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1.发明授权Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same 有权含氧化锑的石英玻璃，光学构件和包括其的光刻系统及其制造方法公开(公告)号：US07635658B2
公开(公告)日：2009-12-22
申请号：US11583619
申请日：2006-10-19
IPC分类号： C03C3/06 , C03C15/00 , C03B19/06 , C03B37/00 , C03B37/014
CPC分类号： C03C3/06 , C03B19/06 , C03B19/066 , C03B19/12 , C03B19/14 , C03B19/1453 , C03B20/00 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/08 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/32 , C03B2201/42 , C03C4/0085 , C03C2201/11 , C03C2201/12 , C03C2201/22 , C03C2201/23
摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。
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2.发明申请DEUTEROXYL-DOPED SILICA GLASS, OPTICAL MEMBER AND LITHOGRAPHIC SYSTEM COMPRISING SAME AND METHOD OF MAKING SAME 审中-公开脱氧硅烷二氧化硅玻璃，光学部件和包含其的光刻系统及其制造方法公开(公告)号：US20090148627A1
公开(公告)日：2009-06-11
申请号：US12370693
申请日：2009-02-13
IPC分类号： B05D1/00
CPC分类号： C03C3/06 , C03B19/06 , C03B19/066 , C03B19/12 , C03B19/14 , C03B19/1453 , C03B20/00 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/08 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/32 , C03B2201/42 , C03C4/0085 , C03C2201/11 , C03C2201/12 , C03C2201/22 , C03C2201/23
摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。
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公开(公告)号：US20120277085A1
公开(公告)日：2012-11-01
申请号：US13372859
申请日：2012-02-14
CPC分类号： C03C21/002 , C03C19/00 , C03C21/006
摘要： A method for strengthening an alkali-containing glass article including: contacting a standardized glass article and aqueous vapor at about 80 to 500° C. for 0.5 to 400 hours at atmospheric pressure. A method for making a damage resistant, low-alkali, glass article including: contacting a standardized glass article and aqueous vapor at about 100 to 600° C. for about 0.5 to about 200 hours at atmospheric pressure. A strengthened and durable glass article prepared by the disclosed methods is disclosed. A display system that can incorporate the glass article, as defined herein, is also disclosed.
摘要翻译： 一种强化含碱玻璃制品的方法，包括：在大气压下使标准玻璃制品和含水蒸汽在约80-500℃下接触0.5-400小时。 一种制造耐损伤的低碱玻璃制品的方法，包括：在大气压下使标准玻璃制品和水蒸气在约100至600℃下接触约0.5至约200小时。 公开了通过公开的方法制备的加强且耐用的玻璃制品。 还公开了可并入如本文定义的玻璃制品的显示系统。
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公开(公告)号：US20080287279A1
公开(公告)日：2008-11-20
申请号：US12151172
申请日：2008-05-05
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/20 , C03B2201/21 , C03B2201/22 , C03B2201/23 , C03B2201/31 , C03C2201/22 , C03C2201/23 , C03C2203/54
摘要： A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot blank or preform in an inert atmosphere containing a drying agent, followed by removal of residual drying agent from the dried soot blank by heating the dried soot blank in an atmosphere comprising an inert gas and of oxygen.
摘要翻译： 熔融石英玻璃和熔融二氧化硅制品，其具有高达约50ppm的OH和OD中的至少一种的组合浓度。 熔融二氧化硅玻璃通过在含有干燥剂的惰性气氛中干燥熔融二氧化硅烟灰坯料或预型体而形成，然后通过在包含惰性气体的气氛中加热干燥的烟灰坯料从干燥的烟灰坯中除去残留的干燥剂， 的氧气。
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公开(公告)号：US07450806B2
公开(公告)日：2008-11-11
申请号：US11583098
申请日：2006-10-18
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
IPC分类号： G02B6/02
CPC分类号： C03B37/02781 , C03B37/01446 , C03B2201/02 , C03B2201/31 , C03B2203/14 , C03B2203/42 , C03C13/00 , C03C13/04 , G02B1/048 , G02B6/02333 , G02B6/02357
摘要： Microstructured optical fiber and method of making. Glass soot is deposited and then consolidated under conditions which are effective to trap a portion of the consolidation gases in the glass to thereby produce a non-periodic array of voids which may then be used to form a void containing cladding region in an optical fiber. Preferred void producing consolidation gases include nitrogen, argon, CO2, oxygen, chlorine, CF4, CO, SO2 and mixtures thereof.
摘要翻译： 微结构光纤及其制造方法。 玻璃烟灰沉积，然后在有效地捕获玻璃中的一部分固结气体的条件下固化，从而产生非周期性的空隙阵列，然后可以将其用于在光纤中形成含有空隙的包层区域。 优选的产生空隙的固结气体包括氮，氩，CO 2，氧，氯，CF 4，CO，SO 2和它们的混合物。
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公开(公告)号：US08012894B2
公开(公告)日：2011-09-06
申请号：US12151172
申请日：2008-05-05
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko
IPC分类号： C03C3/06 , C03B19/06 , C03B19/00 , C03B37/00 , C03B37/018
CPC分类号： C03C3/06 , C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/20 , C03B2201/21 , C03B2201/22 , C03B2201/23 , C03B2201/31 , C03C2201/22 , C03C2201/23 , C03C2203/54
摘要： A fused silica glass and a fused silica article having a combined concentration of at least one of OH and OD of up to about 50 ppm. The fused silica glass is formed by drying a fused silica soot blank or preform in an inert atmosphere containing a drying agent, followed by removal of residual drying agent from the dried soot blank by heating the dried soot blank in an atmosphere comprising an inert gas and of oxygen.
