公开(公告)号：US07268973B2

公开(公告)日：2007-09-11

申请号：US10627396

申请日：2003-07-24

申请人： Jeffrey S. Lille ,  Hugo Alberto Emilio Santini

发明人： Jeffrey S. Lille ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/147

CPC分类号： G11B5/012 ,  G11B5/02 ,  G11B5/1278 ,  G11B5/332 ,  G11B2005/0002 ,  G11B2005/0005 ,  G11B2005/001 ,  G11B2005/0021

摘要： A perpendicular magnetic head including a media heating element that is fabricated within the magnetic head structure. The heating element is preferably fabricated above the first magnetic pole layer close to the ABS surface of the head. In one embodiment, following the fabrication of the heating element, a second magnetic pole probe layer that includes the second magnetic pole tip is fabricated. In an alternative head embodiment, a second magnetic pole shaping layer is fabricated upon the heating element, followed by the fabrication of the probe layer that includes the second magnetic pole tip. The heating element is an electrically resistive heating element that is preferably comprised of NiCr or NiFe.

摘要翻译： 包括在磁头结构内制造的介质加热元件的垂直磁头。 加热元件优选制造在靠近头部的ABS表面的第一磁极层的上方。 在一个实施例中，在加热元件的制造之后，制造包括第二磁极尖端的第二磁极探针层。 在替代的头部实施例中，在加热元件上制造第二磁极成形层，随后制造包括第二磁极尖端的探针层。 加热元件是优选由NiCr或NiFe组成的电阻加热元件。

公开(公告)号：US07187520B2

公开(公告)日：2007-03-06

申请号：US10791186

申请日：2004-03-01

申请人： Edward Hin Pong Lee ,  Jeffrey S. Lille ,  Vladimir Nikitin ,  Hugo Alberto Emilio Santini

发明人： Edward Hin Pong Lee ,  Jeffrey S. Lille ,  Vladimir Nikitin ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/147

CPC分类号： G11B5/3133

摘要： A magnetic head including a media heating device that is fabricated within the magnetic head structure. The media heating device includes an electrically resistive element that is fabricated above the first magnetic pole layer close to the ABS surface of the head. A P1 pole pedestal is fabricated above the heating element. Electrical insulation layers are fabricated beneath and above the heating element to prevent electrical shorting to the P1 pole layer and the P1 pole pedestal that are disposed beneath and above the heating element, respectively.

摘要翻译： 一种磁头，包括制造在磁头结构内的介质加热装置。 介质加热装置包括电阻元件，其制造在接近头部的ABS表面的第一磁极层的上方。 在加热元件上方制造一个P 1极基座。 在加热元件下方和上方制造电绝缘层，以防止分别设置在加热元件下方和上方的P 1极层和P 1极基座的电短路。

公开(公告)号：US07117583B2

公开(公告)日：2006-10-10

申请号：US10101196

申请日：2002-03-18

申请人： Thomas Edward Dinan ,  Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

发明人： Thomas Edward Dinan ,  Jeffrey S. Lille ,  Son Van Nguyen ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/17 ,  C25D7/06

CPC分类号： G11B5/486 ,  G11B5/17 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  H01F17/0006 ,  H01F41/043 ,  H01F41/046 ,  Y10T29/4902 ,  Y10T29/4906 ,  Y10T29/49062 ,  Y10T29/49064 ,  Y10T29/49073

摘要： A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.

摘要翻译： 一种使用预先图案化种子层来提供用于感应头部结构的对准线圈的方法和装置。 该方法使用对准的工艺，其中基板印版制造在电绝缘层上，并且反转的图像被制造并蚀刻到线圈绝缘材料中，例如硬烘烤光致抗蚀剂以减轻与种子层的完全离子去除相关的问题 在高纵横比线圈之间。 该方法也不易于电镀不均匀（空隙），并且在湿法蚀刻步骤中不会经受种子层底切。

公开(公告)号：US06987646B2

公开(公告)日：2006-01-17

申请号：US10632729

申请日：2003-07-31

申请人： Richard Hsiao ,  Hugo Alberto Emilio Santini

发明人： Richard Hsiao ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/012 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/313 ,  Y10T29/49046

摘要： Following the deposition of an insulation layer, a patterned P2 pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask that includes both a P2 pole tip trench opening and an induction coil trench opening is fabricated upon the dielectric layer. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is first electroplated up into its trench, an induction coil seed layer is next deposited, and the induction coil is then electroplated up into the induction coil trench.

