平台座以预定间距。

公开(公告)号：US5249371A

公开(公告)日：1993-10-05

申请号：US779026

申请日：1991-10-18

申请人： Yoshio Saito ,  Masaru Umeda ,  Kohei Ninomiya ,  Masao Kikuchi

发明人： Yoshio Saito ,  Masaru Umeda ,  Kohei Ninomiya ,  Masao Kikuchi

IPC分类号： H01L21/304 ,  F26B21/14 ,  F26B21/06

CPC分类号： F26B21/145

摘要： A purpose of this invention is to provide a vapor drier which can continue a process to dry efficiently objects in an extremely clean condition for a long time. A vapor drier of this invention comprises a circulating/dehydrating/refining means for refining said volatile processing liquid stored in said processing room and circulating refined fluid into said processing room, said circulating/dehydrating/refining means having at least an evaporating section to evaporate said volatile processing liquid stored in said processing room, a dehydrating section to remove water from said vapor generated in said evaporating section with a dehydrating/separating membrane, and a distilling section to distill said dehydrated vapor.

摘要翻译： 本发明的目的是提供一种蒸汽干燥器，其可以持续长时间在极其干燥的条件下有效地干燥物体的方法。 本发明的蒸汽干燥机包括循环/脱水/精制装置，用于将存储在所述处理室中的所述挥发性处理液进行精炼并将精制流体循环到所述处理室中，所述循环/脱水/精制装置至少具有蒸发部分以蒸发所述 存储在所述处理室中的挥发性处理液，脱水部，用脱水分离膜从所述蒸发部中产生的蒸气中除去水，蒸馏部，蒸馏所述脱水蒸气。

公开(公告)号：US09885113B2

公开(公告)日：2018-02-06

申请号：US14001910

申请日：2012-02-27

申请人： Masaru Umeda ,  Masayuki Toda

发明人： Masaru Umeda ,  Masayuki Toda

IPC分类号： C23C16/448

CPC分类号： C23C16/4481

摘要： To obtain a vaporizer in which thin film-forming raw material solutions are stably and reliably carried by a carrier gas while being reliably separated within the dispersion unit body and the plurality of thin film-forming raw material solutions are stably vaporized in the subsequent vaporization unit, a center rod used in the vaporizer, and a method for vaporizing raw materials entrained by a carrier gas. A carrier gas introduction bore is formed in the center axis direction of the dispersion unit body. A center rod is inserted in the carrier gas introduction bore. The interspace between the inner wall of the bore and the outer wall of the rod forms a gas passage. Multiple thin film-forming material supply units are situated midway of the gas passage of the dispersion unit body, supplying thin film-forming materials. The center rod has sealing members in the longitudinal direction of the center rod.

公开(公告)号：US20130291797A1

公开(公告)日：2013-11-07

申请号：US13991756

申请日：2011-12-21

申请人： Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Masayuki Toda

发明人： Masaki Kusuhara ,  Masaru Umeda ,  Mitsuru Fukagawa ,  Masayuki Toda

IPC分类号： C23C16/448

CPC分类号： C23C16/4481 ,  B01D1/00

摘要： Provided is a vaporizer that can reduce ripples, particles, and a carbon content of a film and can supply a raw material capable of forming a film having a desired composition. Moreover, a vaporizer is obtained that sufficient vaporization can be performed without heating more than necessary and temperature management can be facilitated. A vaporizer includes a vaporizer main body (3) into which a carrier gas having a film forming liquid material dispersed is introduced and a heater main body (4) disposed in the vaporizer main body (3). The shape of the inlet portion of the heater main body is in a cone.

摘要翻译： 提供一种蒸发器，其可以减少膜的波纹，颗粒和碳含量，并且可以提供能够形成具有期望组成的膜的原料。 此外，获得能够在不需要加热的情况下进行充分蒸发的蒸发器，并且可以促进温度管理。 蒸发器包括：蒸发器主体（3），引入分散有成膜液体材料的载气和设置在蒸发器主体（3）中的加热器主体（4）。 加热器主体的入口部分的形状为锥形。

公开(公告)号：US07704019B2

公开(公告)日：2010-04-27

申请号：US11630437

申请日：2005-06-22

申请人： Masayuki Toda ,  Masaru Umeda

发明人： Masayuki Toda ,  Masaru Umeda

IPC分类号： B65G53/00

CPC分类号： B65G51/03 ,  B65G47/24 ,  H01L21/67784

摘要： A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.

