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41.发明授权Microfluidic channels with integrated ultrasonic transducers for temperature measurement and method 失效具有集成超声换能器的微流体通道用于温度测量和方法公开(公告)号：US06789426B2
公开(公告)日：2004-09-14
申请号：US10198290
申请日：2002-07-17
IPC分类号： G01H500
CPC分类号： G01N29/223 , G01H5/00 , G01K11/24 , G01N29/024 , G01N29/326 , G01N2291/02881
摘要： There is described a method and apparatus for measuring temperature of a fluid in a microchannel of the type having spaced walls. An ultrasonic transducer transmits ultrasonic waves transmitted from one wall to the opposite wall. A processor determines the time-of-flight of the ultrasonic waves from the one wall and reflected to the opposite wall to the one wall. The processor converts the time-of-flight to velocity by dividing the distance between walls by the time-of-flight. The processor converts velocity to temperature from the relationship of velocity to temperature in the fluid.
摘要翻译： 描述了一种用于测量具有间隔壁的类型的微通道中的流体的温度的方法和装置。 超声波换能器将从一个壁传输的超声波传送到相对的壁。 处理器确定来自一个壁的超声波的飞行时间，并反射到与该墙壁相对的壁。 处理器通过将墙壁之间的距离除以飞行时间将飞行时间转换为速度。 处理器将速度从流体中的速度关系转换为温度。
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42.发明授权Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling 有权具有减小的交叉耦合的电容式微机械超声换能器阵列公开(公告)号：US06262946B1
公开(公告)日：2001-07-17
申请号：US09408156
申请日：1999-09-29
IPC分类号： H04R1900
CPC分类号： B06B1/0292 , G10K11/002
摘要： There is described a capacitive micromachined ultrasonic transducer array which is configured to minimize the excitation and propagation of plate waves traveling in the substrate and ultrasonic waves propagating at the interface between the array surface and the immersion fluid.
摘要翻译： 描述了一种电容微机械超声换能器阵列，其被配置为最小化在基板中行进的板波的激发和传播以及在阵列表面和浸没流体之间的界面处传播的超声波。
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公开(公告)号：US5996415A
公开(公告)日：1999-12-07
申请号：US847144
申请日：1997-04-30
申请人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
发明人： Fred E. Stanke , Butrus T. Khuri-Yakub , Hung Pham , Talat Hasan
CPC分类号： G01N29/46 , G01N29/041 , G01N29/07 , G01N29/449 , G01N2291/02854 , G01N2291/02881 , G01N2291/0423 , G01N2291/0427 , G01N2291/044 , G01N2291/102 , G01N2291/2698
摘要： An apparatus and method are disclosed for characterizing semiconductor wafers or other test objects that can support acoustic waves. Source and receiving transducers are configured in various arrangements to respectively excite and detect acoustic waves (e.g., Lamb waves) in a wafer to be characterized. Signals representing the detected waves are digitally processed and used to compute a measurement set correlated with the waves' velocity in the wafer. A characterization sensitivity is provided that describes how different wafer characteristics of interest vary with changes in the propagation of the acoustic waves. Using the characterization sensitivity and measurement sets computed at a setup time when all wafer characteristics are known and one or more process times when at least one of the characteristics is not known the perturbation in wafer characteristics between the setup and the process times can be determined. Characterization accuracy is improved by a wafer calibration procedure wherein measurement offsets from known conditions are determined for each wafer being characterized. An apparatus and technique are disclosed for correcting for anisotropy of acoustic wave velocity due to the direction of wave propagation with respect to a preferred crystallographic axis of the wafer. An apparatus and technique are also described for measuring wafer temperature using a single transducer whose temperature is related to the temperature of the wafer and, optionally, resonator structures. For characterization steps that occur when the wafer is chucked, a chuck structure is described that reduces the likelihood of the chuck interfering with the waves in the wafer.
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公开(公告)号：US4909082A
公开(公告)日：1990-03-20
申请号：US281941
申请日：1988-12-06
摘要： A shear acoustic transducer-lens system in which a shear polarized piezoelectric material excites shear polarized waves at one end of a buffer rod having a lens at the other end which excites longitudinal waves in a coupling medium by mode conversion at selected locations on the lens.
