公开(公告)号：US20110228281A1

公开(公告)日：2011-09-22

申请号：US13060436

申请日：2010-03-02

Applicant: Zeqin Wang ,  Hong Xie

Inventor： Zeqin Wang ,  Hong Xie

IPC: G01B11/02

CPC classification number: G01J3/45 ,  G01J3/021 ,  G01J3/0286 ,  G02B6/29349 ,  G02F1/21 ,  G02F2203/60

Abstract: The present patent application provides an interference cavity for precisely controlling an optical path including a cavity formed by two equal distance arms, wherein a positive adjusting plate and a negative adjusting plate are disposed in the interference cavity for compensating the change of a cavity length with temperature and thereby ensuring that the interference cavity length is a constant. The present patent application utilizes the matching relationship between the change of the refractive index of the positive adjustment plate with the temperature and the change of the refractive index of the negative adjusting plates with the temperature to make the optical path difference OPL invariant with changes in the environment temperature and thereby to ensure the precision of the optical path.

Abstract translation: 本专利申请提供了一种用于精确控制光路的干涉腔，该光路包括由两个相等的距离臂形成的空腔，其中正调节板和负调节板设置在干涉腔中，用于补偿腔长随温度的变化 从而确保干涉腔长度是恒定的。 本专利申请利用正调整板的折射率与温度的变化与负调节板的折射率随温度的变化之间的匹配关系，以使光路差OPL随着 从而保证光路的精度。

公开(公告)号：US20110181885A1

公开(公告)日：2011-07-28

申请号：US13010745

申请日：2011-01-20

Applicant: Ying Wen Hsu ,  John C. Carson ,  Medhat Azzazy

Inventor： Ying Wen Hsu ,  John C. Carson ,  Medhat Azzazy

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/0202 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/06 ,  G01J3/18 ,  G02B26/0808

Abstract: A micro-lamellar grating interferometer for deriving the spectrum of an incident beam from a scene of interest from a generated interferogram is disclosed with a method for using the same.The interferometer comprises a lamellar grating defined by two interleaved reflective mirror set; a first stationary set of electromagnetically reflective elements and a second moveable set of electromagnetically reflective elements. The first and second set of electromagnetically reflective elements are referred to as mirror elements herein.The second mirror element set is disposed on a moveable platform supported by flexures that are driven with a high stiffness magnetic, thermal or piezoelectric actuator designed have a predetermined vertical displacement that is perpendicular to the first mirror set.

Abstract translation: 公开了一种用于从产生的干涉图导出来自感兴趣场景的入射光束的光谱的微层状光栅干涉仪，其具有使用该方法。 干涉仪包括由两个交错反射镜组限定的层状光栅; 电磁反射元件的第一固定组和第二可移动组的电磁反射元件。 第一和第二组电磁反射元件在本文中被称为镜元件。 第二镜元件组设置在由可弯曲部支撑的可移动平台上，所述弯曲部由高刚性磁性，热或压电致动器驱动，设计成具有垂直于第一反射镜组的预定垂直位移。

公开(公告)号：US20110032531A1

公开(公告)日：2011-02-10

申请号：US12818901

申请日：2010-06-18

Applicant: Denis Simeoni ,  Olivier Pigouche ,  Bruno Chetrite ,  Christian Buil

Inventor： Denis Simeoni ,  Olivier Pigouche ,  Bruno Chetrite ,  Christian Buil

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/453

Abstract: The invention pertains to a static interferometry system comprising two mirrors produced respectively by vertical assemblage (EH) and horizontal assemblage (EV) of a set of parallel plates of constant width, shifted along the optical axis so as to form stairs of variable optical path difference, the said two staircase mirrors (EH, EV) being disposed orthogonally so as to form, by optical superposition, a set of square facets engendering different optical path differences for the incident signal, and a detection device (DET) for detecting the set of optical path differences of the resulting interferogram. The system comprises, furthermore, means of continuous variation (LC) of the optical path difference during the acquisition of data by the detection device (DET), and sampling means (S, ACQL) for sampling the continuous optical path difference acquired while complying with the Nyquist criterion.

Abstract translation: 本发明涉及一种静态干涉测量系统，其包括分别通过沿着光轴移动的一组恒定宽度的平行板的垂直组合（EH）和水平组合（EV）产生的两个反射镜，以形成可变光程差的楼梯 ，所述两个阶梯镜（EH，EV）正交设置，以便通过光学叠加形成一组对于入射信号产生不同光程差的方形面，以及检测装置（DET） 所得干涉图的光程差。 此外，该系统还包括在通过检测装置（DET）获取数据期间光程差的连续变化（LC）的装置以及用于采样在连续光路差下采集的采样装置（S，ACQL） 奈奎斯特标准。

