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41.发明申请Apparatus for generating f2 gas method for generating f2 gas and f2 gas 审中-公开用于产生用于产生f2气体和f2气体的f2气体方法的装置公开(公告)号：US20050006248A1
公开(公告)日：2005-01-13
申请号：US10497158
申请日：2002-12-09
Applicant: Tetsuro Tojo , Jiro Hiraiwa , Hitoshi Takebayashi , Yoshitomi Tada
Inventor： Tetsuro Tojo , Jiro Hiraiwa , Hitoshi Takebayashi , Yoshitomi Tada
Abstract: An F2 gas generating apparatus for generating a high purity F2 gas by subjecting an electrolytic bath made of KF.2HF to electrolysis is characterized by comprising a preparing system for preparing KF.2HF from KF or KF.HF, an HF supplying system for supplying HF into the electrolytic bath and the preparing system, and an F2 gas generating system for generating the F2 gas by subjecting KF.2HF prepared by the preparing system to electrolysis.
Abstract translation: 通过使由KF.2HF制成的电解浴进行电解而生成高纯度F2气体的F2气体发生装置的特征在于包括用于从KF或KF.HF制备KF.2HF的制备系统，用于提供HF的HF供应系统 进入电解槽和制备系统，以及通过使由制备系统制备的KF.2HF电解产生F2气体的F2气体发生系统。
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42.发明授权
公开(公告)号：US5894696A
公开(公告)日：1999-04-20
申请号：US825567
申请日：1997-03-31
Applicant: Shigeru Ando , Minehiro Kamiyama , Megumu Dohi , Osamu Yoshimoto , Tetsuro Tojo
Inventor： Shigeru Ando , Minehiro Kamiyama , Megumu Dohi , Osamu Yoshimoto , Tetsuro Tojo
CPC classification number: A01G7/02 , A01C23/042
Abstract: A method of efficiently supplying terrestrial plants with raising substances such as a solution comprises the steps of: producing a solution by an electrolysis of a water using a carbonaceous electrode; reducing the produced solution to minute particles or fine spray; and supplying the solution to the terrestrial plants including leaves entirely. An apparatus includes a container for storing water having at least a water inlet and a water outlet; a pair of electrodes comprising an anode and a cathode provided in the container, at least the anode being made of composition of carbonaceous materials and cured resins and molded into a plate-like form; a power supply to supply an electric current between the pair of electrodes to produce a solution by an electrolysis of the water; and a pump connected with the water outlet in the container for supplying the solution to the terrestrial plants.
Abstract translation: 有效地向陆生植物提供诸如溶液的物质的方法包括以下步骤：通过使用碳质电极电解水来产生溶液; 将生成的溶液还原成微小颗粒或精细喷雾; 并将溶液全部提供给包括叶子在内的陆地植物。 一种装置包括用于储存至少具有水入口和出水口的水的容器; 一对电极，其包括设置在容器中的阳极和阴极，至少阳极由碳质材料和固化树脂的组合物制成并成型为板状; 用于在所述一对电极之间提供电流以通过电解电解产生溶液的电源; 以及与容器中的出水口连接以将溶液供应给陆地植物的泵。
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43.发明授权
公开(公告)号：US5160415A
公开(公告)日：1992-11-03
申请号：US650536
申请日：1991-02-05
Applicant: Teruhisa Kondo , Tetsuro Tojo , Nobuatsu Watanabe
Inventor： Teruhisa Kondo , Tetsuro Tojo , Nobuatsu Watanabe
Abstract: A carbon electrode is disclosed comprising a porous carbon block and having a flexural strength of at least 50 MPa and exhibiting, on a linear sweep voltammogram obtained by subjecting the carbon electrode to potential sweep in concentrated sulfuric acid at 25.degree. C., a peak having a maximum current density at a potential of at level 1.2 V. This carbon electrode is substantially free from the danger of destruction and the danger of local breakage and partial coming-off and can advantageously be used as an anode not only for stably conducting the electrolysis of an HF-containing molten salt but also for producing a desired electrolysis product with high purity.
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44.发明授权公开(公告)号：US08673450B2
公开(公告)日：2014-03-18
申请号：US12084206
申请日：2006-10-12
Applicant: Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
Inventor： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
CPC classification number: H01J37/3171 , C04B35/522 , C04B35/532 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/31705
Abstract: The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 μΩ·m. Preferably, the R value obtained by dividing D band intensity at 1370 cm−1 by G band intensity at 1570 cm−1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.