摘要翻译： 剪切式声学传感器透镜系统，其中剪切极化压电材料在另一端具有透镜的缓冲杆的一端处激发剪切极化波，其通过在透镜上的选定位置处的模式转换激发耦合介质中的纵波。
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45.发明授权Method and apparatus for ultrasound assisted local delivery of drugs and biomarkers 有权用于超声辅助局部递送药物和生物标志物的方法和装置公开(公告)号：US08852104B2
公开(公告)日：2014-10-07
申请号：US12798982
申请日：2010-04-14
CPC分类号： A61B5/0095 , A61B5/0068 , A61B5/0084 , A61B8/4281 , A61B8/4483 , A61M37/0092
摘要： The current invention provides an ultrasound-assisted delivery device, that includes a focused ultrasound transducer having an ultrasound focal point, a real-time imaging device having an imaging focal point, and a therapeutic delivery device, where the transducer and the imaging device are integrated with the delivery device, and the ultrasound focal point coincides with the imaging focal point, where the delivery device and transducer are disposed to provide an unobstructed imaging path for the real-time imaging device. The invention further includes a scanning optical or laser beam having a focal point disposed to sweep across the target, where the delivery device is disposed to deliver an optical contrast material to the target, and the scanning focal point coincides with the ultrasound and imaging focal points, where the target or the optical contrast material react to the scanning beam to generate at least one interface signal.
摘要翻译： 本发明提供了一种超声辅助输送装置，其包括具有超声焦点的聚焦超声换能器，具有成像焦点的实时成像装置和治疗递送装置，其中所述换能器和成像装置被集成 并且超声焦点与成像焦点重合，其中输送装置和换能器被设置成为实时成像装置提供无障碍的成像路径。 本发明还包括扫描光学或激光束，其具有设置成扫过靶的焦点，其中输送装置设置成将光学对比材料输送到靶，并且扫描焦点与超声波和成像焦点重合 ，其中所述目标或所述光学对比材料对所述扫描光束起反应以产生至少一个接口信号。
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公开(公告)号：US08843190B2
公开(公告)日：2014-09-23
申请号：US13554985
申请日：2012-07-20
CPC分类号： A61B5/0095 , A61B5/0507
摘要： Surface selective photoacoustic (PA) medical imaging is introduced. Surface selective PA imaging is responsive to surface features and does not image sub-surface features, in contrast to conventional PA imaging. The surface PA signal can be considerably larger than the bulk PA signal, for an air-coupled (or gas-coupled) acoustic transducer. Distinguishing these two signals based on time of arrival at the transducer can further distinguish the two signals. This approach provides numerous advantages. Non-contact imaging simplifies and expedites imaging, and can serve as a replacement for visual inspection by physicians. Applications include skin screening and endoscopy.
摘要翻译： 介绍了表面选择性光声（PA）医学成像。 与传统的PA成像相比，表面选择性PA成像对表面特征有反应，并且不影像亚表面特征。 对于空气耦合（或气体耦合）的声换能器，表面PA信号可以大大地大于体积PA信号。 基于到达换能器的时间区分这两个信号可以进一步区分两个信号。 这种方法提供了许多优点。 非接触式成像简化并加速成像，可作为医生进行视觉检查的替代品。 应用包括皮肤筛查和内窥镜检查。
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公开(公告)号：US07846102B2
公开(公告)日：2010-12-07
申请号：US12288575
申请日：2008-10-20
CPC分类号： H02N1/008 , B06B1/0292 , Y10T29/49005
摘要： A capacitive micromachined ultrasonic transducer (CMUT) array connected to a separate electronic unit is provided. The CMUT array includes at least two active elements, a ground element at the array end, and a non-active element having isolation trenches disposed between the active and ground elements. The active element includes a doped first silicon layer, a doped second silicon layer, and a first insulating layer disposed there between. A cavity is in the first silicon layer having a cross section that includes vertical portions disposed at each end of a horizontal portion, and the vertical portion spans from the first insulating layer through the first silicon layer such that a portion of the first silicon layer is isolated by the first insulating layer and the cavity. A membrane layer on the first silicon layer spans the cavity. A bottom electrode is disposed on the bottom of the second silicon layer.
摘要翻译： 提供连接到单独的电子单元的电容微机械超声换能器（CMUT）阵列。 CMUT阵列包括至少两个有源元件，阵列端的接地元件以及设置在有源和接地元件之间的具有隔离沟道的非有源元件。 有源元件包括掺杂的第一硅层，掺杂的第二硅层和设置在其间的第一绝缘层。 空腔在第一硅层中，其横截面包括设置在水平部分的每一端处的垂直部分，并且垂直部分跨越第一绝缘层穿过第一硅层，使得第一硅层的一部分为 由第一绝缘层和空腔隔离。 第一硅层上的膜层跨越空腔。 底部电极设置在第二硅层的底部。
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48.发明授权Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion 有权用于电容式微机械超声换能器的声学串扰降低公开(公告)号：US07745973B2
公开(公告)日：2010-06-29
申请号：US11789210
申请日：2007-04-23
IPC分类号： H01L41/08
CPC分类号： B06B1/0292
摘要： A reduced crosstalk capacitive micromachined ultrasonic transducer (CMUT) array is provided. The CMUT array has at least two CMUT array elements deposited on a substrate, at least one CMUT cell in the array element, a separation region between adjacent CMUT array elements, and a membrane formed in the separation region. The membrane reduces crosstalk between adjacent array elements, where the crosstalk is a dispersive guided mode of an ultrasonic signal from the CMUT propagating in a fluid-solid interface of the CMUT array. Each cell has an insulation layer deposited to the substrate. A cell membrane layer is deposited to the insulation layer, where the cell membrane layer has a vacuum gap therein. The cells further have an electrode layer deposited to a portion of the membrane layer, and a passivation layer deposited to the electrode layer, the cell membrane layer and to the insulation layer.
