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公开(公告)号：US20100270712A1
公开(公告)日：2010-10-28
申请号：US12765145
申请日：2010-04-22
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An object of the present invention is to provide a micropattern transfer method and a micropattern transfer device in which the small amount of resin is applied to a substrate, and the nonuniformity in thickness is prevented to arise on the obtained pattern forming layer. In order to achieve the above object, the present invention provides a micropattern transfer method in which a micropattern is transferred to a resin by pressing a stamper having the micropattern onto the resin applied to a substrate, including the steps of: applying the resin to a surface of the substrate discretely in order to obtain a plurality of resin islands so that a center portion of each of the resin islands forms a planar thin-film, and a peripheral portion of the resin island rises higher than the center portion.
摘要翻译： 本发明的目的是提供一种微图案转印方法和一种微图案转印装置，其中少量的树脂施加于基底，并且在所获得的图案形成层上防止出现不均匀的厚度。 为了实现上述目的，本发明提供一种微图案转印方法，其中通过将具有微图案的压模压入到施加到基板上的树脂上而将微图案转印到树脂上，包括以下步骤：将树脂施加到 为了获得多个树脂岛，使得每个树脂岛的中心部分形成平面薄膜，并且树脂岛的周边部分比中心部分上升得更高。
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公开(公告)号：US07520742B2
公开(公告)日：2009-04-21
申请号：US10801579
申请日：2004-03-17
CPC分类号： B82Y10/00 , B29C33/58 , B29C37/0067 , B29C37/0075 , B29C59/022 , B29C59/025 , B29C2059/023 , B82Y40/00 , G03F7/0002 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/84 , H05K3/12 , Y10S977/887
摘要： A pillar with a high aspect ratio is transferred by a nanoprinting method. In order to form a fine structure on a substrate, a nanoprinting apparatus heats and presses the substrate and a mold with a fine concave-convex pattern formed thereon, the mold having a mechanism for transferring and applying a mold-releasing agent. A method for transferring a fine structure using the aforementioned nanoprinting apparatus.
摘要翻译： 通过纳米印刷法转移具有高纵横比的支柱。 为了在基板上形成精细结构，纳米印刷装置加热并压制基板和形成有细凹凸图案的模具，该模具具有用于转印和施加脱模剂的机构。 使用上述纳米印刷装置转印精细结构的方法。
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公开(公告)号：US20080229948A1
公开(公告)日：2008-09-25
申请号：US12019839
申请日：2008-01-25
申请人： Ryuta Washiya , Takashi Ando , Masahiko Ogino , Hideaki Kataho , Akihiro Miyauchi , Kosuke Kuwabara
发明人： Ryuta Washiya , Takashi Ando , Masahiko Ogino , Hideaki Kataho , Akihiro Miyauchi , Kosuke Kuwabara
IPC分类号： B41F1/40
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprint device transfers a micropattern created on a stamper onto a material to be transferred, by bringing the stamper and the material to be transferred into contact with each other. The imprint device has a flow passage for discharging a fluid to a rear surface of the stamper or the material to be transferred, to thereby bend the stamper or the material to be transferred.
摘要翻译： 压印装置通过使压模和被转印材料彼此接触来将形成在压模上的微图案转印到待转印的材料上。 压印装置具有用于将流体排放到压模的后表面或待转印的材料的流动通道，从而弯曲压模或要转印的材料。
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公开(公告)号：US20050214935A1
公开(公告)日：2005-09-29
申请号：US10989910
申请日：2004-11-17
摘要： It is an object of this invention to provide a cell culture vessel which has a simple and convenient structure, can prevent the injury on the cells at the time of peeling, and accelerates the transportation of nutrients and discharge of waste materials. In order to solve the problem mentioned above, the cell culture vessel of this invention has protrusions having a corresponding diameter not smaller than 10 nm and not greater than 10 μm and a height not smaller than 10 nm and not greater than 1 mm on the surface of the cell culture vessel. The protrusions make the culture fluid permeate into the under part of the cells, accelerate the supply of nutrients and discharge of waste materials, and makes the contact between the cells and the vessel as a point-contact and thereby prevents the cells from the injury which the cells undergo at the time of peeling.
摘要翻译： 本发明的目的是提供一种结构简单方便的细胞培养容器，可以防止剥离时对细胞的损伤，加速营养物质的运输和废料排出。 为了解决上述问题，本发明的细胞培养容器具有相对应的直径不小于10nm且不大于10um的突起，并且在表面上具有不小于10nm且不大于1mm的高度 的细胞培养容器。 突起使得培养液渗透到细胞的下部，加速营养物质的供给和排出废物，并使细胞与血管之间的接触作为点接触，从而防止细胞受损， 细胞在剥离时经历。
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公开(公告)号：US20050116370A1
公开(公告)日：2005-06-02
申请号：US10997865
申请日：2004-11-29
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0015
摘要： An object of the invention is to execute an imprinting process at a higher speed and a higher accuracy, in an imprinting apparatus. In an imprinting apparatus for contacting and pressurizing a mold having a micro concavo-convex structure formed on a surface thereof to a substrate surface in order to form a micro and nanometer size structure on a substrate, a step of pressurizing the mold and the substrate and a step of peeling the mold from the substrate are constituted by independent units, the mold and the substrate are moved in a closely attached state at a time of moving from the pressurizing step to the peeling step, and preferably at least two sets of molds and substrates are processed by the different steps simultaneously or a temporarily overlapped manner.