公开(公告)号：US07767969B2

公开(公告)日：2010-08-03

申请号：US12319332

申请日：2009-01-06

Applicant: Kiyoshi Nagai ,  Harumi Shibata ,  Sayaka Hamaguchi

Inventor： Kiyoshi Nagai ,  Harumi Shibata ,  Sayaka Hamaguchi

IPC: G01J5/06

CPC classification number: G01J3/45 ,  G01N21/3563 ,  G01N2021/3568 ,  G01N2021/3595

Abstract: An object of the present invention is to provide a spectroscopic method and an apparatus which can measure a trace element accurately with high sensitivity. In order to achieve this object, for example, in Fourier transformation infrared spectroscopy (FT-IR), a reference spectrum and a measurement spectrum including an impurity spectrum are measured in order to obtain a differential spectrum comprising the impurity spectrum and a flat baseline, correction including a frequency shift of the reference spectrum before calculating a differential spectrum, is performed on the reference spectrum. This makes it possible to remove baseline deformation due to phonon absorbance of silicon included in the conventional differential spectrum, and to obtain an infrared absorption spectrum of the substitutional carbon with high accuracy and high sensitivity.

Abstract translation: 本发明的目的是提供一种能够以高灵敏度精确地测量微量元素的分光方法和装置。 为了实现该目的，例如在傅里叶变换红外光谱（FT-IR）中，测量参考光谱和包含杂质光谱的测量光谱，以获得包含杂质光谱和平坦基线的差分光谱， 在参考光谱上执行包括计算差分光谱之前的参考光谱的频移的校正。 这使得可以消除由常规差分光谱中包含的硅的声子吸收引起的基线变形，并以高精度和高灵敏度获得取代碳的红外吸收光谱。

公开(公告)号：US07764383B1

公开(公告)日：2010-07-27

申请号：US12133538

申请日：2008-06-05

Applicant: Lee Francis Holeva

Inventor： Lee Francis Holeva

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45

Abstract: A method includes extracting phase due to fringe count error (FCE) in spectra formed by an interferometer. The exemplary method includes the steps of: (a) forming an earth scene spectrum; (b) forming a background reference spectrum; and (c) forming a phase extraction function, Rk, where k is a kth channel of the interferometer. The phase extraction function is formed from the earth scene spectrum and background reference spectrum. The method may also include the steps of (d) using recursive least squares (RLS) to extract phase from the Rk function; and (e) providing the extracted phase to a user to correct the FCE. Step (c) may include forming a term in the Rk function that includes a positive or a negative sign of a square root. Step (d) may include determining whether the sign is negative or positive using the RLS.

Abstract translation: 一种方法包括在由干涉仪形成的光谱中提取由于边缘计数误差（FCE）引起的相位。 该示例性方法包括以下步骤：（a）形成地球场景光谱; （b）形成背景参考光谱; 和（c）形成相位提取函数Rk，其中k是干涉仪的第k个通道。 相位提取函数由地球景观谱和背景参考光谱构成。 该方法还可以包括以下步骤：（d）使用递归最小二乘法（RLS）从Rk函数提取相位; 和（e）将提取的相位提供给用户以校正FCE。 步骤（c）可以包括在Rk函数中形成包括平方根的正号或负号的项。 步骤（d）可以包括使用RLS确定符号是否为负数或正数。

公开(公告)号：US07676337B2

公开(公告)日：2010-03-09

申请号：US11955685

申请日：2007-12-13

Applicant: Kenichi Akao ,  Seiichi Kashiwabara ,  Toshiyuki Nagoshi

Inventor： Kenichi Akao ,  Seiichi Kashiwabara ,  Toshiyuki Nagoshi

IPC: G01R23/16 ,  G06F11/00

CPC classification number: G01J3/45 ,  G01N21/45 ,  G01N2021/1725 ,  G01N2021/3595

Abstract: An irreversible-reaction measurement method comprising: a step in which a perturbation is applied to one of the divided portions of a measurement sample placed in a light path of a Fourier-transform spectrophotometer to cause an irreversible-reaction while a mirror of the spectrophotometer remains at a data point; a step in which interferogram is detected from the sample portion placed in the path at predetermined time intervals after the application of the perturbation; a step in which the mirror moves to and remains at the next data point after the reaction of the sample portion reaches an end point; a step in which the sample portion placed in the light path is changed to the next sample portion each time the mirror moves to the next data point; and a step in which the irreversible-reaction of the measurement sample is analyzed in accordance with the interferogram obtained by repeating the steps.

