Semiconductor probe with resistive tip and method of fabricating the same
    41.
    发明申请
    Semiconductor probe with resistive tip and method of fabricating the same 失效
    具有电阻尖端的半导体探针及其制造方法

    公开(公告)号:US20060060779A1

    公开(公告)日:2006-03-23

    申请号:US11219732

    申请日:2005-09-07

    IPC分类号: G21K7/00

    摘要: A semiconductor probe with a resistive tip, and a method of fabricating the semiconductor probe. The method includes forming a stripe-shaped mask layer on a substrate doped with a first impurity, and forming first and second electrode regions by heavily doping portions of the substrate not covered by the mask layer with a second impurity opposite in polarity to the first impurity; annealing the substrate to decrease a gap between the first and second semiconductor electrode regions, and forming resistive regions lightly doped with the second impurity at portions contiguous with the first and second semiconductor electrode regions; forming a stripe-shaped first photoresist layer orthogonal to the mask layer, and etching the mask layer such that the mask layer has a square shape; forming a second photoresist layer on the substrate to cover a portion of the first photoresist layer and define a cantilever region; forming the cantilever region by etching portions not covered by the first and second photoresist layers; and removing the first and second photoresist layers, and forming a resistive tip having a semi-quadrangular pyramidal shape by etching portions of the substrate not covered by the mask layer.

    摘要翻译: 具有电阻尖端的半导体探针及其制造方法。 该方法包括在掺杂有第一杂质的衬底上形成条形掩模层,以及通过以与第一杂质极性相反的第二杂质重掺杂未被掩模层覆盖的衬底的部分来形成第一和第二电极区 ; 退火所述衬底以减小所述第一和第二半导体电极区之间的间隙,以及在与所述第一和第二半导体电极区相邻的部分形成轻掺杂有所述第二杂质的电阻区; 形成与所述掩模层正交的条状的第一光致抗蚀剂层,并且蚀刻所述掩模层使得所述掩模层具有正方形形状; 在所述基板上形成第二光致抗蚀剂层以覆盖所述第一光致抗蚀剂层的一部分并限定悬臂区域; 通过蚀刻未被第一和第二光致抗蚀剂层覆盖的部分形成悬臂区域; 以及去除所述第一和第二光致抗蚀剂层,以及通过蚀刻未被所述掩模层覆盖的所述衬底的部分,形成具有半四棱锥形形状的电阻尖端。

    Apparatus comprising substrate and conductive layer
    42.
    发明授权
    Apparatus comprising substrate and conductive layer 有权
    装置包括基底和导电层

    公开(公告)号:US08523555B2

    公开(公告)日:2013-09-03

    申请号:US13621204

    申请日:2012-09-15

    IPC分类号: B29C59/00

    摘要: A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

    摘要翻译: 提供了纳米压印母版及其制造方法。 该方法包括:将导电金属离子注入包括石英的衬底中,以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂,以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

    Method of improving sensitivity of electric field sensor, storage apparatus including electric field sensor, and method of reproducing information of the storage apparatus
    45.
    发明授权
    Method of improving sensitivity of electric field sensor, storage apparatus including electric field sensor, and method of reproducing information of the storage apparatus 失效
    提高电场传感器的灵敏度的方法,包括电场传感器的存储装置以及再现存储装置的信息的方法

    公开(公告)号:US07852738B2

    公开(公告)日:2010-12-14

    申请号:US11965836

    申请日:2007-12-28

    IPC分类号: G11B9/00

    CPC分类号: G11B9/02 B82Y10/00 G11B9/1409

    摘要: A storage apparatus includes a ferroelectric recording medium, an electric field sensor including a source region, a drain region and a resistance region electrically connecting the source region to the drain region and having a resistance, which varies according to an intensity of an electric field due to a polarization voltage of an electric domain of the recording medium, a voltage applying unit applying a drain voltage between the source region and the drain region, and a reproducing signal detection unit including at least one negative resistor installed in an electric circuit connecting the drain region to the voltage applying unit, and detecting a change in a voltage between the drain region and the at least one negative resistor.

