公开(公告)号：US11049741B2

公开(公告)日：2021-06-29

申请号：US16200074

申请日：2018-11-26

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  H01J49/10 ,  G01N21/73 ,  H01J49/00 ,  G01N33/00

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US10585108B2

公开(公告)日：2020-03-10

申请号：US15735850

申请日：2016-06-24

Applicant: Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N35/10 ,  G01N21/35 ,  G01N30/02 ,  G01N21/73

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

公开(公告)号：US10551401B2

公开(公告)日：2020-02-04

申请号：US15735850

申请日：2016-06-24

Applicant: Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N35/10 ,  G01N21/35 ,  G01N30/02 ,  G01N21/73

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

公开(公告)号：US20190172730A1

公开(公告)日：2019-06-06

申请号：US16200038

申请日：2018-11-26

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/677 ,  H01J49/10 ,  H01L21/66

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20160370262A1

公开(公告)日：2016-12-22

申请号：US15120897

申请日：2015-02-27

Applicant: David DIAZ ,  Jonathan HEIN ,  Kyle W. UHLMEYER ,  Daniel R. WIEDERIN ,  Tyler YOST ,  Kevin WIEDERIN ,  Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N1/10 ,  G01N35/10 ,  H01J49/04 ,  G01N35/00

CPC classification number: G01N1/10 ,  G01N1/14 ,  G01N35/00732 ,  G01N35/00871 ,  G01N35/1097 ,  G01N2001/002 ,  H01J49/045

Abstract: A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling system for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.

Abstract translation: 系统包括在第一位置处的分析系统和在远离第一位置的第二位置处的一个或多个远程采样系统。 采样系统可以被配置为接收远程液体样品。 该系统还包括被配置为将气体从第二位置输送到第一位置的样品传送管线。 样品传输线被配置为选择性地与远程采样系统耦合，以将连续的液体样品段供应到样品传送线。 该系统还可以包括在第一位置处的样本接收线。 样品接收管线被配置为选择性地与样品传送管线和分析系统连接以接收连续液体样品段并将样品供应到分析装置。