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    Method of forming an air gap intermetal layer dielectric (ILD) by utilizing a dielectric material to bridge underlying metal lines
    1.
    发明授权
    Method of forming an air gap intermetal layer dielectric (ILD) by utilizing a dielectric material to bridge underlying metal lines 有权
    通过利用介电材料桥接下面的金属线形成气隙金属间电介质（ILD）的方法

    公开(公告)号：US06908829B2

    公开(公告)日：2005-06-21

    申请号：US10094875

    申请日：2002-03-11

    申请人： Makarem A. Hussein ,  Peter Moon ,  Jim Powers ,  Kevin P. O'Brien

    发明人： Makarem A. Hussein ,  Peter Moon ,  Jim Powers ,  Kevin P. O'Brien

    IPC分类号： H01L23/522 ,  H01L21/76 ,  H01L21/4763

    CPC分类号： H01L21/7682 ,  H01L21/76807 ,  H01L23/5222 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method of forming an air gap intermetal layer dielectric (ILD) to reduce capacitive coupling between electrical conductors in proximity. The method entails forming first and second electrical conductors over a substrate, wherein the electrical conductors are laterally spaced apart by a gap. Then, forming a gap bridging dielectric layer that extends over the first electrical conductor, the gap, and the second electrical conductor. In order to form a bridge from one electrical conductor to the other electrical conductor, the gap bridging dielectric materials should have poor gap filling characteristics. This can be attained by selecting and/or modifying a dielectric material to have a sufficiently high molecular weight and/or surface tension characteristic such that the material does not substantially sink into the gap. An example of such a material is a spin-on-polymer with a surfactant and/or other additives.

    摘要翻译： 一种形成气隙金属间电介质（ILD）的方法，以减少接近的电导体之间的电容耦合。 该方法需要在衬底上形成第一和第二电导体，其中电导体横向间隔开间隙。 然后，形成在第一电导体，间隙和第二电导体上延伸的间隙桥接电介质层。 为了形成从一个电导体到另一个电导体的桥接，桥接介电材料的间隙应具有差的间隙填充特性。 这可以通过选择和/或改性电介质材料来实现，以具有足够高的分子量和/或表面张力特性，使得材料基本上不会沉入间隙。 这种材料的一个实例是具有表面活性剂和/或其它添加剂的旋涂聚合物。

    VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS
    2.
    发明申请
    VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS 审中-公开
    用于小型电压稳压器的垂直式电感电感器

    公开(公告)号：US20170053977A1

    公开(公告)日：2017-02-23

    申请号：US15342872

    申请日：2016-11-03

    申请人： Christopher J. Jezewski ,  Kevin P. O'Brien

    发明人： Christopher J. Jezewski ,  Kevin P. O'Brien

    IPC分类号： H01L49/02 ,  H01L23/48 ,  H01L23/522

    CPC分类号： H01L28/10 ,  H01L21/4814 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/5227 ,  H01L23/645 ,  H01L2924/0002 ,  H01L2924/00

    摘要： Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography.

    摘要翻译： 描述了用于小型电压调节器的垂直偏转电感器和用于制造小型电压调节器的垂直偏转电感器的方法。 例如，半导体管芯包括衬底。 集成电路设置在基板的有源表面上。 电感器耦合到集成电路。 电感器设置成与设置在基板的基本上平坦的表面上的绝缘层共形。 绝缘层具有起伏的形貌。

    VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS
    3.
    发明申请
    VERTICAL MEANDER INDUCTOR FOR SMALL CORE VOLTAGE REGULATORS 有权
    用于小型电压稳压器的垂直式电感电感器

    公开(公告)号：US20140084414A1

    公开(公告)日：2014-03-27

    申请号：US13629168

    申请日：2012-09-27

    申请人： Christopher J. Jezewski ,  Kevin P. O'Brien

    发明人： Christopher J. Jezewski ,  Kevin P. O'Brien

    IPC分类号： H01L21/02 ,  H01L29/66

    CPC分类号： H01L28/10 ,  H01L21/4814 ,  H01L21/76898 ,  H01L23/481 ,  H01L23/5227 ,  H01L23/645 ,  H01L2924/0002 ,  H01L2924/00

    摘要： Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography.