    摘要翻译: 存储装置包括铁电记录介质,电场传感器,其包括源极区域,漏极区域和将源极区域电连接到漏极区域并具有电阻的电阻区域,该电阻器根据电场的强度而变化 至所述记录介质的电畴的极化电压,在所述源极区域和所述漏极区域之间施加漏极电压的电压施加单元,以及再现信号检测单元,所述再现信号检测单元包括安装在连接所述漏极 区域,并且检测漏极区域和至少一个负电阻器之间的电压变化。

    Semiconductor probe with high resolution resistive tip and method of fabricating the same
    46.
    发明授权
    Semiconductor probe with high resolution resistive tip and method of fabricating the same 有权
    具有高分辨率电阻尖端的半导体探针及其制造方法

    公开(公告)号:US07828981B2

    公开(公告)日:2010-11-09

    申请号:US11835874

    申请日:2007-08-08

    IPC分类号: C23F1/00

    CPC分类号: G01Q60/30 G01Q60/38

    摘要: A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to the first impurity; and first and second electrode regions formed on either side of the resistive convex portion and heavily doped with the second impurity.

    摘要翻译: 提供了具有高分辨率尖端的半导体探针及其制造方法。 半导体探针包括:掺杂有第一杂质的悬臂; 从所述悬臂的端部突出并轻微掺杂与所述第一杂质极性相反的第二杂质的电阻凸部; 以及第一和第二电极区域,形成在电阻凸部的任一侧上并且重掺杂有第二杂质。

    Bit patterned medium, reading head for reading data recorded on bit patterned medium, and hard disk drive for recording/reading data on/from bit patterned medium
    47.
    发明授权
    Bit patterned medium, reading head for reading data recorded on bit patterned medium, and hard disk drive for recording/reading data on/from bit patterned medium 失效
    位图形介质,用于读取记录在位图形介质上的数据的读头,以及用于在位图形介质上记录/读取数据的硬盘驱动器

    公开(公告)号:US07746589B2

    公开(公告)日:2010-06-29

    申请号:US12055344

    申请日:2008-03-26

    IPC分类号: G11B5/09

    摘要: Provided are a bit patterned medium having a super track, a reading head which reads data recorded on the bit-patterned medium, and a hard disk drive (HDD) for recording/reading data on/from the bit patterned medium. The bit patterned medium includes a substrate, and a recording layer formed with a plurality of bit cells separated from each other along a plurality of tracks forming concentric circles having different radii on the substrate, wherein each track includes a super track including a plurality of sub-tracks, and bit cells formed on one of the sub-tracks are arranged at different positions in a circumference direction of the recording layer to bit cells formed on adjacent sub-tracks. The reading head which reads data recorded on a bit patterned medium has a width in a cross-track direction sufficient for reading data of an equal number of bit cells as the plurality of sub-tracks.

    摘要翻译: 提供了具有超级轨道的位图案化介质,读取记录在位图形介质上的数据的读取头和用于在位图形介质上记录/读取数据的硬盘驱动器(HDD)。 位图案化介质包括衬底和形成有沿着多个轨道彼此分离的多个位单元的记录层,所述多个轨道在衬底上形成具有不同半径的同心圆,其中每个轨道包括包括多个子区域的超轨迹 形成在一个子轨道上的位单元被布置在记录层的圆周方向上与形成在相邻子轨道上的位单元的不同位置。 读取记录在位图形介质上的数据的读取头的宽度在跨轨道方向上足以读取与多个子轨道相同数量的位单元的数据。

