公开(公告)号：US20110211796A1

公开(公告)日：2011-09-01

申请号：US13030308

申请日：2011-02-18

申请人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

发明人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC分类号： G02B6/036

CPC分类号： G02B6/03627 ,  G02B6/02014 ,  G02B6/02242 ,  G02B6/02266

摘要： An optical fiber having both low macrobend loss and low microbend loss. The fiber has a first inner cladding region having an outer radius r2>8 microns and refractive index Δ2 and a second outer cladding region surrounding the inner cladding region having refractive index Δ3, wherein Δ1>Δ3>Δ2. The difference between Δ3 and Δ2 is greater than 0.01. The fiber exhibits a 22 m cable cutoff less than or equal to 1260 nm, and r1/r2 is greater or equal to 0.25.

摘要翻译： 具有低弯曲损耗和低微弯损耗的光纤。 纤维具有外半径r2> 8微米且折射率＆Dgr2的第一内包层区域和围绕具有折射率＆Dgr; 3的内包层区域的第二外包层区域，其中＆Dgr | 1＆Dgr; 3＆Dgr ; 2。 Dgr 3和Dgr之间的差异大于0.01。 纤维表现出小于或等于1260nm的22m电缆断线，r1 / r2大于或等于0.25。

公开(公告)号：US20110129191A1

公开(公告)日：2011-06-02

申请号：US12872051

申请日：2010-08-31

申请人： Scott Robertson Bickham ,  Dana Craig Bookbinder ,  Ming-Jun Li ,  Snigdharaj Kumar Mishra ,  Daniel Aloysius Nolan ,  Pushkar Tandon

发明人： Scott Robertson Bickham ,  Dana Craig Bookbinder ,  Ming-Jun Li ,  Snigdharaj Kumar Mishra ,  Daniel Aloysius Nolan ,  Pushkar Tandon

IPC分类号： G02B6/036

CPC分类号： G02B6/02019 ,  G02B6/02242 ,  G02B6/02266 ,  G02B6/02357 ,  G02B6/02366 ,  G02B6/0365

摘要： An optical fiber with a glass core extending from a centerline to a radius R1 wherein R1 is greater than about 5 μm; a glass cladding surrounding and in contact with the core. The cladding has a depressed annular region, the inner radius of said depressed annular region is spaced from said core a distance greater than 1 μm and less or equal to than 5 μm. The core and the cladding provide a fiber with cable cutoff less than 1550 nm, and an effective area at 1550 nm greater than 120 μm2 and bend loss of ≦0.7 dB/turn on a 20 mm diameter mandrel.

摘要翻译： 具有从中心线延伸到半径R1的玻璃芯的光纤，其中R1大于约5μm; 围绕并与芯接触的玻璃包层。 包层具有凹陷的环形区域，所述凹陷的环形区域的内半径与所述芯部间隔大于1μm且小于或等于5μm。 芯和包层提供了一种光缆，其电缆截止值小于1550nm，在1550nm处的有效面积大于120μm2，并且在20mm直径的心轴上具有0.7dB /的弯曲损耗。

公开(公告)号：US20100310219A1

公开(公告)日：2010-12-09

申请号：US12795066

申请日：2010-06-07

申请人： Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Ming-Jun Li ,  Peter Joseph Ronco ,  Pushkar Tandon

发明人： Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Ming-Jun Li ,  Peter Joseph Ronco ,  Pushkar Tandon

IPC分类号： G02B6/02 ,  B26F3/00 ,  B24B1/00 ,  G02B6/46

CPC分类号： G02B6/02376 ,  C03B37/01446 ,  C03B37/01453 ,  C03B2201/31 ,  C03B2203/14 ,  C03B2203/42 ,  G02B6/02357 ,  G02B6/02366 ,  G02B6/0365 ,  G02B6/25 ,  Y10T225/10

摘要： A microstructured optical fiber for transmitting optical signals comprised of light, the optical fiber comprising: a core region disposed about a longitudinal centerline and having a refractive index profile with a first refractive index, and a cladding region surrounding the core region, the cladding region comprising an annular void-containing region comprised of non-periodically disposed voids; wherein maximum void diameter in nm is given by Dmax and the maximum void length in cm is not greater than 2.5×105×(dmax)−1.7.

