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1.发明授权Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same 有权具有低偏振诱导双折射的合成二氧化硅，其制造方法和包含该双折射的平版印刷装置公开(公告)号：US07589039B2
公开(公告)日：2009-09-15
申请号：US11241075
申请日：2005-09-30
CPC分类号： C03B19/1453 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C3/06 , C03C2201/23 , C03C2203/54
摘要： Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.
摘要翻译： 公开了具有低偏振诱发双折射的合成石英玻璃，用于制造玻璃的方法和包含由玻璃制成的光学元件的光刻系统。 当经受约193nm的准分子激光脉冲时，石英玻璃在633nm处测量的偏振诱发双折射小于约0.1nm / cm，具有约40μJ·cm -2脉冲-1的注量和脉冲长度 对于5x109个脉冲，约25ns。
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2.发明申请SYNTHETIC SILICA HAVING LOW POLARIZATION-INDUCED BIREFRINGENCE, METHOD OF MAKING SAME AND LITHOGRAPHIC DEVICE COMPRISING SAME 有权具有低极化诱导性双相的合成二氧化硅，其制造方法和包含其的层压装置公开(公告)号：US20100004113A1
公开(公告)日：2010-01-07
申请号：US12556848
申请日：2009-09-10
申请人： Douglas Clippinger Allan , Dana Craig Bookbinder , Ulrich W. H. Neukirch , Charlene Marie Smith
发明人： Douglas Clippinger Allan , Dana Craig Bookbinder , Ulrich W. H. Neukirch , Charlene Marie Smith
IPC分类号： C03C3/04
CPC分类号： C03B19/1453 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C3/06 , C03C2201/23 , C03C2203/54
摘要： Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.
摘要翻译： 公开了具有低偏振诱发双折射的合成石英玻璃，用于制造玻璃的方法和包含由玻璃制成的光学元件的光刻系统。 当经受约193nm的准分子激光脉冲时，石英玻璃在633nm处测量的偏振诱发双折射小于约0.1nm / cm，具有约40μJ·cm -2脉冲-1的注量和脉冲长度 对于5x109个脉冲，约25ns。
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3.发明授权Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same 有权具有低偏振诱导双折射的合成二氧化硅，其制造方法和包含该双折射的平版印刷装置公开(公告)号：US07906446B2
公开(公告)日：2011-03-15
申请号：US12556848
申请日：2009-09-10
IPC分类号： C03C3/06
CPC分类号： C03B19/1453 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C3/06 , C03C2201/23 , C03C2203/54
摘要： Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 μJ·cm−2·pulse−1 and a pulse length of about 25 ns for 5×109 pulses.
摘要翻译： 公开了具有低偏振诱发双折射的合成石英玻璃，用于制造玻璃的方法和包含由玻璃制成的光学元件的光刻系统。 当在大约193nm处的准分子激光脉冲具有约40μJ·cm-2·pulse-1的注量和脉冲长度时，石英玻璃具有在633nm处测量的偏振诱发双折射小于约0.1nm / cm 对于5×109脉冲，约25ns。
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4.发明授权Synthetic silica material with low fluence-dependent-transmission and method of making the same 有权合成二氧化硅材料，具有低通量依赖性传输和制作相同的方法公开(公告)号：US07928026B2
公开(公告)日：2011-04-19
申请号：US11261005
申请日：2005-10-28
申请人： Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
发明人： Dana Craig Bookbinder , Kenneth Edward Hrdina , Glenn Eric Kohnke , Lisa Anne Moore , Susan Lee Schiefelbein , Charlene Marie Smith , Ulrich W H Neukirch
CPC分类号： C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/54
摘要： Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].
摘要翻译： 在本申请中公开了具有低注射度依赖性透射率，特别是约193nm的合成二氧化硅玻璃及其制造方法。 当在约248nm激活时，该玻璃可期望地在290和390nm处表现出低水平的荧光。 玻璃可能期望显示低水平的LIWFD，[SiH *]和/或[ODC]。
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公开(公告)号：US20130026427A1
公开(公告)日：2013-01-31
申请号：US13192842
申请日：2011-07-28
IPC分类号： H01B1/02
CPC分类号： C04B35/47 , B82Y30/00 , C04B35/495 , C04B35/645 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3229 , C04B2235/3239 , C04B2235/3251 , C04B2235/3843 , C04B2235/5445 , C04B2235/5454 , C04B2235/652 , C04B2235/6587 , C04B2235/666 , C04B2235/77 , C04B2235/9669 , H01L35/22
摘要： Doped and partially-reduced oxide (e.g., SrTiO3-based) thermoelectric materials. The thermoelectric materials can be single-doped or multi-doped (e.g., co-doped) and display a thermoelectric figure of merit (ZT) of 0.2 or higher at 1050K. Methods of forming the thermoelectric materials involve combining and reacting suitable raw materials and heating them in a graphite environment to at least partially reduce the resulting oxide. Optionally, a reducing agent such as titanium carbide can be incorporated into the starting materials prior to the reducing step in graphite. The reaction product can be sintered to form a dense thermoelectric material.
