Spherical body drive type movement device

    公开(公告)号:US12071187B2

    公开(公告)日:2024-08-27

    申请号:US17293588

    申请日:2019-11-07

    摘要: A spherical body drive type movement device 10 includes rotary bodies 14, 15, and 16 rotating n number of driving spherical bodies 11, 12, and 13 by being rotationally driven in a state of being in contact from two different directions with each of the driving spherical bodies 11, 12, and 13, and moves on a traveling surface G. The rotary bodies 14, 15, and 16 come into contact with the driving spherical bodies 11, 12, and 13 at positions higher than centers P1, P2, and P3 of the driving spherical bodies 11, 12, and 13 in contact and inside a virtual inverted n-gonal pyramid H or, at positions higher than the centers P1, P2, and P3 of the driving spherical bodies 11, 12, and 13 in contact and on lateral faces α, β, and γ of the virtual inverted n-gonal pyramid H.

    POLISHING APPARATUS AND POLISHING METHOD

    公开(公告)号:US20230026751A1

    公开(公告)日:2023-01-26

    申请号:US17780885

    申请日:2020-11-30

    IPC分类号: B24B37/005

    摘要: The present invention relates to a polishing apparatus and a polishing method for polishing a workpiece, such as a wafer on which a pattern is formed, on a polishing pad, and more particularly, relates to a polishing apparatus and a polishing method for detecting a geometric element of a pattern, such as a pitch. The polishing apparatus includes: a polishing table (3) configured to support a polishing pad (2); a polishing head (1) configured to press a workpiece (W), having a pattern formed therein, against the polishing pad (2) and polish a surface of the workpiece (W), an imaging device (20) disposed in the polishing table (3) and configured to generate an image including at least the pattern of the workpiece (W), and an image analysis system (30) configured determining a geometric element of the pattern of the workpiece (W) based on the image.

    Information processing device
    5.
    发明授权

    公开(公告)号:US11481919B2

    公开(公告)日:2022-10-25

    申请号:US16649830

    申请日:2018-09-26

    IPC分类号: G06T7/73 G06V10/60

    摘要: An image recognition device includes: an image processing device that acquires a feature amount from an image; and an identification device that determines whether a prescribed identification object is present in the image, and identifies the identification object. The identification device includes a BNN that has learned the identification object in advance, and performs identification processing by performing a binary calculation with the BNN on the feature amount acquired by the image processing device. Then, the identification device selects a portion effective for identification from among high-dimensional feature amounts output by the image processing device to reduce the dimensions used in identification processing, and copies low-dimensional feature amounts output by the image processing device to increase dimensions.

    Discharge detection system and discharge detection method

    公开(公告)号:US11009466B2

    公开(公告)日:2021-05-18

    申请号:US16596555

    申请日:2019-10-08

    摘要: A discharge detection system includes a plurality of optical fibers having different optical distances from each other and provided to allow discharge light generated from a test object to enter at least one of the optical fibers, an optical sensor configured to detect the discharge light having entered the at least one of the optical fibers and to output a detection signal having a temporal change in an amplitude of the detection signal, the temporal change in the amplitude corresponding to a temporal change in intensity of the discharge light, and a signal processing system configured to identify an area where the discharge light is generated based a point of time of at least one peak in the detection signal.

    Optical observation system and optical observation method

    公开(公告)号:US10996103B2

    公开(公告)日:2021-05-04

    申请号:US15449730

    申请日:2017-03-03

    摘要: According to one implementation, an optical observation system includes an optical fiber and at least one detection system. The optical fiber has at least one curved portion as a sensor for inputting light which has occurred in a test region. The optical fiber inputs the light from the at least one curved portion and transmits the light. The at least one detection system detects the light transmitted by the optical fiber. Further, according to one implementation, an optical observation method includes: inputting light, which has occurred in a test region, from at least one curved portion of an optical fiber and transmitting the light; and detecting the light transmitted by the optical fiber.

    Mobile capsule device and control method thereof

    公开(公告)号:US10715021B2

    公开(公告)日:2020-07-14

    申请号:US14371493

    申请日:2013-07-18

    摘要: A mobile capsule device 10 comprises a long capsule body 11 having a permanent magnet 13 movable in the lengthwise direction with respect to the long capsule body and a coil for driving the permanent magnet 13, while a propulsion force is generated entirely by applying an alternate current to the coil and performing back and forth movements of the permanent magnet 13. The coil has first and second coil parts 15 and 16 arranged circumferentially in front and back of the permanent magnet 13, and a frequency of an alternate current applied to the first and second coil parts 15 and 16 is made to accord with a resonance frequency of the capsule device 10 generated by a back and forth vibration of the permanent magnet 13. Thereby, a self-propelled, mobile capsule device 10 which is downsized, compact and efficient and a control method thereof can be provided.