摘要翻译： 一种用于透射由光构成的光信号的微结构光纤，所述光纤包括：围绕纵向中心线布置且具有第一折射率的折射率分布的芯区域和围绕所述芯区域的包层区域，所述包层区域包括 由非周期性设置的空隙构成的环形空隙区域; 其中以Dmax给出最大空穴直径（nm），最大空隙长度（cm）不大于2.5×105×（dmax）-1.7。

公开(公告)号：US20100272406A1

公开(公告)日：2010-10-28

申请号：US12830826

申请日：2010-07-06

申请人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Daniel Aloysius Nolan

发明人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Daniel Aloysius Nolan

IPC分类号： G02B6/028

CPC分类号： G02B6/14 ,  C03B2203/14 ,  C03B2203/23 ,  C03B2203/26 ,  C03B2203/28 ,  G02B6/02333 ,  G02B6/02342 ,  G02B6/0288 ,  G02B6/032 ,  G02B6/03627 ,  G02B6/03633 ,  G02B6/0365

摘要： Bend resistant multimode optical fibers are disclosed herein. Multimode optical fibers disclosed herein comprise a core region and a cladding region surrounding and directly adjacent to the core region, the cladding region comprising a depressed-index annular portion comprising a depressed relative refractive index.

摘要翻译： 本文公开了抗弯曲多模光纤。 本文公开的多模光纤包括围绕并直接邻近芯区域的芯区域和包层区域，所述包层区域包括包含凹陷相对折射率的凹陷折射率环形部分。

公开(公告)号：US07680381B1

公开(公告)日：2010-03-16

申请号：US12278000

申请日：2008-11-25

申请人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Ji Wang

发明人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Ji Wang

IPC分类号： G02B6/036

CPC分类号： G02B6/03638 ,  G02B6/03633

摘要： An optical fiber includes a core, an inner cladding and a low index ring of silica-based glass. The core comprises silica-based glass, an index of refraction n1, and a relative refractive index percent Δ1% relative to pure silica glass. The inner cladding surrounds the core and comprises an index of refraction n2 and a relative refractive index percent Δ2% relative to pure silica glass, wherein Δ1%>Δ2% and the difference between Δ1% and Δ2% is greater than about 0.1%. The low index ring surrounds the inner cladding and comprises silica glass co-doped with boron and fluorine, a radial thickness of less than about 20 μm, an index of refraction n3 and a third relative refractive index percent change Δ3% relative to pure silica glass, wherein Δ2%>Δ3% and Δ3% is less than about −1.0%.

摘要翻译： 光纤包括芯，内包层和二氧化硅基玻璃的低折射率环。 核心包括二氧化硅基玻璃，折射率n1，相对折射率百分数＆Dgr;相对于纯石英玻璃为1％。 内部包层围绕芯部并且包括相对于纯石英玻璃的折射率n2和相对折射率百分比＆Dgr; 2％，其中＆Dgr; 1％>＆Dgr; 2％，并且Dgr; 1％和＆Dgr之间的差异; 2％大于约0.1％。 低折射率环围绕内包层并且包括与硼和氟共掺杂的二氧化硅玻璃，径向厚度小于约20μm，折射率n3和第三相对折射率百分比变化＆Dgr;相对于纯度3％ 石英玻璃，其中＆Dgr; 2％>＆Dgr; 3％和＆Dgr; 3％小于约-1.0％。

公开(公告)号：US20100004113A1

公开(公告)日：2010-01-07

申请号：US12556848

申请日：2009-09-10

申请人： Douglas Clippinger Allan ,  Dana Craig Bookbinder ,  Ulrich W. H. Neukirch ,  Charlene Marie Smith

发明人： Douglas Clippinger Allan ,  Dana Craig Bookbinder ,  Ulrich W. H. Neukirch ,  Charlene Marie Smith

IPC分类号： C03C3/04

CPC分类号： C03B19/1453 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C3/06 ,  C03C2201/23 ,  C03C2203/54

摘要： Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.

