公开(公告)号：USD886741S1

公开(公告)日：2020-06-09

申请号：US29648824

申请日：2018-05-24

Applicant: CKD CORPORATION

Designer： Naoki Okajima ,  Hiroaki Banno ,  Sho Honda ,  Atsushi Fukuta ,  Mitsuhiro Kosugi ,  Hisashi Hatano

公开(公告)号：US10563977B2

公开(公告)日：2020-02-18

申请号：US16059210

申请日：2018-08-09

Applicant: CKD Corporation

Inventor： Tsuyoshi Ohyama ,  Norihiko Sakaida ,  Ikuo Futamura

IPC: G01B11/25 ,  H05K3/34 ,  G01B11/24 ,  G01B11/06 ,  G01B11/16

Abstract: A three-dimensional measurement device includes: an illuminator that irradiates a measured object with a predetermined light; an imaging device that comprises: an imaging sensor displaceable at least in a vertical direction; and a both-sided telecentric optical system that causes the imaging sensor to form an image of a predetermined area on the measured object irradiated with the predetermined light; a conveyor that moves the illuminator and the imaging device relative to the measured object; and a controller that: executes three-dimensional measurement of a predetermined measurement object on the measured object, based on the taken image; measures a height of the predetermined area at least at a time prior to imaging of the predetermined area under the predetermined light; and changes a height position of the imaging sensor based on a measurement result to adjust an interval between the predetermined area and the imaging sensor to a predetermined distance.

公开(公告)号：US10514253B2

公开(公告)日：2019-12-24

申请号：US15596788

申请日：2017-05-16

Applicant: CKD Corporation

Inventor： Tsuyoshi Ohyama ,  Norihiko Sakaida ,  Takahiro Mamiya ,  Hiroyuki Ishigaki

IPC: G01B11/25 ,  G01B11/06 ,  H04N5/225 ,  H04N7/18

Abstract: A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.

公开(公告)号：US20190283910A1

公开(公告)日：2019-09-19

申请号：US16431895

申请日：2019-06-05

Applicant: CKD Corporation

Inventor： Yukihiro Taguchi ,  Tadashi Inoguchi

IPC: B65B9/04 ,  B65B57/02 ,  B65B57/10 ,  G01N21/84

Abstract: An inspection device for inspecting an inspection object of a PTP sheet including a pocket portion formed in a container film, and a cover film mounted to the container film to close the pocket portion, or a portion of a PTP film forming the PTP sheet, includes: an irradiator that irradiates the inspection object with a predetermined light; an imaging device that takes an inspection image of the irradiated inspection object and a peripheral portion of the inspection object; and a processor that: determines whether the inspection object is defective or non-defective based on inspection image data of the inspection object taken from the inspection image. The inspection image data includes data of respective pixels corresponding to an inspection target area subjected to the defective/non-defective determination, and data of respective pixels corresponding to a non-inspection target area that excludes the inspection target area.

公开(公告)号：US10290759B2

公开(公告)日：2019-05-14

申请号：US15915321

申请日：2018-03-08

Applicant: FUJICO CO., LTD. ,  KYUSHU INSTITUTE OF TECHNOLOGY ,  CKD CORPORATION

Inventor： Shuzi Hayase ,  Tingli Ma ,  Hideaki Nagayoshi ,  Daishiro Nomura ,  Takatoshi Nomura

IPC: H01L31/068 ,  H01L31/0224 ,  H01L31/18 ,  H01L51/42

Abstract: A perovskite photoelectric conversion element includes a light transmitting substrate 11, on a front surface of which light is made incident, an oxide porous layer 13, formed on a rear surface of the light transmitting substrate 11 and with metal oxide particles 12 connected in a network, a metal porous layer 15, formed on a rear surface of the oxide porous layer 13 and with metal particles 14 connected in a network, a porous insulating layer 17, formed on a rear surface of the metal porous layer 15, a first electrode layer 18, formed on and across an entirety of a rear surface of the porous insulating layer 17, a second electrode layer 19, connected to the metal porous layer 15 and formed at a portion different from the first electrode layer 18 in a state of being insulated from the first electrode layer 18, and perovskite 20.

