公开(公告)号：US20170369359A1

公开(公告)日：2017-12-28

申请号：US15634634

申请日：2017-06-27

申请人： Heraeus Quarzglas GmbH & Co. KG

发明人： Hardy BAIERL ,  Stephan GRIMM ,  Kay SCHUSTER ,  Jan DELLITH ,  Andreas LANGNER ,  Gerhard SCHOETZ ,  Walter LEHMANN ,  Thomas KAYSER

IPC分类号： C03C3/06 ,  C03B20/00 ,  C03B19/06

CPC分类号： C03C3/06 ,  C03B19/066 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/34 ,  C03B2201/36 ,  C03C2201/32 ,  C03C2201/3488 ,  C03C2203/52 ,  H01S3/17

摘要： A method for producing rare earth metal-doped quartz glass includes the steps of (a) providing a blank of the rare earth metal-doped quartz glass, and (b) homogenizing the blank by softening the blank zone by zone in a heating zone and by twisting the softened zone along a rotation axis. Some rare earth metals, however, show a discoloration of the quartz glass, which hints at an unforeseeable and undesired change in the chemical composition or possibly at an inhomogeneous distribution of the dopants. To avoid this drawback and to provide a modified method which ensures the production of rare earth metal-doped quartz glass with reproducible properties, during homogenization according to method step (b), the blank is softened under the action of an oxidizingly acting or a neutral plasma.

公开(公告)号：US09703035B2

公开(公告)日：2017-07-11

申请号：US14461743

申请日：2014-08-18

申请人： KOHOKU KOGYO CO., LTD

发明人： Katsuyuki Imoto

IPC分类号： G02B6/02 ,  G02B6/38 ,  G02B6/36 ,  G02B6/40 ,  C03B19/00 ,  C03B19/06 ,  C03B23/047

CPC分类号： G02B6/02042 ,  C03B19/00 ,  C03B19/066 ,  C03B23/047 ,  G02B6/3672 ,  G02B6/368 ,  G02B6/3801 ,  G02B6/3885 ,  G02B6/40

摘要： An optical connector connects: N (N is an integer of 3 to 14) single-mode fibers each including one core with a high refractive index in a cladding material with a low refractive index; to multi-core fiber including N cores with high refractive indexes in a cladding material with low refractive index such that the cores of the single-mode fibers are respectively optically coupled to cores of the multi-core fiber. The optical connector includes: quartz glass cylinder having a first end face to be in contact with the multi-core fiber and a second end face to be in contact with single-mode fibers; N glass fibers that are arranged in the quartz glass cylinder to extend from the first to second end face, the N glass fibers each including: a circular rod with high refractive index that has a constant outer diameter; and a low refractive index material that surrounds an outer periphery of the circular rod and has a constant thickness.

公开(公告)号：US20160257612A1

公开(公告)日：2016-09-08

申请号：US15049359

申请日：2016-02-22

申请人： Corning Incorporated

发明人： Liam Ruan de Paor ,  Nicolas LeBlond ,  Richard Curwood Peterson ,  Kenneth William Roberts ,  Li Yang

IPC分类号： C03C25/10

CPC分类号： C03C25/10 ,  C03B19/066 ,  C03B19/1407 ,  C03B19/1469 ,  C03B19/1492 ,  C03B37/01282 ,  C03B37/01406 ,  C03B37/01466 ,  C03B37/01493 ,  Y02P40/57

摘要： A method for forming a porous soot body that includes depositing soot on a release coating supported by a bait substrate. Characteristics of the release coating control the strength of attachment of the porous soot body to the bait substrate. Weak attachment of the porous soot body to the bait substrate facilitates separation of the porous soot body from the bait substrate without damaging the porous soot body. The release coating may be formed from a brittle material or a material that oxidizes or otherwise depletes during deposition of the soot that forms the porous soot body. The release coating may include carbon. The separated porous soot body may be consolidated to form a core cane or may function as a sleeve (porous cladding) in a cane-in-soot fiber preform manufacturing process.

