公开(公告)号：US07071126B2

公开(公告)日：2006-07-04

申请号：US11101688

申请日：2005-04-08

申请人： Steven W. Johnston ,  Kevin P. O'Brien

发明人： Steven W. Johnston ,  Kevin P. O'Brien

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： H01L21/3105 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02351 ,  H01L21/0337 ,  H01L21/76807 ,  H01L21/7682 ,  H01L21/76825 ,  H01L21/76829 ,  H01L21/76832

摘要： An interlayer dielectric may be exposed to a gas cluster ion beam to densify an upper layer of the interlayer dielectric. As a result, the upper layer of the interlayer dielectric may be densified without separate deposition steps and without the need for etch stops that may adversely affect the capacitance of the overall structure.

摘要翻译： 可以将层间电介质暴露于气体簇离子束以致致密层间电介质的上层。 结果，层间电介质的上层可以在没有单独的沉积步骤的情况下被致密化，并且不需要可能不利地影响整个结构的电容的蚀刻停止。

公开(公告)号：US07034399B2

公开(公告)日：2006-04-25

申请号：US10782329

申请日：2004-02-19

申请人： Grant M. Kloster ,  Kevin P. O'Brien ,  Justin K. Brask ,  Michael D. Goodner ,  Donald Bruner

发明人： Grant M. Kloster ,  Kevin P. O'Brien ,  Justin K. Brask ,  Michael D. Goodner ,  Donald Bruner

IPC分类号： H01L23/48 ,  H01L23/52 ,  H01L29/40

CPC分类号： H01L21/02126 ,  H01L21/02203 ,  H01L21/02304 ,  H01L21/02351 ,  H01L21/31695 ,  H01L21/7682

摘要： A dielectric layer is made porous by treating the dielectric material after metal interconnects are formed in or through that layer. The porosity lowers the dielectric constant of the dielectric material. The dielectric material may be subjected to an electron beam or a sonication bath to create the pores. The structure has smooth sidewalls for metal interconnects extending through the dielectric layer.

摘要翻译： 通过在金属互连形成在该层中或通过该层之后处理介电材料，使介质层多孔化。 孔隙率降低介电材料的介电常数。 介电材料可以经受电子束或超声处理浴以产生孔。 该结构具有延伸穿过介电层的金属互连的平滑侧壁。

公开(公告)号：US06908829B2

公开(公告)日：2005-06-21

申请号：US10094875

申请日：2002-03-11

申请人： Makarem A. Hussein ,  Peter Moon ,  Jim Powers ,  Kevin P. O'Brien

发明人： Makarem A. Hussein ,  Peter Moon ,  Jim Powers ,  Kevin P. O'Brien

IPC分类号： H01L23/522 ,  H01L21/76 ,  H01L21/4763

CPC分类号： H01L21/7682 ,  H01L21/76807 ,  H01L23/5222 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of forming an air gap intermetal layer dielectric (ILD) to reduce capacitive coupling between electrical conductors in proximity. The method entails forming first and second electrical conductors over a substrate, wherein the electrical conductors are laterally spaced apart by a gap. Then, forming a gap bridging dielectric layer that extends over the first electrical conductor, the gap, and the second electrical conductor. In order to form a bridge from one electrical conductor to the other electrical conductor, the gap bridging dielectric materials should have poor gap filling characteristics. This can be attained by selecting and/or modifying a dielectric material to have a sufficiently high molecular weight and/or surface tension characteristic such that the material does not substantially sink into the gap. An example of such a material is a spin-on-polymer with a surfactant and/or other additives.

摘要翻译： 一种形成气隙金属间电介质（ILD）的方法，以减少接近的电导体之间的电容耦合。 该方法需要在衬底上形成第一和第二电导体，其中电导体横向间隔开间隙。 然后，形成在第一电导体，间隙和第二电导体上延伸的间隙桥接电介质层。 为了形成从一个电导体到另一个电导体的桥接，桥接介电材料的间隙应具有差的间隙填充特性。 这可以通过选择和/或改性电介质材料来实现，以具有足够高的分子量和/或表面张力特性，使得材料基本上不会沉入间隙。 这种材料的一个实例是具有表面活性剂和/或其它添加剂的旋涂聚合物。

公开(公告)号：US5320107A

公开(公告)日：1994-06-14

申请号：US996611

申请日：1992-12-24

申请人： Kevin P. O'Brien

发明人： Kevin P. O'Brien

IPC分类号： A61B5/087

CPC分类号： A61B5/0871

摘要： A spirometer for in-home use by an individual with a respiratory disorder such as asthma measures the individual's current lung expiratory peak flow rate and provides a means to compare the current peak flow rate to a historical peak flow rate. The spirometer comprises an air flow channel having a terminus to receive air blown into it by the individual, a flow rate measuring chamber in communication with the air flow channel, and an adjustable zone graph in operable association with the flow rate measuring chamber. The zone graph has a series of zones to indicate the individuals current peak rate and compare it to the individual's previously determined peak flow rate as measured at a fully healthy period of time. A visual comparison of the peak flow rates can alert the individual to an on-coming asthma attack prior to the individual suffering from any asthma symptoms.

摘要翻译： 患有哮喘等呼吸系统疾病的个体在家使用的肺活量计测量个体目前的肺呼气峰值流量，并提供一种将当前峰值流量与历史峰值流量进行比较的手段。 肺活量计包括气流通道，其具有用于接收个体吹入其中的空气的终端，与空气流动通道连通的流量测量室，以及与流量测量室可操作地相关联的可调节区域图。 区域图具有一系列区域，以指示个体当前峰值速率，并将其与在完全健康的时间段内测量的个体先前确定的峰值流量进行比较。 峰值流量的视觉比较可以在个体遭受任何哮喘症状之前提醒个体接受即将到来的哮喘发作。