摘要翻译： 在沉积绝缘层之后，沉积图案化的P2极端子种子层。 重要的是，极尖种子层没有沉积在磁头的感应线圈区域之下。 接下来沉积电介质层，并且在电介质层上制造包括P2极尖沟槽开口和感应线圈沟槽开口的图案化RIE蚀刻掩模。 此后，在单个RIE蚀刻步骤中，通过电介质材料将P2极尖沟槽蚀刻到种子层，并且感应线圈沟槽通过电介质材料被蚀刻到绝缘层。 首先将P2极端电镀到其沟槽中，然后沉积感应线圈种子层，然后将感应线圈电镀到感应线圈沟槽中。

公开(公告)号：US06930864B2

公开(公告)日：2005-08-16

申请号：US10104612

申请日：2002-03-22

申请人： Hugo Alberto Emilio Santini

发明人： Hugo Alberto Emilio Santini

IPC分类号： G11B5/31 ,  G11B5/33 ,  G11B5/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3903 ,  G11B5/3912 ,  G11B5/3932 ,  G11B5/398 ,  G11B2005/3996 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49155

摘要： A magnetic head is made of a shield layer having first and second recesses defined in first and second end regions which surround a central region. Bias and lead layers are formed in the first and the second recesses, and a read sensor is formed in the central region. Advantageously, edges of the bias and lead layers are formed below edges of the read sensor to thereby define a magnetic track width of the read sensor. Also, the sensor profile is substantially flat so that a gap layer over the read sensor can provide for adequate insulation.

公开(公告)号：US06696226B1

公开(公告)日：2004-02-24

申请号：US10290747

申请日：2002-11-08

申请人： Thomas Edward Dinan ,  Jeffrey S. Lille ,  Hugo Alberto Emilio Santini

发明人： Thomas Edward Dinan ,  Jeffrey S. Lille ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5147

CPC分类号： G11B5/3163 ,  G11B5/17 ,  G11B5/235 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3166 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49064

摘要： A method of making a magnetic read/write head using a single lithographic step to define both a write coil and a pole tip structure. The use of a thin image resist layer over a hard reactive-ion etch mask and image transfer techniques allows very high resolution optical lithography which can accommodate formation of a very compact coil and pole structure. The use of a single high resolution lithography step on a planarized structure to define both a write pole tip and a write coil coplanar with the write pole tip avoids the problems of reflective notching associated with lithography to define the pole tip in the vicinity of non-planar features of the coil structure and also eliminates alignment inaccuracies inherent in separate lithography processes for the coil and pole.

摘要翻译： 一种使用单个光刻步骤制造磁读/写头以限定写入线圈和极尖结构的方法。 在硬反应离子蚀刻掩模和图像转移技术上使用薄图像抗蚀剂层允许非常高分辨率的光学光刻，其可以适应非常紧凑的线圈和极结构的形成。 在平坦化结构上使用单个高分辨率光刻步骤来限定写磁极尖端和与写磁极尖端共面的写入线圈两者都避免了与光刻相关联的反射凹陷的问题，以限定非极性附近的极尖， 线圈结构的平面特征并且还消除了用于线圈和极的单独光刻工艺中固有的对准不精确。