摘要翻译： 熔融石英玻璃和熔融二氧化硅制品，其具有高达约50ppm的OH和OD中的至少一种的组合浓度。 熔融二氧化硅玻璃通过在含有干燥剂的惰性气氛中干燥熔融二氧化硅烟灰坯料或预型体而形成，然后通过在包含惰性气体的气氛中加热干燥的烟灰坯料从干燥的烟灰坯中除去残留的干燥剂， 的氧气。
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公开(公告)号：US07930904B2
公开(公告)日：2011-04-26
申请号：US12244359
申请日：2008-10-02
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
IPC分类号： C03B37/018
CPC分类号： C03B37/02781 , C03B37/01446 , C03B2201/02 , C03B2201/31 , C03B2203/14 , C03B2203/42 , C03C13/00 , C03C13/04 , G02B1/048 , G02B6/02333 , G02B6/02357
摘要： Microstructured optical fiber and method of making. Glass soot is deposited and then consolidated under conditions which are effective to trap a portion of the consolidation gases in the glass to thereby produce a non-periodic array of voids which may then be used to form a void containing cladding region in an optical fiber. Preferred void producing consolidation gases include nitrogen, argon, CO2, oxygen, chlorine, CF4, CO, SO2 and mixtures thereof.
摘要翻译： 微结构光纤及其制造方法。 玻璃烟灰沉积，然后在有效地捕获玻璃中的一部分固结气体的条件下固化，从而产生非周期性的空隙阵列，然后可以将其用于在光纤中形成含有空隙的包层区域。 优选的空隙产生固结气体包括氮气，氩气，CO 2，氧气，氯气，CF 4，CO，SO 2及其混合物。
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8.发明申请SYNTHETIC SILICA GLASS OPTICAL MATERIAL HAVING HIGH RESISTANCE TO LASER INDUCED DAMAGE 审中-公开合成二氧化硅玻璃光学材料具有高电抗激光诱发的损伤公开(公告)号：US20090203511A1
公开(公告)日：2009-08-13
申请号：US12420443
申请日：2009-04-08
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
CPC分类号： C03C3/06 , C03B19/1453 , C03B32/00 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03B2207/32 , C03C2201/21 , C03C2201/23
摘要： Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633 nm, of between about −1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70 μJ/cm2. The synthetic silica glass optical material of the present invention comprises OH concentration levels of less than about 600 ppm, preferably less than 200 ppm, and H2 concentration levels less than about 5.0×1017 molecules/cm3′ and preferably less than about 2.0×1017 molecules/cm3.
摘要翻译： 公开了一种合成石英玻璃光学材料，其特征在于波长小于约250nm，特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤， 具体地，在经受约193nm处的激光器操作的100亿脉冲和大约70μJ/ cm 2的能量密度下，在633nm处测量的激光感应波前失真在约-1.0和1.0nm / cm之间。 本发明的合成石英玻璃光学材料包含小于约600ppm，优选小于200ppm的OH浓度水平和小于约5.0×10 17分子/ cm 3'，优选小于约2.0×10 17分子/ cm 3的H 2浓度水平 。
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公开(公告)号：US07506521B2
公开(公告)日：2009-03-24
申请号：US11148504
申请日：2005-06-08
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
CPC分类号： C03C3/06 , C03B19/1453 , C03B19/1469 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/54 , G03F7/70958
摘要： Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.
摘要翻译： 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造该材料的烟灰 - 玻璃工艺包括在H 2 O和/或O 2存在下固化烟灰预制件的步骤。
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公开(公告)号：US20090032983A1
公开(公告)日：2009-02-05
申请号：US12244359
申请日：2008-10-02
申请人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
发明人： Dana Craig Bookbinder , Richard Michael Fiacco , Ming-Jun Li , Michael Thomas Murtagh , Pushkar Tandon
IPC分类号： G02B6/028
CPC分类号： C03B37/02781 , C03B37/01446 , C03B2201/02 , C03B2201/31 , C03B2203/14 , C03B2203/42 , C03C13/00 , C03C13/04 , G02B1/048 , G02B6/02333 , G02B6/02357
摘要： Microstructured optical fiber and method of making. Glass soot is deposited and then consolidated under conditions which are effective to trap a portion of the consolidation gases in the glass to thereby produce a non-periodic array of voids which may then be used to form a void containing cladding region in an optical fiber. Preferred void producing consolidation gases include nitrogen, argon, CO2, oxygen, chlorine, CF4, CO, SO2 and mixtures thereof.
摘要翻译： 微结构光纤及其制造方法。 玻璃烟灰沉积，然后在有效地捕获玻璃中的一部分固结气体的条件下固化，从而产生非周期性的空隙阵列，然后可以将其用于在光纤中形成含有空隙的包层区域。 优选的空隙产生固结气体包括氮气，氩气，CO 2，氧气，氯气，CF 4，CO，SO 2及其混合物。
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