摘要:
A microswitch is provided with a movable electrode contact component including a bending displacement component having a cantilever shape, a piezoelectric/electrostrictive element having a piezoelectric/electrostrictor and a voltage application electrode layers, and a substrate joined to a support portion of the movable electrode contact component and having a fixed electrode disposed on the surface thereof, wherein the piezoelectric/electrostrictive element is driven to displace the movable electrode, so that the movable electrode and the fixed electrode can be brought into a state of being electrically connected to each other or disconnected from each other. At least a thin plate of the bending displacement component is made of a ceramic material, and the thin plate, the piezoelectric/electrostrictor, and the voltage application electrode layers are integrated by firing. The microswitch can efficiently switch high-frequency signals at low power consumption and has excellent responsiveness, excellent durability, and high reliability of long term driving.
摘要:
A first electrode and a second electrode are provided in separation on a main surface of a substrate made of a ferroelectric single crystal. A first voltage is applied between the first electrode and the second electrode, for example, on condition that the first electrode is positive and the second electrode is negative, to generate and grow a first polarization-inverted portion toward the second electrode from the first electrode. Then, the distance between the first electrode and the second electrode is changed, and a second voltage is applied between the first electrode and the second electrode on the same condition, to generate and grow a second polarization-inverted portion, in a different area from that of the polarization-inverted portion, toward the second electrode from the first electrode.
摘要:
A method of processing a substrate made of a ferroelectric single crystalline material, including the steps of forming a desired proton-exchanged layer in the substrate by proton-exchanging a portion of the substrate, and selectively removing the proton-exchanged layer to form a concave ditch structure in the ferroelectric single crystalline substrate, wherein the desired proton-exchange layer is formed by using an acid containing a lithium salt as a proton-exchanging source, the surface of the substrate from which the concave ditch structure is formed is an X-cut surface or a Z-cut surface, as a main surface, of the ferroelectric single crystalline material used as the substrate, and the concave ditch structure has a recessed portion with its depth equal to or larger than its half opening width.
摘要:
A process for producing an optical waveguide element by thermally diffusing a metal element or a metallic compound into a substrate having a photoelectric effect, includes the steps of: forming a waveguide pattern on the substrate, the waveguide pattern includes a metal element or metallic compound; forming a film on a main plane of the substrate that covers the entire waveguide pattern, the film having an electro-optic effect; and effecting the thermal diffusion of the metallic element or the metallic compound.
摘要:
A process for producing an optical waveguide substrate including a ridge-shaped structural portion containing at least an optical waveguide, which process including the steps of forming an optical waveguide-forming layer on a substrate body to prepare a substrate workpiece, and forming said ridge-shaped structural portion at said substrate workpiece by grinding.
摘要:
In producing an optical single crystal epitaxial film from a melt containing a transition metal on a single crystal substrate by a liquid phase epitaxial method, this process contains the steps of: annealing the film at a predetermined temperature in an ozonic atmosphere; and temperature-increasing and -decreasing to and from the predetermined temperature, wherein at least one of temperature-increasing and -decreasing steps, the film is exposed to a substantially ozone-free atmosphere.
摘要:
Optoelectric article includes a substrate made of an optoelectric single crystal and a film of a single crystal of lithium niobate formed on the substrate by a liquid phase epitaxial process, wherein a ratio of lithium/niobium of a composition of the film of the lithium niobate single crystal falls in a range of 48.6/51.4 to 49.5 to 50.5 or 50.5/49.5 to 52.3/47.7.
摘要:
A process for producing an optical waveguide device including a substrate and a ridge-shaped optical waveguide projected at a main plane of the substrate, comprising the steps of: forming said ridge shaped optical waveguide at the main plane of the substrate by abrasion working.
摘要:
According to the invention, a film of optoelectric single crystal may be formed on a substrate made of optoelectric single crystal by a liquid phase epitaxial process. The process comprises the steps of producing a melt of a solute and a melting medium, a solid phase and a liquid phase coexisting in the melt; then cooling the liquid phase for producing super cooling state in the liquid phase; and contacting the substrate to the liquid phase to form the film on the substrate by an epitaxial growing process. The film may be produced on the substrate, the film having a half value width of an X-ray rocking curve not more than that of the substrate.