Abstract translation: 本发明的问题在于，在高电流 - 低能量型离子注入装置中，提供一种用于离子注入装置的束线内部构件的石墨构件，该石墨构件可以显着地减少结合在晶片表面中的颗粒。 该问题可以通过本发明的石墨构件来解决，该石墨构件是用于离子注入装置的束线内部构件的石墨构件，其堆积密度不小于1.80Mg / m 3，并且电阻率 不超过9.5亩。 优选地，在石墨构件的自发断裂面的拉曼光谱中，将1370cm -1处的D带强度除以1570cm -1处的G带强度获得的R值不大于0.20。
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45.发明授权Purification method for carbon material containing carbon nanotubes, carbon material produced by the same method, and resin molding, fiber, heat sink, slider, material for field electron emission source, conduction aid for electrode, catalyst support 失效含有碳纳米管的碳材料的纯化方法，通过相同方法生产的碳材料，以及树脂成型，纤维，散热片，滑块，场电子发射源材料，电极导电助剂，催化剂载体公开(公告)号：US08628748B2
公开(公告)日：2014-01-14
申请号：US12531283
申请日：2008-03-07
Applicant: Yuji Takimoto , Naoto Ohta , Tetsuro Tojo
Inventor： Yuji Takimoto , Naoto Ohta , Tetsuro Tojo
CPC classification number: B01J21/185 , B01J23/83 , B82Y30/00 , B82Y40/00 , C01B32/17 , C01B2202/06 , H01J9/025 , H01J2201/30469
Abstract: A purification method for a carbon material containing carbon nanotubes is provided, which satisfies the following requirements: The method should prevent carbon nanotubes from being damaged, broken or flocculated; the method should be capable of removing the catalyst metal and carbon components other than the carbon nanotubes; and the method should be applicable to not only multi-walled carbon nanotubes but also single-walled carbon nanotubes which will undergo significant structural changes when heated to 1400° C. or higher temperatures. The method is characterized by including a carbon material preparation process for preparing a carbon material containing carbon nanotubes by an arc discharge method, using an anode made of a material containing at least carbon and a catalyst metal; and a halogen treatment process for bringing the carbon material into contact with a gas containing a halogen and/or halogen compound.
Abstract translation: 提供了一种含有碳纳米管的碳材料的净化方法，该方法满足以下要求：该方法应防止碳纳米管受损，破裂或絮凝; 该方法应能除去碳纳米管以外的催化剂金属和碳成分; 该方法不仅适用于多壁碳纳米管，而且还适用于单层碳纳米管，当加热至1400℃或更高温度时，其将经历显着的结构变化。 该方法的特征在于包括通过电弧放电法制备含有碳纳米管的碳材料的碳材料制备方法，使用由至少含有碳和催化剂金属的材料制成的阳极; 以及使碳材料与含有卤素和/或卤素化合物的气体接触的卤素处理方法。
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Patent Agency Ranking
公开(公告)号：US20120138476A1
公开(公告)日：2012-06-07
申请号：US13372751
申请日：2012-02-14
Applicant: Tetsuro TOJO , Jiro Hiraiwa , Hitoshi Takebayashi , Masashi Kodama
Inventor： Tetsuro TOJO , Jiro Hiraiwa , Hitoshi Takebayashi , Masashi Kodama
IPC: C25B1/24
CPC classification number: C25B1/245 , C25B11/0478 , C25B11/12
Abstract: It is a task of the present invention to provide an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt, the electrolytic apparatus being advantageous in that the electrolysis can be performed without the occurrence of the anode effect even at a high current density and without the occurrence of an anodic dissolution. In the present invention, this task has been accomplished by an electrolytic apparatus for producing fluorine or nitrogen trifluoride by electrolyzing a hydrogen fluoride-containing molten salt at an applied current density of from 1 to 1,000 A/dm2, the electrolytic apparatus using a conductive diamond-coated electrode as an anode.
