SYSTEM AND METHODS FOR HERMETIC SEALING OF POST MEDIA-FILLED MEMS PACKAGE
    41.
    发明申请
    SYSTEM AND METHODS FOR HERMETIC SEALING OF POST MEDIA-FILLED MEMS PACKAGE 有权
    用于封装后封装的MEMS封装的系统和方法

    公开(公告)号:US20050184382A1

    公开(公告)日:2005-08-25

    申请号:US10783849

    申请日:2004-02-19

    摘要: This invention provides a system and method for hermetically sealing a post media-filled package with a metal cap. The method can include the operation of filling a MEMS package through a fill port with at least one medium. A further operation can be plugging the fill port in the MEMS package with a sealant. Another operation can include depositing a metal cap over the sealant to hermetically seal the fill port.

    摘要翻译: 本发明提供了一种用金属盖密封填充后填充包装的系统和方法。 该方法可以包括通过具有至少一种介质的填充端口填充MEMS封装的操作。 进一步的操作可以用密封剂堵塞MEMS封装中的填充端口。 另一种操作可以包括在密封剂上沉积金属盖以气密地密封填充口。

    Substrate etch method and device
    42.
    发明授权
    Substrate etch method and device 失效
    基板蚀刻方法和器件

    公开(公告)号:US06933237B2

    公开(公告)日:2005-08-23

    申请号:US10178033

    申请日:2002-06-21

    CPC分类号: H01L21/76898

    摘要: The present invention provides methods and an etched substrate. In one embodiment, a method for etching a substrate is provided which comprises creating an etch hole in the substrate using a through the substrate etch and forming a junction on an interior of the etched hole for forming a semiconductor device therein.

    摘要翻译: 本发明提供了方法和蚀刻的衬底。 在一个实施例中,提供了一种用于蚀刻衬底的方法,其包括通过衬底蚀刻在衬底中产生蚀刻孔,并在其上形成半导体器件的蚀刻孔内部形成结。

    Wafer packaging and singulation method
    43.
    发明申请
    Wafer packaging and singulation method 有权
    晶圆包装和切片方法

    公开(公告)号:US20050176166A1

    公开(公告)日:2005-08-11

    申请号:US10776084

    申请日:2004-02-11

    摘要: A method for packaging and singulating a wafer having a plurality of micro devices includes providing a multi-lid substrate having a trench having intersection portions and non-intersection portions formed on a first side of the multi-lid substrate. The multi-lid substrate is coupled to the wafer such that the intersection portions of the trench pattern extend adjacent to at least three micro devices. Portions of the multi-lid substrate between a second side of the multi-lid substrate and the trench pattern are removed while the multi-lid substrate is coupled to the wafer.

    摘要翻译: 一种用于封装和分离具有多个微器件的晶片的方法包括提供具有沟槽的多盖基板,所述沟槽具有形成在所述多盖基板的第一侧上的交叉部分和非交叉部分。 多盖基板耦合到晶片,使得沟槽图案的相交部分相邻于至少三个微器件延伸。 在多盖基板与晶片连接的同时,多盖基板的多盖基板的第二面与沟槽图案之间的部分被去除。

    Substrate for fluid ejection device
    45.
    发明授权
    Substrate for fluid ejection device 失效
    用于流体喷射装置的基板

    公开(公告)号:US06554403B1

    公开(公告)日:2003-04-29

    申请号:US10135297

    申请日:2002-04-30

    IPC分类号: B41J205

    摘要: A substrate for a fluid ejection device includes a first side, a second side opposite the first side, spaced etch stops extending into the substrate from the first side, and a fluidic channel communicating with the first side and the second side, wherein a first portion of the fluidic channel extends from the first side toward the second side between the spaced etch stops and a second portion of the fluidic channel extends from the second side toward the first side to the spaced etch stops.

    摘要翻译: 用于流体喷射装置的衬底包括第一侧,与第一侧相对的第二侧,间隔开的蚀刻停止从第一侧延伸到衬底中,以及与第一侧和第二侧连通的流体通道,其中第一部分 流体通道从间隔开的蚀刻停止件之间的第一侧向第二侧延伸,并且流体通道的第二部分从第二侧朝向第一侧延伸到间隔开的蚀刻停止点。

    Method of fabricating micromachined ink feed channels for an inkjet printhead
    46.
    发明授权
    Method of fabricating micromachined ink feed channels for an inkjet printhead 失效
    制造用于喷墨打印头的微加工墨水供给通道的方法

    公开(公告)号:US06534247B2

    公开(公告)日:2003-03-18

    申请号:US09755837

    申请日:2001-01-03

    IPC分类号: H01J201

    摘要: An inkjet print cartridge comprising a printhead that is formed using a sequence of etch process steps is described. The first etch of the two etch step process is comprised of a wet chemical etch. A dry etch process follows. Both etch steps are consecutively initiated from the back of the wafer. The fabrication process described offers several advantages including precise dimensional control of the ink feed channel, greater packing density of ink ejectors disposed in the printhead and greater printing speed. Additionally, the time required to manufacture the printhead, in contrast to a conventional printhead, is reduced.

