摘要:
A refrigeration system regulates the temperature of an electrostatic wafer chuck disposed in a process chamber. The refrigeration system includes a heat exchanger disposed in a heat exchange relationship with the electrostatic chuck, a refrigerator, a temperature sensor, and a temperature controller for controlling the refrigerator to cool the coolant withdrawn from the heat exchanger to a desired temperature in response to the temperature detected by the temperature sensor. The heat exchanger forms a coolant passageway inside the electrostatic chuck, and the refrigerator is disposed outside the process chamber. The temperature sensor is disposed within the body of the electrostatic chuck. The temperature of the electrostatic chuck can be regulated so as to be maintained nearly constant because the temperature used to control the cooling of the coolant is measured directly from the body of the electrostatic chuck.
摘要:
The present invention relates to isothiazolone-containing compositions comprising a) 3-isothiazolone compounds; b) a metal nitrate; c) magnesium chloride; d) at least one compound selected from the group consisting of iodic acid, periodic acid, an iodate salt, and a periodate salt; e) chlorite salts; and f) solvents. The invention further provides a method for stabilizing isothiazolone-containing compositions by inhibiting precipitation of by-products formed during production and precipitation of the compounds formed during storage. The compositions of the invention are useful for suppressing the growth of microorganisms.
摘要:
A vacuum transfer device for engaging a vacuum chuck to introduce a vacuum thereto includes an upper fixed plate fixed, a lower plate slidingly coupled with the upper plate so as to be capable of sliding toward and away from the vacuum chuck, and a pushing unit mounted to the upper plate for forcing the lower plate into position against the vacuum chuck. The pushing unit has a lever urged by a coil spring to press a roller into engagement with a curved surface of the lower plate, and gap control elements by which the position of the roller relative to the inclined surface can be adjusted to in turn adjust the force exerted by the roller on the lower plate. The gap control elements along with the curved surface of the lower plate make it quite easy to set the precise force by which the roller positions the lower plate of the device against the vacuum chuck. This in turn prevents the chuck and vacuum transfer device from being damaged, minimizes the time the facility must be down while the pushing unit is being adjusted, and works to ensure that no gap will be left between the vacuum transfer device and the vacuum chuck.
摘要:
This invention relates to a stabilized isothiazolone solution and more particularly, to a stabilized isothiazolone solution comprising isothiazolone expressed by the following formula (I), stabilizer expressed by the following formula (II), and organic solvent diffusing these compounds effectively: ##STR1## In these formulae, n, R.sup.1, R.sup.2, R.sup.3, R.sup.4, and R.sup.5 have the same definitions as defined in the detailed description of this application, respectively.
摘要:
A waste gas disposal apparatus includes a scraper rotating portion for rotating a scraper configured to simultaneously scrape off fine reactant particles adsorbed to an inner surface of a waste gas collecting unit and a surface of a cone in a collection inducing portion of the collection unit. The scraper is designed to be fixed to a scraper support rod, which is formed coaxially with a cone support rod and rotated through a 360.degree. arc. The fine reactant particle collection efficiency is much higher compared with conventional devices that only rotate through a 180.degree. arc, and must repeatedly reverse directions during scraping operations.
摘要:
The present invention relates to an improved process for selectively preparing 4-isothiazolin-3-one having the following structural formula(I), consisted of preparing 3,3'-dithiodipropionyldichloride by reacting 3,3'-dithiodipropionic acid with thionylchloride, reacting with amine compound to prepare 3,3'-dithiodipropioneamide, and herein adding sulfrylchloride in organic solvent to cyclize, which is useful as antiseptic or anti-infectives for cooling water, metal processing oils, paints, cosmetics, surfactants, sensitizers, etc. ##STR1## wherein, R.sup.1 is methyl or n-octyl group;R.sup.2 is hydrogen or chlorine atom.
摘要:
The present disclosure relates to an apparatus and a method for controlling a function of a communication module in a portable terminal, by which the function of the communication module can be automatically turned on or off in order to reduce the consumption of a battery of the portable terminal based on a connection/disconnection pattern, so that learning pattern the communication module selectively turned on a particular cycle calculated as a learning pattern.
摘要:
The present invention relates to antibacterial and antifungal compositions having 3-isothiazolone and polyhexamethyleneguanidine phosphate. These new antiseptic compositions demonstrate a superior degree of effectiveness on a wide spectrum of pathogens. The present invention also relates to the use of these new antiseptic compositions to kill and/or restrain the growth of bacteria and fungi in a variety of applications.
摘要:
The present invention relates to a method of automatically controlling the volume level of communication speech for Mean Opinion Score (MOS) measurement, which, before evaluating the quality of communication speech using a MOS measurement method, automatically controls the volume level of actual communication speech to a predetermined optimal level, thus improving the reliability of MOS values.The present invention provides a method of automatically controlling a volume level of communication speech for MOS measurement using MOS measurement equipment, the MOS measurement equipment calculating an MOS value based on results obtained by comparing a speech signal, which is received via a voice communication network, with a reference speech signal, the method comprising the steps of (a) when an audio signal, including a speech signal, is received from counterpart MOS measurement equipment in a predetermined format, measuring the volume level of the speech signal and comparing the volume level of the measured speech signal with a reference volume level; (b) transmitting a predetermined intrinsic audible frequency signal, which corresponds to ‘proper,’ ‘excess’ or ‘insufficiency’ information resulting from the comparison, to the counterpart MOS measurement equipment; and (c) the counterpart MOS measurement equipment interpreting the predetermined intrinsic audible frequency signal, which corresponds to the ‘proper,’ ‘excess’ or ‘insufficiency’ information, and controlling the volume level of the communication speech.
摘要:
Hinge assemblies that may adjust a tilt angle of an element of a portable electronic device in a user-comfortable position are disclosed. An example hinge assembly includes a first frame, a second frame rotatably coupled to the first frame, wherein a position of the second frame is adjustable between a first position and a second position to change a tilt angle of the second frame with respect to the first frame, a first elastic member connected to the first frame and the second frame and pressing the second frame toward the second position, and a locking member movably coupled to the first frame and capable of moving between a locking position where the locking member is engaged with the second frame to maintain the second frame at the first position, and an unlocking position where the locking member is separated from the second frame.