Method and apparatus for measuring surface topography
    41.
    发明授权
    Method and apparatus for measuring surface topography 失效
    用于测量表面形貌的方法和装置

    公开(公告)号:US5708279A

    公开(公告)日:1998-01-13

    申请号:US613674

    申请日:1996-03-11

    Applicant: David Cheng

    Inventor: David Cheng

    CPC classification number: H01L21/67288 G01B11/16 G01B11/255 G01B11/306

    Abstract: A method for measuring surface topography characterized by making multiple scans of the surface with a laser scanning unit and utilizing the multiple scans to create representations of the surface's topography. The surface topography data can also be used to calculate the compressive or tensile stress caused by a thin film applied to the surface of a semiconductor wafer. The apparatus of the present invention scans a laser beam across a surface in an x direction, and detects displacements of a reflected portion of the laser beam in a z direction. A pair of photodetectors are used to translate z direction displacements of the reflected beam into analog signals which are digitized and input into a microcomputer for analysis. The multiple scans of the surface are preferably accomplished by placing the workpiece on a pedestal which can be rotated to various angular positions.

    Abstract translation: 一种用于测量表面形貌的方法,其特征在于用激光扫描单元对表面进行多次扫描,并利用多次扫描来创建表面的地形图。 表面形貌数据也可用于计算由施加到半导体晶片表面的薄膜引起的压缩或拉伸应力。 本发明的装置沿x方向扫描激光束的表面,并且检测激光束在z方向上的反射部分的位移。 一对光电探测器用于将反射光束的z方向位移转换为模拟信号,并将其数字化并输入微型计算机进行分析。 表面的多次扫描优选通过将工件放置在可旋转到各种角度位置的基座上来实现。

    Multichamber integrated process system
    42.
    发明授权
    Multichamber integrated process system 失效
    多室综合过程系统

    公开(公告)号:US5292393A

    公开(公告)日:1994-03-08

    申请号:US808786

    申请日:1991-12-16

    CPC classification number: H01L21/67167 H01L21/67201

    Abstract: An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R-.theta. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.

    Abstract translation: 公开了一种集成的模块化多室真空处理系统。 该系统包括一个加载锁定,可以包括一个外部盒式电梯和一个内部装载锁定晶片升降机,并且还包括围绕负载锁的周边的站,用于将一个,两个或几个真空处理室连接到负载锁定室。 机器人被安装在装载锁中,并且利用通过双重四杆连杆机构连接到端部执行器的同心轴驱动系统,用于将选定的R(θ)运动传递到叶片以在外部升降机上加载和卸载晶片, 内部电梯和各个处理室。 该系统独特地适用于实现各种类型的IC处理,包括蚀刻,沉积,溅射和快速热退火室,从而为使用不同工艺的多步骤顺序处理提供了机会。

    Motion blur compensation for moving media optical data recording system
    44.
    发明授权
    Motion blur compensation for moving media optical data recording system 失效
    移动介质光学数据记录系统的运动模糊补偿

    公开(公告)号:US4130898A

    公开(公告)日:1978-12-19

    申请号:US828801

    申请日:1977-08-29

    CPC classification number: G11B7/128 G11C13/048

    Abstract: An optical data recording system in which during recording the writing beam is made to move at the same velocity as the recording medium whereby motion blur is minimized or reduced. Movement of the writing beam at the same velocity as the recording medium is achieved by supplying a constantly varying frequency RF signal to an acousto-optic device which deflects (diffracts) the writing beam in accordance with the instantaneous frequency of the RF signal. The acousto-optic device can also be utilized to amplitude modulate the writing beam.

    Abstract translation: 一种光学数据记录系统,其中在记录写入光束期间以与记录介质相同的速度移动,由此运动模糊被最小化或减小。 通过向声光装置提供恒定变化的频率RF信号,根据RF信号的瞬时频率偏转(衍射)写入光束来实现与记录介质以相同速度的写入光束的移动。 声光装置也可用于幅度调制书写光束。

    Self-Adhering Graphics
    45.
    发明申请
    Self-Adhering Graphics 审中-公开
    自我贴图

    公开(公告)号:US20140068981A1

    公开(公告)日:2014-03-13

    申请号:US13614149

    申请日:2012-09-13

    CPC classification number: G09F3/10

    Abstract: The device described herein includes self-adhering graphics presented in a multiple perspectives so that when applied to structural containers, such as cardboard boxes, the containers are transformed, child playthings.

    Abstract translation: 本文描述的装置包括以多个视角呈现的自粘附图形,使得当应用于诸如纸板箱的结构容器时,容器被转换,儿童玩具。

    Techniques for clustering a set of objects
    46.
    发明申请
    Techniques for clustering a set of objects 有权
    聚集一组对象的技术

    公开(公告)号:US20080010304A1

    公开(公告)日:2008-01-10

    申请号:US11731008

    申请日:2007-03-29

    CPC classification number: G06F17/3071 G06F17/30625 G06K9/6224

    Abstract: Described are techniques for clustering a data set of objects. Divide phase processing is performed to partition the data set into two or more partitions forming a hierarchy of the objects. Merge phase processing may be performing using the hierarchy to determine one or more disjoint clusters of objects of the data set. Optional preprocessing may be performed to determine weights for one or more features of an object.