Abstract translation: 一种不可逆反应测定方法，其特征在于，包括以下步骤：在分光光度计的反射镜保留在傅立叶变换分光光度计的光路内的测定样品的分割部分之一中产生不可逆反应的步骤 在数据点; 在施加扰动之后，以预定时间间隔从放置在路径中的样本部分检测干涉图的步骤; 在样品部分的反应达到终点之后，镜子移动并保持在下一个数据点的步骤; 每当镜子移动到下一个数据点时，将放置在光路中的样本部分改变为下一个采样部分的步骤; 以及根据通过重复该步骤获得的干涉图来分析测量样品的不可逆反应的步骤。

公开(公告)号：US07639364B2

公开(公告)日：2009-12-29

申请号：US11973448

申请日：2007-10-08

Applicant: Robert J. Rafac

Inventor： Robert J. Rafac

IPC: G01B9/02

CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

Abstract translation: 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数表示第 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数。 实际带宽参数可以包括在从激光器发射的光的光谱的全宽度内的最大值的百分之几处的光谱全宽度，或者包含光谱的全光谱的一部分能量百分比的光谱上的两个点之间的宽度 从激光发射的光谱。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。

公开(公告)号：US20090296097A1

公开(公告)日：2009-12-03

申请号：US12540986

申请日：2009-08-13

Applicant: George G. He ,  Diane E. Deterline

Inventor： George G. He ,  Diane E. Deterline

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/02 ,  G01J3/0264

Abstract: A method for determining a background noise level includes receiving interferogram data; determining at least one measure of interferogram quality; accumulating said received interferogram data; and generating a background noise level based on said interferogram data and at least one measure of interferogram quality.

Abstract translation: 一种用于确定背景噪声电平的方法包括：接收干涉图数据; 确定干涉图质量的至少一个度量; 累积所述接收的干涉图数据; 以及基于所述干涉图数据和干涉图质量的至少一个度量产生背景噪声电平。

公开(公告)号：US20090173884A1

公开(公告)日：2009-07-09

申请号：US12319332

申请日：2009-01-06

Applicant: Kiyoshi Nagai ,  Harumi Shibata ,  Sayaka Hamaguchi

Inventor： Kiyoshi Nagai ,  Harumi Shibata ,  Sayaka Hamaguchi

IPC: G01J5/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01N21/3563 ,  G01N2021/3568 ,  G01N2021/3595

Abstract: An object of the present invention is to provide a spectroscopic method and an apparatus which can measure a trace element accurately with high sensitivity. In order to achieve this object, for example, in Fourier transformation infrared spectroscopy (FT-IR), a reference spectrum and a measurement spectrum including an impurity spectrum are measured in order to obtain a differential spectrum comprising the impurity spectrum and a flat baseline, correction including a frequency shift of the reference spectrum before calculating a differential spectrum, is performed on the reference spectrum. This makes it possible to remove baseline deformation due to phonon absorbance of silicon included in the conventional differential spectrum, and to obtain an infrared absorption spectrum of the substitutional carbon with high accuracy and high sensitivity.

Abstract translation: 本发明的目的是提供一种能够以高灵敏度精确地测量微量元素的分光方法和装置。 为了实现该目的，例如在傅里叶变换红外光谱（FT-IR）中，测量参考光谱和包含杂质光谱的测量光谱，以获得包含杂质光谱和平坦基线的差分光谱， 在参考光谱上执行包括计算差分光谱之前的参考光谱的频移的校正。 这使得可以消除由常规差分光谱中包含的硅的声子吸收引起的基线变形，并以高精度和高灵敏度获得取代碳的红外吸收光谱。

公开(公告)号：US07535004B2

公开(公告)日：2009-05-19

申请号：US11946318

申请日：2007-11-28

Applicant: Yoshitake Yamamoto

Inventor： Yoshitake Yamamoto

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01J3/45 ,  G01J3/02 ,  G01J3/027

Abstract: Disclosed is a Fourier transform infrared spectrophotometer, which comprises: a main interferometer section including a beam splitter, a fixed mirror, a movable mirror, and a phase plate disposed between the beam splitter and the fixed mirror; a control interferometer section having a quadrature control system for calculating a position of the movable mirror; a center-burst-position detection section operable, based on an input of interference signals and interferograms, to subject respective intensities of the interferograms to an addition processing while correcting a positional deviation of the movable mirror, so as to obtain a cumulative interferogram, and detecting a center burst position having a maximum intensity value in the cumulative interferogram; a center-burst-position storage section operable to store the detected center burst position; and a measurement-start-position determination section operable, based on the stored center burst position, to determine a measurement start position of the movable mirror during the measurement operation.

Abstract translation: 公开了一种傅里叶变换红外分光光度计，其包括：主干涉仪部分，包括分束器，固定镜，可移动反射镜和设置在分束器和固定镜之间的相位板; 控制干涉仪部分，具有用于计算可移动反射镜的位置的正交控制系统; 中央突发位置检测部，其基于干涉信号和干涉图的输入，在校正可动镜的位置偏差的同时对干涉图的各个强度进行加法处理，以获得累积干涉图;以及 检测累积干涉图中具有最大强度值的中心脉冲串位置; 中央突发位置存储部分，用于存储检测到的中心突发位置; 以及测量开始位置确定部，其基于所存储的中心突发位置可操作，以在测量操作期间确定可移动镜的测量开始位置。