摘要翻译： 一种悬挂运输装置，其能够在被输送物体从输送路径的中心位移时进行调节; A，具有形成用于被输送物体的输送路径的输送路径的悬浮输送装置，多个用于输送物体的喷射喷嘴 沿着输送路径以悬浮方式，一个或多个检测部分，用于检测运输路径中运输物体的运输方向;以及控制部分，用于根据检测结果检测多个喷嘴 部分。

公开(公告)号：US20060037539A1

公开(公告)日：2006-02-23

申请号：US10515888

申请日：2003-05-29

申请人： Masayuki Toda ,  Masaru Umeda

发明人： Masayuki Toda ,  Masaru Umeda

IPC分类号： C23C16/00

CPC分类号： C23C16/40 ,  C23C16/4481 ,  C23C16/4486 ,  H01L21/6708

摘要： A vaporizer that does not cause clogging or other failure, permits long-term use and enables stable supply of raw materials to a reaction section. In particular, a vaporizer which not only enables continuous and stable supply of raw materials adjusted to stoichiometric ratios but also exerts an effect of reducing the amount of carbon residue in a formed film; and a relevant disperser, film formation unit, method of vaporization, method of dispersion and method of film formation. The vaporizer may be one comprising vaporizing a raw material solution contained in a carrier gas characterized in that elements for causing the carrier gas before containing the raw material solution to contain the solvent of the raw material solution is disposed therein.

摘要翻译： 不引起堵塞或其他故障的蒸发器，可长期使用，能够稳定地供应原料至反应段。 特别是一种蒸发器，其不仅能够连续稳定地供给调整为化学计量比的原料，而且还发挥降低成膜的碳残留量的效果; 和相关的分散器，成膜单元，蒸发方法，分散方法和成膜方法。 蒸发器可以是包含汽化载气中所含的原料溶液的蒸发器，其特征在于，在将含有原料溶液的原料溶液含有原料溶液的溶剂之前使载体气体引入的元件设置在其中。

公开(公告)号：US06398464B1

公开(公告)日：2002-06-04

申请号：US09799229

申请日：2001-03-05

申请人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

发明人： Michio Yagai ,  Masayuki Toda ,  Masaru Umeda

IPC分类号： B65G5100

CPC分类号： B65G51/03

摘要： An air stream transfer apparatus capable of preventing particles in a transfer passage from adhering to an object to be processed and removing the particles. The apparatus includes that of a transfer face and a transfer passage partition both constituting a transfer passage, which are made of an electroconductive material and each have a thin insulating layer on the surface. A planer dust collecting electrode is opposed to an object to be processed and mechanism is provided for bringing the dust collecting electrode and the face to be cleared of dust close to each other while jetting air. A mechanism is provided for applying voltages between the transfer face and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode and between the transfer passage partition and the dust collecting electrode. Another apparatus is characterized in that a transfer face and a transfer passage partition both constituting a transfer passage are made of an electroconductive material and each has a thin insulating layer on the surface. A mechanism for transferring a pre-charged semiconductive plate-shaped body along the transfer passage is provided, and the semiconductive plate-shaped body used as a dust collecting electrode.

摘要翻译： 一种气流传送装置，其能够防止传送通道中的颗粒粘附到待处理物体并除去颗粒。 该装置包括由导电材料制成并且每个在表面上具有薄绝缘层的构成传送通道的传送面和传送通道隔板。 平板式集尘电极与待处理物体相对，并且设置有用于使灰尘收集电极和面部被灰尘彼此靠近而排出的机构，同时喷射空气。 提供了一种用于在转印面和集尘电极之间以及传送通道隔板与集尘电极之间以及传送通道隔板与集尘电极之间施加电压的机构。 另一种装置的特征在于，构成传送通道的传送面和传送通道隔板由导电材料制成，并且在表面上各具有薄的绝缘层。 提供了一种用于沿着传送通道传送预充电的半导体板状体的机构，并且用作集尘电极的半导体板状体。