    Abstract translation: 描述了用于聚类对象的数据集的技术。 执行分割相位处理以将数据集划分成形成对象的层次结构的两个或更多个分区。 可以使用层级来执行合并阶段处理以确定数据集的对象的一个​​或多个不相交的集群。 可以执行可选的预处理以确定对象的一个​​或多个特征的权重。

    Spark plug capable of removing remaining electric charges

    公开(公告)号:US07140359B2

    公开(公告)日:2006-11-28

    申请号:US11042905

    申请日:2005-01-26

    Applicant: David Cheng

    Inventor: David Cheng

    CPC classification number: H01T13/04

    Abstract: A spark plug capable of removing the remaining electric charges is proposed. The spark plug can be installed in a vehicle and has an insulating body, a center electrode, a conductive housing and a conductive wire. The center electrode is passed through the insulating body. The conductive housing is disposed outside the insulating body. One end of the conductive wire is connected to the conductive housing and the other end of the conductive wire is fixed on a negative electrode of a battery of the vehicle. Since the electric charges remaining in the spark plug can be removed by the conductive wire after the high-voltage current sent from the ignition system induces the sparks, the present invention can avoid the damage of the spark plug to keep the spark plug in good status, maintain the efficiency of the engine, and make the car safer in usage.

    System and method for content-based filtering of popup objects
    49.
    发明申请
    System and method for content-based filtering of popup objects 审中-公开
    用于基于内容的弹出对象过滤的系统和方法

    公开(公告)号:US20060005148A1

    公开(公告)日:2006-01-05

    申请号:US10879049

    申请日:2004-06-30

    CPC classification number: G06F9/451

    Abstract: A system and related techniques automatically monitor browser and other sessions to detect the onset of a popup or other automatically generated windows or media. When a popup object is detected, a filter or engine may examine the content of that object to generate an estimate of the desirability of the popup to the user. The content-based evaluation of the popup may examine, for instance, the source of the popup, the type or quantity of embedded image files, text including keywords, embedded links and a variety of other factors to assess the likelihood that the popup was related to the user's legitimate browser activity or otherwise likely to be desired by the user. If not, the platform may suppress the popup or other object without user intervention. In embodiments, the content analysis may be performed by a self-learning network such as a neural network, for instance based on stored feedback from a collection of users, or otherwise.

    Abstract translation: 系统和相关技术自动监视浏览器和其他会话以检测弹出窗口或其他自动生成的窗口或介质的发生。 当检测到弹出对象时,过滤器或引擎可以检查该对象的内容以生成弹出窗口对用户的可取性的估计。 弹出窗口的基于内容的评估可以检查例如弹出窗口的来源,嵌入图像文件的类型或数量,包括关键字的文本,嵌入链接以及各种其他因素来评估弹出窗口相关的可能性 用户的合法浏览器活动或者用户可能希望的。 如果没有,平台可以在没有用户干预的情况下抑制弹出窗口或其他对象。 在实施例中,内容分析可以由诸如神经网络的自学习网络来执行,例如基于来自用户集合的存储的反馈或其他方式。

    Method and apparatus for integrated wafer handling and testing
    50.
    发明授权
    Method and apparatus for integrated wafer handling and testing 失效
    用于集成晶片处理和测试的方法和装置

    公开(公告)号:US6164894A

    公开(公告)日:2000-12-26

    申请号:US963722

    申请日:1997-11-04

    Applicant: David Cheng

    Inventor: David Cheng

    Abstract: A wafer handling and testing apparatus and method include a station for supporting a wafer carrier, such as a cassette or pod, that holds one or more wafers, where the carrier can be moved in a z-direction. A wafer handling assembly is moveable in an x-direction and removes a wafer from the wafer carrier. The handling assembly includes an end effector and a sensor for detecting an edge of the wafer. A chuck includes a platform that is movable in a z-direction and is used to lift the wafer from the handling assembly and rotate the wafer so that the sensor maps the edge of the wafer. The wafer is then centered on the platform, lowered onto the chuck, and is tested by a test head that is preferably coupled to the handling assembly.

    Abstract translation: 晶片处理和测试装置和方法包括用于支撑晶片载体(例如盒或盒)的站,该台架保持一个或多个晶片,其中载体可沿z方向移动。 晶片处理组件可在x方向上移动并从晶片载体移除晶片。 处理组件包括端部执行器和用于检测晶片边缘的传感器。 卡盘包括可在z方向上移动的平台,并且用于从处理组件抬起晶片并旋转晶片,使得传感器映射晶片的边缘。 然后晶片在平台上居中,下降到卡盘上,并通过优选地联接到操作组件的测试头进行测试。

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