公开(公告)号：US08946718B2

公开(公告)日：2015-02-03

申请号：US14133820

申请日：2013-12-19

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Satoshi Murakami ,  Masahiko Hayakawa ,  Shunpei Yamazaki

IPC: H01L29/10 ,  H01L27/12 ,  G02F1/1362 ,  H01L27/32 ,  H01L29/66 ,  H01L29/786 ,  H01L23/498

CPC classification number: H01L27/1248 ,  G02F1/133512 ,  G02F1/1337 ,  G02F1/1339 ,  G02F1/1341 ,  G02F1/13439 ,  G02F1/136213 ,  G02F1/136227 ,  G02F1/136286 ,  G02F1/1368 ,  G02F2201/123 ,  H01L23/3171 ,  H01L23/49827 ,  H01L27/1218 ,  H01L27/124 ,  H01L27/3248 ,  H01L27/3258 ,  H01L27/3276 ,  H01L29/41733 ,  H01L29/42384 ,  H01L29/66757 ,  H01L29/66765 ,  H01L29/786 ,  H01L29/78606 ,  H01L29/78651 ,  H01L2251/5315 ,  H01L2251/5338 ,  H01L2924/0002 ,  Y10S438/95 ,  H01L2924/00

Abstract: A semiconductor having an active layer; a gate insulating film in contact with the semiconductor; a gate electrode opposite to the active layer through the gate insulating film; a first nitride insulating film formed over the active layer; a photosensitive organic resin film formed on the first nitride insulating film; a second nitride insulating film formed on the photosensitive organic resin film; and a wiring provided on the second, nitride insulating film. A first opening portion is provided in the photosensitive organic resin film, an inner wall surface of the first opening portion is covered with the second nitride insulating film, a second opening portion is provided in a laminate including the gate insulating film, the first nitride insulating film, and the second nitride insulating film inside the first opening portion, and the semiconductor is connected with the wiring through the first opening portion and the second opening portion.

公开(公告)号：US08847316B2

公开(公告)日：2014-09-30

申请号：US13898077

申请日：2013-05-20

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Satoshi Murakami ,  Shunpei Yamazaki ,  Jun Koyama ,  Mitsuaki Osame ,  Yukio Tanaka ,  Yoshiharu Hirakata

IPC: H01L29/04

CPC classification number: H01L27/1244 ,  G02F1/13454 ,  G02F1/136213 ,  H01L27/1255 ,  H01L27/1259 ,  H01L27/15 ,  H01L29/458 ,  H01L29/66757 ,  H01L29/786 ,  H01L29/78645 ,  H01L29/78675 ,  H01L31/02164

Abstract: An object of the present invention is to provide a semiconductor device having high operation characteristic and reliability. The measures taken are: A pixel capacitor is formed between an electrode comprising anodic capable material over an organic resin film, an anodic oxide film of the electrode and a pixel electrode above. Since the anodic oxide film is anodically oxidized by applied voltage per unit time at 15V/min, there is no wrap around on the electrode, and film peeling can be prevented.

Abstract translation: 本发明的目的是提供一种具有高操作特性和可靠性的半导体器件。 所采取的措施是：在有机树脂膜上包含阳极氧化膜的电极，电极的阳极氧化膜和上面的像素电极之间形成像素电容器。 由于阳极氧化膜以15V /分钟的单位时间的施加电压进行阳极氧化，所以在电极上没有卷绕，可以防止膜剥离。

公开(公告)号：US08835271B2

公开(公告)日：2014-09-16

申请号：US13857659

申请日：2013-04-05

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Satoshi Murakami ,  Masahiko Hayakawa ,  Kiyoshi Kato ,  Mitsuaki Osame

IPC: H01L33/52 ,  H01L27/12 ,  G02F1/1362 ,  H01L27/32 ,  H01L27/13 ,  H01L51/52

CPC classification number: H01L27/1248 ,  G02F1/136227 ,  H01L27/12 ,  H01L27/1214 ,  H01L27/124 ,  H01L27/1244 ,  H01L27/1255 ,  H01L27/13 ,  H01L27/3246 ,  H01L27/3276 ,  H01L33/52 ,  H01L51/5237 ,  H01L51/5253

Abstract: It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulting film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulting film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film. Then, in the opening part of the organic resin film, a gate insulating film and the two layer inorganic insulating film containing nitrogen are opened partially by etching to expose an active layer of the TFT.

Abstract translation: 本发明的目的是提供一种具有层间绝缘膜的半导体显示装置，其可以在控制成膜时间的同时获得表面的平面性，并且可以控制用于除去水分的加热处理的处理时间，并且可以防止水分 在层间绝缘膜中不被放电到与层间绝缘膜相邻的膜或电极。 形成与有机树脂相比不容易透过水分的含氮的无机绝缘膜，以覆盖TFT。 接着，在有机绝缘膜上涂布含有感光性丙烯酸树脂的有机树脂膜，将有机树脂膜部分地曝光以打开。 然后，形成与有机树脂相比不容易透过水分的含有氮的无机绝缘膜，以覆盖打开的有机树脂膜。 然后，在有机树脂膜的开口部分中，通过蚀刻部分地打开栅极绝缘膜和含氮的两层无机绝缘膜，以暴露TFT的有源层。

公开(公告)号：US20140191239A1

公开(公告)日：2014-07-10

申请号：US14204342

申请日：2014-03-11

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Shunpei Yamazaki ,  Satoshi Murakami ,  Mitsuaki Osame

IPC: H01L27/12

CPC classification number: H01L27/1248 ,  H01L27/1214 ,  H01L27/124 ,  H01L27/1255 ,  H01L27/3244 ,  H01L27/3246 ,  H01L27/3258 ,  H01L27/326 ,  H01L27/3262 ,  H01L29/4958 ,  H01L29/4966 ,  H01L29/78645 ,  H01L51/5237 ,  H01L51/524 ,  H01L51/5253 ,  H01L51/5271 ,  H01L2251/5315

Abstract: Disclosed is a display device and an electronic apparatus incorporating the display device. The display device includes a transistor and a planarization film over the transistor. The planarization film has an opening where an edge portion is rounded. The display device further includes a first electrode over the planarization film and an organic resin film over the first electrode. The organic resin film also has an opening where an edge portion is rounded. The organic resin film is located in the opening of the planarization film. The first electrode and the transistor are electrically connected to each other through a conductive film. The first electrode is in contact with a top surface of the conductive film. Over the first electrode, a light-emitting member and a second electrode are provided.

Abstract translation: 公开了一种结合了显示装置的显示装置和电子装置。 显示装置包括晶体管和晶体管上的平坦化膜。 平坦化膜具有边缘部分为圆形的开口。 显示装置还包括在平坦化膜上的第一电极和在第一电极上的有机树脂膜。 有机树脂膜也具有边缘部分为圆形的开口。 有机树脂膜位于平坦化膜的开口内。 第一电极和晶体管通过导电膜彼此电连接。 第一电极与导电膜的顶表面接触。 在第一电极上设置有发光部件和第二电极。