摘要翻译： 一种形成多孔烟灰体的方法，其包括在由诱饵基底支撑的剥离涂层上沉积烟灰。 释放涂层的特征控制多孔烟炱体与诱饵基底的连接强度。 多孔烟炱体与诱饵底物的弱附着有利于将多孔烟炱体与诱饵基质分离，而不损害多孔烟炱体。 剥离涂层可以由脆性材料或在形成多孔烟灰体的烟灰沉积期间氧化或以其他方式消耗的材料形成。 脱模涂层可以包括碳。 分离的多孔烟灰体可以被固结以形成芯棒，或者可以在烟囱纤维预制棒制造工艺中用作套筒（多孔包层）。

公开(公告)号：US20150197688A1

公开(公告)日：2015-07-16

申请号：US14411332

申请日：2013-06-25

申请人： Heraeus Quarzglas GmbH & Co., KG

发明人： Mario Such ,  Gerhard Schoetz ,  Andreas Langner

IPC分类号： C09K11/77 ,  C09K11/02

CPC分类号： C09K11/7706 ,  C01B33/18 ,  C03B19/066 ,  C03B2201/06 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/36 ,  C03C1/006 ,  C03C3/06 ,  C03C3/061 ,  C03C4/12 ,  C03C2201/06 ,  C03C2201/3488 ,  C03C2201/36 ,  C09K11/025

摘要： The invention relates to a method for producing a doped SiO2 slurry in which an SiO2 suspension is brought into interaction with at least one doping solution, wherein the SiO2 suspension and/or the doping solution act on one another in the form of an atomised spray, the average droplet diameter of which is in the range between 10 μm and 100 μm. The invention further relates to the use of an SiO2 slurry doped by the atomised spray method for the production of doped quartz glass, particularly for the production of laser-active quartz glass.

摘要翻译： 本发明涉及一种制备掺杂SiO 2浆料的方法，其中SiO 2悬浮液与至少一种掺杂溶液相互作用，其中SiO 2悬浮液和/或掺杂溶液以雾化喷雾的形式彼此作用， 其平均液滴直径在10μm和100μm之间的范围内。 本发明还涉及通过雾化喷雾方法掺杂的SiO 2浆料用于生产掺杂石英玻璃的用途，特别是用于生产激光活性石英玻璃。

公开(公告)号：US20140053608A1

公开(公告)日：2014-02-27

申请号：US13945631

申请日：2013-07-18

申请人： Shigeo Harada

发明人： Shigeo Harada

IPC分类号： C03B32/00 ,  C03B25/00

CPC分类号： C03B32/00 ,  C03B19/066 ,  C03B19/1453 ,  C03B25/00

摘要： [Problem] The provision of a synthetic quartz glass heat treatment method that can, by a single heat treatment, and without particular limitations on the OH group concentration distribution of the starting material, regulate the birefringence fast axis direction in the synthetic quartz glass after it has been heat-treated.[Means of Overcoming the Problem] A heat treatment method for synthetic quartz glass whereby columnar synthetic quartz glass having two opposing end faces and a lateral face is heat-treated covered with thermal insulator; wherein said heat treatment is performed using as end face thermal insulator which covers said two end faces, and as lateral face thermal insulator which covers said lateral face, thermal insulators that differ in at least either type or thickness to afford different thermal insulation effects such that the birefringence fast axis direction of said synthetic quartz glass is regulated.

摘要翻译： [问题]提供合成石英玻璃热处理方法，其可以通过单一热处理，对原料的OH基浓度分布没有特别限制，调节合成石英玻璃后的双折射快轴方向 已被热处理。 解决问题的方法由具有两个相对的端面和侧面的柱状合成石英玻璃用绝热体进行热处理的合成石英玻璃的热处理方法; 其中所述热处理使用作为覆盖所述两个端面的端面绝热体，以及作为覆盖所述侧面的侧面热绝缘体，至少两种类型或厚度不同的热绝缘体，以提供不同的隔热效果，使得 所述合成石英玻璃的双折射快轴方向被调节。

公开(公告)号：US08209998B2

公开(公告)日：2012-07-03

申请号：US13340632

申请日：2011-12-29

申请人： Waltraud Werdecker ,  Norbert Traeger ,  Juergen Weber

发明人： Waltraud Werdecker ,  Norbert Traeger ,  Juergen Weber

IPC分类号： C03B20/00

CPC分类号： C03C17/02 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03C2218/11

摘要： SiO2 slurry for the production of quartz glass contains a dispersion liquid and amorphous SiO2 particles with particle sizes to a maximum of 500 μm. The largest volume fraction is SiO2 particles with particle sizes of 1 μm-60 μm, as well as SiO2 nanoparticles with particle sizes less than 100 nm constituting 0.2-15% volume by weight of the entire solids content. To prepare the slurry for use and optimize its flow behavior for later processing by dressing or pouring the slurry mass, and for later drying and sintering without cracks, the slurry has SiO2 particles with a multimodal distribution of particle sizes, with a first maximum in the range 1 μm-3 μm and a second maximum in the range 5 μm-50 μm, and an 83%-90% solids content by weight of the SiO2 particles and the SiO2 nanoparticles together.