公开(公告)号：US06525913B1

公开(公告)日：2003-02-25

申请号：US09635720

申请日：2000-08-09

申请人： Daniele Mauri ,  Hugo Alberto Emilio Santini

发明人： Daniele Mauri ,  Hugo Alberto Emilio Santini

IPC分类号： G11B523

CPC分类号： G11B5/3903 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3967

摘要： First and second portions of a first shield layer on each side of a planar shield portion below a read sensor are recessed for receiving first and second insulative prefill layers which minimize electrical shorting between first and second hard bias layers and first and second lead layers to the first shield layer. The first and second prefill layers are close to first and second side edges of the read sensor so as to minimize shorting between the layers. By varying the depth of the first and second recesses in the first shield layer the first read gap layer or the second read gap layer can be planarized or, alternatively, each of the first and second read gap layers can be partially planarized, as desired.

摘要翻译： 在读取传感器下面的平面屏蔽部分的每一侧上的第一屏蔽层的第一和第二部分被凹入，用于接收第一和第二绝缘预填层，其将第一和第二硬偏置层之间的电短路最小化以及将第一和第二引线层的电短路最小化到 第一屏蔽层。 第一和第二预填充层靠近读取传感器的第一和第二侧边缘，以便最小化层之间的短路。 通过改变第一屏蔽层中的第一和第二凹槽的深度，第一读取间隙层或第二读取间隙层可以被平坦化，或者可选地，可以根据需要部分地平坦化第一和第二读取间隙层中的每一个。

公开(公告)号：US06338939B1

公开(公告)日：2002-01-15

申请号：US09645163

申请日：2000-08-24

申请人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

发明人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

IPC分类号： G11B517

CPC分类号： G11B5/313 ,  G11B5/3967 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49064

摘要： A read/write head is provided with an embedded planar dual coil write structure. The head includes generally parallel shield, shield/pole, and pole layers. The shield/pole layer abuts a generally coplanar planarization layer in one embodiment. A circuitous recess is defined in the shield/pole and planarization layer, spanning the junction twice and encircling a central hub of adjoining shield/pole and planarization layer material. A write structure is located in the recess, with the shield/pole layer, planarization layer, and embedded write structure forming a substantially flat surface for building the pole layer. The write structure includes first and second substantially co-planar multi-turn flat coils, where turns of the first write coil are interspersed with turns of the second write coil. The first and second write coils reside in the circuitous recess, winding around the central hub. An insulating material separates the first and second coils.

摘要翻译： 读/写头具有嵌入式平面双线圈写结构。 头部包括大致平行的屏蔽，屏蔽/极和极层。 在一个实施例中，屏蔽/极层邻接大致共面的平坦化层。 在屏蔽/极和平坦化层中限定了一个迂回的凹槽，跨越结两次并围绕相邻的屏蔽/极和平坦化层材料的中心毂。 写入结构位于凹部中，屏蔽/极层，平坦化层和嵌入式写入结构形成用于构建极层的基本上平坦的表面。 该写入结构包括第一和第二基本上共面的多匝扁平线圈，其中第一写入线圈的匝与第二写入线圈的匝分散。 第一和第二写入线圈驻留在迂回凹部中，围绕中心毂绕过。 绝缘材料分离第一和第二线圈。

公开(公告)号：US06191918B1

公开(公告)日：2001-02-20

申请号：US09178377

申请日：1998-10-23

申请人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

发明人： Thomas Carl Clarke ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Eric James Lee ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5147

CPC分类号： G11B5/313 ,  G11B5/3967 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49064

摘要： A read/write head is provided with an embedded planar dual coil write structure. The head includes generally parallel shield, shield/pole, and pole layers. The shield/pole layer abuts a generally coplanar planarization layer in one embodiment. A circuitous recess is defined in the shield/pole and planarization layer, spanning the junction twice and encircling a central hub of adjoining shield/pole and planarization layer material. A write structure is located in the recess, with the shield/pole layer, planarization layer, and embedded write structure forming a substantially flat surface for building the pole layer. The write structure includes first and second substantially co-planar multi-turn flat coils, where turns of the first write coil are interspersed with turns of the second write coil. The first and second write coils reside in the circuitous recess, winding around the central hub. An insulating material separates the first and second coils.

