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41.发明申请公开(公告)号：US20080272447A1
公开(公告)日：2008-11-06
申请号：US12136722
申请日：2008-06-10
申请人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
发明人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
IPC分类号： H01L29/84
CPC分类号： H01L21/76898 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C1/00896 , B81C2201/019 , G02B6/357 , G02B6/3584
摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.
摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。
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公开(公告)号：US06924166B2
公开(公告)日：2005-08-02
申请号：US10293980
申请日：2002-11-12
CPC分类号： B81C1/00333
摘要： A process for the fabrication of devices that integrate protected microstructures, comprising the following steps: forming, in a body of semiconductor material, at least one microstructure having at least one first portion and one second portion which are relatively mobile with respect to one another and are separated from one another by at least one gap region, which is accessible through a face of the body; and sealing the gap. The sealing step includes depositing on the face of the body a layer of protective material, in such a way as to close the gap region, the protective layer being such as to enable relative motion between the first portion and the second portion of the microstructure.
摘要翻译： 一种用于制造整合受保护微结构的器件的方法，包括以下步骤：在半导体材料体中形成至少一个具有至少一个第一部分和一个第二部分的微结构，所述第一部分和第二部分相对于彼此相对移动， 通过至少一个间隙区域彼此分离，所述间隙区域可通过身体的面部接近; 并密封间隙。 所述密封步骤包括在所述主体的表面上沉积一层保护材料，以使得所述间隙区域闭合，所述保护层能够使所述微结构的第一部分和第二部分之间相对运动。
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公开(公告)号：US08901925B2
公开(公告)日：2014-12-02
申请号：US13608965
申请日：2012-09-10
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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44.发明授权Integrated triaxial magnetometer of semiconductor material manufactured in MEMS technology 有权用MEMS技术制造的半导体材料的集成三轴磁力计公开(公告)号：US08471557B2
公开(公告)日：2013-06-25
申请号：US12965491
申请日：2010-12-10
申请人： Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
发明人： Lorenzo Baldo , Francesco Procopio , Sarah Zerbini
IPC分类号： G01R33/02
CPC分类号： G01R33/0286 , G01R33/0005 , G01R33/028 , G01R33/038
摘要： Two suspended masses are configured so as to be flowed by respective currents flowing in the magnetometer plane in mutually transversal directions and are capacitively coupled to lower electrodes. Mobile sensing electrodes are carried by the first suspended mass and are capacitively coupled to respective fixed sensing electrodes. The first suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a first horizontal direction. The second suspended mass is configured so as to be mobile in a direction transversal to the plane in presence of a magnetic field having a component in a second horizontal direction, and the first suspended mass is configured so as to be mobile in a direction parallel to the plane and transversal to the current flowing in the first suspended mass in presence of a magnetic field having a component in a vertical direction.
摘要翻译： 两个悬挂质量被配置为使得在相互横向上在磁力计平面中流动的相应电流流动，并且电容耦合到下电极。 移动感测电极由第一悬浮质量携带并且电容耦合到相应的固定感测电极。 第一悬挂质量被配置为在存在具有在第一水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的。 第二悬挂质量被配置为在存在具有在第二水平方向上的分量的磁场的情况下在横向于平面的方向上是可移动的，并且第一悬挂质量被配置为在平行于 并且在存在具有在垂直方向上的分量的磁场的情况下横向于在第一悬浮质量块中流动的电流。
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公开(公告)号：US20130000136A1
公开(公告)日：2013-01-03
申请号：US13608965
申请日：2012-09-10
CPC分类号： G01C17/28 , B82Y25/00 , G01R33/093 , G01R33/096
摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.
摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。
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46.发明申请公开(公告)号：US20120208343A1
公开(公告)日：2012-08-16
申请号：US13456990
申请日：2012-04-26
申请人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
发明人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
IPC分类号： H01L21/311
CPC分类号： H01L21/76898 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C1/00896 , B81C2201/019 , G02B6/357 , G02B6/3584
摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.
摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。
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47.发明授权Method for manufacturing a micro-electro-mechanical device, in particular an optical microswitch, and micro-electro-mechanical device thus obtained 有权微机电装置，特别是光学微动开关的制造方法以及如此获得的微电子机械装置公开(公告)号：US08193550B2
公开(公告)日：2012-06-05
申请号：US12136722
申请日：2008-06-10
申请人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
发明人： Simone Sassolini , Mauro Marchi , Marco Del Sarto , Lorenzo Baldo
IPC分类号： H01L31/0352 , G02B26/10
CPC分类号： H01L21/76898 , B81B2201/033 , B81B2201/045 , B81C1/00484 , B81C1/00896 , B81C2201/019 , G02B6/357 , G02B6/3584
摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.
摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。
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48.发明授权Read/write transducer for hard disk drives with optical position measuring system, and manufacturing process thereof 有权用于具有光学位置测量系统的硬盘驱动器的读/写传感器及其制造过程公开(公告)号：US06924958B2
公开(公告)日：2005-08-02
申请号：US10001922
申请日：2001-11-13
IPC分类号： G11B5/596
CPC分类号： G01R33/0286 , G11B5/59677
摘要： Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.
摘要翻译： 这里描述了一种用于具有双驱动级的硬盘驱动器的读/写换能器，包括至少一个硬盘和至少一个承载读/写换能器的悬架。 读/写换能器包括具有基本上平行六面体形状的支撑体，布置在支撑体的前表面上的读/写头和在制造过程中在支撑体的一个侧面上限定的光栅 读/写传感器。 该光栅能够使用激光发射器以光学方式测量读/写换能器相对于相应悬架的位置，该激光发射器向激光束发射和指向光栅;以及激光接收器，被布置成拦截由 光栅并输出位置信号，基于此可以以简单的方式计算读/写换能器相对于相应悬架的位置。
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