摘要翻译： 用于生产石英玻璃的SiO2浆料含有粒径达500μm的分散液和无定形SiO 2颗粒。 最大的体积分数是粒径为1μm-60μm的SiO 2颗粒，以及粒径小于100nm的SiO 2纳米颗粒，占整个固体含量的0.2-15重量％。 为了制备使用的浆料并优化其流动行为以便随后通过修整或倾倒浆料进行加工，并且为了稍后的干燥和烧结而没有裂缝，该浆料具有多晶粒度分布的SiO 2颗粒，其中第一最大值在 范围为1μm-3μm，第二最大值为5μm-50μm，并且SiO 2颗粒和SiO 2纳米颗粒的固体含量为83％-90％。

公开(公告)号：US07637126B2

公开(公告)日：2009-12-29

申请号：US10582117

申请日：2004-11-30

申请人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

发明人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

IPC分类号： C03B37/075

CPC分类号： C03C4/0071 ,  C03B19/06 ,  C03B19/063 ,  C03B19/066 ,  C03B19/1005 ,  C03B19/1065 ,  C03B19/108 ,  C03B19/1095 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/34 ,  C03C1/026 ,  C03C3/06 ,  C03C2201/23 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/3488 ,  C03C2201/36 ,  C03C2203/22 ,  C03C2203/30 ,  C03C2203/44 ,  C03C2203/52

摘要： The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 40 wt. %, comprising SiO2 nanopowder and doping agents, including a cation of the rare earth metals and transition metals in a fluid, b) granulation by agitation of the dispersion, with removal of moisture to form a doped SiO2 granulate of spherical porous granular particles with a moisture content of less than 35 wt. % and a density of at least 0.95 g/cm3, c) drying and purification of the SiO2 granulate, by heating to a temperature of at least 1000° C. to form doped porous SiO2 grains with an OH content of less than 10 ppm and d) sintering or fusing the doped SiO2 grains in a reducing atmosphere to give the blank made from doped quartz glass.

摘要翻译： 本发明涉及一种用于经济地生产用于由任何形式或尺寸的激光 - 活性石英玻璃制成的部件的坯料的方法。 该方法包括以下方法步骤：a）制备固体含量为至少40wt。 ％，包括SiO 2纳米粉末和掺杂剂，其包括流体中的稀土金属和过渡金属的阳离子，b）通过搅拌分散体制粒，除去水分以形成掺杂的SiO 2颗粒的球形多孔颗粒，其具有 含水量小于35wt。 ％和密度至少为0.95g / cm 3，c）通过加热到至少1000℃的温度来干燥和纯化SiO 2颗粒，以形成OH含量低于10ppm的掺杂多孔SiO 2颗粒，以及 d）在还原气氛中烧结或熔融掺杂的SiO 2晶粒，得到由掺杂的石英玻璃制成的坯料。

公开(公告)号：US20080164631A1

公开(公告)日：2008-07-10

申请号：US11795567

申请日：2006-02-09

申请人： Hiroyuki Watanabe ,  Akira Fujinoki ,  Takayuki Imaizumi ,  Kazuhisa Hayakawa ,  Shingo Niinobe

发明人： Hiroyuki Watanabe ,  Akira Fujinoki ,  Takayuki Imaizumi ,  Kazuhisa Hayakawa ,  Shingo Niinobe

IPC分类号： B29C47/00

CPC分类号： C03B20/00 ,  C03B19/06 ,  C03B19/066

摘要： A process for producing a transparent or opaque silica glass product including mixing a silica fine powder and a cellulose derivative and injection molding the mixture, followed by degreasing treatment and baking treatment, which is characterized in that the cellulose derivative is a cellulose derivative which causes reversible thermal gelation in an aqueous solution of at least one member selected from methyl cellulose, hydroxypropylmethyl cellulose and hydroxyethylmethyl cellulose; in producing a transparent silica glass product, the cellulose derivative is added in water heated at a gelation temperature thereof or higher, and after cooling, the formed aqueous solution is kneaded with the silica fine powder; and in producing an opaque silica glass product, the cellulose derivative is added in a silica slurry containing a silica powder and heated at a gelation temperature of the cellulose derivative or higher.