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公开(公告)号：US20100064969A1
公开(公告)日：2010-03-18
申请号：US12278407
申请日：2007-02-07
Applicant: Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
Inventor： Jiro Hiraiwa , Osamu Yoshimoto , Hiroshi Hayakawa , Tetsuro Tojo , Tsuneyuki Okabe , Takanobu Asano , Shinichi Wada , Ken Nakao , Hitoshi Kato
IPC: H01L21/46
CPC classification number: F17D1/04 , C01B7/19 , F17C2250/032 , F17C2270/0518 , H01L21/67017 , H01L21/67276
Abstract: Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
Abstract translation: 氟气发生器通过包括存储在现场氟气发生器中产生的预定量的氟气的储罐的气体供给系统与半导体制造装置连接。 当一个或多个现场氟气发生器停止时，从储存预定量的氟气的储罐向半导体制造装置供应氟气，以保持半导体制造装置的操作。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置，并具有优异的成本性能的半导体制造工厂。
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48.发明申请公开(公告)号：US20090181527A1
公开(公告)日：2009-07-16
申请号：US12084206
申请日：2006-10-12
Applicant: Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
Inventor： Kiyoshi Saito , Fumiaki Yokoyama , Hitoshi Suzuki , Atsuko Ando , Tetsuro Tojo , Seiji Shinohara
CPC classification number: H01J37/3171 , C04B35/522 , C04B35/532 , C04B2235/5436 , C04B2235/656 , C04B2235/77 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/31705
Abstract: The problem of the present invention is to provide, in high current-low energy type ion implantation apparatuses, a graphite member for a beam line inner member of an ion implantation apparatus, which graphite member can markedly reduce particles incorporated in a wafer surface. This problem can be solved by the graphite member of the present invention, which is a graphite member for a beam line inner member of an ion implantation apparatus, which member having a bulk density of not less than 1.80 Mg/m3 and an electric resistivity of not more than 9.5 μΩ·m. Preferably, the R value obtained by dividing D band intensity at 1370 cm−1 by G band intensity at 1570 cm−1 in the Raman spectrum of a spontaneous fracture surface of the graphite member is not more than 0.20.
Abstract translation: 本发明的问题在于，在高电流 - 低能量型离子注入装置中，提供一种用于离子注入装置的束线内部构件的石墨构件，该石墨构件可以显着地减少结合在晶片表面中的颗粒。 该问题可以通过本发明的石墨构件来解决，该石墨构件是用于离子注入装置的束线内部构件的石墨构件，其堆积密度不小于1.80Mg / m 3，并且电阻率 不超过9.5亩。 优选地，在石墨构件的自发断裂面的拉曼光谱中，将1370cm -1处的D带强度除以1570cm -1处的G带强度获得的R值不大于0.20。
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公开(公告)号：US07316765B2
公开(公告)日：2008-01-08
申请号：US10879135
申请日：2004-06-30
Applicant: Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
Inventor： Tetsuro Tojo , Jiro Hiraiwa , Osamu Yoshimoto
IPC: C25B15/02
Abstract: An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.
Abstract translation: 一种用于控制熔盐电解器的装置，其中包含在电解槽中的固体电解液熔化，以自动获得允许电解的状态，该装置包括用于通过检测器检测电解槽状态变化的检测装置 以及调节装置，用于在使用检测装置之后将液体电解槽液位调整到允许电解的状态。
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公开(公告)号：US20070199828A1
公开(公告)日：2007-08-30
申请号：US11572938
申请日：2005-08-03
Applicant: Akimasa Tasaka , Masashi Kodama , Udai Tanaka , Hitoshi Takebayashi , Tetsuro Tojo , Atsuhisa Mimoto
Inventor： Akimasa Tasaka , Masashi Kodama , Udai Tanaka , Hitoshi Takebayashi , Tetsuro Tojo , Atsuhisa Mimoto
IPC: C25B1/00
Abstract: It is an object of the present invention to produce a carbon electrode having a texture with decreased pores and having relatively high mechanical strength by only being subjected to a process where a specified metal fluoride is mixed with a carbon material, then the mixture is baked, and to provide a carbon electrode for producing gaseous nitrogen trifluoride having a long life without the polarization of the carbon electrode even in any case of an NH4F—KF—HF series and an NH4F—HF series. The carbon electrode for producing gaseous nitrogen trifluoride of the present invention has a dense texture with an average pore size of 0.5 μm or less. It is preferable that the carbon electrode contains a carbonaceous material, and at least one of more kinds selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material. Also, it is preferable that the content of at least one of more kinds selected from the magnesium fluoride and the aluminum fluoride is 3 to 10 wt %.
Abstract translation: 本发明的目的是通过仅将特定的金属氟化物与碳材料混合的方法制造具有孔隙减小和机械强度相对较高的织构的碳电极，然后将该混合物烘烤， 并且即使在NH 4 F-KF-HF系列和NH 4系列的任何情况下，也可提供一种具有长寿命而不具有碳电极极化性的气态三氟化氮的碳电极 F-HF系列。 本发明的生产气态三氟化氮的碳电极具有平均孔径为0.5μm以下的致密组织。 优选碳电极含有碳质材料和熔点不低于碳质材料的烧成温度的氟化镁和氟化铝中的至少一种。 此外，从氟化镁和氟化铝中选出的至少一种的含量优选为3〜10重量％。
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