公开(公告)号：US20090288772A1

公开(公告)日：2009-11-26

申请号：US12511785

申请日：2009-07-29

Applicant: William M. Holber ,  John A. Smith ,  Xing Chen ,  Donald K. Smith

Inventor： William M. Holber ,  John A. Smith ,  Xing Chen ,  Donald K. Smith

IPC: C23C16/54

CPC classification number: H01J37/32174 ,  H01J37/321 ,  H05H1/46 ,  H05H2001/4667

Abstract: A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Abstract translation: 用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。 将金属轴承气体引入到等离子体室中以与环形等离子体反应。 环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。

公开(公告)号：US07569790B2

公开(公告)日：2009-08-04

申请号：US11269917

申请日：2005-11-08

Applicant: William M. Holber ,  John A. Smith ,  Xing Chen ,  Donald K. Smith

Inventor： William M. Holber ,  John A. Smith ,  Xing Chen ,  Donald K. Smith

IPC: B23K10/00

CPC classification number: H01J37/32174 ,  H01J37/321 ,  H05H1/46 ,  H05H2001/4667

Abstract: A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

Abstract translation: 用于处理金属轴承气体的方法和装置涉及在等离子体室中产生环形等离子体。 将金属轴承气体引入到等离子体室中以与环形等离子体反应。 环形等离子体和金属承载气体之间的相互作用产生金属材料，金属氧化物材料或金属氮化物材料中的至少一种。

公开(公告)号：US20080282621A1

公开(公告)日：2008-11-20

申请号：US11749794

申请日：2007-05-17

Applicant: Xing Chen

Inventor： Xing Chen

IPC: E04H1/00

CPC classification number: A63B9/00 ,  A63B2009/006 ,  A63F9/0078 ,  A63F2250/21 ,  A63J11/00

Abstract: Disclosed is a multi-modular maze device comprising a plurality of maze modules interconnected using a plurality of adaptors to configure a plurality of interconnected pathways. The maze modules and the adaptors are removably engaged to each other using hook and loop fastening arrangements. The maze device is capable of being removably installed on a supporting surface (for example, floor), either outdoor or indoor.

Abstract translation: 公开了一种多模块迷宫设备，其包括使用多个适配器互连的多个迷宫模块，以配置多个互连路径。 迷宫模块和适配器使用钩环紧固装置可拆卸地彼此接合。 迷宫装置能够可拆卸地安装在室外或室内的支撑表面（例如，地板）上。

公开(公告)号：US07388868B2

公开(公告)日：2008-06-17

申请号：US10321230

申请日：2002-12-17

Applicant: Peter O'Connell ,  John Abraira ,  Gary Hanson ,  Xing Chen ,  Babu Mani

Inventor： Peter O'Connell ,  John Abraira ,  Gary Hanson ,  Xing Chen ,  Babu Mani

IPC: H04L12/28 ,  H04L12/56

CPC classification number: H04Q3/66 ,  H04M3/08 ,  H04M2242/04 ,  H04Q2213/13166 ,  H04Q2213/13196 ,  H04Q2213/1325 ,  H04Q2213/13298 ,  H04Q2213/1337 ,  H04Q2213/13389

Abstract: Emergency call-routing apparatus, and an associated method, for use in a packet-based, telephonic network. An emergency call router is positioned selectably to provide local call handling functionality to a local network that is normally connected by way of an access gateway to the telephonic network whose operation is normally controlled by a softswitch. The apparatus is used when, e.g., a total communication link failure condition occurs between the access gateway and the softswitch. The emergency call router selectably routes calls within the local network to permit continued, local calling functionality in spite of the failure of the communication link. High-priority calls, such as calls placed to an emergency dispatch center, are routed within the local network to a designated, local-network station. And local calls are also selectably routed by the emergency call router. A call priority scheme is also used in the event that call capacity is exceeded. Calls of higher priority are permitted while calls of lower priority are blocked.