摘要翻译： 一种制造透明或不透明的二氧化硅玻璃制品的方法，包括混合二氧化硅细粉和纤维素衍生物并注射模塑该混合物，然后进行脱脂处理和烘烤处理，其特征在于纤维素衍生物是可逆的纤维素衍生物 在选自甲基纤维素，羟丙基甲基纤维素和羟乙基甲基纤维素中的至少一种的水溶液中的热凝胶化; 在制造透明石英玻璃制品时，将纤维素衍生物加入到其凝胶化温度以上加热的水中，冷却后，将所形成的水溶液与二氧化硅细粉混合; 在制造不透明的二氧化硅玻璃制品时，将纤维素衍生物加入到含有二氧化硅粉末的二氧化硅浆料中，并在纤维素衍生物的凝胶化温度以上加热。

公开(公告)号：US20070145332A1

公开(公告)日：2007-06-28

申请号：US10582117

申请日：2004-11-30

申请人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

发明人： Rainer Koeppler ,  Bodo Kuehn ,  Waltraud Werdecker ,  Ulrich Kirst ,  Walter Lehmann

IPC分类号： C09K11/66 ,  C03B8/00 ,  C03B19/00

CPC分类号： C03C4/0071 ,  C03B19/06 ,  C03B19/063 ,  C03B19/066 ,  C03B19/1005 ,  C03B19/1065 ,  C03B19/108 ,  C03B19/1095 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/34 ,  C03C1/026 ,  C03C3/06 ,  C03C2201/23 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/3488 ,  C03C2201/36 ,  C03C2203/22 ,  C03C2203/30 ,  C03C2203/44 ,  C03C2203/52

摘要： The invention relates to a method for the economic production of a blank for a component made from laser-active quartz glass in any form or dimension. The method comprises the following method steps: a) preparation of a dispersion with a solids content of at least 40 wt. %, comprising SiO2 nanopowder and doping agents, including a cation of the rare earth metals and transition metals in a fluid, b) granulation by agitation of the dispersion, with removal of moisture to form a doped SiO2 granulate of spherical porous granular particles with a moisture content of less than 35 wt. % and a density of at least 0.95 g/cm3, c) drying and purification of the SiO2 granulate, by heating to a temperature of at least 1000° C. to form doped porous SiO2 grains with an OH content of less than 10 ppm and d) sintering or fusing the doped SiO2 grains in a reducing atmosphere to give the blank made from doped quartz glass.

摘要翻译： 本发明涉及一种用于经济地生产用于由任何形式或尺寸的激光 - 活性石英玻璃制成的部件的坯料的方法。 该方法包括以下方法步骤：a）制备固体含量为至少40wt。 ％，包括SiO 2纳米粉末和掺杂剂，其包括流体中的稀土金属和过渡金属的阳离子，b）通过搅拌分散体制粒，除去水分以形成掺杂的SiO 水分含量小于35重量％的球形多孔粒状颗粒颗粒。 ％，密度至少为0.95g / cm 3，c）通过加热到至少1000℃的温度来干燥和纯化SiO 2颗粒。 以形成OH含量小于10ppm的掺杂多孔SiO 2颗粒，以及d）在还原气氛中烧结或熔合掺杂的SiO 2颗粒，得到坯料 来自掺杂石英玻璃。

公开(公告)号：US20070105704A1

公开(公告)日：2007-05-10

申请号：US11583619

申请日：2006-10-19

申请人： Dana Bookbinder ,  Richard Fiacco ,  Ulrich Neukirch

发明人： Dana Bookbinder ,  Richard Fiacco ,  Ulrich Neukirch

IPC分类号： C03C3/06 ,  C03B8/00 ,  C03B19/06

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B19/12 ,  C03B19/14 ,  C03B19/1453 ,  C03B20/00 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/42 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/22 ,  C03C2201/23

摘要： What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.

摘要翻译： 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。