摘要翻译： 掺杂和部分还原的氧化物（例如，基于SrTiO 3的）热电材料。 热电材料可以是单掺杂或多掺杂（例如，共掺杂），并且在1050K下显示出0.2或更高的热电性能（ZT）。 形成热电材料的方法包括组合和反应合适的原料并在石墨环境中加热它们以至少部分地减少所得的氧化物。 任选地，还原剂如碳化钛可以在石墨中的还原步骤之前引入原料中。 反应产物可以烧结以形成致密的热电材料。
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公开(公告)号：US08268740B2
公开(公告)日：2012-09-18
申请号：US12364083
申请日：2009-02-02
申请人： Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko , Lisa Anne Moore , Charlene Marie Smith
发明人： Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko , Lisa Anne Moore , Charlene Marie Smith
IPC分类号： C03C3/06 , C03B37/018 , C03B37/01
CPC分类号： C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/22 , C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/22 , C03C2201/23 , C03C2203/54 , G03F7/70966
摘要： A fused silica glass having a refractive index homogeneity of less or equal to about 5 ppm over an aperture area of at least about 50 cm2. The fused silica glass is also substantially free of halogens and has an adsorption edge of less than about 160 nm. The glass is dried by exposing a silica soot blank to carbon monoxide before consolidation, reducing the combined concentration of hydroxyl (i.e., OH, where H is protium (11H) and deuteroxyl (OD), where D is deuterium (12H)) of less than about 20 ppm by weight in one embodiment, less than about 5 ppm by weight in another embodiment, and less than about 1 ppm by weight in a third embodiment.
摘要翻译： 在至少约50cm 2的开口面积上具有小于或等于约5ppm的折射率均匀性的熔融石英玻璃。 熔融石英玻璃也基本上不含卤素并具有小于约160nm的吸附边。 玻璃通过在固化前将二氧化硅烟炱坯料暴露于一氧化碳而干燥，降低羟基（即OH，其中H为铑（11H）和氘氧基（OD），其中D为氘（12H））的组合浓度较小 在一个实施方案中约20重量ppm，在另一个实施方案中小于约5重量ppm，在第三个实施方案中小于约1重量ppm。
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公开(公告)号：US07829489B2
公开(公告)日：2010-11-09
申请号：US11897905
申请日：2007-08-31
CPC分类号： C03C15/00 , C03C3/095 , C03C10/0027 , C03C23/002 , C03C23/007 , C03C2218/34
摘要： The present invention describes a composition, method and article for a photomachinable glass having a coefficient of thermal expansion from less than 6×10−6/° C. in the temperature range of 0° C. to 300° C. The photomachinable glass composition is a low expansion glass having an amorphous glass phase and crystalline phases selected from the group consisting of spudomene and lithium disilicate.
摘要翻译： 本发明描述了在0℃至300℃的温度范围内热可膨胀玻璃的组成，方法和制品的热膨胀系数小于6×10-6 /℃。可光热熔玻璃组合物 是具有无定形玻璃相的低膨胀玻璃和选自聚硅氧烷和二硅酸锂的结晶相。
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公开(公告)号：US20100108890A1
公开(公告)日：2010-05-06
申请号：US12582981
申请日：2009-10-21
申请人： Natarajan Gunasekaran , Vitor Marino Schneider , Charlene Marie Smith , Carlo Anthony Kosik Williams
发明人： Natarajan Gunasekaran , Vitor Marino Schneider , Charlene Marie Smith , Carlo Anthony Kosik Williams
IPC分类号： G01J5/02
CPC分类号： G01N21/94 , G01N21/3504 , G01N21/3577 , G01N21/3581 , G01N2201/129
摘要： Methods of characterizing and measuring particulate accumulation in a family of particulate filters (10) are disclosed. The disclosure can be applied to diesel, gasoline and natural gas fueled engines, fluid streams bearing dust, and chemical and biological substances such as may be found in laboratory fluids, for example, air. In one embodiment, the disclosure is directed to measuring diesel particulate accumulation in a family of diesel particulate filters. The methods include measuring calibration complex terahertz transmission spectra (PC(f)) of at least a portion (17) of at least one particulate or diesel particulate filter in the family for different known particulate or diesel particulate amounts (ADP). The method also involves performing a partial least squares (PLS) analysis on the calibration complex terahertz transmission spectra to establish a calibration relationship between the complex terahertz transmission spectra and the particulate or diesel particulate amounts. The complex transmission spectrum of a subject particulate filter or diesel particulate filter having an unknown amount of particulate or diesel particulate accumulation is then determined and compared to the linear calibration relationship to establish a measured amount of particulates or diesel particulates. The methods include using a terahertz (THz) system (100) to obtain the complex terahertz transmission spectra for the calibration and subject particulate or diesel particulate filters.