Abstract translation: 紧急呼叫路由设备和相关方法，用于基于分组的电话网络。 紧急呼叫路由器被可选择地定位，以向本地网络提供本地呼叫处理功能，该本地网络通常通过通过软件交换机操作的电话网络的接入网关连接。 当在接入网关和软交换机之间出现例如总的通信链路故障状况时，使用该装置。 紧急呼叫路由器可选地路由本地网络内的呼叫以允许继续的本地呼叫功能，尽管通信链路发生故障。 高优先级呼叫，例如拨到紧急调度中心的呼叫，在本地网络内路由到指定的本地网络站。 本地呼叫也可以由紧急呼叫路由器选择路由。 在超过呼叫容量的情况下，还会使用呼叫优先权方案。 较低优先级的呼叫被阻止时允许较高优先级的呼叫。

公开(公告)号：US20070079935A1

公开(公告)日：2007-04-12

申请号：US11541388

申请日：2006-09-29

Applicant: Jack Schuss ,  Xing Chen

Inventor： Jack Schuss ,  Xing Chen

IPC: H01L21/306

CPC classification number: H01J37/32522 ,  H01J37/32357

Abstract: An improved plasma vessel (i.e., plasma applicator) that provides effective cooling includes a plurality of generally linear tubes having a dielectric interior fluidly connected together by dielectric connectors. The tubes and connectors are joined together to form a leak-tight plasma vessel. A cooling system surrounding the improved plasma vessel includes a rigid cooling plate and a deformable thermal transfer material disposed between the plasma vessel and the cooling plate. After use or at an operator's discretion, the plasma vessel can be removed from the cooling system and a new vessel may be inserted in its place. Alternatively, the used vessel may be refurbished and re-inserted into the cooling system. The new or refurbished vessel may or may not be of the same size or configuration as the used vessel. Thermal contact between the cooling system and the new or refurbished vessel, however is maintained through the deformable thermal transfer material.

Abstract translation: 提供有效冷却的改进的等离子体容器（即，等离子体施加器）包括多个大致直线的管，其具有通过电介质连接器流体连接在一起的电介质内部。 管和连接器连接在一起以形成不透漏等离子体容器。 围绕改进的等离子体容器的冷却系统包括刚性冷却板和设置在等离子体容器和冷却板之间的可变形的热转印材料。 使用后或由操作人员决定，等离子体容器可从冷却系统中取出，新的容器可插入其中。 或者，所用的容器可以被翻新并重新插入到冷却系统中。 新的或翻新的船舶可能与或不同于使用的船只的尺寸或构造。 然而，冷却系统和新的或翻新的容器之间的热接触通过可变形的热转印材料保持。

公开(公告)号：US06924455B1

公开(公告)日：2005-08-02

申请号：US09774165

申请日：2001-01-26

Applicant: Xing Chen ,  Donald K. Smith ,  William M. Holber

Inventor： Xing Chen ,  Donald K. Smith ,  William M. Holber

IPC: H01J27/16 ,  H01J37/32 ,  B23K10/00

CPC classification number: H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

Abstract: A material processing apparatus having an integrated toroidal plasma source is described. The material processing apparatus includes a plasma chamber that comprises a portion of an outer surface of a process chamber. A transformer having a magnetic core surrounds a portion of the plasma chamber. The transformer has a primary winding. A solid state AC switching power supply comprising one or more switching semiconductor devices is coupled to a voltage supply and has an output that is coupled to the primary winding. The solid state AC switching power supply drives an AC current in the primary winding that induces an AC potential inside the chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas.

