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113 条记录 (耗时 0.037 秒)

    SEM system and a method for producing a recipe
    42.
    发明授权
    SEM system and a method for producing a recipe 有权
    SEM系统和生产食谱的方法

    公开(公告)号：US08073242B2

    公开(公告)日：2011-12-06

    申请号：US11954410

    申请日：2007-12-12

    申请人： Atsushi Miyamoto ,  Tomofumi Nishiura ,  Ryoichi Matsuoka ,  Hidetoshi Morokuma

    发明人： Atsushi Miyamoto ,  Tomofumi Nishiura ,  Ryoichi Matsuoka ,  Hidetoshi Morokuma

    IPC分类号： G06K9/00

    CPC分类号： G06T7/0006 ,  G06T2207/30148

    摘要： This invention relates to a SEM system constructed to create imaging recipes or/and measuring recipes automatically and at high speed, and improve inspection efficiency and an automation ratio, and to a method using the SEM system; a method for creation of imaging recipes and measuring recipes in the SEM system is adapted to include, in a recipe arithmetic unit, the steps of evaluating a tolerance for an imaging position error level at an evaluation point, evaluating a value predicted of the imaging position error level at the evaluation point when any region on circuit pattern design data is defined as an addressing point, and determining an imaging recipe and a measuring recipe on the basis of a relationship between the tolerance for the imaging position error level at the evaluation point and the predicted value of the imaging position error level at the evaluation point.

    摘要翻译： 本发明涉及一种用于自动和高速创建成像配方或/和测量配方，提高检测效率和自动化比例的SEM系统以及使用SEM系统的方法。 用于在SEM系统中创建成像配方和测量配方的方法适于在配方算术单元中包括评估评估点处的成像位置误差水平的公差的步骤，评估成像位置的预测值 当将电路图案设计数据上的任何区域定义为寻址点时，在评估点处的误差水平，以及基于评估点处的成像位置误差水平的公差与所述评估点之间的关系确定成像配方和测量配方 在评估点的成像位置误差水平的预测值。

    Mass spectrometer
    44.
    发明授权
    Mass spectrometer 有权
    质谱仪

    公开(公告)号：US08664588B2

    公开(公告)日：2014-03-04

    申请号：US13368549

    申请日：2012-02-08

    申请人： Hiroyuki Noda ,  Mitsuru Onuma ,  Yoko Sato ,  Koji Ishiguro ,  Hidetoshi Morokuma ,  Shigeo Otsuki ,  Nami Ibi

    发明人： Hiroyuki Noda ,  Mitsuru Onuma ,  Yoko Sato ,  Koji Ishiguro ,  Hidetoshi Morokuma ,  Shigeo Otsuki ,  Nami Ibi

    IPC分类号： H01J49/00

    CPC分类号： H01J49/0022 ,  H01J49/0013 ,  H05K7/20136

    摘要： In the spectrometer, heavy loads are arranged centrally inside a case having a height smaller than a width, and having a depth smaller than the height. The heavy loads include a vacuum chamber, a vacuum pump which evacuates the vacuum chamber, a sample introduction unit which introduces a sample to be measured and evaporates the sample, an ionization unit which ionizes the evaporated sample and provides it to the vacuum chamber, and an ion detection unit which is connected to the vacuum chamber. Circuit board storage units which store a plurality of circuit boards with a predetermined space therebetween are formed on both sides along a width direction of the case.

    摘要翻译： 在光谱仪中，重负荷被布置在具有小于宽度的高度的壳体的中央内部，并且具有比该高度更小的深度。 重负荷包括真空室，抽空真空室的真空泵，引入待测样品并蒸发样品的样品引入单元，离子化蒸发的样品并将其提供给真空室的离子化单元，以及 离子检测单元，连接到真空室。 在壳体的宽度方向的两侧形成存储有多个电路板的电路板存储单元。

    MASS SPECTROMETER AND MASS ANALYZING METHOD
    46.
    发明申请
    MASS SPECTROMETER AND MASS ANALYZING METHOD 有权
    质谱仪和质谱分析方法

    公开(公告)号：US20120326022A1

    公开(公告)日：2012-12-27

    申请号：US13527627

    申请日：2012-06-20

    申请人： Shun KUMANO ,  Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masuyoshi Yamada ,  Hidetoshi Morokuma ,  Shuhei Hashiba

    发明人： Shun KUMANO ,  Masuyuki Sugiyama ,  Yuichiro Hashimoto ,  Hideki Hasegawa ,  Masuyoshi Yamada ,  Hidetoshi Morokuma ,  Shuhei Hashiba

    IPC分类号： H01J49/04

    CPC分类号： H01J49/0409 ,  H01J49/0495

    摘要： A mass spectrometer including a sample attaching member of attaching a sample, an ionizing chamber including an introductory port of the sample attaching member and an ionization source of generating a sample ion, a vacuumed chamber having a mass analyzer of analyzing the sample ion, and an opening/closing mechanism provided between the ionizing chamber and the vacuumed chamber, in which the opening/closing mechanism is controlled from a closed state to an open state after introducing the sample attaching member into the ionizing chamber to thereby enable to perform ionization with inconsiderable fragmentation at a high sensitivity with a high throughput

    摘要翻译： 一种质谱仪，包括附着样品的样品附着构件，包括样品附着构件的入口的电离室和产生样品离子的离子源，具有分析样品离子的质量分析器的真空室，以及 设置在离子化室和真空室之间的开/关机构，其中将样品附着构件引入电离室之后，将开/关机构从关闭状态控制到打开状态，从而能够以不可分割的碎片进行电离 灵敏度高，吞吐量高

    SCANNING ELECTRON MICROSCOPE
    48.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20090041333A1

    公开(公告)日：2009-02-12

    申请号：US12249014

    申请日：2008-10-10

    申请人： Satoru YAMAGUCHI ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

    发明人： Satoru YAMAGUCHI ,  Takashi Iizumi ,  Osamu Komuro ,  Hidetoshi Morokuma ,  Tatsuya Maeda ,  Juntaro Arima ,  Yasuhiko Ozawa

    IPC分类号： G06K9/00 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01N23/04 ,  G01N23/225 ,  G06T7/74 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/2817

    摘要： An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

    摘要翻译： 本发明的目的是提供一种用于减少与检查定位或输入操作相关的处理的扫描电子显微镜，从而以高速度高精度地运行。 为了实现上述目的，本发明提供了一种扫描电子显微镜，其具有基于预先登记的图案来识别期望位置的功能，该扫描电子显微镜包括用于设置关于图案种类的信息的装置，多个部分之间的间隔 构成图案的部分，以及构成图案的部分的尺寸，以及基于由相关装置获得的信息形成由多个部分组成的图案图像的装置。