摘要翻译： 公开了在微粒过滤器（10）系列中表征和测量颗粒积聚的方法。 本公开可以应用于柴油，汽油和天然气燃料发动机，带有灰尘的流体流，以及诸如可以在实验室流体例如空气中发现的化学和生物物质。 在一个实施方案中，本公开涉及测量柴油颗粒过滤器系列中的柴油颗粒物积聚。 所述方法包括测量家族中至少一种颗粒或柴油颗粒过滤器的至少一部分（17）的校准复数太赫兹透射光谱（PC（f）），用于不同的已知颗粒或柴油颗粒量（ADP）。 该方法还涉及对校准复数太赫兹透射光谱进行偏最小二乘法（PLS）分析，以建立复数太赫兹透射光谱与颗粒或柴油颗粒量之间的校准关系。 然后确定具有未知量的颗粒或柴油颗粒物积聚的目标颗粒过滤器或柴油颗粒过滤器的复杂透射光谱，并将其与线性校准关系进行比较，以建立测量量的颗粒物或柴油颗粒物。 这些方法包括使用太赫兹（THz）系统（100）来获得用于校准和主体颗粒或柴油颗粒过滤器的复数太赫兹透射光谱。
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公开(公告)号：US20090203512A1
公开(公告)日：2009-08-13
申请号：US12364083
申请日：2009-02-02
申请人： Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko , Lisa Anne Moore , Charlene Marie Smith
发明人： Richard Michael Fiacco , Kenneth Edward Hrdina , Rostislav Radievich Khrapko , Lisa Anne Moore , Charlene Marie Smith
CPC分类号： C03B19/1453 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/22 , C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/22 , C03C2201/23 , C03C2203/54 , G03F7/70966
摘要： A fused silica glass having a refractive index homogeneity of less or equal to about 5 ppm over an aperture area of at least about 50 cm2. The fused silica glass is also substantially free of halogens and has an adsorption edge of less than about 160 nm. The glass is dried by exposing a silica soot blank to carbon monoxide before consolidation, reducing the combined concentration of hydroxyl (i.e., OH, where H is protium (11H) and deuteroxyl (OD), where D is deuterium (12H)) of less than about 20 ppm by weight in one embodiment, less than about 5 ppm by weight in another embodiment, and less than about 1 ppm by weight in a third embodiment.
摘要翻译： 在至少约50cm 2的开口面积上具有小于或等于约5ppm的折射率均匀性的熔融石英玻璃。 熔融石英玻璃也基本上不含卤素并具有小于约160nm的吸附边。 玻璃通过在固化前将二氧化硅烟炱坯料暴露于一氧化碳而干燥，降低羟基（即OH，其中H为铑（11H）和氘氧基（OD），其中D为氘（12H））的组合浓度较小 在一个实施方案中约20重量ppm，在另一个实施方案中小于约5重量ppm，在第三个实施方案中小于约1重量ppm。
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公开(公告)号：US20080198882A1
公开(公告)日：2008-08-21
申请号：US11708816
申请日：2007-02-21
IPC分类号： H01S3/04
CPC分类号： H01S3/0014 , G03F7/70025 , H01S3/005 , H01S3/02 , H01S3/0401 , H01S3/2308 , H01S3/2366
摘要： A laser beam is generated and transmitted within an enclosed pathway through at least one crystal optic at a power density that progressively degrades transmissivity of the crystal optic with accumulating fluence. The crystal optics are cooled below normal operating temperatures to slow the progressive degradation in the transmissivity of the crystal optics with the accumulating fluence or to accommodate a higher power density without correspondingly increasing the progressive degradation in transmissivity.
摘要翻译： 产生激光束并通过至少一个晶体光学器件在封闭路径内以功率密度传输激光束，该功率密度逐渐降低晶体光学器件的透射率并且累积注量。 晶体光学器件在正常工作温度以下冷却，以减缓晶体光学器件的累积流量的透射率逐渐降低，或者适应更高的功率密度，而不会相应地增加透射率的逐渐降低。
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