Method of manufacturing a sputtering target and sputtering target
    31.
    发明授权
    Method of manufacturing a sputtering target and sputtering target 有权
    制造溅射靶和溅射靶的方法

    公开(公告)号:US09017493B2

    公开(公告)日:2015-04-28

    申请号:US13144538

    申请日:2010-08-10

    摘要: [Object] To provide a method of manufacturing a sputtering target and a sputtering target that are capable of achieving refinement and uniformity of crystal grains.[Solving Means] A method of manufacturing a sputtering target according to an embodiment of the present invention includes forging an ingot formed of metal by applying a stress in a first axis direction (z-axis direction) and a plane direction (xy-plane direction) orthogonal to the first axis direction. The ingot is additionally forged by applying a stress in a second axis direction (axial directions c11, c12, c21, c22) obliquely intersecting with a direction parallel to the first axis direction. The ingot is heat-treated at a temperature equal to or higher than a recrystallization temperature thereof. In such a manner, since slip deformation can be caused not only in the first axis direction and the plane direction orthogonal thereto but also in the second axis direction, the high density and uniformity of an internal stress can be achieved.

    摘要翻译: 本发明提供能够实现晶粒细化和均匀性的溅射靶和溅射靶的制造方法。 本发明的实施方式的溅射靶的制造方法包括:通过在第一轴方向(z轴方向)和平面方向(xy面方向)上施加应力来锻造由金属形成的铸锭 )与第一轴方向正交。 通过在与第一轴方向平行的方向倾斜地相交的第二轴方向(轴方向c11,c12,c21,c22)上施加应力来另外锻造锭。 在等于或高于其再结晶温度的温度下对锭进行热处理。 以这种方式,由于不仅在第一轴方向和与其正交的平面方向上,而且在第二轴线方向上都可能产生滑动变形,所以可以实现高密度和内部应力的均匀性。

    laser aligned shotpeen nozzle
    32.
    发明授权
    laser aligned shotpeen nozzle 有权
    激光对准喷丸嘴

    公开(公告)号:US07140216B2

    公开(公告)日:2006-11-28

    申请号:US10991816

    申请日:2004-11-18

    申请人: Jose Abiel Garza

    发明人: Jose Abiel Garza

    CPC分类号: B24C1/10 C21D7/06 Y10T29/479

    摘要: A shotpeen nozzle includes a tubular core mounted in a casing. The casing has an inlet for receiving shot in a stream of pressurized air, and the core includes an outlet for discharging the stream. A laser is mounted to the casing for projecting a laser beam in parallel with the core at its outlet in the direction of discharge of the stream therefrom.

    摘要翻译: 喷丸喷嘴包括安装在壳体中的管状芯体。 壳体具有用于在加压空气流中接收射流的入口,并且芯部包括用于排出流的出口。 激光器安装到壳体上,用于在其出口的方向上从与其排出的流的方向上的芯平行地投射激光束。

    Method and device for forging a workpiece in bar form

    公开(公告)号:US10525523B2

    公开(公告)日:2020-01-07

    申请号:US15531921

    申请日:2015-12-15

    申请人: GFM—GmbH

    摘要: A description is given of a method and a device for forging a rod-shaped workpiece (5) which is deformed with the aid of forging tools (1, 2, 3, 4) in the sense of a cross-sectional displacement perpendicular to the forging axis (a) and is subjected to an axial advancement and possibly a rotation about the forging axis (a) during the pauses in the engagement of the forging tools (1, 2, 3, 4). In order to achieve an advantageous grain refinement, it is proposed that the workpiece (5) is deformed in the sense of the cross-sectional displacement perpendicular to the forging axis (a) in a bending zone (13) between two central supports (11) by means of the forging tools (1, 2, 3, 4) acting on the workpiece (5) radially in relation to the forging axis (a).