    摘要翻译: 描述了包括使用一系列蚀刻工艺步骤形成的打印头的喷墨打印盒。 两个蚀刻步骤工艺的第一次蚀刻由湿化学蚀刻构成。 以下是干蚀刻工艺。 两个蚀刻步骤从晶片的背面连续地起始。 所描述的制造工艺提供了几个优点,包括油墨供给通道的精确尺寸控制,设置在打印头中的喷墨器的更大包装密度和更高的打印速度。 此外,与常规打印头相比,制造打印头所需的时间减少了。

    Method for forming tapered inkjet nozzles
    48.
    发明授权
    Method for forming tapered inkjet nozzles 失效
    形成锥形喷墨喷嘴的方法

    公开(公告)号:US5417897A

    公开(公告)日:1995-05-23

    申请号:US308329

    申请日:1994-03-19

    摘要: A single mask is used to form a tapered nozzle in a polymer nozzle member using laser ablation. In one embodiment of the mask, clear portions of the mask, corresponding to the nozzle pattern to be formed, each incorporate a variable-density dot pattern, where the opaque dots act to partially shield the underlying polymer nozzle member from the laser energy. This partial shielding of the nozzle member under the dot pattern results in the nozzle member being ablated to less of a depth than where there is no shielding. By selecting the proper density of opaque dots around the peripheral portions of the mask openings, the central portion of each nozzle formed in the polymer nozzle member will be completely ablated through, and the peripheral portions of the nozzle will be only partially ablated through. By increasing the density of dots toward the periphery of each mask opening, the resulting nozzle may be formed to have any tapered shape. Other mask patterns are also described.

    摘要翻译: 使用单个掩模在使用激光烧蚀的聚合物喷嘴构件中形成锥形喷嘴。 在掩模的一个实施例中,对应于要形成的喷嘴图案的掩模的透明部分各自包含可变密度点图案,其中不透明点用于部分地屏蔽下面的聚合物喷嘴构件与激光能量。 喷嘴构件在点图案下的部分屏蔽导致喷嘴构件被烧蚀到比没有屏蔽的那个深度更小的深度。 通过在掩模开口的周边部分周围选择适当的不透明点密度,形成在聚合物喷嘴构件中的每个喷嘴的中心部分将被完全烧蚀穿过,并且喷嘴的周边部分将仅被部分地烧蚀通过。 通过向每个掩模开口的周边增加点的密度,所得到的喷嘴可以形成为具有任何锥形形状。 还描述了其他掩模图案。

    Signal swing trimming apparatus and method thereof
    49.
    发明授权
    Signal swing trimming apparatus and method thereof 有权
    信号摆动修整装置及其方法

    公开(公告)号:US08502589B2

    公开(公告)日:2013-08-06

    申请号:US12626630

    申请日:2009-11-26

    IPC分类号: G06F13/14

    CPC分类号: G06F13/4072 G06F2213/0042

    摘要: A signal swing trimming apparatus calibrates a swing level of an output signal generated from a transmitting device to a receiving device including: a comparing device coupled to the output signal for comparing the swing level of the output signal with a target swing level and generating a comparison output signal, and an adjusting device coupled to the comparing device and the transmitting device for controlling the transmitting device to adjust the swing level of the output signal according to the comparison output signal, wherein the signal swing trimming apparatus is configured to calibrate the swing level of the output signal during a hand-shake process between the transmitting device and the receiving device.

    摘要翻译: 信号摆幅修整装置将从发送装置产生的输出信号的摆幅电平校准到接收装置,包括:与输出信号耦合的比较装置,用于将输出信号的摆幅电平与目标摆动电平进行比较,并产生比较 输出信号,以及耦合到所述比较装置和所述发送装置的调整装置,用于根据所述比较输出信号控制所述发送装置调整所述输出信号的摆动电平,其中所述信号摆幅修整装置被配置为校准所述摆动电平 在发送设备和接收设备之间的握手过程中的输出信号。