摘要:
An ozone generating apparatus having high reliability in which a glass tube can prevent from being damaged by melting a power feeding brush even if a large amount of short-circuit current flows. In an ozone generating apparatus using silent discharge, an alternating high voltage power is supplied from a power supply to a metal film formed in an inner wall of a glass tube by a power feeding brush comprising a brush shaft made of metal and a large number of metal thin wires fixed to the periphery of the brush shaft, the following equation satisfies. (D2/D1)≧1/{1+(1/20β)}, wherein ‘D1’ indicates an outer diameter of a bundle of metal thin wires, ‘D2’ indicates an outer diameter of the brush shaft and ‘β’ indicates the line density of metal thin wires on a surface of the brush shaft.
摘要:
An ozone generating apparatus in which the temperature distribution in a dielectric tube can be more uniform so as to increase the discharge power density, the size of apparatus can be miniaturized or the capacity can be increased. An ozone generating apparatus comprising a sealed vessel, two tube sheets made of conductive metal plate having a hole formed therein which are provided at a predetermined interval to divide the inside of the sealed vessel into three spaces; a metal tube formed so as to connect holes of the two tube sheets, a dielectric tube which is inserted into the inner part of a dielectric tube so as to have a predetermined gap between an outer wall and an inner wall of a metal tube and a metal electrode formed inside the dielectric tube, wherein an alternating current voltage is applied between the metal tube and the metal electrode, a material gas including oxygen flowing in a gap is discharged so as to generate ozone, and a discharge suppressing member is provided at a part of gap facing a tube sheet.
摘要:
It is intended to provide a volatile organic compound treatment apparatus having: an absorption treatment chamber in which absorption frames having absorbents for absorbing volatile organic compounds are aligned in a direction of a gas flow; an absorbent recovery treatment chamber that is provided with a discharge unit having a high voltage electrode, a ground electrode, and a dielectric; and a transfer mechanism for transferring the absorption frames present in an upstream of the gas flow to the absorbent recovery treatment chamber and transferring the absorption frames in the absorbent recovery treatment chamber to a downstream of the gas flow. The volatile organic compound treatment apparatus is capable of decomposing VOC without generating a large amount of harmful NOx and reduced in apparatus cost.
摘要:
A volatile organic compound treatment apparatus including an adsorber coming into contact with a gas to be treated and adsorbing volatile organic compounds; a plurality of pairs of electrodes, divided into a plurality of groups, which generate electric discharge so that a part of the adsorber is exposed to the electric discharge; and an electric discharge control mechanism for controlling whether or not the electric discharge is generated in what pair of the electrodes by applying a voltage to every group of the pair of electrodes such that different parts of the adsorber are sequentially exposed to the electric discharge.
摘要:
A pulsed transversely excited gas laser device includes a pair of main electrodes having main surfaces opposing each other across a main discharge gap and extending along the optical axis of the laser. A corona discharge preionizer for radiating ultraviolet radiation is substantially accommodated within a recess formed on the main surface of one of the main electrodes at an upstream side of the foot of the main discharge 3. The corona discharge preionizer is separated from the inner wall and bottom surface of the recess except at a surface portion thereof which is in contact with a projection extending sideways from a side wall of the recess next to the main discharge. The corona discharge generated over the preionizer radiates ultraviolet radiation to preionize the laser gas.
摘要:
By dissipating a reverse voltage energy occurring on the pulse generation capacitor (4) of a pulse laser apparatus through the diode (11) connected in parallel with this pulse generation capacitor (4), arc or streamer becomes not occurring, and hence the lifetime of the main discharge electrodes become long and a high-repetition rate oscillation becomes possible.
摘要:
A pulsed laser according to the present invention comprises a charge terminal, mutually-opposing first and second main discharge electrodes, a pulse generation capacitor connected between the first main electrode and the charge terminal, a plurality of peaking capacitors connected in parallel between the first and second main discharge electrodes, and a plurality of diodes connected in parallel with the plurality of peaking capacitors and oriented to suppress reverse-bias components of main discharge current flowing between the first and second main discharge electrodes. Thereby, reverse current flowing between the first and second main discharge electrodes can be minimized without sacrificing laser oscillation efficiency.
摘要:
A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.
摘要:
At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.
摘要:
A discharge exciting pulse laser device such as an exima laser device. The laser device is capable of accelerating the timing of rise of the voltage between an auxiliary electrode and one of main electrodes without decreasing a discharge start voltage between the main electrodes, so that the laser output power is increased and the laser oscillation efficiency is improved.