    BIT PATTERNED MEDIUM, READING HEAD FOR READING DATA RECORDED ON BIT PATTERNED MEDIUM, AND HARD DISK DRIVE FOR RECORDING/READING DATA ON/FROM BIT PATTERNED MEDIUM
    49.
    发明申请
    BIT PATTERNED MEDIUM, READING HEAD FOR READING DATA RECORDED ON BIT PATTERNED MEDIUM, AND HARD DISK DRIVE FOR RECORDING/READING DATA ON/FROM BIT PATTERNED MEDIUM 失效
    位图形图形读取头,读取数据记录在位图形图上,硬盘驱动器用于记录/读取数据/从位图形图

    公开(公告)号:US20090067078A1

    公开(公告)日:2009-03-12

    申请号:US12055344

    申请日:2008-03-26

    IPC分类号: G11B5/09

    摘要: Provided are a bit patterned medium having a super track, a reading head which reads data recorded on the bit-patterned medium, and a hard disk drive (HDD) for recording/reading data on/from the bit patterned medium. The bit patterned medium includes a substrate, and a recording layer formed with a plurality of bit cells separated from each other along a plurality of tracks forming concentric circles having different radii on the substrate, wherein each track includes a super track including a plurality of sub-tracks, and bit cells formed on one of the sub-tracks are arranged at different positions in a circumference direction of the recording layer to bit cells formed on adjacent sub-tracks. The reading head which reads data recorded on a bit patterned medium has a width in a cross-track direction sufficient for reading data of an equal number of bit cells as the plurality of sub-tracks.

    摘要翻译: 提供了具有超级轨道的位图案化介质,读取记录在位图形介质上的数据的读取头和用于在位图形介质上记录/读取数据的硬盘驱动器(HDD)。 位图案化介质包括衬底和形成有沿着多个轨道彼此分离的多个位单元的记录层,所述多个轨道在衬底上形成具有不同半径的同心圆,其中每个轨道包括包括多个子区域的超轨迹 形成在一个子轨道上的位单元被布置在记录层的圆周方向上与形成在相邻子轨道上的位单元的不同位置。 读取记录在位图形介质上的数据的读取头的宽度在跨轨道方向上足以读取与多个子轨道相同数量的位单元的数据。

    Method and apparatus for calibrating position of image sensor, and method of detecting position of image sensor
    50.
    发明授权
    Method and apparatus for calibrating position of image sensor, and method of detecting position of image sensor 有权
    用于校准图像传感器位置的方法和装置,以及检测图像传感器位置的方法

    公开(公告)号:US07490016B2

    公开(公告)日:2009-02-10

    申请号:US11828516

    申请日:2007-07-26

    IPC分类号: G01C25/00

    CPC分类号: H04N5/349

    摘要: A method and apparatus for calibrating a position of an image sensor, and a method of detecting the position of an image sensor are provided. The method of calibrating the position of an image sensor includes: obtaining first image information corresponding to a first position of the image sensor and obtaining second image information corresponding to a second position of the image sensor, calculating cross-correlation values between the obtained first image information and second image information; determining whether or not the calculated cross-correlation values are symmetrical; setting a driving power value of the image sensor for moving the image sensor the distance between the first position to the second position as a reference driving power value for moving the image sensor one-pixel distance, if it is determined that the cross-correlation values are not symmetrical; and calibrating the position of the image sensor by using the set driving power value.

    摘要翻译: 提供了用于校准图像传感器的位置的方法和装置以及检测图像传感器的位置的方法。 校准图像传感器的位置的方法包括:获得与图像传感器的第一位置相对应的第一图像信息,并获得与图像传感器的第二位置对应的第二图像信息,计算所获得的第一图像之间的互相关值 信息和第二图像信息; 确定所计算的互相关值是否对称; 设置图像传感器的驱动功率值,用于将图像传感器的距离移动到第一位置与第二位置之间,作为用于使图像传感器移动一像素距离的基准驱动功率值,如果确定互相关值 不对称 并使用设定的驱动功率值来校准图像传感器的位置。