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1.发明授权Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure 失效使用预图案种子层的方法和装置，用于提供用于感应头部结构的对准线圈公开(公告)号：US07117583B2
公开(公告)日：2006-10-10
申请号：US10101196
申请日：2002-03-18
CPC分类号： G11B5/486 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , H01F17/0006 , H01F41/043 , H01F41/046 , Y10T29/4902 , Y10T29/4906 , Y10T29/49062 , Y10T29/49064 , Y10T29/49073
摘要： A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.
摘要翻译： 一种使用预先图案化种子层来提供用于感应头部结构的对准线圈的方法和装置。 该方法使用对准的工艺，其中基板印版制造在电绝缘层上，并且反转的图像被制造并蚀刻到线圈绝缘材料中，例如硬烘烤光致抗蚀剂以减轻与种子层的完全离子去除相关的问题 在高纵横比线圈之间。 该方法也不易于电镀不均匀（空隙），并且在湿法蚀刻步骤中不会经受种子层底切。
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2.发明授权Simultaneous definition and direct transfer of a write head pole and coil for a magnetic read/write head 失效同时定义并直接传送写磁头磁极和磁盘用于磁读/写磁头公开(公告)号：US06696226B1
公开(公告)日：2004-02-24
申请号：US10290747
申请日：2002-11-08
IPC分类号： G11B5147
CPC分类号： G11B5/3163 , G11B5/17 , G11B5/235 , G11B5/3116 , G11B5/313 , G11B5/3166 , G11B5/3967 , Y10T29/49032 , Y10T29/49064
摘要： A method of making a magnetic read/write head using a single lithographic step to define both a write coil and a pole tip structure. The use of a thin image resist layer over a hard reactive-ion etch mask and image transfer techniques allows very high resolution optical lithography which can accommodate formation of a very compact coil and pole structure. The use of a single high resolution lithography step on a planarized structure to define both a write pole tip and a write coil coplanar with the write pole tip avoids the problems of reflective notching associated with lithography to define the pole tip in the vicinity of non-planar features of the coil structure and also eliminates alignment inaccuracies inherent in separate lithography processes for the coil and pole.
摘要翻译： 一种使用单个光刻步骤制造磁读/写头以限定写入线圈和极尖结构的方法。 在硬反应离子蚀刻掩模和图像转移技术上使用薄图像抗蚀剂层允许非常高分辨率的光学光刻，其可以适应非常紧凑的线圈和极结构的形成。 在平坦化结构上使用单个高分辨率光刻步骤来限定写磁极尖端和与写磁极尖端共面的写入线圈两者都避免了与光刻相关联的反射凹陷的问题，以限定非极性附近的极尖， 线圈结构的平面特征并且还消除了用于线圈和极的单独光刻工艺中固有的对准不精确。
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3.发明授权公开(公告)号：US06940693B2
公开(公告)日：2005-09-06
申请号：US10675065
申请日：2003-09-29
CPC分类号： G11B5/3116
摘要： An embodiment of a magnetic head of the present invention includes a media heating device that is fabricated within the magnetic head structure following the fabrication of the read head element of the magnetic head. The media heating device is preferably fabricated between the first and second magnetic pole layers and close to the ABS surface of the head. The heating device includes electrical leads and an electrically resistive heating element that is preferably comprised of TaSiN, NiCr or NiFe, and in the present invention one or both of the magnetic poles are utilized as an electrical lead of the heating device. The heating device serves to heat the magnetic media immediately prior to the passage of the magnetic media beneath the pole tip, which lowers the localized coercivity of the media and facilitates the writing of data to the media by the write head element of the magnetic head.