公开(公告)号：US10167962B2

公开(公告)日：2019-01-01

申请号：US15801006

申请日：2017-11-01

Applicant: CKD CORPORATION

Inventor： Shinji Itoh ,  Kiyotoki Natsume ,  Atsushi Fukuta

IPC: F16K11/07 ,  F16K31/42 ,  F16K37/00 ,  F16K27/04 ,  F16K31/06

Abstract: An electromagnetic valve includes a valve casing, which has a valve hole, a spool valve in the valve hole, first and second output ports each communicating with the valve hole, first and second pressure introduction holes, which respectively communicate with the first and second output ports, first and second pressure sensors, which is respectively fitted in the first and second pressure introduction holes, sealing members, which are arranged between the respective pressure sensors and the pressure introduction holes, first and second substrates, on which the corresponding first and second pressure sensors are mounted, and a housing, which accommodates the first and second substrates, has the first and second pressure introduction holes, and is attached to the valve casing. The first and second substrates are arranged to be opposed to each other in a state of being upright in a direction perpendicular to the movement direction of the spool valve.

公开(公告)号：US10167958B2

公开(公告)日：2019-01-01

申请号：US15414091

申请日：2017-01-24

Applicant: CKD CORPORATION

Inventor： Yasunori Nishimura ,  Masayuki Watanabe ,  Seiji Hashiguchi

IPC: F16K1/226

Abstract: A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.

公开(公告)号：US20180261708A1

公开(公告)日：2018-09-13

申请号：US15915321

申请日：2018-03-08

Applicant: FUJICO CO., LTD. ,  KYUSHU INSTITUTE OF TECHNOLOGY ,  CKD CORPORATION

Inventor： Shuzi Hayase ,  Tingli Ma ,  Hideaki Nagayoshi ,  Daishiro Nomura ,  Takatoshi Nomura

IPC: H01L31/068 ,  H01L31/0224 ,  H01L31/18

CPC classification number: H01L31/0682 ,  H01L31/022441 ,  H01L31/18 ,  H01L51/4253 ,  Y02E10/549 ,  Y02P70/521

Abstract: A perovskite photoelectric conversion element includes a light transmitting substrate 11, on a front surface of which light is made incident, an oxide porous layer 13, formed on a rear surface of the light transmitting substrate 11 and with metal oxide particles 12 connected in a network, a metal porous layer 15, formed on a rear surface of the oxide porous layer 13 and with metal particles 14 connected in a network, a porous insulating layer 17, formed on a rear surface of the metal porous layer 15, a first electrode layer 18, formed on and across an entirety of a rear surface of the porous insulating layer 17, a second electrode layer 19, connected to the metal porous layer 15 and formed at a portion different from the first electrode layer 18 in a state of being insulated from the first electrode layer 18, and perovskite 20.

公开(公告)号：US20180162618A1

公开(公告)日：2018-06-14

申请号：US15880873

申请日：2018-01-26

Applicant: CKD Corporation

Inventor： Shunji Maruyama ,  Tsuyoshi Ohyama ,  Norihiko Sakaida

IPC: B65D75/36 ,  B65B9/04

CPC classification number: B65D75/367 ,  B65B9/04 ,  B65B9/045 ,  B65B2230/02 ,  B65D75/327 ,  B65D2575/362

Abstract: A blister sheet includes a container film comprising pockets receiving a content, and a cover film mounted to the container film to close the pockets. The container and the cover film are made of synthetic resins. The cover film is thinner than the container film. One pair of cuts formed for each pocket passes through the container and the cover film and extends to the pocket such that each pocket is placed between the cuts. The container and the cover film are broken from the one pair of cuts toward the pocket. A cutting slit or perforation is formed in the container film to allow for separation of the blister sheet into sheet pieces. The cutting slit or perforation is extended to intersect with the cut and a portion of the cutting slit or perforation that intersects with the cut passes through the container and the cover film.

公开(公告)号：US09984908B2

公开(公告)日：2018-05-29

申请号：US14354198

申请日：2012-11-13

Applicant: Tokyo Electron Limited ,  CKD Corporation

Inventor： Atsushi Kobayashi ,  Atsuhiko Tabuchi ,  Hideki Wakai ,  Kazutoshi Itoh ,  Yasuhisa Hirose ,  Keiichi Nishikawa ,  Takahiro Minatani

IPC: H01L21/00 ,  H01L21/67 ,  G05D23/19

CPC classification number: H01L21/67103 ,  G05D23/1934 ,  H01L21/67109 ,  H01L21/67248

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.