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公开(公告)号:US11152484B2
公开(公告)日:2021-10-19
申请号:US16808180
申请日:2020-03-03
Applicant: United Microelectronics Corp.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang
IPC: H01L29/66 , H01L21/768 , H01L27/12 , H01L29/06
Abstract: A semiconductor structure including a substrate, a CMOS device and a BJT is provided. The substrate has a first side and a second side opposite to each other. The CMOS device includes an NMOS transistor and a PMOS transistor. The NMOS transistor includes a first N-type doped region and a second N-type doped region disposed in the substrate. The PMOS transistor includes a first P-type doped region and a second P-type doped region disposed in the substrate. The BJT includes a collector, a base and an emitter. The base is disposed on the first side of the substrate. The emitter is disposed on the base. A first metal silicide layer, a second metal silicide layer, and a third metal silicide layer are respectively located on the second side of the substrate and respectively disposed on the collector, the first N-type doped region, and the first P-type doped region.
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公开(公告)号:US11114562B2
公开(公告)日:2021-09-07
申请号:US15892373
申请日:2018-02-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Chia-Huei Lin , Kuo-Yuh Yang
IPC: H01L29/78 , H01L29/786 , H01L29/10 , H01L29/06 , H01L29/423 , H01L29/66 , H01L21/285 , H01L21/266
Abstract: A semiconductor device includes: a first gate structure on a substrate; a first drain region having a first conductive type adjacent to one side of the first gate structure; a source region having the first conductive type adjacent to another side of the first gate structure; and a first body implant region having a second conductive type under part of the first gate structure.
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公开(公告)号:US11101165B2
公开(公告)日:2021-08-24
申请号:US16561026
申请日:2019-09-05
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Chia-Huei Lin , Kuo-Yuh Yang
IPC: H01L21/762 , H01L21/761 , H01L21/311 , H01L21/763 , H01L21/764 , H01L29/06 , H01L21/8234 , H01L29/66 , H01L27/088 , H01L29/10
Abstract: A method for fabricating semiconductor device comprising the steps of: forming a first trench and a second trench in a substrate; forming a liner in the first trench and the second trench; forming a first patterned mask on the substrate to cover the second trench; removing the liner in the first trench; removing the first patterned mask; and forming an insulating layer in the first trench and the second trench to form a trap rich isolation structure in the first trench and a deep trench isolation structure in the second trench.
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公开(公告)号:US20210043533A1
公开(公告)日:2021-02-11
申请号:US17080855
申请日:2020-10-27
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang , Chia-Huei Lin
IPC: H01L23/367 , H01L21/48
Abstract: A high resistivity wafer with a heat dissipation structure includes a high resistivity wafer and a metal structure. The high resistivity wafer includes a heat dissipation region and a device support region. The high resistivity wafer consists of an insulating material. The metal structure is only embedded within the heat dissipation region of the high resistivity wafer. The metal structure surrounds the device support region.
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公开(公告)号:US10903314B2
公开(公告)日:2021-01-26
申请号:US16017840
申请日:2018-06-25
Applicant: United Microelectronics Corp.
Inventor: Wen-Shen Li , Ching-Yang Wen , Purakh Raj Verma , Xingxing Chen , Chee-Hau Ng
IPC: H01L29/06 , H01L23/528 , H01L23/522 , H01L21/311 , H01L21/768 , H01L21/306 , H01L21/285
Abstract: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an insulating layer, a semiconductor layer, a plurality of isolation structures, a transistor, a first contact, a plurality of silicide layers, and a protective layer. The semiconductor layer is disposed on a front side of the insulating layer. The plurality of isolation structures are disposed in the semiconductor layer. The transistor is disposed on the semiconductor layer. The first contact is disposed beside the transistor and passes through one of the plurality of isolation structures and the insulating layer therebelow. The plurality of silicide layers are respectively disposed on a bottom surface of the first contact and disposed on a source, a drain, and a gate of the transistor. The protective layer is disposed between the first contact and the insulating layer.