摘要翻译： 本发明的磁头的一个实施例包括在制造磁头读头元件之后制造在磁头结构内的介质加热装置。 介质加热装置优选地制造在第一和第二磁极层之间并且靠近头部的ABS表面。 加热装置包括电引线和优选由TaSiN，NiCr或NiFe组成的电阻加热元件，并且在本发明中，一个或两个磁极用作加热装置的电引线。 加热装置用于在磁性介质在磁极尖端之下通过之前立即加热磁性介质，这降低了介质的局部矫顽力，并且便于通过磁头的写头元件将数据写入介质。
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公开(公告)号：US07268973B2
公开(公告)日：2007-09-11
申请号：US10627396
申请日：2003-07-24
IPC分类号： G11B5/147
CPC分类号： G11B5/012 , G11B5/02 , G11B5/1278 , G11B5/332 , G11B2005/0002 , G11B2005/0005 , G11B2005/001 , G11B2005/0021
摘要： A perpendicular magnetic head including a media heating element that is fabricated within the magnetic head structure. The heating element is preferably fabricated above the first magnetic pole layer close to the ABS surface of the head. In one embodiment, following the fabrication of the heating element, a second magnetic pole probe layer that includes the second magnetic pole tip is fabricated. In an alternative head embodiment, a second magnetic pole shaping layer is fabricated upon the heating element, followed by the fabrication of the probe layer that includes the second magnetic pole tip. The heating element is an electrically resistive heating element that is preferably comprised of NiCr or NiFe.
摘要翻译： 包括在磁头结构内制造的介质加热元件的垂直磁头。 加热元件优选制造在靠近头部的ABS表面的第一磁极层的上方。 在一个实施例中，在加热元件的制造之后，制造包括第二磁极尖端的第二磁极探针层。 在替代的头部实施例中，在加热元件上制造第二磁极成形层，随后制造包括第二磁极尖端的探针层。 加热元件是优选由NiCr或NiFe组成的电阻加热元件。
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5.发明授权公开(公告)号：US07187520B2
公开(公告)日：2007-03-06
申请号：US10791186
申请日：2004-03-01
IPC分类号： G11B5/147
CPC分类号： G11B5/3133
摘要： A magnetic head including a media heating device that is fabricated within the magnetic head structure. The media heating device includes an electrically resistive element that is fabricated above the first magnetic pole layer close to the ABS surface of the head. A P1 pole pedestal is fabricated above the heating element. Electrical insulation layers are fabricated beneath and above the heating element to prevent electrical shorting to the P1 pole layer and the P1 pole pedestal that are disposed beneath and above the heating element, respectively.
摘要翻译： 一种磁头，包括制造在磁头结构内的介质加热装置。 介质加热装置包括电阻元件，其制造在接近头部的ABS表面的第一磁极层的上方。 在加热元件上方制造一个P 1极基座。 在加热元件下方和上方制造电绝缘层，以防止分别设置在加热元件下方和上方的P 1极层和P 1极基座的电短路。
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6.发明授权High aspect ratio co-planar structure fabrication consisting of different materials 有权高纵横比共面结构制造由不同材料组成公开(公告)号：US07280313B2
公开(公告)日：2007-10-09
申请号：US10837386
申请日：2004-04-30
CPC分类号： G11B5/3163 , Y10T29/49052 , Y10T29/4906 , Y10T29/49064
摘要： A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.
摘要翻译： 一种用于制造具有不同组成的两个共面金属特征的结构（例如磁头）的方法，两者都沉积在它们自己的种子层上。 特征可以相对于它们的宽度（即，具有高纵横比）而高，并且也非常紧密地间隔开。 仅使用单一的高清晰度，严格对准的光刻过程来创建关键结构，避免了由多个过程产生的对准特征的任何问题。 该方法被应用于磁读/写头的写结构的制造，其中极结构和感应线圈的一部分以相近的间距制造在相同的平面中，并且两者的垂直纵横比大于 约2：1。
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7.发明授权公开(公告)号：US07248434B2
公开(公告)日：2007-07-24
申请号：US10798163
申请日：2004-03-10
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49032
摘要： A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.