摘要翻译： 读/写头具有嵌入式平面双线圈写结构。 头部包括大致平行的屏蔽，屏蔽/极和极层。 在一个实施例中，屏蔽/极层邻接大致共面的平坦化层。 在屏蔽/极和平坦化层中限定了一个迂回的凹槽，跨越结两次并围绕相邻的屏蔽/极和平坦化层材料的中心毂。 写入结构位于凹部中，屏蔽/极层，平坦化层和嵌入式写入结构形成用于构建极层的基本上平坦的表面。 该写入结构包括第一和第二基本上共面的多匝扁平线圈，其中第一写入线圈的匝与第二写入线圈的匝分散。 第一和第二写入线圈驻留在迂回凹部中，围绕中心毂绕过。 绝缘材料分离第一和第二线圈。

公开(公告)号：US6162582A

公开(公告)日：2000-12-19

申请号：US344904

申请日：1999-06-25

申请人： Richard Hsiao ,  Tsann Lin ,  Hugo Alberto Emilio Santini

发明人： Richard Hsiao ,  Tsann Lin ,  Hugo Alberto Emilio Santini

IPC分类号： G11B5/012 ,  G11B5/31 ,  G11B5/39 ,  G11B5/40 ,  G03F7/00

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/012 ,  G11B5/313 ,  G11B5/3133 ,  G11B5/3163 ,  G11B5/3903 ,  G11B5/3967 ,  G11B5/40 ,  G11B2005/3996

摘要： An MR read head has first and second lead layers protected by first, second and third insulation layers in addition to the first and second insulative gap layers substantially all the way from the side edges of an MR sensor to terminals. The first and second insulation layers do not extend outside of the first and second lead layer sites so that greater heat dissipation can be realized from the MR sensor. Each lead layer comprises first and second lead layer films. Where these films overlap for electrical connection their top and bottom surfaces are protected by the first and second insulation layers and their edges are protected by the third insulation layer. Where the first lead layer film extends from the second lead layer film toward the respective terminal its bottom surface is protected by the first insulation layer and its top surface and its side edges are protected by the third insulation layer. Only three masks are required for fabricating or constructing these components. The first liftoff mask is employed for defining the first insulation layer and the first lead layer film. The second liftoff mask is employed for depositing the second lead layer film on the first lead layer film with an end of the second lead layer film for defining the track width of the MR sensor and making a contiguous junction with a respective side edge of the MR sensor and then depositing a second insulation layer on the second lead layer film. A third liftoff mask is employed for masking the MR sensor site and the second lead layer film of the first and second lead layers so that the height of the MR sensor can be defined and the third insulation layer deposited.

摘要翻译： 除了基本上从MR传感器的侧边缘到端子的所有第一和第二绝缘间隙层之外，MR读取头具有由第一，第二和第三绝缘层保护的第一和第二引线层。 第一绝缘层和第二绝缘层不延伸到第一和第二引线层位置的外部，从而可以从MR传感器实现更大的散热。 每个引线层包括第一和第二引线层膜。 当这些膜重叠用于电连接时，其顶表面和底表面被第一和第二绝缘层保护，并且它们的边缘被第三绝缘层保护。 在第一引线层膜从第二引线层膜朝向各个端子延伸的情况下，其底表面被第一绝缘层及其顶表面保护，并且其侧边缘被第三绝缘层保护。 制造或构造这些部件只需要三个掩模。 采用第一剥离掩模来限定第一绝缘层和第一引线层膜。 第二剥离掩模用于在第一引线层膜上沉积第二引线层膜，第二引线层膜用于限定MR传感器的磁道宽度，并与MR的相应侧边缘形成连续的连接 传感器，然后在第二引线层膜上沉积第二绝缘层。 采用第三剥离掩模掩蔽第一和第二引线层的MR传感器位置和第二引线层膜，从而可以限定MR传感器的高度，并沉积第三绝缘层。