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公开(公告)号:US10600734B2
公开(公告)日:2020-03-24
申请号:US15893676
申请日:2018-02-11
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Chia-Huei Lin , Kuo-Yuh Yang
IPC: H01L23/528 , H01L29/08 , H01L29/78 , H01L27/12 , H01L29/423 , H01L29/45 , H01L21/768 , H03F3/16 , H01L21/321 , H01L21/84
Abstract: A semiconductor device on silicon-on-insulator (SOI) substrate includes: a first gate line and a second gate line extending along a first direction, a third gate extending along a second direction and between the first gate line and the second gate line, and a drain region adjacent to one side of the third gate line. Preferably, the third gate line includes a first protrusion overlapping the drain region.
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公开(公告)号:US20190252253A1
公开(公告)日:2019-08-15
申请号:US15928105
申请日:2018-03-22
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Su Xing , Ching-Yang Wen
IPC: H01L21/768 , H01L27/12 , H01L23/48 , H01L29/786 , H01L29/417 , H01L23/522 , H01L23/528
Abstract: A semiconductor device includes a buried insulation layer, a semiconductor layer, a gate structure, a source doped region, and a drain doped region. The semiconductor layer is disposed on the buried insulation layer. The gate structure is disposed on the semiconductor layer. The semiconductor layer includes a body region disposed between the gate structure and the buried insulation layer. The source doped region and the drain doped region are disposed in the semiconductor layer. A first contact structure penetrates the buried insulation layer and contacts the body region. A second contact structure penetrates the buried insulation layer and is electrically connected with the source doped region. At least a part of the first contact structure overlaps the body region in a thickness direction of the buried insulation layer. The body region is electrically connected with the source doped region via the first contact structure and the second contact structure.
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公开(公告)号:US20190221517A1
公开(公告)日:2019-07-18
申请号:US15893676
申请日:2018-02-11
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Chia-Huei Lin , Kuo-Yuh Yang
IPC: H01L23/528 , H01L29/08 , H01L27/12 , H01L29/78
Abstract: A semiconductor device on silicon-on-insulator (SOI) substrate includes: a first gate line and a second gate line extending along a first direction, a third gate extending along a second direction and between the first gate line and the second gate line, and a drain region adjacent to one side of the third gate line. Preferably, the third gate line includes a first protrusion overlapping the drain region.
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公开(公告)号:US12249545B2
公开(公告)日:2025-03-11
申请号:US17407157
申请日:2021-08-19
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang , Chia-Huei Lin , Chu-Chun Chang
Abstract: An integrated circuit device includes a substrate; an integrated circuit area disposed on the substrate and comprising a dielectric stack; a seal ring disposed in the dielectric stack and around a periphery of the integrated circuit area; a cap layer on the dielectric stack; a trench around the seal ring and exposing a sidewall of the dielectric stack; a memory storage structure disposed on the cap layer; and a moisture blocking layer continuously covering the integrated circuit area and the memory storage structure. The moisture blocking layer extends to the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack.
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公开(公告)号:US12087712B2
公开(公告)日:2024-09-10
申请号:US18123317
申请日:2023-03-19
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Purakh Raj Verma , Kuo-Yuh Yang , Chia-Huei Lin , Chu-Chun Chang
IPC: H01L23/66 , H01L21/56 , H01L21/71 , H01L23/00 , H01L23/522 , H01L23/532 , H01L23/58
CPC classification number: H01L23/66 , H01L21/56 , H01L21/71 , H01L23/5223 , H01L23/5226 , H01L23/53228 , H01L23/564 , H01L23/585 , H01L24/05 , H01L2223/6661 , H01L2224/05624
Abstract: A method for fabricating an integrated circuit device is disclosed. A substrate is provided and an integrated circuit area is formed on the substrate. The integrated circuit area includes a dielectric stack. A seal ring is formed in the dielectric stack and around a periphery of the integrated circuit area. A trench is formed around the seal ring and exposing a sidewall of the dielectric stack. The trench is formed within a scribe line. A moisture blocking layer is formed on the sidewall of the dielectric stack, thereby sealing a boundary between two adjacent dielectric films in the dielectric stack.
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