摘要翻译： 提供一种用于制造用于磁头的极尖结构的方法。 最初沉积蚀刻停止层，之后沉积转移层。 进一步沉积的是至少一个掩模层。 然后执行反应离子蚀刻以在至少转移层中限定沟槽。 然后将极尖层沉积在沟槽中以限定至少部分地由转移层侧面的极尖结构。 然后转印层或蚀刻停止层的表面与极尖结构的表面保持共面关系。
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公开(公告)号：US07380331B2
公开(公告)日：2008-06-03
申请号：US11132689
申请日：2005-05-18
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3116 , G11B5/3163 , G11B5/332 , G11B5/3903 , G11B5/3912 , G11B5/3932 , G11B5/398 , G11B2005/3996 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49155
摘要： A method comprises depositing first and second lead layers in end regions which surround a central region; and forming a read sensor in the central region such that a first edge of the read sensor is disposed above an edge of the first lead layer and a second edge of the read sensor is disposed above an edge of the second lead layer. In one approach, first and second bias layers are deposited in end regions over the first and the second lead layers. The read sensor is formed in the central region such that the first edge of the read sensor is disposed above an edge of the first bias layer and the second edge of the read sensor is disposed above an edge of the second bias layer. Third and fourth bias layers are deposited adjacent the read sensor. Methods taking different approaches are also presented.
摘要翻译： 一种方法包括在围绕中心区域的端部区域中沉积第一和第二引线层; 以及在所述中央区域中形成读取传感器，使得所述读取传感器的第一边缘设置在所述第一引线层的边缘上方，并且所述读取传感器的第二边缘设置在所述第二引线层的边缘的上方。 在一种方法中，第一和第二偏压层沉积在第一和第二引线层上的端部区域中。 读取传感器形成在中央区域，使得读取传感器的第一边缘设置在第一偏置层的边缘上方，并且读取传感器的第二边缘设置在第二偏置层的边缘上方。 第三和第四偏置层沉积在读取传感器附近。 还提出了采取不同方法的方法。
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公开(公告)号：US07343664B2
公开(公告)日：2008-03-18
申请号：US11615846
申请日：2006-12-22
申请人： Gautam Khera , Sanford J. Lewis , Galina Moutchaidze , Aron Pentek , Hugo Alberto Emilio Santini , Mason Lamar Williams, III
发明人： Gautam Khera , Sanford J. Lewis , Galina Moutchaidze , Aron Pentek , Hugo Alberto Emilio Santini , Mason Lamar Williams, III
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49025 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A method for fabricating a magnetic head includes forming a first pole and a flux shaping layer in spaced relation to the first pole. A nonmagnetic layer is formed adjacent the flux shaping layer and positioned on an air bearing surface (ABS) side of the flux shaping layer. A tapered recess is created in the nonmagnetic layer, the taper of the recess increasing (i.e., becoming deeper) towards the flux forming layer. The recess is filled with a magnetic material. A probe layer is formed such that it is in electrical communication with the magnetic material filling the recess.
摘要翻译： 用于制造磁头的方法包括形成与第一极间隔开的第一极和磁通形成层。 在磁通形成层附近形成非磁性层，并定位在磁通形成层的空气轴承表面（ABS）侧。 在非磁性层中产生锥形凹部，凹部的锥形朝向焊剂形成层增加（即变深）。 凹部填充有磁性材料。 探针层形成为使得其与填充凹部的磁性材料电连通。
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10.发明授权Method of fabricating electronic component using resist structure with no undercut 有权使用没有底切的抗蚀剂结构制造电子元件的方法公开(公告)号：US07323112B2
公开(公告)日：2008-01-29
申请号：US10652053
申请日：2003-08-29
申请人： Amanda Baer , Marie-Claire Cyrille , Frederick Hayes Dill , Wipul Pemsiri Jayaekara , Jui-Lung Li , Hugo Alberto Emilio Santini , Benjamin Lu Chen Wang
发明人： Amanda Baer , Marie-Claire Cyrille , Frederick Hayes Dill , Wipul Pemsiri Jayaekara , Jui-Lung Li , Hugo Alberto Emilio Santini , Benjamin Lu Chen Wang
IPC分类号： B44C1/22
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , H01J2237/3114
摘要： A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.
摘要翻译： 一种铣削结构的方法。 将未切割的单层或多层抗蚀剂加入要研磨的结构的表面，待研磨的表面限定一个平面。 进行铣削加工，例如离子铣削。 铣削过程包括以高发射率铣削结构并铣削结构。 铣削加工只能执行一次，或重复多次。 可以将高入射率定义为从被研磨表面的平面约65度至约90度。 闪电发生率可以定义为距被研磨表面的平面约0至约30度。
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