公开(公告)号：US12094738B2

公开(公告)日：2024-09-17

申请号：US18320748

申请日：2023-05-19

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau A. Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  G01N21/73 ,  G01N33/00 ,  H01J49/00 ,  H01J49/10 ,  H01L21/66 ,  H01L21/677

CPC classification number: H01L21/6719 ,  G01N21/73 ,  H01J49/105 ,  H01L21/67051 ,  H01L21/6708 ,  H01L21/67126 ,  H01L21/6715 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67772 ,  H01L22/14 ,  H01L22/34 ,  G01N33/0095 ,  H01J49/00 ,  H01L22/12

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US11705351B2

公开(公告)日：2023-07-18

申请号：US16200010

申请日：2018-11-26

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/66 ,  H01J49/10 ,  G01N21/73 ,  H01J49/00 ,  G01N33/00

CPC classification number: H01L21/6719 ,  G01N21/73 ,  H01J49/105 ,  H01L21/6708 ,  H01L21/6715 ,  H01L21/67051 ,  H01L21/67126 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67772 ,  H01L22/14 ,  H01L22/34 ,  G01N2033/0095 ,  H01J49/00 ,  H01L22/12

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20220189794A1

公开(公告)日：2022-06-16

申请号：US17562411

申请日：2021-12-27

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/66 ,  H01L21/677 ,  H01J49/10 ,  G01N21/73

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20190172731A1

公开(公告)日：2019-06-06

申请号：US16200074

申请日：2018-11-26

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/677 ,  H01J49/10 ,  H01L21/66

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20180180639A1

公开(公告)日：2018-06-28

申请号：US15735850

申请日：2016-06-24

Applicant: Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N35/10 ,  G01N30/02 ,  G01N21/35

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

公开(公告)号：US20250027579A1

公开(公告)日：2025-01-23

申请号：US18759594

申请日：2024-06-28

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Brad Prucha ,  Jeremiah Meints ,  Jonathan Hein

IPC: F16K37/00 ,  F16K11/074 ,  G01N35/10

Abstract: Rotary valve systems with integrated sensors are described that facilitate stabilizing electrical connection from a valve actuator. A valve system includes a rotary valve comprising one or more ports configured to receive one or more fluids. The valve system further includes an actuator attached to the rotary valve, wherein the actuator comprises a power connection fed from electronics associated with the actuator. The valve system further includes an actuator cap attached to the actuator, the actuator cap configured to allow the power connection to pass through, wherein the actuator cap comprises one or more apertures, a valve collar with an integrated press-on connector configured to be attached to the actuator cap, wherein the valve collar comprises an electronic feedthrough passage for the power connection, a retainer portion comprising one or more retainer pins, wherein the one or more retainer pins are configured to mate with the one or more apertures on the actuator cap, the retainer portion configured to allow electrical connection between the power connector and a sensor connector when the one or more retainer pins fit within the one or more apertures on the actuator cap, and a sensor housing adjacent to the rotary valve and configured to support one or more sensors disposed with respect to one or more fluid lines coupled to the one or more ports of the rotary valve, the sensor connector configured to transmit signals from the one or more sensors to the actuator.

公开(公告)号：US11519521B1

公开(公告)日：2022-12-06

申请号：US16418477

申请日：2019-05-21

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Brad Prucha ,  Jeremiah Meints ,  Jonathan Hein

IPC: F16K37/00 ,  G01N35/10 ,  F16K11/074

Abstract: Rotary valve systems with integrated sensors are described that facilitate stabilizing electrical connection from a valve actuator. A valve system embodiment includes, but is not limited to, a multi-port rotary valve; an actuator attached to the multi-port rotary valve, wherein the actuator comprises a power connection fed from electronics associated with the actuator; an actuator cap attached to the actuator, the actuator cap configured to allow the power connection to pass through; a valve collar with an integrated press-on connector, wherein the valve collar comprises an electronic feedthrough passage for the power connection; and a retainer portion comprising two retainer pins, wherein the two retainer pins are configured to mate with apertures on the actuator cap, the retainer portion configured to allow electrical connection between the power connector and a sensor connector when the two retainer pins fit within the two apertures on the actuator cap.

公开(公告)号：US11249101B2

公开(公告)日：2022-02-15

申请号：US16781262

申请日：2020-02-04

Applicant: Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N35/10 ,  G01N21/35 ,  G01N30/02 ,  G01N21/73

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

公开(公告)号：US20210382022A1

公开(公告)日：2021-12-09

申请号：US17355031

申请日：2021-06-22

Applicant: Elemental Scientific, Inc.

Inventor： DAVID DIAZ ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N30/78 ,  G01N30/06

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

公开(公告)号：US20190172729A1

公开(公告)日：2019-06-06

申请号：US16200010

申请日：2018-11-26

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01J49/10 ,  G01N21/73 ,  H01L21/66

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.