摘要翻译： 公开了具有低偏振诱发双折射的合成石英玻璃，用于制造玻璃的方法和包含由玻璃制成的光学元件的光刻系统。 当经受约193nm的准分子激光脉冲时，石英玻璃在633nm处测量的偏振诱发双折射小于约0.1nm / cm，具有约40μJ·cm -2脉冲-1的注量和脉冲长度 对于5x109个脉冲，约25ns。

公开(公告)号：US20090169163A1

公开(公告)日：2009-07-02

申请号：US12250987

申请日：2008-10-14

申请人： John Steele Abbott, III ,  Scott Robertson Bickham ,  Dana Craig Bookbinder ,  Ming-Jun Li

发明人： John Steele Abbott, III ,  Scott Robertson Bickham ,  Dana Craig Bookbinder ,  Ming-Jun Li

IPC分类号： G02B6/02

CPC分类号： G02B6/0288 ,  G02B6/0365

摘要： Bend resistant multimode optical fibers are disclosed herein. Multimode optical fibers disclosed herein comprise a core region and a cladding region surrounding and directly adjacent to the core region, the cladding region comprising a depressed-index annular portion comprising a depressed relative refractive index which is spaced from the core at least 0.5 microns and less than 4 microns.

公开(公告)号：US20090148627A1

公开(公告)日：2009-06-11

申请号：US12370693

申请日：2009-02-13

申请人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

发明人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Ulrich Wilhelm Heinz Neukirch

IPC分类号： B05D1/00

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。

公开(公告)号：US07534733B2

公开(公告)日：2009-05-19

申请号：US11064341

申请日：2005-02-22

申请人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Susan Lee Schiefelbein

发明人： Dana Craig Bookbinder ,  Richard Michael Fiacco ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Susan Lee Schiefelbein

IPC分类号： C03C3/06 ,  C03B19/00 ,  C03B37/00

CPC分类号： C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/32 ,  C03C2201/21 ,  C03C2201/23

摘要： Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633 nm, of between about −1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70 μJ/cm2. The synthetic silica glass optical material of the present invention comprises OH concentration levels of less than about 600 ppm, preferably less than 200 ppm, and H2 concentration levels less than about 5.0×1017 molecules/cm3,and preferably less than about 2.0×1017 molecules/cm3.

摘要翻译： 公开了一种合成石英玻璃光学材料，其特征在于波长小于约250nm，特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤， 具体地，在经受约193nm处的激光器操作的100亿脉冲和大约70μJ/ cm 2的能量密度下，在633nm处测量的激光感应波前失真在约-1.0和1.0nm / cm之间。 本发明的合成石英玻璃光学材料包含小于约600ppm，优选小于200ppm的OH浓度水平和小于约5.0×10 17分子/ cm 3的H 2浓度水平，优选小于约2.0×10 17分子/ cm 3 。

公开(公告)号：US07526166B2

公开(公告)日：2009-04-28

申请号：US11701287

申请日：2007-01-31

申请人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Michael Thomas Murtagh ,  Daniel Aloysius Nolan ,  Pushkar Tandon ,  Ji Wang

发明人： Dana Craig Bookbinder ,  Ming-Jun Li ,  Michael Thomas Murtagh ,  Daniel Aloysius Nolan ,  Pushkar Tandon ,  Ji Wang

IPC分类号： G02B6/32

CPC分类号： G02B6/02366 ,  G02B6/024 ,  G02B6/03633

摘要： An optical fiber comprising: a silica based core having a first index of refraction n1; and at least one silica based cladding surrounding the core, the at least one silica based cladding comprising index lowering non-periodic voids containing a gas, wherein at least 80% of said voids have a maximum cross-sectional dimension of less than 2000 nm, and the NA of the fiber layer situated immediately adjacent to and inside said at least one silica based cladding is at least 0.2.

摘要翻译： 一种光纤，包括：具有第一折射率n1的二氧化硅基核; 以及包围所述芯的至少一个二氧化硅基包层，所述至少一个二氧化硅基包层包含含有气体的折射率降低的非周期性空隙，其中至少80％的所述空隙具有小于2000nm的最大横截面尺寸， 并且位于所述至少一个基于二氧化硅的包层内和所述至少一个二氧化硅基包层内的所述纤维层的NA为至少0.2。