摘要翻译： 提供了减少的串扰电容微机械超声波换能器（CMUT）阵列。 CMUT阵列具有沉积在衬底上的至少两个CMUT阵列元件，阵列元件中的至少一个CMUT单元，相邻CMUT阵列元件之间的分离区域和形成在分离区域中的膜。 膜减少相邻阵列元件之间的串扰，其中串扰是来自在CMUT阵列的流体 - 固体界面中传播的CMUT的超声信号的色散引导模式。 每个单元具有沉积到基板上的绝缘层。 细胞膜层沉积到绝缘层，其中细胞膜层在其中具有真空间隙。 电池还具有沉积到膜层的一部分的电极层和沉积到电极层，细胞膜层和绝缘层的钝化层。
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公开(公告)号：US20090292208A1
公开(公告)日：2009-11-26
申请号：US12380889
申请日：2009-03-03
IPC分类号： A61B8/06
CPC分类号： A61B8/06 , A61B5/02007 , G01S15/8927 , G01S15/8979 , G01S15/8984
摘要： Peak blood velocity measurement for automated stenosis detection is provided. Ultrasound measurements of the peak blood velocity are corrected by a calculation of the Doppler angle, which exists from misalignment of the ultrasound transducer axis and the true blood velocity. The direction of the blood velocity and the Doppler angle are found by imaging a set of planar cross-sections of a blood vessel, such as the carotid artery, to obtain velocity maps of the blood flowing in the blood vessel. Peak blood velocity can be correlated with an amount of stenosis therefore accurate peak blood velocity measurements are necessary for medical diagnosis. Automated stenosis detection allows for implementation in many medical settings. A capacitive micromachined ultrasound transducer array is also provided to measure the planar cross-sectional images.
摘要翻译： 提供自动狭窄检测的峰值血液速度测量。 通过计算由超声换能器轴的未对准和真实血液速度存在的多普勒角来校正峰值血液速度的超声测量。 通过对血管如颈动脉的一组平面横截面进行成像来获得血液速度和多普勒角的方向，以获得在血管中流动的血液的速度图。 峰值血流速度可以与狭窄量相关，因此精确的峰值血液速度测量对于医学诊断是必需的。 自动狭窄检测允许在许多医疗设置中实现。 还提供电容微加工超声换能器阵列以测量平面横截面图像。
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公开(公告)号：US20090140357A1
公开(公告)日：2009-06-04
申请号：US12288344
申请日：2008-10-17
CPC分类号： H02N1/008 , B06B1/0292 , Y10T29/49005
摘要： A high temperature micromachined ultrasonic transducer (HTCMUT) is provided. The HTCMUT includes a silicon on insulator (SOI) substrate having a doped first silicon layer, a doped second silicon layer, and a first insulating layer disposed between the first and second silicon layers. A cavity is disposed in the first silicon layer, where a cross section of the cavity includes a horizontal cavity portion on top of vertical cavity portions disposed at each end of the horizontal cavity portion, and the vertical cavity portion spans from the first insulating layer through the first silicon layer, such that a portion of the first silicon layer is isolated by the first insulating layer and the cavity. A membrane layer is disposed on the first silicon layer top surface, and spans across the cavity. A bottom electrode is disposed on the bottom of the second silicon layer.
摘要翻译： 提供了一种高温微加工超声波换能器（HTCMUT）。 HTCMUT包括具有掺杂的第一硅层，掺杂的第二硅层和设置在第一和第二硅层之间的第一绝缘层的绝缘体上硅（SOI）衬底。 空腔设置在第一硅层中，其中空腔的横截面包括在设置在水平空腔部分的每个端部处的垂直空腔部分的顶部上的水平空腔部分，并且垂直空腔部分从第一绝缘层穿过 第一硅层，使得第一硅层的一部分被第一绝缘层和空腔隔离。 膜层设置在第一硅层顶表面上，跨越空腔。 底部电极设置在第二硅层的底部。
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