摘要翻译： 本发明的目的是在压印装置中以更高的速度和更高的精度执行压印过程。 在用于使形成在其表面上的具有微凹凸结构的模具与基板表面接触和加压以在基板上形成微米和纳米尺寸结构的压印装置中，对模具和基板加压的步骤和 从基板剥离模具的步骤由独立的单元构成，在从加压步骤移动到剥离步骤时，模具和基板以紧密连接的状态移动，并且优选地至少两组模具和 基板通过不同的步骤同时处理或临时重叠。
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公开(公告)号：US08668487B2
公开(公告)日：2014-03-11
申请号：US13581169
申请日：2011-02-16
IPC分类号： B29C59/16
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0046 , G03F7/038 , G03F7/0757
摘要： A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.
摘要翻译： 微图案转印模具包括支撑基材和形成在支撑基材上的微结构层，微结构层是主要包含含有多个可聚合官能团的倍半硅氧烷衍生物的树脂组合物的聚合物，以及一个或多个 含有多个聚合性官能团的单体元素种类。
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公开(公告)号：US08562896B2
公开(公告)日：2013-10-22
申请号：US12765145
申请日：2010-04-22
IPC分类号： B82Y40/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An object of the present invention is to provide a micropattern transfer method and a micropattern transfer device in which the small amount of resin is applied to a substrate, and the nonuniformity in thickness is prevented to arise on the obtained pattern forming layer. In order to achieve the above object, the present invention provides a micropattern transfer method in which a micropattern is transferred to a resin by pressing a stamper having the micropattern onto the resin applied to a substrate, including the steps of: applying the resin to a surface of the substrate discretely in order to obtain a plurality of resin islands so that a center portion of each of the resin islands forms a planar thin-film, and a peripheral portion of the resin island rises higher than the center portion.
摘要翻译： 本发明的目的是提供一种微图案转印方法和一种微图案转印装置，其中少量的树脂施加于基底，并且在所获得的图案形成层上防止出现不均匀的厚度。 为了实现上述目的，本发明提供一种微图案转印方法，其中通过将具有微图案的压模压入到施加到基板上的树脂上而将微图案转印到树脂上，包括以下步骤：将树脂施加到 为了获得多个树脂岛，使得每个树脂岛的中心部分形成平面薄膜，并且树脂岛的周边部分比中心部分上升得更高。
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公开(公告)号：US08268209B2
公开(公告)日：2012-09-18
申请号：US11623776
申请日：2007-01-17
申请人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
发明人： Masahiko Ogino , Akihiro Miyauchi , Takashi Ando , Chiseki Haginoya , Susumu Komoriya , Yasunari Sohda , Souichi Katagiri , Hiroya Ohta , Yoshinori Nakayama
IPC分类号： H01L23/544
CPC分类号： H01L21/76838 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/7076 , G11B5/855 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
摘要： In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respective marks, and an alignment between the mold and the substrate to which a resin film is applied is carried out excluding the damaged mark.
摘要翻译： 在图案形成为微细凹凸形状的模具中，同心地形成用于确定基板和模具之间的相对位置关系的两个或更多个对准标记。 此外，根据各个标记的位置信息和形状来识别损坏的标记，并且除了损坏的标记之外，执行模具和施加了树脂膜的基板之间的对准。
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公开(公告)号：US08186992B2
公开(公告)日：2012-05-29
申请号：US12692135
申请日：2010-01-22
IPC分类号： B29C59/00
CPC分类号： G11B5/82 , B29C43/021 , B29C2043/025 , B29C2043/3411 , B29C2043/3488 , B29C2043/3602 , B29C2043/3634 , B29C2043/5038 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B7/263
摘要： In a micropattern transfer device, a stamper on which a fine indented pattern is formed is brought into contact with a material to be transferred, and the fine indented pattern on the stamper is transferred onto a surface of the material to be transferred. The micropattern transfer device includes a holding mechanism which holds an entire outer circumferential portion of the material to be transferred. The holding mechanism holds the material to be transferred such that a distance between the material to be transferred and the stamper is substantially equal to or shorter than a distance between the holding mechanism and the stamper.
摘要翻译： 在微图案转印装置中，形成有精细凹凸图案的压模与要转印的材料接触，压模上的精细凹入图案被转印到待转印材料的表面上。 微图案转印装置包括保持待转印材料的外周部分的保持机构。 保持机构保持要被转印的材料，使得被转印材料和压模之间的距离基本上等于或短于保持机构和压模之间的距离。
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公开(公告)号：US08109751B2
公开(公告)日：2012-02-07
申请号：US11774244
申请日：2007-07-06
IPC分类号： B28B11/08
CPC分类号： B29C43/021 , B29C43/003 , B29C43/58 , B29C2043/025 , B29C2043/3634 , B29C2043/5808 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： There is provided an imprint device for transferring a fine pattern to a material to form a patterned material. The device comprises a stamper having the fine pattern thereon, and a pressure distribution mechanism. The stamper is pressed against the material, and the pressure distribution mechanism provides a nonuniform pressure distribution in a patterned region of the patterned material, while the stamper is in contact with the material. There are provided an imprint device and a microstructure transfer method, by which it is possible to sufficiently spread a resin or other material for forming a pattern layer between a stamper and a patterned material with a lower pressure so as not to damage the stamper or the patterned material, and to form a pattern formation layer having the uniform thickness on the patterned material.
摘要翻译： 提供了用于将精细图案转印到材料以形成图案化材料的压印装置。 该装置包括其上具有精细图案的压模和压力分布机构。 压模被压在材料上，并且压力分配机构在图案化材料的图案化区域中提供不均匀的压力分布，同时压模与材料接触。 提供了压印装置和微结构转印方法，通过该方法可以在压模和图案化材料之间以较低压力充分地铺展树脂或其它材料以形成图案层，以便不损坏压模或 并且在图案化材料上形成具有均匀厚度的图案形成层。
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