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41.发明授权Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body 有权振动元件，制造振子元件的方法，振动器，电子设备，电子设备和移动体公开(公告)号：US09341643B2
公开(公告)日：2016-05-17
申请号：US13947468
申请日：2013-07-22
IPC分类号： G01C19/56 , G01C19/5621
CPC分类号： G01C19/5607 , G01C19/5621 , G01C19/5628 , G01P9/04 , Y10T29/49 , Y10T74/12
摘要： A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.
摘要翻译： 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。
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42.发明申请Resonator Element, Electronic Device, Electronic Apparatus, And Moving Object 有权谐振器元件，电子设备，电子设备和移动物体公开(公告)号：US20160123734A1
公开(公告)日：2016-05-05
申请号：US14921786
申请日：2015-10-23
发明人： Keiji Nakagawa , Ryuta Nishizawa
IPC分类号： G01C19/5621 , H01L41/08
CPC分类号： G01C19/5621 , G01C19/56
摘要： A gyro element as a resonator element includes a drive resonating arm as a drive portion that is driven by application of a voltage, and a detection resonating arm as a detection portion in which charge is generated in response to a Coriolis force generated in the drive resonating arm. An amount of charge detected in the detection resonating arm in a state where the Coriolis force is not generated is greater than 0% and equal to or less than 0.1% of an amount of charge generated in the drive resonating arm when driving the drive resonating arm.
摘要翻译： 作为谐振器元件的陀螺元件包括作为通过施加电压驱动的驱动部分的驱动谐振臂和作为响应于在驱动谐振中产生的科里奥利力产生电荷的检测部分的检测谐振臂 臂。 在不产生科里奥利力的状态下在检测谐振臂中检测的电荷的量大于驱动驱动谐振臂时在驱动谐振臂中产生的电荷量的0％且等于或小于0.1％ 。
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公开(公告)号：US09130147B2
公开(公告)日：2015-09-08
申请号：US13868472
申请日：2013-04-23
发明人： Ryuta Nishizawa , Keiji Nakagawa
IPC分类号： G01C19/56 , H01L41/047 , G01C19/5621 , G01C19/5607
CPC分类号： H01L41/0475 , G01C19/56 , G01C19/5607 , G01C19/5621
摘要： A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.
摘要翻译： 振动片包括基部。 驱动振动臂，检测振动臂和调节振动臂从基部延伸。 第一调整电极和第二调整电极连接到调节振动臂。 第一调整电极在第一相中产生电信号。 第二调整电极产生与第一相相反的第二相位的电信号。 调整电极的电信号叠加在检测振动臂的检测信号上，从而抵消振动泄漏成分。 调节振动臂部分地夹在第一电极片和第二电极片之间，并且调节振动臂部分地夹在第三电极片和第四电极片之间。
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公开(公告)号：US20240333243A1
公开(公告)日：2024-10-03
申请号：US18618488
申请日：2024-03-27
CPC分类号： H03H3/02 , H03H9/1021 , H03H9/132 , H03H9/19 , H03H2003/022
摘要： A method of manufacturing a resonator element including a substrate having a thin-wall part and a thick-wall part, and an electrode part having an excitation electrode arranged in an excitation electrode placement area of the thin-wall part, a pad electrode arranged in a pad electrode placement area of the thick-wall part, and an extraction electrode which is configured to couple the excitation electrode and the pad electrode to each other, and which is arranged in an extraction electrode placement area of the substrate, includes a metal layer formation step of forming a metal layer on the substrate, a protective film formation step of forming a protective film in an area overlapping at least a part of the extraction electrode placement area in a plan view on the metal layer, and a metal layer etching step of etching the metal layer arranged in the excitation electrode placement area via the protective film to thereby reduce a wall thickness of the metal layer.
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公开(公告)号：US12088277B2
公开(公告)日：2024-09-10
申请号：US17322948
申请日：2021-05-18
摘要： A vibration device includes a quartz substrate including a first vibration section, a second vibration section, and a third vibration section, a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate, a pair of second excitation electrodes so formed as to sandwich the second vibration section in the thickness direction of the quartz substrate, and a pair of third excitation electrodes so formed as to sandwich the third vibration section in the thickness direction of the quartz substrate. At least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces. At least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces. The second inclining surface inclines with respect to the first inclining surface.
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公开(公告)号：US20240258989A1
公开(公告)日：2024-08-01
申请号：US18427363
申请日：2024-01-30
发明人： Ryuta Nishizawa , Junichi Takeuchi
CPC分类号： H03H9/0557 , H03H9/1021 , H03H9/19
摘要： A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a second surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to a first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a first region overlapping the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ>90° is satisfied, θ being an angle formed by the first surface and an inner side surface of the side wall.
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公开(公告)号：US20240258971A1
公开(公告)日：2024-08-01
申请号：US18427294
申请日：2024-01-30
发明人： Ryuta Nishizawa , Junichi Takeuchi
CPC分类号： H03B5/04 , H03B5/1206 , H03B5/32 , H03H9/0547 , H03H9/19
摘要： A vibrator device includes: a base having an integrated circuit disposed at a second surface; a vibration element; and a lid having an end surface of a side wall bonded to a first surface of the base at a bonding portion. The integrated circuit includes a first circuit and a second circuit, the first circuit includes a plurality of first circuit elements disposed in a first region ARA, and the second circuit includes a second circuit element disposed in a second region ARB. At this time, the following relations are established.
{
1
-
L
1
A
/
WX
}
≤
0.95
{
1
-
L
2
A
/
WX
}
≤
0.95
{
1
-
L
3
A
/
WY
}
≤
0.95
{
1
-
L
4
A
/
WY
}
≤
0.95
{
1
-
L
1
B
/
WX
}
≤
0.8
{
1
-
L
2
B
/
WX
}
≤
0.8
{
1
-
L
3
B
/
WY
}
≤
0.8
{
1
-
L
4
B
/
WY
}
≤
0.8-
公开(公告)号：US11940275B2
公开(公告)日：2024-03-26
申请号：US17718418
申请日：2022-04-12
IPC分类号： G01C19/5642 , B60R16/023 , G01C19/56 , G01C19/5607 , G01C19/5656 , G01P15/18
CPC分类号： G01C19/5642 , B60R16/023 , G01C19/56 , G01C19/5607 , G01C19/5656 , G01P15/18
摘要： A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
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公开(公告)号：US11555702B2
公开(公告)日：2023-01-17
申请号：US16744328
申请日：2020-01-16
IPC分类号： G01C19/5621 , B81C1/00
摘要： A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.
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公开(公告)号：US20220294392A1
公开(公告)日：2022-09-15
申请号：US17691410
申请日：2022-03-10
发明人： Atsushi Matsuo , Ryuta Nishizawa
摘要： A vibrator includes: a vibration element that includes a pair of first excitation electrodes formed at the first vibration portion, a pair of second excitation electrodes formed at the second vibration portion, and a pair of third excitation electrodes formed at the third vibration portion, in which one second excitation electrode of the pair of second excitation electrodes is formed at a first inclined surface that is inclined with respect to two main surfaces, and one third excitation electrode of the pair of third excitation electrodes is formed at a second inclined surface that is inclined with respect to the two main surfaces and the first inclined surface; and a package that houses the vibration element. The vibration element includes a fixing portion to be fixed to the package. The fixing portion is provided between the first vibration portion and the second and third vibration portions.
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