    摘要翻译： 描述了用于小型电压调节器的垂直偏转电感器和用于制造小型电压调节器的垂直偏转电感器的方法。 例如，半导体管芯包括衬底。 集成电路设置在基板的有源表面上。 电感器耦合到集成电路。 电感器设置成与设置在基板的基本上平坦的表面上的绝缘层共形。 绝缘层具有起伏的形貌。

    Sacrificial dielectric planarization layer
    7.
    发明授权
    Sacrificial dielectric planarization layer 失效
    牺牲电介质平坦化层

    公开(公告)号：US07109557B2

    公开(公告)日：2006-09-19

    申请号：US10963839

    申请日：2004-10-12

    申请人： Chris E. Barns ,  Kevin P. O'Brien ,  Anne E. Miller

    发明人： Chris E. Barns ,  Kevin P. O'Brien ,  Anne E. Miller

    IPC分类号： H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： H01L21/7684 ,  H01L21/31053 ,  H01L21/31144 ,  H01L21/3212

    摘要： A method of forming a microelectronic structure and its associated structures is described. In one embodiment, a substrate is provided with a sacrificial layer disposed on a hard mask layer, and a metal layer disposed in a trench of the substrate and on the sacrificial layer. The metal layer is then removed at a first removal rate wherein a dishing is induced on a top surface of the metal layer until the sacrificial layer is exposed, and simultaneously removing the metal layer and the sacrificial layer at a second removal rate without substantially removing the hard mask.

    摘要翻译： 描述了形成微电子结构及其相关结构的方法。 在一个实施例中，衬底设置有设置在硬掩模层上的牺牲层，以及设置在衬底的沟槽中和牺牲层上的金属层。 然后以第一去除速率去除金属层，其中在金属层的顶表面上诱导凹陷，直到牺牲层被暴露，同时以第二移除速率去除金属层和牺牲层，而基本上不去除 硬面膜

    Ridable recreation device
    10.
    发明授权
    Ridable recreation device 失效
    可玩的娱乐设备

    公开(公告)号：US4081182A

    公开(公告)日：1978-03-28

    申请号：US715393

    申请日：1976-08-18

    申请人： Kevin P. O'Brien

    发明人： Kevin P. O'Brien

    IPC分类号： A63B5/16 ,  A63B5/00

    CPC分类号： A63B25/10 ,  A63B5/166

    摘要： A resilient object adapted to be ridden by a person sitting or standing thereon and exerting repeated jumping motions thereagainst. In one embodiment, the device comprises a resilient body member having an upper seat portion and a lower bottom portion, a handle member attached proximate its seat portion, and foot supports extending from either side of its lower portion. The device is ridden by a rider sitting on the seat portion with his legs astraddle the body member, grasping the handle member and exerting repeating jumping motions against the foot supports to bounce the device across the ground. In a second embodiment, the device comprises a horizontally oriented resilient body member having an overall width dimension substantially greater than its heighth dimension, and including a pair of foot supports attached to its upper surface for engaging the feet of a rider standing thereon. This latter device is ridden by a rider standing on the upper surface of the body member, with his feet engaged by the foot supports, and jumping up and down to bounce the device across the ground. In either embodiment, the body member may be filled with a resilient material or be substantially hollow and inflatable. A reinforcing layer of resilient material is provided over the lower surface of the body member to protect it from damage caused by repeated contact with the ground as the device is ridden.

    摘要翻译： 适合于坐在或站立在其上的人骑行的弹性物体，并在其上施加重复的跳跃运动。 在一个实施例中，该装置包括具有上座部分和下底部的弹性本体构件，靠近其座部分附接的把手构件和从其下部的任一侧延伸的脚支撑件。 该装置由坐在座椅部分上的骑手骑行，其腿部位于主体构件上，抓握把手构件并且对脚部支撑件施加重复的跳动运动以使装置横穿地面。 在第二实施例中，该装置包括具有基本上大于其高度尺寸的总宽度尺寸的水平定向的弹性体构件，并且包括附接到其上表面的一对脚踏支架，用于接合站在其上的骑手的脚。 后一种装置由站立在身体构件的上表面上的骑手骑着，其脚与脚部支撑件接合，并且上下跳跃以将装置弹过地面。 在任一实施例中，主体构件可以填充有弹性材料或者基本上是中空的和可充气的。 弹性材料的增强层设置在主体构件的下表面上，以防止在装置被骑行时与地面反复接触造成的损坏。