Abstract translation: 描述了具有集成环形等离子体源的材料处理装置。 材料处理装置包括等离子体室，其包括处理室的外表面的一部分。 具有磁芯的变压器包围等离子体室的一部分。 变压器有一个初级绕组。 包括一个或多个开关半导体器件的固态AC开关电源耦合到电压源并具有耦合到初级绕组的输出。 固态交流开关电源驱动初级绕组中的交流电流，其在室内引起AC电位，其直接形成环形等离子体，其完成变压器的次级电路并解离气体。

公开(公告)号：US06907167B2

公开(公告)日：2005-06-14

申请号：US09765544

申请日：2001-01-19

Applicant: Hwan J. Jeong ,  Xing Chen

Inventor： Hwan J. Jeong ,  Xing Chen

IPC: H04J14/02 ,  G20B6/42

CPC classification number: H04J14/02 ,  G02B6/2934 ,  G02B6/29349 ,  G02B6/29353 ,  G02B6/29358 ,  G02B6/29386 ,  H04J14/0208 ,  H04J14/0213

Abstract: An optical interleaver is described, comprising a splitting element for splitting an incident beam into a first optical signal directed along a first path and a second optical signal directed along a second path, a first resonant element positioned along the first path, a second resonant element positioned along the second path, and a combining element positioned to receive and to interferometrically combine the outputs of the first and second resonant to produce the output signal. The optical interleaver may be implemented using a free-space configuration using a beamsplitter and a plurality of resonant cavities such as asymmetric Fabry-Perot resonators or Michelson-Gires-Tournois resonators. In an alternative preferred embodiment, the optical interleaver may be implemented in a Mach-Zender-style configuration using couplers and fiber ring resonators.

Abstract translation: 描述了一种光学交织器，其包括用于将入射光束分成沿着第一路径定向的第一光信号和沿着第二路径引导的第二光信号的分离元件，沿着第一路径定位的第一谐振元件，第二谐振元件 以及组合元件，其被定位成接收和干涉地组合第一和第二谐振的输出以产生输出信号。 光交错器可以使用使用分束器和多个谐振腔的自由空间配置来实现，例如非对称法布里 - 珀罗谐振器或迈克尔逊 - 雷尔 - 波尔诺斯谐振器。 在替代的优选实施例中，光交错器可以使用耦合器和光纤环形谐振器以马赫 - 祖德式配置来实现。

公开(公告)号：US06734967B1

公开(公告)日：2004-05-11

申请号：US09248876

申请日：1999-02-11

Applicant: Timothy R. Piwonka-Corle ,  Karen F. Scoffone ,  Xing Chen ,  Lloyd J. Lacomb, Jr. ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

Inventor： Timothy R. Piwonka-Corle ,  Karen F. Scoffone ,  Xing Chen ,  Lloyd J. Lacomb, Jr. ,  Jean-Louis Stehle ,  Dorian Zahorski ,  John-Pierre Rey

IPC: G01N2121

CPC classification number: G01N21/211

Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).

Abstract translation: 使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。 该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。 优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点 并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。 聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。 一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。 在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。 椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道 从样品）。

公开(公告)号：US06559408B2

公开(公告)日：2003-05-06

申请号：US10143061

申请日：2002-05-10

Applicant: Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

Inventor： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

IPC: B23K1000

CPC classification number: H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.

公开(公告)号：US06388226B1

公开(公告)日：2002-05-14

申请号：US09502087

申请日：2000-02-10

Applicant: Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

Inventor： Donald K. Smith ,  Xing Chen ,  William M. Holber ,  Eric Georgelis

IPC: B23K1000

CPC classification number: H01J37/32009 ,  H01J27/16 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32862

Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

Abstract translation: 改进的环形低场等离子体源允许在比现有技术的等离子体源允许的更宽的气体条件范围内等离子体点火。 通过根据对电源的负载自动调节输送到等离子体的功率来提高等离子体源的功率效率。 等离子体源可以在比现有技术的等离子体源允许的更宽的压力范围内操作。 可以操作等离子体源，以便增加来自源的原子物质的输出。 可以操作等离子体源以增加有机材料的蚀刻速率。 通过将等离子体源转换成可擦洗的产品，等离子体源可以有效地从废气流中去除有害气体化合物。