摘要:
A disk brake has a mount and a pad. The pad has a guide portion and outer and inner push bearing portions on a disk rotor rotation outlet side. The mount has a support portion to support the guide portion movably in a rotor axial direction. The outer and inner push bearing portions are provided on each position outwardly or inwardly of the rotor rotation outlet side guide portion in the radial direction of the rotor, and project toward the mount in the radial direction of the rotor to abut against the mount. The outer push bearing portion has an abutment surface to abut against the mount on a tangent to an outer peripheral side in a central position of the outer peripheral side of a friction surface of the pad radially outwardly in the radial direction of the rotor, or in a position outwardly of the tangent.
摘要:
An electrostatic chuck member comprises an electrode layer and an electric insulating layer, wherein a spray coating layer of an oxide of a Group 3A element in the Periodic Table is formed as an outermost layer of the member and a surface of the spray coating layer is rendered into a densified re-melting layer having an average surface roughness (Ra) Of 0.8-3.0 μm.
摘要:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
摘要翻译:本发明提供一种等离子体处理容器的内部构件,该等离子体处理容器在含有卤素气体的环境下具有优异的耐化学腐蚀和等离子体侵蚀性,并且其制造方法是通过将基材的表面覆盖而形成的构件 由作为底层形成的金属涂层,形成在作为中间层的底涂层上的Al 2 O 3 O 3膜和Y 2 N 2 O 3组成的多层复合层 > O 3喷涂涂层形成在中间层上作为顶涂层。
摘要:
A time series analysis system can perform computation with a less amount of computation than before when a long-term trend component and a long-term cyclic component are handled, or when a plurality of cyclic components is handled. From input time series data including a plurality of cyclic components, long-term time series data of a different series using a plurality of time spans is prepared for each of the time spans. Then, the long-term time series data for each of the time spans is removed from the original time series data, thereby preparing short-term time series data. Then, by learning through probability statistic processing that uses the long-term time series data and the short-term time series data, a model having a time span optimal for prediction of the time series data is selected as an optimal model, and is used for prediction of the time series data.
摘要:
First, two subsystems are connected with each other via a communication cable and then recognize physical connection between the two subsystems. Next, each one of the two subsystems ignores signals from the other subsystem for a predetermined time period after recognition of the physical connection. Then, the two subsystems execute the connection procedure and after that, establish data communication between the two subsystems.
摘要:
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
摘要:
To provide an energy evaluation support system and the like which can more efficiently and precisely compute electric power consumption for each of predetermined processing units such as production steps and the like, the energy evaluation support system includes a receiving section which receives a factory design request including a production condition instruction indicating a production condition from the user, a storage section which stores a production device database containing data relating to production devices and a requisite-power supply device database containing data relating to requisite-power supply devices, a processing section which computes energy consumption for each of the production devices and the requisite-power supply devices and for each requisite power type, based on the production device database and requisite-power supply device database according to the factory design request from the user, and an output section which presents the energy consumption computed by the processing section to the user in a predetermined form.
摘要:
It is to provide an electrostatic chuck member having a strong adsorption force and an excellent responsibility (release property) in the stop of voltage application and is an electrostatic chuck member comprising a substrate, an undercoat of a metallic layer formed on at least one surface thereof, a lower insulating layer of Al2O3 ceramic formed on the undercoat, a metallic electrode layer formed on the lower insulating layer and an upper insulating layer of Al2O3 ceramic formed on the electrode layer as a topcoat.
摘要翻译:本发明提供一种静电卡盘部件,其具有强的吸附力和在施加电压停止时的优异的责任(释放特性),并且是静电卡盘部件,其包括基板,在其至少一个表面上形成的金属层的底涂层 形成在底涂层上的Al 2 O 3陶瓷的下绝缘层,形成在下绝缘层上的金属电极层和形成在作为顶涂层的电极层上的Al 2 O 3陶瓷的上绝缘层。
摘要:
A semiconductor device having a contact structure that can exhibit superlative step coverage without causing voids or wiring discontinuities, using aluminum or aluminum alloys as a conductive substance for via-holes. A method of fabricating the semiconductor device comprises, for at least one layer of wiring regions above the first wiring region on a semiconductor substrate, the following steps (a) to (f): (a) a step of forming a via-hole in a second interlayer dielectric formed above the first wiring region on a semiconductor substrate; (b) a degassing step for removing gaseous components included within the interlayer dielectric by a heat treatment under reduced pressure and at the substrate temperature of 300.degree. C. to 550.degree. C.; (c) a step of forming a wetting layer on the surface of the interlayer dielectric and the via-hole; (d) a step of cooling the substrate to a temperature of no more than 100.degree. C.; (e) a step of forming a first aluminum layer comprising one of aluminum and an alloy in which aluminum is the main component on the wetting layer at a temperature of no more than 200.degree. C.; and (f) a step of forming a second aluminum layer comprising one of aluminum and an alloy in which aluminum is the main component on the first aluminum layer at a temperature of at least 300.degree. C.
摘要:
Provided is a display device in which a panel module can be fixed to a front cabinet without using screws, and when performing maintenance, the panel module can be easily removed from the front cabinet.The display device including a panel module having a display surface on the front side thereof, a front cabinet surrounding a peripheral edge part of the panel module, and a back cabinet covering a back side of the panel module includes a flexible hook part protruded toward the back cabinet from the inner surface of the front cabinet, and an L-shaped fixing member which has an L shape and includes a latch plate having a hole part in which the flexible hook part is latched and a contact plate which contacts with a back surface of the panel module so as to fix the front cabinet to the panel module.